{"id":"https://openalex.org/W2044006468","doi":"https://doi.org/10.1109/icra.2013.6630754","title":"Capillary self-alignment assisted hybrid robotic handling for ultra-thin die stacking","display_name":"Capillary self-alignment assisted hybrid robotic handling for ultra-thin die stacking","publication_year":2013,"publication_date":"2013-05-01","ids":{"openalex":"https://openalex.org/W2044006468","doi":"https://doi.org/10.1109/icra.2013.6630754","mag":"2044006468"},"language":"en","primary_location":{"id":"doi:10.1109/icra.2013.6630754","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icra.2013.6630754","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2013 IEEE International Conference on Robotics and Automation","raw_type":"proceedings-article"},"type":"preprint","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5009766877","display_name":"Ville Liimatainen","orcid":"https://orcid.org/0000-0002-0358-9805"},"institutions":[{"id":"https://openalex.org/I9927081","display_name":"Aalto University","ror":"https://ror.org/020hwjq30","country_code":"FI","type":"education","lineage":["https://openalex.org/I9927081"]}],"countries":["FI"],"is_corresponding":false,"raw_author_name":"Ville Liimatainen","raw_affiliation_strings":["School of Electrical Engineering, Department of Automation and Systems Technology, Aalto University, Espoo, Finland","[Department of Automation and Systems Technology, Aalto University, Espoo, Finland]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical Engineering, Department of Automation and Systems Technology, Aalto University, Espoo, Finland","institution_ids":["https://openalex.org/I9927081"]},{"raw_affiliation_string":"[Department of Automation and Systems Technology, Aalto University, Espoo, Finland]","institution_ids":["https://openalex.org/I9927081"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049318002","display_name":"Mohamed Kharboutly","orcid":null},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]},{"id":"https://openalex.org/I53262699","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et des Microtechniques","ror":"https://ror.org/05813w841","country_code":"FR","type":"education","lineage":["https://openalex.org/I53262699"]},{"id":"https://openalex.org/I927159995","display_name":"ASM International","ror":"https://ror.org/0244fmj21","country_code":"US","type":"other","lineage":["https://openalex.org/I927159995"]}],"countries":["FR","US"],"is_corresponding":false,"raw_author_name":"Mohamed Kharboutly","raw_affiliation_strings":["FEMTO-ST Institute, AS2M Department UMR, 6174-UFC, ENSMM, UTBM, Centre National de la Recherche Scientifique, Besancon, France","AS2M Department, FEMTO-ST Institute, Besan\u00e7on, France#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"FEMTO-ST Institute, AS2M Department UMR, 6174-UFC, ENSMM, UTBM, Centre National de la Recherche Scientifique, Besancon, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I53262699","https://openalex.org/I2802759292"]},{"raw_affiliation_string":"AS2M Department, FEMTO-ST Institute, Besan\u00e7on, France#TAB#","institution_ids":["https://openalex.org/I927159995"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000852860","display_name":"David Rostoucher","orcid":null},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]},{"id":"https://openalex.org/I53262699","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et des Microtechniques","ror":"https://ror.org/05813w841","country_code":"FR","type":"education","lineage":["https://openalex.org/I53262699"]},{"id":"https://openalex.org/I927159995","display_name":"ASM International","ror":"https://ror.org/0244fmj21","country_code":"US","type":"other","lineage":["https://openalex.org/I927159995"]}],"countries":["FR","US"],"is_corresponding":false,"raw_author_name":"David Rostoucher","raw_affiliation_strings":["FEMTO-ST Institute, AS2M Department UMR, 6174-UFC, ENSMM, UTBM, Centre National de la Recherche Scientifique, Besancon, France","AS2M Department, FEMTO-ST Institute, Besan\u00e7on, France#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"FEMTO-ST Institute, AS2M Department UMR, 6174-UFC, ENSMM, UTBM, Centre National de la Recherche Scientifique, Besancon, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I53262699","https://openalex.org/I2802759292"]},{"raw_affiliation_string":"AS2M Department, FEMTO-ST