{"id":"https://openalex.org/W2574176635","doi":"https://doi.org/10.1109/icsens.2016.7808933","title":"Fully-differential AlN-on-Si wine glass mode resonator for enhanced characterization in water","display_name":"Fully-differential AlN-on-Si wine glass mode resonator for enhanced characterization in water","publication_year":2016,"publication_date":"2016-10-01","ids":{"openalex":"https://openalex.org/W2574176635","doi":"https://doi.org/10.1109/icsens.2016.7808933","mag":"2574176635"},"language":"en","primary_location":{"id":"doi:10.1109/icsens.2016.7808933","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2016.7808933","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100617855","display_name":"Abid Ali","orcid":"https://orcid.org/0000-0002-7343-1835"},"institutions":[{"id":"https://openalex.org/I889458895","display_name":"University of Hong Kong","ror":"https://ror.org/02zhqgq86","country_code":"HK","type":"education","lineage":["https://openalex.org/I889458895"]},{"id":"https://openalex.org/I168719708","display_name":"City University of Hong Kong","ror":"https://ror.org/03q8dnn23","country_code":"HK","type":"education","lineage":["https://openalex.org/I168719708"]}],"countries":["HK"],"is_corresponding":true,"raw_author_name":"Abid Ali","raw_affiliation_strings":["Department of Electronic Engineering City, University of Hong Kong, Kowloon, Hong Kong"],"affiliations":[{"raw_affiliation_string":"Department of Electronic Engineering City, University of Hong Kong, Kowloon, Hong Kong","institution_ids":["https://openalex.org/I168719708","https://openalex.org/I889458895"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100604069","display_name":"Joshua E.-Y. Lee","orcid":"https://orcid.org/0000-0002-1741-1485"},"institutions":[{"id":"https://openalex.org/I889458895","display_name":"University of Hong Kong","ror":"https://ror.org/02zhqgq86","country_code":"HK","type":"education","lineage":["https://openalex.org/I889458895"]},{"id":"https://openalex.org/I168719708","display_name":"City University of Hong Kong","ror":"https://ror.org/03q8dnn23","country_code":"HK","type":"education","lineage":["https://openalex.org/I168719708"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Joshua E.-Y. Lee","raw_affiliation_strings":["Department of Electronic Engineering City, University of Hong Kong, Kowloon, Hong Kong"],"affiliations":[{"raw_affiliation_string":"Department of Electronic Engineering City, University of Hong Kong, Kowloon, Hong Kong","institution_ids":["https://openalex.org/I168719708","https://openalex.org/I889458895"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5100617855"],"corresponding_institution_ids":["https://openalex.org/I168719708","https://openalex.org/I889458895"],"apc_list":null,"apc_paid":null,"fwci":1.2273,"has_fulltext":false,"cited_by_count":11,"citation_normalized_percentile":{"value":0.80100611,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"2016","issue":null,"first_page":"1","last_page":"3"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/feedthrough","display_name":"Feedthrough","score":0.9570094347000122},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.8344710469245911},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.795170783996582},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5871638059616089},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.534538745880127},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.504205584526062},{"id":"https://openalex.org/keywords/q-factor","display_name":"Q factor","score":0.5040766000747681},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.46727052330970764},{"id":"https://openalex.org/keywords/silicon-nitride","display_name":"Silicon nitride","score":0.4480293095111847},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.4323166310787201},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.4221365451812744},{"id":"https://openalex.org/keywords/oscillation","display_name":"Oscillation (cell signaling)","score":0.41679757833480835},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.22642546892166138}],"concepts":[{"id":"https://openalex.org/C2777303812","wikidata":"https://www.wikidata.org/wiki/Q5441253","display_name":"Feedthrough","level":2,"score":0.9570094347000122},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8344710469245911},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.795170783996582},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5871638059616089},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.534538745880127},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.504205584526062},{"id":"https://openalex.org/C187725362","wikidata":"https://www.wikidata.org/wiki/Q830521","display_name":"Q