{"id":"https://openalex.org/W2575599576","doi":"https://doi.org/10.1109/icsens.2016.7808651","title":"Wideband piezoelectric mems vibration sensor","display_name":"Wideband piezoelectric mems vibration sensor","publication_year":2016,"publication_date":"2016-10-01","ids":{"openalex":"https://openalex.org/W2575599576","doi":"https://doi.org/10.1109/icsens.2016.7808651","mag":"2575599576"},"language":"en","primary_location":{"id":"doi:10.1109/icsens.2016.7808651","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2016.7808651","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE SENSORS","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5088966611","display_name":"Bahareh Yaghootkar","orcid":null},"institutions":[{"id":"https://openalex.org/I18014758","display_name":"Simon Fraser University","ror":"https://ror.org/0213rcc28","country_code":"CA","type":"education","lineage":["https://openalex.org/I18014758"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Bahareh Yaghootkar","raw_affiliation_strings":["Integrated Multi-Transducer Laboratory, Simon Fraser University, Surrey, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Integrated Multi-Transducer Laboratory, Simon Fraser University, Surrey, Canada","institution_ids":["https://openalex.org/I18014758"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071432172","display_name":"S. Azimi","orcid":"https://orcid.org/0000-0003-2309-5498"},"institutions":[{"id":"https://openalex.org/I18014758","display_name":"Simon Fraser University","ror":"https://ror.org/0213rcc28","country_code":"CA","type":"education","lineage":["https://openalex.org/I18014758"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Soheil Azimi","raw_affiliation_strings":["Integrated Multi-Transducer Laboratory, Simon Fraser University, Surrey, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Integrated Multi-Transducer Laboratory, Simon Fraser University, Surrey, Canada","institution_ids":["https://openalex.org/I18014758"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5014284015","display_name":"Behraad Bahreyni","orcid":"https://orcid.org/0000-0001-6809-1445"},"institutions":[{"id":"https://openalex.org/I18014758","display_name":"Simon Fraser University","ror":"https://ror.org/0213rcc28","country_code":"CA","type":"education","lineage":["https://openalex.org/I18014758"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Behraad Bahreyni","raw_affiliation_strings":["Integrated Multi-Transducer Laboratory, Simon Fraser University, Surrey, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Integrated Multi-Transducer Laboratory, Simon Fraser University, Surrey, Canada","institution_ids":["https://openalex.org/I18014758"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I18014758"],"apc_list":null,"apc_paid":null,"fwci":0.744,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":{"value":0.76583908,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"2016","issue":null,"first_page":"1","last_page":"3"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.7667170763015747},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7513341307640076},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6703206300735474},{"id":"https://openalex.org/keywords/pmut","display_name":"PMUT","score":0.6647048592567444},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.6017640829086304},{"id":"https://openalex.org/keywords/proof-mass","display_name":"Proof mass","score":0.56095290184021},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5474609732627869},{"id":"https://openalex.org/keywords/nanogenerator","display_name":"Nanogenerator","score":0.5105050802230835},{"id":"https://openalex.org/keywords/piezoelectric-motor","display_name":"Piezoelectric motor","score":0.4981389045715332},{"id":"https://openalex.org/keywords/piezoelectric-sensor","display_name":"Piezoelectric sensor","score":0.49328774213790894},{"id":"https://openalex.org/keywords/wideband","display_name":"Wideband","score":0.49118801951408386},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.4892739951610565},{"id":"https://openalex.org/keywords/electromechanical-coupling-coefficient","display_name":"Electromechanical coupling coefficient","score":0.48302707076072693},{"id":"https://openalex.org/keywords/piezoelectric-accelerometer","display_name":"Piezoelectric accelerometer","score":0.45356106758117676},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.42732179164886475},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.42034024000167847},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.35920828580856323},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.26969343423843384},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.1668855845928192},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.15453892946243286},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.06664204597473145}],"concepts":[{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.7667170763015747},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7513341307640076},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6703206300735474},{"id":"https://openalex.org/C57693265","wikidata":"https://www.wikidata.org/wiki/Q17105295","display_name":"PMUT","level":3,"score":0.6647048592567444},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.6017640829086304},{"id":"https://openalex.org/C2780330379","wikidata":"https://www.wikidata.org/wiki/Q16990023","display_name":"Proof