{"id":"https://openalex.org/W2571678770","doi":"https://doi.org/10.1109/icsens.2016.7808938","title":"A novel characterization method for MEMS based electrostatic resonators for Q enhancement and feedthrough current elimination","display_name":"A novel characterization method for MEMS based electrostatic resonators for Q enhancement and feedthrough current elimination","publication_year":2016,"publication_date":"2016-10-01","ids":{"openalex":"https://openalex.org/W2571678770","doi":"https://doi.org/10.1109/icsens.2016.7808938","mag":"2571678770"},"language":"en","primary_location":{"id":"doi:10.1109/icsens.2016.7808938","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2016.7808938","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5081661239","display_name":"Eren Ayd\u0131n","orcid":"https://orcid.org/0000-0003-4851-4003"},"institutions":[{"id":"https://openalex.org/I201799495","display_name":"Middle East Technical University","ror":"https://ror.org/014weej12","country_code":"TR","type":"education","lineage":["https://openalex.org/I201799495"]}],"countries":["TR"],"is_corresponding":false,"raw_author_name":"E. Aydin","raw_affiliation_strings":["Dept. of Electrical and Electronics Engineering, Middle East Technical University, Ankara, Turkey"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Dept. of Electrical and Electronics Engineering, Middle East Technical University, Ankara, Turkey","institution_ids":["https://openalex.org/I201799495"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021292160","display_name":"Mustafa Kang\u00fcl","orcid":"https://orcid.org/0000-0002-4009-4676"},"institutions":[{"id":"https://openalex.org/I201799495","display_name":"Middle East Technical University","ror":"https://ror.org/014weej12","country_code":"TR","type":"education","lineage":["https://openalex.org/I201799495"]}],"countries":["TR"],"is_corresponding":false,"raw_author_name":"M. Kangul","raw_affiliation_strings":["Orta Dogu Teknik Universitesi, Ankara, Ankara, TR"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Orta Dogu Teknik Universitesi, Ankara, Ankara, TR","institution_ids":["https://openalex.org/I201799495"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000381951","display_name":"Furkan G\u00f6k\u00e7e","orcid":"https://orcid.org/0000-0002-6520-0324"},"institutions":[{"id":"https://openalex.org/I201799495","display_name":"Middle East Technical University","ror":"https://ror.org/014weej12","country_code":"TR","type":"education","lineage":["https://openalex.org/I201799495"]}],"countries":["TR"],"is_corresponding":false,"raw_author_name":"F. Gokce","raw_affiliation_strings":["Dept. of Electrical and Electronics Engineering, Middle East Technical University, Ankara, Turkey"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Dept. of Electrical and Electronics Engineering, Middle East Technical University, Ankara, Turkey","institution_ids":["https://openalex.org/I201799495"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5090114436","display_name":"\u00d6zge Zorlu","orcid":"https://orcid.org/0000-0002-9570-0434"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"O. Zorlu","raw_affiliation_strings":["Mikro Biyosistemler Elektronik Sanayi ve Ticaret A.S, Ankara, Turkey"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Mikro Biyosistemler Elektronik Sanayi ve Ticaret A.S, Ankara, Turkey","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5045177705","display_name":"Haluk K\u00fclah","orcid":"https://orcid.org/0000-0003-1331-4474"},"institutions":[{"id":"https://openalex.org/I201799495","display_name":"Middle East Technical University","ror":"https://ror.org/014weej12","country_code":"TR","type":"education","lineage":["https://openalex.org/I201799495"]}],"countries":["TR"],"is_corresponding":false,"raw_author_name":"H. Kulah","raw_affiliation_strings":["Orta Dogu Teknik Universitesi, Ankara, Ankara, TR"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Orta Dogu Teknik Universitesi, Ankara, Ankara, TR","institution_ids":["https://openalex.org/I201799495"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.175,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.60229775,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"16","issue":null,"first_page":"1","last_page":"3"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/feedthrough","display_name":"Feedthrough","score":0.6690170764923096},{"id":"https://openalex.org/keywords/resonance","display_name":"Resonance (particle