factor","level":3,"score":0.5040766000747681},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.46727052330970764},{"id":"https://openalex.org/C2777431650","wikidata":"https://www.wikidata.org/wiki/Q413828","display_name":"Silicon nitride","level":3,"score":0.4480293095111847},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.4323166310787201},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.4221365451812744},{"id":"https://openalex.org/C2778439541","wikidata":"https://www.wikidata.org/wiki/Q7106412","display_name":"Oscillation (cell signaling)","level":2,"score":0.41679757833480835},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.22642546892166138},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C54355233","wikidata":"https://www.wikidata.org/wiki/Q7162","display_name":"Genetics","level":1,"score":0.0},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/icsens.2016.7808933","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2016.7808933","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE SENSORS","raw_type":"proceedings-article"},{"id":"mag:2743569985","is_oa":false,"landing_page_url":"http://jglobal.jst.go.jp/en/public/20090422/201702224186332346","pdf_url":null,"source":{"id":"https://openalex.org/S4306512817","display_name":"IEEE Conference Proceedings","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":null,"raw_source_name":"IEEE Conference Proceedings","raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Clean water and sanitation","id":"https://metadata.un.org/sdg/6","score":0.6600000262260437}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W1968343372","https://openalex.org/W1978135970","https://openalex.org/W2055099059","https://openalex.org/W2062606086","https://openalex.org/W2126984829","https://openalex.org/W2138308932","https://openalex.org/W2148392400","https://openalex.org/W2285605407"],"related_works":["https://openalex.org/W2075931814","https://openalex.org/W1986839414","https://openalex.org/W2048871732","https://openalex.org/W2357288154","https://openalex.org/W2033569341","https://openalex.org/W3103904424","https://openalex.org/W4390444039","https://openalex.org/W2364929389","https://openalex.org/W1992994658","https://openalex.org/W2781579234"],"abstract_inverted_index":{"In":[0],"this":[1,42,108],"work,":[2],"we":[3,110],"present":[4],"a":[5,80,95,141],"fully-differential":[6,48,114],"wine-glass":[7],"(WG)":[8],"mode":[9,43,57,76,136],"MEMS":[10,22],"resonator":[11],"fabricated":[12],"in":[13,28,71,100,119,131],"thin":[14],"film":[15],"Aluminum":[16],"Nitride":[17],"(AlN)":[18],"on":[19],"Silicon":[20],"(Si)":[21],"technology":[23],"for":[24,47],"resonant":[25,127],"sensing":[26],"applications":[27],"liquids.":[29],"Our":[30],"finite":[31],"element":[32],"(FE)":[33],"simulations":[34],"show":[35,111],"that":[36,54,112],"the":[37,55,67,85,101,105,113,126,134],"strain":[38],"fields":[39],"associated":[40],"with":[41,79],"are":[44],"well":[45],"suited":[46],"piezoelectric":[49],"transduction.":[50],"We":[51,63],"experimentally":[52],"demonstrate":[53],"WG":[56,135],"consequently":[58],"possesses":[59],"strong":[60],"electromechanical":[61],"coupling.":[62],"have":[64],"also":[65],"measured":[66],"highest":[68],"quality":[69],"factor":[70],"water":[72,93],"among":[73],"various":[74],"contour":[75],"resonators":[77],"yet":[78],"value":[81],"of":[82,90,98,104,125,147],"360.":[83],"But":[84],"notably":[86],"high":[87],"dielectric":[88],"constant":[89],"liquids":[91],"like":[92],"introduces":[94],"large":[96],"amount":[97],"feedthrough":[99],"electrical":[102],"characterization":[103],"resonators.":[106],"To":[107],"end,":[109],"configuration":[115],"is":[116],"highly":[117],"effective":[118],"reduction":[120,130],"feedthrough.":[121],"The":[122],"simultaneous":[123],"enhancement":[124],"signal":[128,142],"and":[129],"background":[132,144],"using":[133],"allows":[137],"us":[138],"to":[139,143],"achieve":[140],"ratio":[145],"(SBR)":[146],"15":[148],"dB.":[149]},"counts_by_year":[{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2018,"cited_by_count":4},{"year":2017,"cited_by_count":3}],"updated_date":"2026-04-04T16:13:02.066488","created_date":"2025-10-10T00:00:00"}