{"id":"https://openalex.org/W2484813467","doi":"https://doi.org/10.1109/icosc.2016.7507067","title":"Regularized regression models to predict the product quality in multistep manufacturing","display_name":"Regularized regression models to predict the product quality in multistep manufacturing","publication_year":2016,"publication_date":"2016-05-01","ids":{"openalex":"https://openalex.org/W2484813467","doi":"https://doi.org/10.1109/icosc.2016.7507067","mag":"2484813467"},"language":"en","primary_location":{"id":"doi:10.1109/icosc.2016.7507067","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icosc.2016.7507067","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 5th International Conference on Systems and Control (ICSC)","raw_type":"proceedings-article"},"type":"preprint","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5016282141","display_name":"Mariam Melhem","orcid":null},"institutions":[{"id":"https://openalex.org/I21491767","display_name":"Aix-Marseille Universit\u00e9","ror":"https://ror.org/035xkbk20","country_code":"FR","type":"education","lineage":["https://openalex.org/I21491767"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Mariam Melhem","raw_affiliation_strings":["CNRS, Aix Marseille University, Marseille"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNRS, Aix Marseille University, Marseille","institution_ids":["https://openalex.org/I21491767"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012269990","display_name":"Bouchra Ananou","orcid":null},"institutions":[{"id":"https://openalex.org/I21491767","display_name":"Aix-Marseille Universit\u00e9","ror":"https://ror.org/035xkbk20","country_code":"FR","type":"education","lineage":["https://openalex.org/I21491767"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Bouchra Ananou","raw_affiliation_strings":["CNRS, Aix Marseille University, Marseille"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNRS, Aix Marseille University, Marseille","institution_ids":["https://openalex.org/I21491767"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110160381","display_name":"Mustapha Ouladsine","orcid":null},"institutions":[{"id":"https://openalex.org/I21491767","display_name":"Aix-Marseille Universit\u00e9","ror":"https://ror.org/035xkbk20","country_code":"FR","type":"education","lineage":["https://openalex.org/I21491767"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Mustapha Ouladsine","raw_affiliation_strings":["CNRS, Aix Marseille University, Marseille"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CNRS, Aix Marseille University, Marseille","institution_ids":["https://openalex.org/I21491767"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5011705857","display_name":"Jacques Pinaton","orcid":null},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Jacques Pinaton","raw_affiliation_strings":["ST-microelectronics, Rousset, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ST-microelectronics, Rousset, France","institution_ids":["https://openalex.org/I4210104693"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.4247,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.69949135,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"31","last_page":"36"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11443","display_name":"Advanced Statistical Process Monitoring","score":0.9968000054359436,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},{"id":"https://openalex.org/T12282","display_name":"Mineral Processing and Grinding","score":0.98580002784729,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/quality","display_name":"Quality (philosophy)","score":0.6722335815429688},{"id":"https://openalex.org/keywords/product","display_name":"Product (mathematics)","score":0.5936253666877747},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5722265243530273},{"id":"https://openalex.org/keywords/multivariate-statistics","display_name":"Multivariate statistics","score":0.5332479476928711},{"id":"https://openalex.org/keywords/wafer-fabrication","display_name":"Wafer fabrication","score":0.5323624610900879},{"id":"https://openalex.org/keywords/regression-analysis","display_name":"Regression analysis","score":0.5022180080413818},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.4717434346675873},{"id":"https://openalex.org/keywords/statistical-process-control","display_name":"Statistical process control","score":0.4631013572216034},{"id":"https://openalex.org/keywords/regression","display_name":"Regression","score":0.42925670742988586},{"id":"https://openalex.org/keywords/data-mining","display_name":"Data mining","score":0.4241105616092682},{"id":"https://openalex.org/keywords/reliability-engineering","display_name":"Reliability engineering","score":0.42256516218185425},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.4186203181743622},{"id":"https://openalex.org/keywords/linear-regression","display_name":"Linear regression","score":0.416015625},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.38016706705093384},{"id":"https://openalex.org/keywords/manufacturing-engineering","display_name":"Manufacturing engineering","score":0.3505989909172058},{"id":"https://openalex.org/keywords/statistics","display_name":"Statistics","score":0.30263397097587585},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.24624332785606384},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.17649269104003906},{"id":"https://openalex.org/keywords/machine-learning","display_name":"Machine