{"id":"https://openalex.org/W2781735088","doi":"https://doi.org/10.1109/icsens.2017.8233984","title":"A high symmetry polysilicon micro hemispherical resonating gyroscope with spherical electrodes","display_name":"A high symmetry polysilicon micro hemispherical resonating gyroscope with spherical electrodes","publication_year":2017,"publication_date":"2017-10-01","ids":{"openalex":"https://openalex.org/W2781735088","doi":"https://doi.org/10.1109/icsens.2017.8233984","mag":"2781735088"},"language":"en","primary_location":{"id":"doi:10.1109/icsens.2017.8233984","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2017.8233984","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5111085192","display_name":"Quan Wan","orcid":null},"institutions":[{"id":"https://openalex.org/I3923682","display_name":"Soochow University","ror":"https://ror.org/05t8y2r12","country_code":"CN","type":"education","lineage":["https://openalex.org/I3923682"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Quan Wan","raw_affiliation_strings":["School of Electronic and Information Engineering, Soochow University, Suzhou, China"],"affiliations":[{"raw_affiliation_string":"School of Electronic and Information Engineering, Soochow University, Suzhou, China","institution_ids":["https://openalex.org/I3923682"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023251050","display_name":"Honghua Gu","orcid":null},"institutions":[{"id":"https://openalex.org/I3923682","display_name":"Soochow University","ror":"https://ror.org/05t8y2r12","country_code":"CN","type":"education","lineage":["https://openalex.org/I3923682"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Honghua Gu","raw_affiliation_strings":["School of Electronic and Information Engineering, Soochow University, Suzhou, China"],"affiliations":[{"raw_affiliation_string":"School of Electronic and Information Engineering, Soochow University, Suzhou, China","institution_ids":["https://openalex.org/I3923682"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072620327","display_name":"Bo Fan","orcid":"https://orcid.org/0000-0001-9577-8592"},"institutions":[{"id":"https://openalex.org/I3923682","display_name":"Soochow University","ror":"https://ror.org/05t8y2r12","country_code":"CN","type":"education","lineage":["https://openalex.org/I3923682"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bo Fan","raw_affiliation_strings":["School of Electronic and Information Engineering, Soochow University, Suzhou, China"],"affiliations":[{"raw_affiliation_string":"School of Electronic and Information Engineering, Soochow University, Suzhou, China","institution_ids":["https://openalex.org/I3923682"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048071193","display_name":"Heming Zhao","orcid":"https://orcid.org/0000-0001-9947-7754"},"institutions":[{"id":"https://openalex.org/I3923682","display_name":"Soochow University","ror":"https://ror.org/05t8y2r12","country_code":"CN","type":"education","lineage":["https://openalex.org/I3923682"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Heming Zhao","raw_affiliation_strings":["School of Electronic and Information Engineering, Soochow University, Suzhou, China"],"affiliations":[{"raw_affiliation_string":"School of Electronic and Information Engineering, Soochow University, Suzhou, China","institution_ids":["https://openalex.org/I3923682"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045856891","display_name":"Dacheng Xu","orcid":"https://orcid.org/0009-0009-9508-8191"},"institutions":[{"id":"https://openalex.org/I3923682","display_name":"Soochow University","ror":"https://ror.org/05t8y2r12","country_code":"CN","type":"education","lineage":["https://openalex.org/I3923682"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Dacheng Xu","raw_affiliation_strings":["School of Electronic and Information Engineering, Soochow University, Suzhou, China"],"affiliations":[{"raw_affiliation_string":"School of Electronic and Information Engineering, Soochow University, Suzhou, China","institution_ids":["https://openalex.org/I3923682"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5046592628","display_name":"Shuwen Guo","orcid":"https://orcid.org/0000-0002-8754-1613"},"institutions":[{"id":"https://openalex.org/I3923682","display_name":"Soochow University","ror":"https://ror.org/05t8y2r12","country_code":"CN","type":"education","lineage":["https://openalex.org/I3923682"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shuwen Guo","raw_affiliation_strings":["School of Electronic and Information Engineering, Soochow University, Suzhou, China"],"affiliations":[{"raw_affiliation_string":"School of Electronic and Information Engineering, Soochow