physics)","score":0.4723150432109833},{"id":"https://openalex.org/keywords/harmonic","display_name":"Harmonic","score":0.4541066586971283},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.4443424940109253},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.3347278833389282},{"id":"https://openalex.org/keywords/topology","display_name":"Topology (electrical circuits)","score":0.3240935206413269},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.32283157110214233},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.25765034556388855},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2570785582065582},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2562444806098938},{"id":"https://openalex.org/keywords/atomic-physics","display_name":"Atomic physics","score":0.20236268639564514},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.16203126311302185},{"id":"https://openalex.org/keywords/quantum-mechanics","display_name":"Quantum mechanics","score":0.12340524792671204},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.120093435049057},{"id":"https://openalex.org/keywords/chromatography","display_name":"Chromatography","score":0.076081782579422}],"concepts":[{"id":"https://openalex.org/C2777303812","wikidata":"https://www.wikidata.org/wiki/Q5441253","display_name":"Feedthrough","level":2,"score":0.6690170764923096},{"id":"https://openalex.org/C139210041","wikidata":"https://www.wikidata.org/wiki/Q2145840","display_name":"Resonance (particle physics)","level":2,"score":0.4723150432109833},{"id":"https://openalex.org/C127934551","wikidata":"https://www.wikidata.org/wiki/Q1148098","display_name":"Harmonic","level":2,"score":0.4541066586971283},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.4443424940109253},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3347278833389282},{"id":"https://openalex.org/C184720557","wikidata":"https://www.wikidata.org/wiki/Q7825049","display_name":"Topology (electrical circuits)","level":2,"score":0.3240935206413269},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.32283157110214233},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.25765034556388855},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2570785582065582},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2562444806098938},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.20236268639564514},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.16203126311302185},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.12340524792671204},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.120093435049057},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.076081782579422}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icsens.2016.7808938","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2016.7808938","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE SENSORS","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.8399999737739563,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":2,"referenced_works":["https://openalex.org/W2599974146","https://openalex.org/W2724632175"],"related_works":["https://openalex.org/W1986839414","https://openalex.org/W2048871732","https://openalex.org/W2357288154","https://openalex.org/W2033569341","https://openalex.org/W3103904424","https://openalex.org/W2070512270","https://openalex.org/W4390444039","https://openalex.org/W2364929389","https://openalex.org/W4226100221","https://openalex.org/W4390577852"],"abstract_inverted_index":{"This":[0],"paper":[1],"introduces":[2],"a":[3],"new":[4],"technique":[5],"for":[6],"electrostatic":[7],"resonance":[8,90],"characterization":[9],"based":[10],"on":[11],"2":[12,32,61,82],"<sup":[13,33,46,62,83],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[14,34,47,63,84],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">nd</sup>":[15,35,64,85],"harmonic":[16,36,65,86],"distortion":[17],"terms":[18],"at":[19],"the":[20,26,31,44,60,71,74,89,101,108],"output":[21,27,51,105],"current.":[22],"Mathematical":[23],"analysis":[24],"of":[25,73],"current":[28,52,55,106],"shows":[29],"that":[30,70],"component":[37],"exhibits":[38],"higher":[39,58],"quality":[40],"factor":[41],"(Q)":[42],"than":[43],"1":[45],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">st</sup>":[48],"harmonic.":[49],"Besides,":[50],"to":[53,98,107],"feedthrough":[54,109],"ratio":[56],"is":[57,77],"in":[59,104],"term.":[66],"Experimental":[67],"results":[68],"show":[69],"Q":[72],"resonating":[75],"system":[76],"enhanced":[78],"by":[79],"66%":[80],"with":[81],"operation.":[87],"Moreover,":[88],"peak":[91],"has":[92],"been":[93],"improved":[94],"from":[95],"0.2":[96],"dB":[97],"5dB,":[99],"showing":[100],"effective":[102],"increase":[103],"ratio.":[110]},"counts_by_year":[{"year":2018,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}