learning","score":0.17193156480789185}],"concepts":[{"id":"https://openalex.org/C2779530757","wikidata":"https://www.wikidata.org/wiki/Q1207505","display_name":"Quality (philosophy)","level":2,"score":0.6722335815429688},{"id":"https://openalex.org/C90673727","wikidata":"https://www.wikidata.org/wiki/Q901718","display_name":"Product (mathematics)","level":2,"score":0.5936253666877747},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5722265243530273},{"id":"https://openalex.org/C161584116","wikidata":"https://www.wikidata.org/wiki/Q1952580","display_name":"Multivariate statistics","level":2,"score":0.5332479476928711},{"id":"https://openalex.org/C35750839","wikidata":"https://www.wikidata.org/wiki/Q7959421","display_name":"Wafer fabrication","level":3,"score":0.5323624610900879},{"id":"https://openalex.org/C152877465","wikidata":"https://www.wikidata.org/wiki/Q208042","display_name":"Regression analysis","level":2,"score":0.5022180080413818},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.4717434346675873},{"id":"https://openalex.org/C113644684","wikidata":"https://www.wikidata.org/wiki/Q1356717","display_name":"Statistical process control","level":3,"score":0.4631013572216034},{"id":"https://openalex.org/C83546350","wikidata":"https://www.wikidata.org/wiki/Q1139051","display_name":"Regression","level":2,"score":0.42925670742988586},{"id":"https://openalex.org/C124101348","wikidata":"https://www.wikidata.org/wiki/Q172491","display_name":"Data mining","level":1,"score":0.4241105616092682},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.42256516218185425},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.4186203181743622},{"id":"https://openalex.org/C48921125","wikidata":"https://www.wikidata.org/wiki/Q10861030","display_name":"Linear regression","level":2,"score":0.416015625},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.38016706705093384},{"id":"https://openalex.org/C117671659","wikidata":"https://www.wikidata.org/wiki/Q11049265","display_name":"Manufacturing engineering","level":1,"score":0.3505989909172058},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.30263397097587585},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.24624332785606384},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.17649269104003906},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.17193156480789185},{"id":"https://openalex.org/C111472728","wikidata":"https://www.wikidata.org/wiki/Q9471","display_name":"Epistemology","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icosc.2016.7507067","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icosc.2016.7507067","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 5th International Conference on Systems and Control (ICSC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.41999998688697815,"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W604429516","https://openalex.org/W2000728417","https://openalex.org/W2027330308","https://openalex.org/W2091629725","https://openalex.org/W2100404025","https://openalex.org/W2115202981","https://openalex.org/W2127861000","https://openalex.org/W2135046866","https://openalex.org/W2155614680","https://openalex.org/W2156495583","https://openalex.org/W2964264782","https://openalex.org/W4229930971","https://openalex.org/W4246432872","https://openalex.org/W4255455317","https://openalex.org/W6765966688"],"related_works":["https://openalex.org/W2170726572","https://openalex.org/W2146435486","https://openalex.org/W2006086900","https://openalex.org/W1483119123","https://openalex.org/W2377558694","https://openalex.org/W2992897358","https://openalex.org/W2394172622","https://openalex.org/W1594978932","https://openalex.org/W2083418455","https://openalex.org/W2148670835"],"abstract_inverted_index":{"Nowadays,":[0],"the":[1,16,26,38,45,50,55,75,80,85,94,111,117],"semiconductor":[2],"manufacturing":[3],"process":[4],"is":[5,22,104],"becoming":[6],"very":[7,59],"complex,":[8],"consisting":[9],"of":[10,12,79],"hundreds":[11],"steps":[13],"before":[14],"obtaining":[15],"final":[17],"product.":[18],"Continuous":[19],"Yield":[20],"improvement":[21],"required":[23],"to":[24,68,106],"meet":[25],"current":[27],"competitive":[28],"market":[29],"needs.":[30],"High":[31],"yield":[32],"can":[33],"be":[34],"achieved":[35],"by":[36,72],"monitoring":[37],"wafer":[39],"quality":[40,52,57,71,91,114],"in":[41],"real":[42],"time":[43],"throughout":[44],"auto-correlated":[46],"multivariate":[47],"process.":[48],"However,":[49],"missing":[51],"measurements":[53,78,92,115],"make":[54],"product":[56,70,90,113],"control":[58],"difficult.":[60],"In":[61],"this":[62,98],"paper,":[63],"we":[64],"present":[65],"an":[66],"approach":[67],"predict":[69],"using":[73],"both":[74],"available":[76],"on-line":[77],"production":[81],"equipment":[82],"data":[83],"and":[84,116],"information":[86],"about":[87],"correlations":[88],"between":[89,110],"across":[93],"different":[95],"steps.":[96],"For":[97],"purpose,":[99],"a":[100],"regularized":[101],"regression":[102],"technique":[103],"used":[105],"represent":[107],"statistical":[108],"relationships":[109],"correlated":[112],"high-dimensional":[118],"sensor":[119],"data.":[120]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":2},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2019,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}