{"id":"https://openalex.org/W2578369323","doi":"https://doi.org/10.1109/icsens.2016.7808667","title":"CMOS integrated tin dioxide gas sensors functionalized with bimetallic nanoparticles for improved carbon monoxide detection","display_name":"CMOS integrated tin dioxide gas sensors functionalized with bimetallic nanoparticles for improved carbon monoxide detection","publication_year":2016,"publication_date":"2016-10-01","ids":{"openalex":"https://openalex.org/W2578369323","doi":"https://doi.org/10.1109/icsens.2016.7808667","mag":"2578369323"},"language":"en","primary_location":{"id":"doi:10.1109/icsens.2016.7808667","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2016.7808667","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5108548832","display_name":"Eva Lackner","orcid":null},"institutions":[{"id":"https://openalex.org/I4210135925","display_name":"Materials Center Leoben (Austria)","ror":"https://ror.org/04s620254","country_code":"AT","type":"company","lineage":["https://openalex.org/I4210135925"]}],"countries":["AT"],"is_corresponding":true,"raw_author_name":"Eva Lackner","raw_affiliation_strings":["Materials for Microelectronics, Materials Center Leoben Forschung GmbH, Leoben, Austria"],"affiliations":[{"raw_affiliation_string":"Materials for Microelectronics, Materials Center Leoben Forschung GmbH, Leoben, Austria","institution_ids":["https://openalex.org/I4210135925"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060998831","display_name":"Johanna Krainer","orcid":null},"institutions":[{"id":"https://openalex.org/I4210135925","display_name":"Materials Center Leoben (Austria)","ror":"https://ror.org/04s620254","country_code":"AT","type":"company","lineage":["https://openalex.org/I4210135925"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"Johanna Krainer","raw_affiliation_strings":["Materials for Microelectronics, Materials Center Leoben Forschung GmbH, Leoben, Austria"],"affiliations":[{"raw_affiliation_string":"Materials for Microelectronics, Materials Center Leoben Forschung GmbH, Leoben, Austria","institution_ids":["https://openalex.org/I4210135925"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112270839","display_name":"Robert Wimmer-Teubenbacher","orcid":null},"institutions":[{"id":"https://openalex.org/I4210135925","display_name":"Materials Center Leoben (Austria)","ror":"https://ror.org/04s620254","country_code":"AT","type":"company","lineage":["https://openalex.org/I4210135925"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"Robert Wimmer-Teubenbacher","raw_affiliation_strings":["Materials Center Leoben Forschung GmbH, Leoben, AT"],"affiliations":[{"raw_affiliation_string":"Materials Center Leoben Forschung GmbH, Leoben, AT","institution_ids":["https://openalex.org/I4210135925"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038415000","display_name":"Florentyna Sosada","orcid":null},"institutions":[{"id":"https://openalex.org/I4210135925","display_name":"Materials Center Leoben (Austria)","ror":"https://ror.org/04s620254","country_code":"AT","type":"company","lineage":["https://openalex.org/I4210135925"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"Florentyna Sosada","raw_affiliation_strings":["Materials for Microelectronics, Materials Center Leoben Forschung GmbH, Leoben, Austria"],"affiliations":[{"raw_affiliation_string":"Materials for Microelectronics, Materials Center Leoben Forschung GmbH, Leoben, Austria","institution_ids":["https://openalex.org/I4210135925"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026281346","display_name":"Marco Deluca","orcid":"https://orcid.org/0000-0002-2308-7968"},"institutions":[{"id":"https://openalex.org/I4210135925","display_name":"Materials Center Leoben (Austria)","ror":"https://ror.org/04s620254","country_code":"AT","type":"company","lineage":["https://openalex.org/I4210135925"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"Marco Deluca","raw_affiliation_strings":["Materials for Microelectronics, Materials Center Leoben Forschung GmbH, Leoben, Austria"],"affiliations":[{"raw_affiliation_string":"Materials for Microelectronics, Materials Center Leoben Forschung GmbH, Leoben, Austria","institution_ids":["https://openalex.org/I4210135925"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055855854","display_name":"Anton Koeck","orcid":null},"institutions":[{"id":"https://openalex.org/I4210135925","display_name":"Materials Center Leoben (Austria)","ror":"https://ror.org/04s620254","country_code":"AT","type":"company","lineage":["https://openalex.org/I4210135925"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"Anton Koeck","raw_affiliation_strings":["Materials for Microelectronics, Materials Center Leoben Forschung GmbH, Leoben, Austria"],"affiliations":[{"raw_affiliation_string":"Materials for Microelectronics, Materials Center Leoben Forschung GmbH, Leoben, Austria","institution_ids":["https://openalex.org/I4210135925"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042581959","display_name":"E. Laubender","orcid":"https://orcid.org/0000-0003-3806-5099"},"institutions":[{"id":"https://openalex.org/I161046081","display_name":"University of Freiburg","ror":"https://ror.org/0245cg223","country_code":"DE","type":"education","lineage":["https://openalex.org/I161046081"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Elmar Laubender","raw_affiliation_strings":["The Freiburg