Institute, Besan\u00e7on, France#TAB#","institution_ids":["https://openalex.org/I927159995"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007495116","display_name":"Micha\u00ebl Gauthier","orcid":"https://orcid.org/0000-0002-7565-8443"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]},{"id":"https://openalex.org/I53262699","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et des Microtechniques","ror":"https://ror.org/05813w841","country_code":"FR","type":"education","lineage":["https://openalex.org/I53262699"]},{"id":"https://openalex.org/I927159995","display_name":"ASM International","ror":"https://ror.org/0244fmj21","country_code":"US","type":"other","lineage":["https://openalex.org/I927159995"]}],"countries":["FR","US"],"is_corresponding":false,"raw_author_name":"Michael Gauthier","raw_affiliation_strings":["FEMTO-ST Institute, AS2M Department UMR, 6174-UFC, ENSMM, UTBM, Centre National de la Recherche Scientifique, Besancon, France","AS2M Department, FEMTO-ST Institute, Besan\u00e7on, France#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"FEMTO-ST Institute, AS2M Department UMR, 6174-UFC, ENSMM, UTBM, Centre National de la Recherche Scientifique, Besancon, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I53262699","https://openalex.org/I2802759292"]},{"raw_affiliation_string":"AS2M Department, FEMTO-ST Institute, Besan\u00e7on, France#TAB#","institution_ids":["https://openalex.org/I927159995"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100356471","display_name":"Quan Zhou","orcid":"https://orcid.org/0000-0002-3819-3878"},"institutions":[{"id":"https://openalex.org/I9927081","display_name":"Aalto University","ror":"https://ror.org/020hwjq30","country_code":"FI","type":"education","lineage":["https://openalex.org/I9927081"]}],"countries":["FI"],"is_corresponding":false,"raw_author_name":"Quan Zhou","raw_affiliation_strings":["School of Electrical Engineering, Department of Automation and Systems Technology, Aalto University, Espoo, Finland","[Department of Automation and Systems Technology, Aalto University, Espoo, Finland]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical Engineering, Department of Automation and Systems Technology, Aalto University, Espoo, Finland","institution_ids":["https://openalex.org/I9927081"]},{"raw_affiliation_string":"[Department of Automation and Systems Technology, Aalto University, Espoo, Finland]","institution_ids":["https://openalex.org/I9927081"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":5,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":2.4882,"has_fulltext":false,"cited_by_count":9,"citation_normalized_percentile":{"value":0.88474873,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"1403","last_page":"1408"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12784","display_name":"Modular Robots and Swarm Intelligence","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12784","display_name":"Modular Robots and Swarm Intelligence","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11737","display_name":"Advanced Materials and Mechanics","score":0.9958999752998352,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10783","display_name":"Additive Manufacturing and 3D Printing Technologies","score":0.9918000102043152,"subfield":{"id":"https://openalex.org/subfields/2203","display_name":"Automotive Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/die","display_name":"Die (integrated circuit)","score":0.7869973182678223},{"id":"https://openalex.org/keywords/smt-placement-equipment","display_name":"SMT placement equipment","score":0.6688217520713806},{"id":"https://openalex.org/keywords/stacking","display_name":"Stacking","score":0.5869205594062805},{"id":"https://openalex.org/keywords/flexibility","display_name":"Flexibility (engineering)","score":0.4811617136001587},{"id":"https://openalex.org/keywords/robot","display_name":"Robot","score":0.48029419779777527},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.4463983178138733},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.4110935628414154},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.38422733545303345},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3625217080116272},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2733224034309387},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.26938608288764954},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.21589836478233337},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.08672270178794861}],"concepts":[{"id":"https://openalex.org/C111106434","wikidata":"https://www.wikidata.org/wiki/Q1072430","display_name":"Die (integrated circuit)","level":2,"score":0.7869973182678223},{"id":"https://openalex.org/C17511633","wikidata":"https://www.wikidata.org/wiki/Q830694","display_name":"SMT placement equipment","level":3,"score":0.6688217520713806},{"id":"https://openalex.org/C33347731","wikidata":"https://www.wikidata.org/wiki/Q285210","display_name":"Stacking","level":2,"score":0.5869205594062805},{"id":"https://openalex.org/C2780598303","wikidata":"https://www.wikidata.org/wiki/Q65921492","display_name":"Flexibility (engineering)","level":2,"score":0.4811617136001587},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.48029419779777527},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.4463983178138733},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.4110935628414154},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.38422733545303345},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3625217080116272},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2733224034309387},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.26938608288764954},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.21589836478233337},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08672270178794861},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C46141821","wikidata":"https://www.wikidata.org/wiki/Q209402","display_name":"Nuclear magnetic resonance","level":1,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icra.2013.6630754","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icra.2013.6630754","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2013 IEEE International Conference on Robotics and Automation","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.4699999988079071,"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W585119230","https://openalex.org/W1997218633","https://openalex.org/W2026923884","https://openalex.org/W2050051792","https://openalex.org/W2052565612","https://openalex.org/W2064070003","https://openalex.org/W2071458629","https://openalex.org/W2086019689","https://openalex.org/W2123971380","https://openalex.org/W2138757576","https://openalex.org/W2148476951","https://openalex.org/W2162325862"],"related_works":["https://openalex.org/W2035329725","https://openalex.org/W4376641153","https://openalex.org/W2070875936","https://openalex.org/W4250391473","https://openalex.org/W3045075405","https://openalex.org/W4302292679","https://openalex.org/W4241625287","https://openalex.org/W2050788868","https://openalex.org/W4295885776","https://openalex.org/W4391180485"],"abstract_inverted_index":{"Ultra-thin":[0,64],"dies":[1,65,86,102,109,122],"are":[2,69],"difficult":[3],"to":[4,106,141],"package":[5],"because":[6],"of":[7,36,51,73,97,100,120],"their":[8],"fragility":[9],"and":[10,25,58,138],"flexibility.":[11],"Current":[12],"ultra-thin":[13,38,84,108,121,142],"die":[14,143],"integration":[15,119],"technology":[16],"for":[17,33],"3D":[18],"microsystems":[19],"relies":[20],"on":[21],"robotic":[22,52,136],"pick-and-place":[23,53],"machines":[24],"machine":[26,91],"vision,":[27],"which":[28],"has":[29],"rather":[30],"limited":[31],"throughput":[32,125],"high-accuracy":[34],"assembly":[35,47,75],"fragile":[37],"dies.":[39],"In":[40],"this":[41],"paper,":[42],"we":[43,81],"report":[44],"a":[45,55],"hybrid":[46],"strategy":[48],"that":[49,80,117],"consists":[50],"using":[54],"vacuum":[56],"micro-gripper,":[57],"droplet":[59,139],"self-alignment":[60,140],"by":[61,133],"capillary":[62],"force.":[63],"with":[66,87,123],"breakable":[67],"links":[68],"chosen":[70],"as":[71],"part":[72],"the":[74,127],"strategy.":[76],"Experimental":[77],"results":[78,115],"show":[79,116],"can":[82],"align":[83],"(10\u03bcm)":[85],"sub-micron":[88],"accuracy":[89],"without":[90],"vision.":[92],"A":[93],"fully":[94],"automatic":[95],"sequence":[96],"stacking":[98],"several":[99],"these":[101],"is":[103,131],"demonstrated.":[104],"Up":[105],"12":[107],"have":[110],"been":[111],"stacked.":[112],"These":[113],"early":[114],"die-to-die":[118],"higher":[124],"than":[126],"current":[128],"industry":[129],"robot":[130],"possible":[132],"applying":[134],"both":[135],"handling":[137],"assembly.":[144]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2020,"cited_by_count":2},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":2}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}