{"id":"https://openalex.org/W2937817908","doi":"https://doi.org/10.1109/icphm.2019.8819404","title":"Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning","display_name":"Predicting Time-to-Failure of Plasma Etching Equipment using Machine Learning","publication_year":2019,"publication_date":"2019-06-01","ids":{"openalex":"https://openalex.org/W2937817908","doi":"https://doi.org/10.1109/icphm.2019.8819404","mag":"2937817908"},"language":"en","primary_location":{"id":"doi:10.1109/icphm.2019.8819404","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icphm.2019.8819404","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE International Conference on Prognostics and Health Management (ICPHM)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["arxiv","crossref","datacite"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://arxiv.org/pdf/1904.07686","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5010149819","display_name":"Anahid Jalali","orcid":"https://orcid.org/0000-0002-8889-0735"},"institutions":[{"id":"https://openalex.org/I132118926","display_name":"Austrian Institute of Technology","ror":"https://ror.org/04knbh022","country_code":"AT","type":"facility","lineage":["https://openalex.org/I132118926"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"Anahid Jalali","raw_affiliation_strings":["Austrian Institute of Technology, Vienna, Austria","[Austrian Institute of Technology, Vienna, Austria]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Austrian Institute of Technology, Vienna, Austria","institution_ids":["https://openalex.org/I132118926"]},{"raw_affiliation_string":"[Austrian Institute of Technology, Vienna, Austria]","institution_ids":["https://openalex.org/I132118926"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113181632","display_name":"Clemens Heistracher","orcid":null},"institutions":[{"id":"https://openalex.org/I132118926","display_name":"Austrian Institute of Technology","ror":"https://ror.org/04knbh022","country_code":"AT","type":"facility","lineage":["https://openalex.org/I132118926"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"Clemens Heistracher","raw_affiliation_strings":["Austrian Institute of Technology, Vienna, Austria","[Austrian Institute of Technology, Vienna, Austria]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Austrian Institute of Technology, Vienna, Austria","institution_ids":["https://openalex.org/I132118926"]},{"raw_affiliation_string":"[Austrian Institute of Technology, Vienna, Austria]","institution_ids":["https://openalex.org/I132118926"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102746568","display_name":"Alexander Schindler","orcid":"https://orcid.org/0000-0001-6058-7753"},"institutions":[{"id":"https://openalex.org/I132118926","display_name":"Austrian Institute of Technology","ror":"https://ror.org/04knbh022","country_code":"AT","type":"facility","lineage":["https://openalex.org/I132118926"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"Alexander Schindler","raw_affiliation_strings":["Austrian Institute of Technology, Vienna, Austria","[Austrian Institute of Technology, Vienna, Austria]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Austrian Institute of Technology, Vienna, Austria","institution_ids":["https://openalex.org/I132118926"]},{"raw_affiliation_string":"[Austrian Institute of Technology, Vienna, Austria]","institution_ids":["https://openalex.org/I132118926"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078932059","display_name":"Bernhard Haslhofer","orcid":"https://orcid.org/0000-0002-0415-4491"},"institutions":[{"id":"https://openalex.org/I132118926","display_name":"Austrian Institute of Technology","ror":"https://ror.org/04knbh022","country_code":"AT","type":"facility","lineage":["https://openalex.org/I132118926"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"Bernhard Haslhofer","raw_affiliation_strings":["Austrian Institute of Technology, Vienna, Austria","[Austrian Institute of Technology, Vienna, Austria]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Austrian Institute of Technology, Vienna, Austria","institution_ids":["https://openalex.org/I132118926"]},{"raw_affiliation_string":"[Austrian Institute of Technology, Vienna, Austria]","institution_ids":["https://openalex.org/I132118926"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029594731","display_name":"Tanja Nemeth","orcid":null},"institutions":[{"id":"https://openalex.org/I4210125165","display_name":"Fraunhofer Austria","ror":"https://ror.org/038bzrc91","country_code":"AT","type":"nonprofit","lineage":["https://openalex.org/I4210125165","https://openalex.org/I4923324"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"Tanja Nemeth","raw_affiliation_strings":["Fraunhofer Austria, Vienna, Austria"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Austria, Vienna, Austria","institution_ids":["https://openalex.org/I4210125165"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110625768","display_name":"Robert