{"id":"https://openalex.org/W2782526382","doi":"https://doi.org/10.1109/icsens.2017.8233879","title":"Large-aperture Fabry-Perot filters based on silicon/silicon carbonitride distributed Bragg reflectors for the near-infrared","display_name":"Large-aperture Fabry-Perot filters based on silicon/silicon carbonitride distributed Bragg reflectors for the near-infrared","publication_year":2017,"publication_date":"2017-10-01","ids":{"openalex":"https://openalex.org/W2782526382","doi":"https://doi.org/10.1109/icsens.2017.8233879","mag":"2782526382"},"language":"en","primary_location":{"id":"doi:10.1109/icsens.2017.8233879","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2017.8233879","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101789547","display_name":"Christian Huber","orcid":"https://orcid.org/0000-0002-8969-8577"},"institutions":[{"id":"https://openalex.org/I889804353","display_name":"Robert Bosch (Germany)","ror":"https://ror.org/01fe0jt45","country_code":"DE","type":"company","lineage":["https://openalex.org/I889804353"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Christian Huber","raw_affiliation_strings":["Microsystems and Nanotechnologies Department, Robert Bosch GmbH, Renningen, Germany"],"affiliations":[{"raw_affiliation_string":"Microsystems and Nanotechnologies Department, Robert Bosch GmbH, Renningen, Germany","institution_ids":["https://openalex.org/I889804353"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5015207081","display_name":"Benedikt Stein","orcid":null},"institutions":[{"id":"https://openalex.org/I889804353","display_name":"Robert Bosch (Germany)","ror":"https://ror.org/01fe0jt45","country_code":"DE","type":"company","lineage":["https://openalex.org/I889804353"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Benedikt Stein","raw_affiliation_strings":["Microsystems and Nanotechnologies Department, Robert Bosch GmbH, Renningen, Germany"],"affiliations":[{"raw_affiliation_string":"Microsystems and Nanotechnologies Department, Robert Bosch GmbH, Renningen, Germany","institution_ids":["https://openalex.org/I889804353"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5029288038","display_name":"H. Kalt","orcid":"https://orcid.org/0000-0002-3698-1512"},"institutions":[{"id":"https://openalex.org/I102335020","display_name":"Karlsruhe Institute of Technology","ror":"https://ror.org/04t3en479","country_code":"DE","type":"education","lineage":["https://openalex.org/I102335020","https://openalex.org/I1305996414"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Heinz Kalt","raw_affiliation_strings":["Institute of Applied Physics, Karlsruhe Institute of Technology, Karlsruhe, Germany"],"affiliations":[{"raw_affiliation_string":"Institute of Applied Physics, Karlsruhe Institute of Technology, Karlsruhe, Germany","institution_ids":["https://openalex.org/I102335020"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5101789547"],"corresponding_institution_ids":["https://openalex.org/I889804353"],"apc_list":null,"apc_paid":null,"fwci":0.1433,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.53962638,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":96},"biblio":{"volume":"8373","issue":null,"first_page":"1","last_page":"3"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11169","display_name":"Silicon Nanostructures and Photoluminescence","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.998199999332428,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/fabry\u2013p\u00e9rot-interferometer","display_name":"Fabry\u2013P\u00e9rot interferometer","score":0.8072562217712402},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7883096933364868},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.7819707989692688},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.6578733325004578},{"id":"https://openalex.org/keywords/refractive-index","display_name":"Refractive index","score":0.6138204336166382},{"id":"https://openalex.org/keywords/distributed-bragg-reflector","display_name":"Distributed Bragg reflector","score":0.5942440629005432},{"id":"https://openalex.org/keywords/optical-filter","display_name":"Optical