mass","level":3,"score":0.56095290184021},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5474609732627869},{"id":"https://openalex.org/C175616097","wikidata":"https://www.wikidata.org/wiki/Q6964048","display_name":"Nanogenerator","level":3,"score":0.5105050802230835},{"id":"https://openalex.org/C149878695","wikidata":"https://www.wikidata.org/wiki/Q10541502","display_name":"Piezoelectric motor","level":3,"score":0.4981389045715332},{"id":"https://openalex.org/C173677008","wikidata":"https://www.wikidata.org/wiki/Q2094637","display_name":"Piezoelectric sensor","level":3,"score":0.49328774213790894},{"id":"https://openalex.org/C2780202535","wikidata":"https://www.wikidata.org/wiki/Q4524457","display_name":"Wideband","level":2,"score":0.49118801951408386},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.4892739951610565},{"id":"https://openalex.org/C86194701","wikidata":"https://www.wikidata.org/wiki/Q2981748","display_name":"Electromechanical coupling coefficient","level":3,"score":0.48302707076072693},{"id":"https://openalex.org/C108185170","wikidata":"https://www.wikidata.org/wiki/Q7193130","display_name":"Piezoelectric accelerometer","level":4,"score":0.45356106758117676},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.42732179164886475},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.42034024000167847},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.35920828580856323},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.26969343423843384},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.1668855845928192},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.15453892946243286},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.06664204597473145},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/icsens.2016.7808651","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icsens.2016.7808651","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE SENSORS","raw_type":"proceedings-article"},{"id":"mag:2752464551","is_oa":false,"landing_page_url":"http://jglobal.jst.go.jp/en/public/20090422/201702225845508916","pdf_url":null,"source":{"id":"https://openalex.org/S4306512817","display_name":"IEEE Conference Proceedings","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":null,"raw_source_name":"IEEE Conference Proceedings","raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.7099999785423279,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320310709","display_name":"CMC Microsystems","ror":"https://ror.org/03k70ea39"},{"id":"https://openalex.org/F4320334593","display_name":"Natural Sciences and Engineering Research Council of Canada","ror":"https://ror.org/01h531d29"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W1971702003","https://openalex.org/W2003491610","https://openalex.org/W2010800724","https://openalex.org/W2044096515","https://openalex.org/W2061374444","https://openalex.org/W2064936868","https://openalex.org/W2069508161","https://openalex.org/W2107890555","https://openalex.org/W2135064357"],"related_works":["https://openalex.org/W1450886466","https://openalex.org/W2063021415","https://openalex.org/W4240113637","https://openalex.org/W3026484128","https://openalex.org/W145213491","https://openalex.org/W2162658193","https://openalex.org/W4251203366","https://openalex.org/W2171438948","https://openalex.org/W2416587712","https://openalex.org/W2912807936"],"abstract_inverted_index":{"Design,":[0],"fabrication":[1,18],"and":[2,42,92],"characterization":[3],"of":[4,35,64,88,95,103,113],"a":[5,28,36,39,43,57,76],"piezoelectric":[6,44,58,90],"MEMS":[7],"vibration":[8,69],"sensor":[9,33,104,115],"intended":[10],"for":[11],"wide":[12],"bandwidth":[13],"applications":[14],"is":[15,20,27],"presented.":[16],"The":[17,32,82,98,109],"process":[19],"based":[21],"on":[22,78],"standard":[23],"PiezoMUMPS":[24],"process,":[25],"which":[26],"CMOS":[29],"compatible":[30],"process.":[31],"consists":[34],"proof":[37,80],"mass,":[38],"resilient":[40],"membrane":[41,73],"layer":[45,60,91],"as":[46,56],"the":[47,62,72,79,89,114],"sensing":[48,59],"element.":[49],"Aluminum":[50],"Nitride":[51],"(AlN)":[52],"has":[53],"been":[54],"implemented":[55],"with":[61],"thickness":[63],"only":[65],"500":[66],"nm.":[67],"Any":[68],"perpendicular":[70],"to":[71],"surface":[74],"prompts":[75],"force":[77,84],"mass.":[81],"induced":[83],"results":[85],"in":[86],"deformation":[87],"ultimately":[93],"generation":[94],"electric":[96],"charge.":[97],"first":[99],"mode":[100],"resonance":[101],"frequency":[102],"was":[105,116],"occurred":[106],"at":[107],"12KHz.":[108],"measured":[110],"voltage":[111],"sensitivity":[112],"46":[117],"mV/g.":[118]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2022,"cited_by_count":2},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":2}],"updated_date":"2026-06-26T08:34:08.712188","created_date":"2025-10-10T00:00:00"}