{"id":"https://openalex.org/W4404849772","doi":"https://doi.org/10.1109/icnsc62968.2024.10760109","title":"Scheduling of Multi-Finger-Robotic Cluster Tools with Multi-Space Process Modules","display_name":"Scheduling of Multi-Finger-Robotic Cluster Tools with Multi-Space Process Modules","publication_year":2024,"publication_date":"2024-10-18","ids":{"openalex":"https://openalex.org/W4404849772","doi":"https://doi.org/10.1109/icnsc62968.2024.10760109"},"language":"en","primary_location":{"id":"doi:10.1109/icnsc62968.2024.10760109","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icnsc62968.2024.10760109","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 International Conference on Networking, Sensing and Control (ICNSC)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100729052","display_name":"Lei Gu","orcid":"https://orcid.org/0000-0002-3846-1617"},"institutions":[{"id":"https://openalex.org/I111950717","display_name":"Macau University of Science and Technology","ror":"https://ror.org/03jqs2n27","country_code":"MO","type":"education","lineage":["https://openalex.org/I111950717","https://openalex.org/I4391767947"]}],"countries":["MO"],"is_corresponding":false,"raw_author_name":"Lei Gu","raw_affiliation_strings":["Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology,Macao,China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology,Macao,China","institution_ids":["https://openalex.org/I111950717"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5090664309","display_name":"Naiqi Wu","orcid":"https://orcid.org/0000-0001-6782-458X"},"institutions":[{"id":"https://openalex.org/I111950717","display_name":"Macau University of Science and Technology","ror":"https://ror.org/03jqs2n27","country_code":"MO","type":"education","lineage":["https://openalex.org/I111950717","https://openalex.org/I4391767947"]}],"countries":["MO"],"is_corresponding":false,"raw_author_name":"NaiQi Wu","raw_affiliation_strings":["Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology,Macao,China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology,Macao,China","institution_ids":["https://openalex.org/I111950717"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044196048","display_name":"Yan Qiao","orcid":"https://orcid.org/0000-0001-5162-0224"},"institutions":[{"id":"https://openalex.org/I111950717","display_name":"Macau University of Science and Technology","ror":"https://ror.org/03jqs2n27","country_code":"MO","type":"education","lineage":["https://openalex.org/I111950717","https://openalex.org/I4391767947"]}],"countries":["MO"],"is_corresponding":false,"raw_author_name":"Yan Qiao","raw_affiliation_strings":["Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology,Macao,China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology,Macao,China","institution_ids":["https://openalex.org/I111950717"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100633928","display_name":"Siwei Zhang","orcid":"https://orcid.org/0000-0001-7554-4369"},"institutions":[{"id":"https://openalex.org/I111950717","display_name":"Macau University of Science and Technology","ror":"https://ror.org/03jqs2n27","country_code":"MO","type":"education","lineage":["https://openalex.org/I111950717","https://openalex.org/I4391767947"]}],"countries":["MO"],"is_corresponding":false,"raw_author_name":"SiWei Zhang","raw_affiliation_strings":["Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology,Macao,China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Systems Engineering and Collaborative Laboratory for Intelligent Science and Systems, Macau University of Science and Technology,Macao,China","institution_ids":["https://openalex.org/I111950717"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I111950717"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"6"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11814","display_name":"Advanced Manufacturing and Logistics Optimization","score":0.9876999855041504,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11814","display_name":"Advanced Manufacturing and Logistics Optimization","score":0.9876999855041504,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9836000204086304,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11159","display_name":"Manufacturing Process and Optimization","score":0.9537000060081482,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.7505451440811157},{"id":"https://openalex.org/keywords/scheduling","display_name":"Scheduling (production processes)","score":0.5587354302406311},{"id":"https://openalex.org/keywords/cluster","display_name":"Cluster (spacecraft)","score":0.43793806433677673},{"id":"https://openalex.org/keywords/distributed-computing","display_name":"Distributed computing","score":0.4278967082500458},{"id":"https://openalex.org/keywords/computer-network","display_name":"Computer network","score":0.14909759163856506},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.13382822275161743}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.7505451440811157},{"id":"https://openalex.org/C206729178","wikidata":"https://www.wikidata.org/wiki/Q2271896","display_name":"Scheduling (production processes)","level":2,"score":0.5587354302406311},{"id":"https://openalex.org/C164866538","wikidata":"https://www.wikidata.org/wiki/Q367351","display_name":"Cluster (spacecraft)","level":2,"score":0.43793806433677673},{"id":"https://openalex.org/C120314980","wikidata":"https://www.wikidata.org/wiki/Q180634","display_name":"Distributed computing","level":1,"score":0.4278967082500458},{"id":"https://openalex.org/C31258907","wikidata":"https://www.wikidata.org/wiki/Q1301371","display_name":"Computer network","level":1,"score":0.14909759163856506},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.13382822275161743},{"id":"https://openalex.org/C21547014","wikidata":"https://www.wikidata.org/wiki/Q1423657","display_name":"Operations management","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icnsc62968.2024.10760109","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icnsc62968.2024.10760109","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 International Conference on Networking, Sensing and Control (ICNSC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2899084033","https://openalex.org/W2748952813","https://openalex.org/W2390279801","https://openalex.org/W4391913857","https://openalex.org/W2358668433","https://openalex.org/W4396701345","https://openalex.org/W2376932109","https://openalex.org/W2001405890","https://openalex.org/W4396696052"],"abstract_inverted_index":{"Robotic":[0],"cluster":[1,39,53],"tools":[2,40,54],"have":[3],"been":[4],"applied":[5],"for":[6],"wafer":[7],"fabrication.":[8],"To":[9],"improve":[10],"the":[11,21,30,48,71,86,102,106,119,125],"productivity":[12],"of":[13,23,51,74,85,89,105,127],"such":[14,75,90],"a":[15,26,33,59,76,91,128],"tool,":[16,107],"one":[17],"method":[18],"involves":[19],"increasing":[20],"number":[22],"spaces":[24],"within":[25],"process":[27,43,57],"module":[28],"and":[29],"fingers":[31],"on":[32,101],"robot":[34,96,132],"arm,":[35],"leading":[36],"to":[37,113,117],"multi-finger-robotic":[38],"with":[41,55],"multi-space":[42],"modules.":[44],"This":[45,80],"study":[46,81],"addresses":[47],"scheduling":[49,72],"issue":[50,73],"four-finger-robotic":[52],"four-space":[56],"modules,":[58],"commonly":[60],"seen":[61],"configuration":[62],"in":[63],"modern":[64],"semiconductor":[65],"fabs.":[66],"Residency":[67],"time":[68],"constraints":[69],"make":[70],"tool":[77,92,129],"more":[78],"challenging.":[79],"conducts":[82],"an":[83],"analysis":[84],"steady-state":[87],"operations":[88],"under":[93,130],"two":[94,108],"presented":[95],"task":[97,133],"sequences.":[98],"Then,":[99],"based":[100],"temporal":[103],"properties":[104],"linear":[109],"programs":[110],"are":[111],"developed":[112],"find":[114],"feasible":[115],"schedules":[116],"minimize":[118],"system":[120],"cycle":[121],"time.":[122],"Experiments":[123],"show":[124],"performance":[126],"different":[131,137],"sequences":[134],"by":[135],"considering":[136],"parameters.":[138]},"counts_by_year":[],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}