Materials Research Center, University of Freiburg, Freiburg, Germany"],"affiliations":[{"raw_affiliation_string":"The Freiburg Materials Research Center, University of Freiburg, Freiburg, Germany","institution_ids":["https://openalex.org/I161046081"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022781556","display_name":"Olena Yurchenko","orcid":"https://orcid.org/0000-0001-9837-0883"},"institutions":[{"id":"https://openalex.org/I161046081","display_name":"University of Freiburg","ror":"https://ror.org/0245cg223","country_code":"DE","type":"education","lineage":["https://openalex.org/I161046081"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Olena Yurchenko","raw_affiliation_strings":["The Freiburg Materials Research Center, University of Freiburg, Freiburg, Germany"],"affiliations":[{"raw_affiliation_string":"The Freiburg Materials Research Center, University of Freiburg, Freiburg, Germany","institution_ids":["https://openalex.org/I161046081"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044520105","display_name":"G. Urban","orcid":"https://orcid.org/0000-0003-1567-000X"},"institutions":[{"id":"https://openalex.org/I161046081","display_name":"University of Freiburg","ror":"https://ror.org/0245cg223","country_code":"DE","type":"education","lineage":["https://openalex.org/I161046081"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Gerald Urban","raw_affiliation_strings":["The Freiburg Materials Research Center, University of Freiburg, Freiburg, Germany"],"affiliations":[{"raw_affiliation_string":"The Freiburg Materials Research Center, University of Freiburg, Freiburg, Germany","institution_ids":["https://openalex.org/I161046081"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067225327","display_name":"Justyna Bekacz","orcid":null},"institutions":[{"id":"https://openalex.org/I4210121671","display_name":"EV Group (Austria)","ror":"https://ror.org/02e8b3g15","country_code":"AT","type":"company","lineage":["https://openalex.org/I4210121671"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"Justyna Bekacz","raw_affiliation_strings":["EV Group, Austria"],"affiliations":[{"raw_affiliation_string":"EV Group, Austria","institution_ids":["https://openalex.org/I4210121671"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068930684","display_name":"Karl Rohracher","orcid":"https://orcid.org/0000-0001-7691-4173"},"institutions":[{"id":"https://openalex.org/I154481106","display_name":"AMS (Austria)","ror":"https://ror.org/03vz6gs79","country_code":"AT","type":"company","lineage":["https://openalex.org/I154481106"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"Karl Rohracher","raw_affiliation_strings":["AMS AG, Austria"],"affiliations":[{"raw_affiliation_string":"AMS AG, Austria","institution_ids":["https://openalex.org/I154481106"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5014976776","display_name":"E. Wachmann","orcid":null},"institutions":[{"id":"https://openalex.org/I154481106","display_name":"AMS (Austria)","ror":"https://ror.org/03vz6gs79","country_code":"AT","type":"company","lineage":["https://openalex.org/I154481106"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"Ewald Wachmann","raw_affiliation_strings":["AMS AG, Austria"],"affiliations":[{"raw_affiliation_string":"AMS AG, Austria","institution_ids":["https://openalex.org/I154481106"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":12,"corresponding_author_ids":["https://openalex.org/A5108548832"],"corresponding_institution_ids":["https://openalex.org/I4210135925"],"apc_list":null,"apc_paid":null,"fwci":0.3675,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.67960593,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"10","issue":null,"first_page":"1","last_page":"3"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11667","display_name":"Advanced Chemical Sensor Technologies","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9947999715805054,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/bimetallic-strip","display_name":"Bimetallic strip","score":0.8043056726455688},{"id":"https://openalex.org/keywords/nanoparticle","display_name":"Nanoparticle","score":0.6727263331413269},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6374040246009827},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.5998058915138245},{"id":"https://openalex.org/keywords/nanosensor","display_name":"Nanosensor","score":0.5937192440032959},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.5822495818138123},{"id":"https://openalex.org/keywords/carbon-monoxide","display_name":"Carbon monoxide","score":0.5626294612884521},{"id":"https://openalex.org/keywords/tin","display_name":"Tin","score":0.5217905044555664},{"id":"https://openalex.org/keywords/pyrolysis","display_name":"Pyrolysis","score":0.4652467966079712},{"id":"https://openalex.org/keywords/tin-dioxide","display_name":"Tin dioxide","score":0.41999638080596924},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.29186689853668213},{"id":"https://openalex.org/keywords/chemical-engineering","display_name":"Chemical