{"id":"https://openalex.org/W2014951979","doi":"https://doi.org/10.1109/icra.2014.6907621","title":"Calibration of scanning electron microscope using a multi-image non-linear minimization process","display_name":"Calibration of scanning electron microscope using a multi-image non-linear minimization process","publication_year":2014,"publication_date":"2014-05-01","ids":{"openalex":"https://openalex.org/W2014951979","doi":"https://doi.org/10.1109/icra.2014.6907621","mag":"2014951979"},"language":"en","primary_location":{"id":"doi:10.1109/icra.2014.6907621","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icra.2014.6907621","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 IEEE International Conference on Robotics and Automation (ICRA)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5051056303","display_name":"Le Cui","orcid":null},"institutions":[{"id":"https://openalex.org/I2802519937","display_name":"Institut de Recherche en Informatique et Syst\u00e8mes Al\u00e9atoires","ror":"https://ror.org/00myn0z94","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1326498283","https://openalex.org/I205703379","https://openalex.org/I2802204017","https://openalex.org/I2802519937","https://openalex.org/I28221208","https://openalex.org/I4210127572","https://openalex.org/I4210159245","https://openalex.org/I56067802"]}],"countries":["FR"],"is_corresponding":true,"raw_author_name":"Le Cui","raw_affiliation_strings":["Lagadic team, IRISA, Rennes, France","Visual servoing in robotics, computer vision, and augmented reality"],"affiliations":[{"raw_affiliation_string":"Lagadic team, IRISA, Rennes, France","institution_ids":["https://openalex.org/I2802519937"]},{"raw_affiliation_string":"Visual servoing in robotics, computer vision, and augmented reality","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5004362037","display_name":"\u00c9ric Marchand","orcid":"https://orcid.org/0000-0001-7096-5236"},"institutions":[{"id":"https://openalex.org/I2802519937","display_name":"Institut de Recherche en Informatique et Syst\u00e8mes Al\u00e9atoires","ror":"https://ror.org/00myn0z94","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I1326498283","https://openalex.org/I205703379","https://openalex.org/I2802204017","https://openalex.org/I2802519937","https://openalex.org/I28221208","https://openalex.org/I4210127572","https://openalex.org/I4210159245","https://openalex.org/I56067802"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Eric Marchand","raw_affiliation_strings":["Lagadic team, IRISA, Rennes, France","Visual servoing in robotics, computer vision, and augmented reality"],"affiliations":[{"raw_affiliation_string":"Lagadic team, IRISA, Rennes, France","institution_ids":["https://openalex.org/I2802519937"]},{"raw_affiliation_string":"Visual servoing in robotics, computer vision, and augmented reality","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5051056303"],"corresponding_institution_ids":["https://openalex.org/I2802519937"],"apc_list":null,"apc_paid":null,"fwci":1.7071,"has_fulltext":false,"cited_by_count":18,"citation_normalized_percentile":{"value":0.87154984,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":"36","issue":null,"first_page":"5191","last_page":"5196"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/calibration","display_name":"Calibration","score":0.7788292169570923},{"id":"https://openalex.org/keywords/minification","display_name":"Minification","score":0.6895216703414917},{"id":"https://openalex.org/keywords/position","display_name":"Position (finance)","score":0.6447350978851318},{"id":"https://openalex.org/keywords/projection","display_name":"Projection (relational algebra)","score":0.6055120229721069},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5837290287017822},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.5810277462005615},{"id":"https://openalex.org/keywords/computer-vision","display_name":"Computer vision","score":0.5144693851470947},{"id":"https://openalex.org/keywords/perspective","display_name":"Perspective (graphical)","score":0.5017414093017578},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.47055792808532715},{"id":"https://openalex.org/keywords/iterative-and-incremental-development","display_name":"Iterative and incremental