{"id":"https://openalex.org/W2576780000","doi":"https://doi.org/10.1109/icsens.2016.7808883","title":"Frequency output MEMS resonator on membrane pressure sensors","display_name":"Frequency output MEMS resonator on membrane pressure sensors","publication_year":2016,"publication_date":"2016-10-01","ids":{"openalex":"https://openalex.org/W2576780000","doi":"https://doi.org/10.1109/icsens.2016.7808883","mag":"2576780000"},"language":"en","primary_location":{"id":"doi:10.1109/icsens.2016.7808883","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2016.7808883","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE SENSORS","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5038428529","display_name":"Vahid Qaradaghi","orcid":"https://orcid.org/0000-0001-6946-1516"},"institutions":[{"id":"https://openalex.org/I162577319","display_name":"The University of Texas at Dallas","ror":"https://ror.org/049emcs32","country_code":"US","type":"education","lineage":["https://openalex.org/I162577319"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Vahid Qaradaghi","raw_affiliation_strings":["Department of Electrical Engineering, University of Texas at Dallas, Dallas, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, University of Texas at Dallas, Dallas, USA","institution_ids":["https://openalex.org/I162577319"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020427723","display_name":"Mohammad Mahdavi","orcid":"https://orcid.org/0000-0002-7044-2790"},"institutions":[{"id":"https://openalex.org/I162577319","display_name":"The University of Texas at Dallas","ror":"https://ror.org/049emcs32","country_code":"US","type":"education","lineage":["https://openalex.org/I162577319"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Mohammad Mahdavi","raw_affiliation_strings":["Department of Electrical Engineering, University of Texas at Dallas, Dallas, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, University of Texas at Dallas, Dallas, USA","institution_ids":["https://openalex.org/I162577319"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101519430","display_name":"Varun Kumar","orcid":"https://orcid.org/0000-0001-5014-2961"},"institutions":[{"id":"https://openalex.org/I162577319","display_name":"The University of Texas at Dallas","ror":"https://ror.org/049emcs32","country_code":"US","type":"education","lineage":["https://openalex.org/I162577319"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Varun Kumar","raw_affiliation_strings":["Department of Electrical Engineering, University of Texas at Dallas, Dallas, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, University of Texas at Dallas, Dallas, USA","institution_ids":["https://openalex.org/I162577319"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5022358493","display_name":"Siavash Pourkamali","orcid":"https://orcid.org/0009-0006-2184-5581"},"institutions":[{"id":"https://openalex.org/I162577319","display_name":"The University of Texas at Dallas","ror":"https://ror.org/049emcs32","country_code":"US","type":"education","lineage":["https://openalex.org/I162577319"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Siavash Pourkamali","raw_affiliation_strings":["Department of Electrical Engineering, University of Texas at Dallas, Dallas, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, University of Texas at Dallas, Dallas, USA","institution_ids":["https://openalex.org/I162577319"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I162577319"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":"2016","issue":null,"first_page":"1","last_page":"3"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.8835673332214355},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7708829641342163},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7263383865356445},{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.7129243612289429},{"id":"https://openalex.org/keywords/pressure-sensor","display_name":"Pressure sensor","score":0.5741142630577087},{"id":"https://openalex.org/keywords/membrane","display_name":"Membrane","score":0.5683572888374329},{"id":"https://openalex.org/keywords/torr","display_name":"Torr","score":0.537227988243103},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.5344127416610718},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.5018327236175537},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.49115225672721863},{"id":"https://openalex.org/keywords/diaphragm","display_name":"Diaphragm (acoustics)","score":0.4512363076210022},{"id":"https://openalex.org/keywords/resonance","display_name":"Resonance (particle physics)","score":0.4148157238960266},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.23949038982391357},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1922086477279663},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.12047821283340454},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.10369306802749634},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.09448707103729248}],"concepts":[{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.8835673332214355},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7708829641342163},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7263383865356445},{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.7129243612289429},{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.5741142630577087},{"id":"https://openalex.org/C41625074","wikidata":"https://www.wikidata.org/wiki/Q176088","display_name":"Membrane","level":2,"score":0.5683572888374329},{"id":"https://openalex.org/C30646810","wikidata":"https://www.wikidata.org/wiki/Q185648","display_name":"Torr","level":2,"score":0.537227988243103},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.5344127416610718},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5018327236175537},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.49115225672721863},{"id":"https://openalex.org/C164292776","wikidata":"https://www.wikidata.org/wiki/Q5271779","display_name":"Diaphragm (acoustics)","level":3,"score":0.4512363076210022},{"id":"https://openalex.org/C139210041","wikidata":"https://www.wikidata.org/wiki/Q2145840","display_name":"Resonance (particle physics)","level":2,"score":0.4148157238960266},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.23949038982391357},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1922086477279663},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.12047821283340454},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.10369306802749634},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.09448707103729248},{"id":"https://openalex.org/C109214941","wikidata":"https://www.wikidata.org/wiki/Q18334","display_name":"Particle physics","level":1,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/icsens.2016.7808883","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2016.7808883","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE SENSORS","raw_type":"proceedings-article"},{"id":"mag:2746678918","is_oa":false,"landing_page_url":"http://jglobal.jst.go.jp/en/public/201702243376142635","pdf_url":null,"source":{"id":"https://openalex.org/S4306512817","display_name":"IEEE Conference Proceedings","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":null,"raw_source_name":"IEEE Conference Proceedings","raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.800000011920929}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W1964404781","https://openalex.org/W2015794221","https://openalex.org/W2035394251","https://openalex.org/W2130337450","https://openalex.org/W2326753694"],"related_works":["https://openalex.org/W2326864911","https://openalex.org/W1995409867","https://openalex.org/W4231551819","https://openalex.org/W2089076881","https://openalex.org/W2576957273","https://openalex.org/W99992490","https://openalex.org/W2890232104","https://openalex.org/W2378386980","https://openalex.org/W2443919171","https://openalex.org/W4319718036"],"abstract_inverted_index":{"This":[0],"paper":[1],"reports":[2],"implementation":[3],"and":[4,41,68],"characterization":[5],"of":[6,11],"MEMS":[7],"pressure":[8,25,47],"sensors":[9],"comprised":[10],"a":[12,18],"thin":[13],"silicon":[14],"membrane":[15,29,67],"coupled":[16],"to":[17,24,61],"thermal-piezoresistive":[19],"resonator.":[20],"Membrane":[21],"deflections":[22],"due":[23,60],"difference":[26],"across":[27],"the":[28,32,36,57,62,66,69],"slightly":[30],"deform":[31],"piezoresistive":[33],"beam":[34],"on":[35],"resonator,":[37],"changing":[38],"its":[39,43],"stiffness":[40],"consequently":[42],"resonance":[44],"frequency.":[45],"The":[46],"sensor":[48],"can":[49],"be":[50],"used":[51],"in":[52],"different":[53],"media":[54],"without":[55],"perturbing":[56],"resonator":[58,70],"operation":[59],"isolation":[63],"provided":[64],"between":[65],"body.":[71],"Sensitivities":[72],"as":[73,75],"high":[74],"10ppm/Torr":[76],"have":[77],"been":[78],"demonstrated":[79],"for":[80],"such":[81],"devices.":[82]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2018,"cited_by_count":3}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}