engineering","score":0.2745285630226135},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.17563292384147644},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.14215394854545593},{"id":"https://openalex.org/keywords/catalysis","display_name":"Catalysis","score":0.09546953439712524},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.08258917927742004},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.07276207208633423},{"id":"https://openalex.org/keywords/metal","display_name":"Metal","score":0.05748218297958374}],"concepts":[{"id":"https://openalex.org/C43411465","wikidata":"https://www.wikidata.org/wiki/Q2997621","display_name":"Bimetallic strip","level":3,"score":0.8043056726455688},{"id":"https://openalex.org/C155672457","wikidata":"https://www.wikidata.org/wiki/Q61231","display_name":"Nanoparticle","level":2,"score":0.6727263331413269},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6374040246009827},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.5998058915138245},{"id":"https://openalex.org/C41858301","wikidata":"https://www.wikidata.org/wiki/Q2327870","display_name":"Nanosensor","level":2,"score":0.5937192440032959},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.5822495818138123},{"id":"https://openalex.org/C512735826","wikidata":"https://www.wikidata.org/wiki/Q2025","display_name":"Carbon monoxide","level":3,"score":0.5626294612884521},{"id":"https://openalex.org/C525849907","wikidata":"https://www.wikidata.org/wiki/Q1096","display_name":"Tin","level":2,"score":0.5217905044555664},{"id":"https://openalex.org/C36759035","wikidata":"https://www.wikidata.org/wiki/Q176848","display_name":"Pyrolysis","level":2,"score":0.4652467966079712},{"id":"https://openalex.org/C2779667129","wikidata":"https://www.wikidata.org/wiki/Q129163","display_name":"Tin dioxide","level":2,"score":0.41999638080596924},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.29186689853668213},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.2745285630226135},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.17563292384147644},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.14215394854545593},{"id":"https://openalex.org/C161790260","wikidata":"https://www.wikidata.org/wiki/Q82264","display_name":"Catalysis","level":2,"score":0.09546953439712524},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.08258917927742004},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.07276207208633423},{"id":"https://openalex.org/C544153396","wikidata":"https://www.wikidata.org/wiki/Q11426","display_name":"Metal","level":2,"score":0.05748218297958374}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icsens.2016.7808667","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2016.7808667","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE SENSORS","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Responsible consumption and production","id":"https://metadata.un.org/sdg/12","score":0.4000000059604645}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":18,"referenced_works":["https://openalex.org/W926871616","https://openalex.org/W1977901738","https://openalex.org/W2014579735","https://openalex.org/W2025792479","https://openalex.org/W2033882862","https://openalex.org/W2049843382","https://openalex.org/W2052331946","https://openalex.org/W2091791303","https://openalex.org/W2129440925","https://openalex.org/W2135851621","https://openalex.org/W2147271478","https://openalex.org/W2154016282","https://openalex.org/W2156417107","https://openalex.org/W2252700656","https://openalex.org/W3102635930","https://openalex.org/W4251226982","https://openalex.org/W6659024832","https://openalex.org/W6785489056"],"related_works":["https://openalex.org/W4375951439","https://openalex.org/W4361001398","https://openalex.org/W2494879891","https://openalex.org/W2112842299","https://openalex.org/W3032796188","https://openalex.org/W2316719495","https://openalex.org/W2268765215","https://openalex.org/W2883395230","https://openalex.org/W2495725809","https://openalex.org/W2915682158"],"abstract_inverted_index":{"In":[0],"this":[1],"work,":[2],"we":[3],"present":[4],"the":[5,24,57,60,63,71,96],"integration":[6],"of":[7,31,59,70,113],"functionalized":[8,45],"tin":[9],"dioxide":[10],"gas":[11,25,115],"sensors":[12,78],"on":[13,34,62,119],"CMOS":[14,35,72,105],"fabricated":[15],"microhotplate":[16,106],"chips.":[17],"Spray":[18],"pyrolysis":[19],"was":[20,66],"used":[21],"to":[22,83,95],"deposit":[23],"sensitive":[26],"films,":[27],"with":[28,46,79,130],"a":[29],"thickness":[30],"50":[32],"nm,":[33],"microhotplates.":[36],"The":[37,68,104],"SnO":[38,74,98],"<sub":[39,75,99],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[40,76,100],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[41,77,101],"thin":[42,102],"films":[43],"were":[44],"noble":[47],"bimetallic":[48],"nanoparticles":[49,61,81],"-":[50,52],"PdAu":[51,80],"by":[53],"inkjet":[54],"printing":[55],"and":[56],"influence":[58],"sensor":[64,89],"performance":[65],"evaluated.":[67],"functionalization":[69],"integrated":[73],"lead":[82],"an":[84],"almost":[85],"three":[86],"times":[87],"higher":[88],"response":[90],"towards":[91],"carbon":[92],"monoxide":[93],"compared":[94],"bare":[97],"film.":[103],"chips":[107],"are":[108],"also":[109],"applicable":[110],"for":[111,124],"3D-integration":[112],"different":[114],"sensing":[116],"systems":[117],"based":[118],"through-silicon-via":[120],"technology.":[121],"Building":[122],"devices":[123],"daily":[125],"life":[126],"applications":[127],"is":[128],"possible":[129],"such":[131],"3D-integrated":[132],"nanosensors.":[133]},"counts_by_year":[{"year":2020,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}