development","score":0.4269997775554657},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.3712270259857178},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.25366634130477905},{"id":"https://openalex.org/keywords/statistics","display_name":"Statistics","score":0.07144159078598022}],"concepts":[{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.7788292169570923},{"id":"https://openalex.org/C147764199","wikidata":"https://www.wikidata.org/wiki/Q6865248","display_name":"Minification","level":2,"score":0.6895216703414917},{"id":"https://openalex.org/C198082294","wikidata":"https://www.wikidata.org/wiki/Q3399648","display_name":"Position (finance)","level":2,"score":0.6447350978851318},{"id":"https://openalex.org/C57493831","wikidata":"https://www.wikidata.org/wiki/Q3134666","display_name":"Projection (relational algebra)","level":2,"score":0.6055120229721069},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5837290287017822},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.5810277462005615},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.5144693851470947},{"id":"https://openalex.org/C12713177","wikidata":"https://www.wikidata.org/wiki/Q1900281","display_name":"Perspective (graphical)","level":2,"score":0.5017414093017578},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.47055792808532715},{"id":"https://openalex.org/C143587482","wikidata":"https://www.wikidata.org/wiki/Q1543216","display_name":"Iterative and incremental development","level":2,"score":0.4269997775554657},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.3712270259857178},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.25366634130477905},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.07144159078598022},{"id":"https://openalex.org/C115903868","wikidata":"https://www.wikidata.org/wiki/Q80993","display_name":"Software engineering","level":1,"score":0.0},{"id":"https://openalex.org/C10138342","wikidata":"https://www.wikidata.org/wiki/Q43015","display_name":"Finance","level":1,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icra.2014.6907621","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icra.2014.6907621","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 IEEE International Conference on Robotics and Automation (ICRA)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320320883","display_name":"Agence Nationale de la Recherche","ror":"https://ror.org/00rbzpz17"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":18,"referenced_works":["https://openalex.org/W297039922","https://openalex.org/W1984574775","https://openalex.org/W1998406145","https://openalex.org/W2051604583","https://openalex.org/W2082460896","https://openalex.org/W2096284826","https://openalex.org/W2098129520","https://openalex.org/W2105085370","https://openalex.org/W2108598000","https://openalex.org/W2112731915","https://openalex.org/W2124535811","https://openalex.org/W2140708027","https://openalex.org/W2167667767","https://openalex.org/W2182437840","https://openalex.org/W2920676148","https://openalex.org/W6686285539","https://openalex.org/W6760314816","https://openalex.org/W7015249783"],"related_works":["https://openalex.org/W2385118824","https://openalex.org/W2359476137","https://openalex.org/W2362165903","https://openalex.org/W2575294667","https://openalex.org/W2378962668","https://openalex.org/W2760239433","https://openalex.org/W2358910850","https://openalex.org/W3151522584","https://openalex.org/W2351452215","https://openalex.org/W1548456315"],"abstract_inverted_index":{"In":[0],"this":[1,70],"paper,":[2],"a":[3],"novel":[4],"approach":[5],"of":[6,41,59,80],"SEM":[7,17],"calibration":[8,18,49,60],"based":[9],"on":[10],"non-linear":[11,28],"minimization":[12],"process":[13],"is":[14],"presented.":[15],"The":[16,48,72],"for":[19],"the":[20,33,37,42,76,81],"intrinsic":[21],"parameters":[22],"are":[23,67],"achieved":[24,52],"by":[25,53],"an":[26],"iterative":[27],"optimization":[29],"algorithm":[30],"which":[31],"minimize":[32],"registration":[34],"error":[35],"between":[36],"current":[38],"estimated":[39],"position":[40],"pattern":[43],"and":[44,56,63,78],"its":[45],"observed":[46],"position.":[47],"can":[50],"be":[51],"one":[54],"image":[55],"multiple":[57],"images":[58],"pattern.":[61],"Perspective":[62],"parallel":[64],"projection":[65],"models":[66],"addressed":[68],"in":[69],"approach.":[71],"experimental":[73],"results":[74],"show":[75],"efficiency":[77],"accuracy":[79],"proposed":[82],"method.":[83]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}