Glawar","orcid":null},"institutions":[{"id":"https://openalex.org/I4210125165","display_name":"Fraunhofer Austria","ror":"https://ror.org/038bzrc91","country_code":"AT","type":"nonprofit","lineage":["https://openalex.org/I4210125165","https://openalex.org/I4923324"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"Robert Glawar","raw_affiliation_strings":["Fraunhofer Austria, Vienna, Austria"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Austria, Vienna, Austria","institution_ids":["https://openalex.org/I4210125165"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022367509","display_name":"Wilfried Sihn","orcid":null},"institutions":[{"id":"https://openalex.org/I4210125165","display_name":"Fraunhofer Austria","ror":"https://ror.org/038bzrc91","country_code":"AT","type":"nonprofit","lineage":["https://openalex.org/I4210125165","https://openalex.org/I4923324"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"Wilfried Sihn","raw_affiliation_strings":["Fraunhofer Austria, Vienna, Austria"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Fraunhofer Austria, Vienna, Austria","institution_ids":["https://openalex.org/I4210125165"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111967528","display_name":"Peter de Boer","orcid":null},"institutions":[{"id":"https://openalex.org/I4210131793","display_name":"Infineon Technologies (Austria)","ror":"https://ror.org/03msng824","country_code":"AT","type":"company","lineage":["https://openalex.org/I137594350","https://openalex.org/I4210131793"]}],"countries":["AT"],"is_corresponding":false,"raw_author_name":"Peter De Boer","raw_affiliation_strings":["Infineon Technologies Austria AG, Villach, Austria","Infineon Technologies Austria AG,Villach,Austria"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Infineon Technologies Austria AG, Villach, Austria","institution_ids":["https://openalex.org/I4210131793"]},{"raw_affiliation_string":"Infineon Technologies Austria AG,Villach,Austria","institution_ids":["https://openalex.org/I4210131793"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.1346,"has_fulltext":true,"cited_by_count":3,"citation_normalized_percentile":{"value":0.72125648,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"8"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10780","display_name":"Reliability and Maintenance Optimization","score":0.9876999855041504,"subfield":{"id":"https://openalex.org/subfields/2213","display_name":"Safety, Risk, Reliability and Quality"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10780","display_name":"Reliability and Maintenance Optimization","score":0.9876999855041504,"subfield":{"id":"https://openalex.org/subfields/2213","display_name":"Safety, Risk, Reliability and Quality"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9799000024795532,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12423","display_name":"Software Reliability and Analysis Research","score":0.9380999803543091,"subfield":{"id":"https://openalex.org/subfields/1712","display_name":"Software"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/machine-learning","display_name":"Machine learning","score":0.6794159412384033},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6054122447967529},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.5849173069000244},{"id":"https://openalex.org/keywords/plasma-etching","display_name":"Plasma etching","score":0.5700010657310486},{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.5334487557411194},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.5041877031326294},{"id":"https://openalex.org/keywords/reliability-engineering","display_name":"Reliability engineering","score":0.3796193599700928},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.21607956290245056},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.1407129168510437},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.12684661149978638},{"id":"https://openalex.org/keywords/operating-system","display_name":"Operating system","score":0.08477762341499329}],"concepts":[{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.6794159412384033},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6054122447967529},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.5849173069000244},{"id":"https://openalex.org/C107187091","wikidata":"https://www.wikidata.org/wiki/Q2392011","display_name":"Plasma etching","level":4,"score":0.5700010657310486},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.5334487557411194},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.5041877031326294},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.3796193599700928},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.21607956290245056},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.1407129168510437},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.12684661149978638},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.08477762341499329},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.1109/icphm.2019.8819404","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icphm.2019.8819404","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 