University, Suzhou, China","institution_ids":["https://openalex.org/I3923682"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5111085192"],"corresponding_institution_ids":["https://openalex.org/I3923682"],"apc_list":null,"apc_paid":null,"fwci":1.0197,"has_fulltext":false,"cited_by_count":16,"citation_normalized_percentile":{"value":0.7920955,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"3"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/gyroscope","display_name":"Gyroscope","score":0.8848205804824829},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.8320517539978027},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.784771740436554},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6211866140365601},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.576982855796814},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4678768813610077},{"id":"https://openalex.org/keywords/quality","display_name":"Quality (philosophy)","score":0.4230923056602478},{"id":"https://openalex.org/keywords/q-factor","display_name":"Q factor","score":0.41191366314888},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3486981987953186},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.32675379514694214},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.09394222497940063}],"concepts":[{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.8848205804824829},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.8320517539978027},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.784771740436554},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6211866140365601},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.576982855796814},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4678768813610077},{"id":"https://openalex.org/C2779530757","wikidata":"https://www.wikidata.org/wiki/Q1207505","display_name":"Quality (philosophy)","level":2,"score":0.4230923056602478},{"id":"https://openalex.org/C187725362","wikidata":"https://www.wikidata.org/wiki/Q830521","display_name":"Q factor","level":3,"score":0.41191366314888},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3486981987953186},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.32675379514694214},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.09394222497940063},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icsens.2017.8233984","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2017.8233984","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE SENSORS","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.8799999952316284,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W1573487348","https://openalex.org/W2129925483","https://openalex.org/W2134677387","https://openalex.org/W2144846919","https://openalex.org/W2241539093","https://openalex.org/W2327039264","https://openalex.org/W2591652586"],"related_works":["https://openalex.org/W2766999340","https://openalex.org/W2028268967","https://openalex.org/W2054124615","https://openalex.org/W2670482320","https://openalex.org/W2532341012","https://openalex.org/W3217179084","https://openalex.org/W4245281580","https://openalex.org/W4283755933","https://openalex.org/W2244350851","https://openalex.org/W2953193290"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,72],"highly":[4],"symmetric":[5],"micro-scale":[6],"hemispherical":[7],"resonator":[8,51],"gyroscope":[9,31],"(HRG)":[10],"made":[11],"of":[12,49,59,75,103,112,127],"polysilicon":[13],"with":[14,52,71],"spherical":[15,18],"electrodes.":[16],"The":[17,56,86],"electrodes":[19,39,111],"enhance":[20],"transduction":[21],"area":[22],"(1.1":[23],"mm":[24],"<sup":[25],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[26],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sup>":[27],").":[28],"Meanwhile,":[29],"the":[30,50,60,79,110,125,128],"has":[32],"small":[33],"gap":[34],"size":[35],"(1.8":[36],"\u03bcm)":[37],"between":[38,78],"and":[40,106,114,123],"resonators.":[41],"These":[42],"two":[43,80],"features":[44],"enable":[45],"mode":[46,62],"match":[47],"operation":[48],"low":[53,100],"voltage":[54],"supply.":[55],"quality":[57],"factor":[58],"wineglass":[61],"is":[63],"measured":[64],"to":[65,94],"be":[66,90],"22000":[67],"at":[68],"14184":[69],"Hz":[70,77],"frequency":[73,87],"split":[74,88],"10":[76],"n":[81],"=":[82],"2":[83,104],"degenerate":[84],"modes.":[85],"can":[89],"minimized":[91],"from":[92],"0.07%":[93],"0.003%":[95],"(0.51":[96],"Hz)":[97],"by":[98],"applying":[99],"tuning":[101],"voltages":[102],"V":[105,108],"1.6":[107],"on":[109],"22.5\u00b0":[113],"45\u00b0,":[115],"respectively,":[116],"which":[117],"would":[118],"significantly":[119],"reduce":[120],"power":[121],"supply":[122],"simplify":[124],"circuit":[126],"high-performance":[129],"HRG.":[130]},"counts_by_year":[{"year":2025,"cited_by_count":3},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":4},{"year":2018,"cited_by_count":2}],"updated_date":"2026-03-24T05:59:24.953642","created_date":"2025-10-10T00:00:00"}