filter","score":0.5431825518608093},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5068219304084778},{"id":"https://openalex.org/keywords/infrared","display_name":"Infrared","score":0.4408230185508728},{"id":"https://openalex.org/keywords/hybrid-silicon-laser","display_name":"Hybrid silicon laser","score":0.4138787090778351},{"id":"https://openalex.org/keywords/wavelength","display_name":"Wavelength","score":0.08351638913154602},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.06588873267173767}],"concepts":[{"id":"https://openalex.org/C169268690","wikidata":"https://www.wikidata.org/wiki/Q1359945","display_name":"Fabry\u2013P\u00e9rot interferometer","level":3,"score":0.8072562217712402},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7883096933364868},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.7819707989692688},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.6578733325004578},{"id":"https://openalex.org/C42067758","wikidata":"https://www.wikidata.org/wiki/Q174102","display_name":"Refractive index","level":2,"score":0.6138204336166382},{"id":"https://openalex.org/C34082928","wikidata":"https://www.wikidata.org/wiki/Q1108160","display_name":"Distributed Bragg reflector","level":3,"score":0.5942440629005432},{"id":"https://openalex.org/C45613198","wikidata":"https://www.wikidata.org/wiki/Q1134091","display_name":"Optical filter","level":2,"score":0.5431825518608093},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5068219304084778},{"id":"https://openalex.org/C158355884","wikidata":"https://www.wikidata.org/wiki/Q11388","display_name":"Infrared","level":2,"score":0.4408230185508728},{"id":"https://openalex.org/C139159486","wikidata":"https://www.wikidata.org/wiki/Q5953298","display_name":"Hybrid silicon laser","level":3,"score":0.4138787090778351},{"id":"https://openalex.org/C6260449","wikidata":"https://www.wikidata.org/wiki/Q41364","display_name":"Wavelength","level":2,"score":0.08351638913154602},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.06588873267173767}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icsens.2017.8233879","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2017.8233879","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE SENSORS","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W1535993857","https://openalex.org/W2024881054","https://openalex.org/W2086456240","https://openalex.org/W2164280110","https://openalex.org/W2300597427","https://openalex.org/W2610363572","https://openalex.org/W6656562525","https://openalex.org/W6697803458"],"related_works":["https://openalex.org/W2354462865","https://openalex.org/W2065523387","https://openalex.org/W1979386281","https://openalex.org/W3177028888","https://openalex.org/W2791834687","https://openalex.org/W2034954964","https://openalex.org/W2772216499","https://openalex.org/W1993502256","https://openalex.org/W2059151447","https://openalex.org/W2386787399"],"abstract_inverted_index":{"This":[0],"contribution":[1],"presents":[2],"silicon":[3,16,54],"carbonitride":[4],"as":[5],"a":[6,62,71,76],"new":[7],"low":[8],"refractive":[9,50],"index":[10,51],"material":[11],"for":[12,75],"integration":[13],"together":[14],"with":[15,81],"in":[17],"suspended":[18],"distributed":[19],"Bragg":[20],"reflector":[21],"membranes.":[22],"We":[23],"show":[24],"how":[25],"its":[26],"benign":[27],"mechanical":[28],"stress":[29],"properties":[30],"can":[31],"be":[32],"used":[33],"to":[34,42,47,53],"fabricate":[35],"inherently":[36],"flat":[37],"mirror":[38,56],"membranes":[39,57],"of":[40,73],"up":[41],"5":[43],"mm":[44],"diameter.":[45],"Due":[46],"the":[48],"large":[49,77],"contrast":[52],"such":[55],"exhibit":[58],"high":[59],"reflectance":[60],"over":[61],"wide":[63],"spectral":[64],"range.":[65],"Using":[66],"these":[67],"mirrors,":[68],"we":[69],"demonstrate":[70],"proof":[72],"concept":[74],"aperture":[78],"Fabry-Perot":[79],"filter":[80],"narrow":[82],"bandwidth":[83],"that":[84],"could":[85],"help":[86],"miniaturize":[87],"hyperspectral":[88],"imaging":[89],"sensors.":[90]},"counts_by_year":[{"year":2022,"cited_by_count":2},{"year":2018,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}