IEEE International Conference on Prognostics and Health Management (ICPHM)","raw_type":"proceedings-article"},{"id":"pmh:oai:arXiv.org:1904.07686","is_oa":true,"landing_page_url":"http://arxiv.org/abs/1904.07686","pdf_url":"https://arxiv.org/pdf/1904.07686","source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"text"},{"id":"mag:2937817908","is_oa":true,"landing_page_url":"https://arxiv.org/pdf/1904.07686","pdf_url":null,"source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"arXiv (Cornell University)","raw_type":null},{"id":"doi:10.48550/arxiv.1904.07686","is_oa":true,"landing_page_url":"https://doi.org/10.48550/arxiv.1904.07686","pdf_url":null,"source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":null,"is_accepted":false,"is_published":null,"raw_source_name":null,"raw_type":"Preprint"}],"best_oa_location":{"id":"pmh:oai:arXiv.org:1904.07686","is_oa":true,"landing_page_url":"http://arxiv.org/abs/1904.07686","pdf_url":"https://arxiv.org/pdf/1904.07686","source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"text"},"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9","score":0.44999998807907104}],"awards":[],"funders":[{"id":"https://openalex.org/F4320323031","display_name":"\u00d6sterreichische Forschungsf\u00f6rderungsgesellschaft","ror":"https://ror.org/028jc0449"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2937817908.pdf","grobid_xml":"https://content.openalex.org/works/W2937817908.grobid-xml"},"referenced_works_count":22,"referenced_works":["https://openalex.org/W46659105","https://openalex.org/W1559451814","https://openalex.org/W1575628899","https://openalex.org/W1628954589","https://openalex.org/W1969150846","https://openalex.org/W1999393241","https://openalex.org/W2002352409","https://openalex.org/W2026282679","https://openalex.org/W2028695918","https://openalex.org/W2038012452","https://openalex.org/W2095278535","https://openalex.org/W2127918592","https://openalex.org/W2163605009","https://openalex.org/W2314270270","https://openalex.org/W2475096048","https://openalex.org/W2591055632","https://openalex.org/W2795280371","https://openalex.org/W4255500610","https://openalex.org/W6602002561","https://openalex.org/W6642324735","https://openalex.org/W6675354045","https://openalex.org/W6687566353"],"related_works":["https://openalex.org/W2970655765","https://openalex.org/W2600283457","https://openalex.org/W2512344339","https://openalex.org/W3133468499","https://openalex.org/W1969020285","https://openalex.org/W3205263124","https://openalex.org/W3011926870","https://openalex.org/W2919567172","https://openalex.org/W2908218695","https://openalex.org/W3128690092","https://openalex.org/W3167276134","https://openalex.org/W3210022641","https://openalex.org/W2344695726","https://openalex.org/W2155430293","https://openalex.org/W152354284","https://openalex.org/W3115104792","https://openalex.org/W2786121524","https://openalex.org/W2791194697","https://openalex.org/W2192713181","https://openalex.org/W2175379971"],"abstract_inverted_index":{"Predicting":[0],"unscheduled":[1],"breakdowns":[2],"of":[3,87],"plasma":[4,19,120],"etching":[5,20,121],"equipment":[6,33,122],"can":[7,68,98],"reduce":[8],"maintenance":[9,123],"costs":[10],"and":[11,25,35,82,125],"production":[12],"losses":[13],"in":[14,37,104],"the":[15],"semiconductor":[16],"industry.":[17],"However,":[18],"is":[21,27],"a":[22,38,114],"complex":[23],"procedure":[24],"it":[26],"hard":[28],"to":[29,117],"capture":[30],"all":[31,105],"relevant":[32,54],"properties":[34],"behaviors":[36],"single":[39],"physical":[40],"model.":[41],"Machine":[42],"learning":[43,65,96,112],"offers":[44,113],"an":[45,88],"alternative":[46,116],"for":[47,71],"predicting":[48,75,79,84],"upcoming":[49],"machine":[50,64,95,111],"failures":[51],"based":[52],"on":[53],"data":[55],"points.":[56],"In":[57],"this":[58],"paper,":[59],"we":[60],"describe":[61],"three":[62,106],"different":[63],"tasks":[66],"that":[67,72,93,110],"be":[69],"used":[70],"purpose:":[73],"(i)":[74],"Time-To-Failure":[76],"(TTF),":[77],"(ii)":[78],"health":[80],"state,":[81],"(iii)":[83],"TTF":[85],"intervals":[86],"equipment.":[89],"Our":[90],"results":[91],"show":[92],"trained":[94],"models":[97],"outperform":[99],"benchmarks":[100],"resembling":[101],"human":[102],"judgments":[103],"tasks.":[107],"This":[108],"suggest":[109],"viable":[115],"currently":[118],"deployed":[119],"strategies":[124],"decision":[126],"making":[127],"processes.":[128]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2020,"cited_by_count":2}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}