{"id":"https://openalex.org/W4315777746","doi":"https://doi.org/10.1109/icnsc55942.2022.10004192","title":"Scheduling of single-arm cluster tools mixedly processing two kinds of wafers","display_name":"Scheduling of single-arm cluster tools mixedly processing two kinds of wafers","publication_year":2022,"publication_date":"2022-12-15","ids":{"openalex":"https://openalex.org/W4315777746","doi":"https://doi.org/10.1109/icnsc55942.2022.10004192"},"language":"en","primary_location":{"id":"doi:10.1109/icnsc55942.2022.10004192","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/icnsc55942.2022.10004192","pdf_url":null,"source":{"id":"https://openalex.org/S4363608241","display_name":"2022 IEEE International Conference on Networking, Sensing and Control (ICNSC)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE International Conference on Networking, Sensing and Control (ICNSC)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5010066597","display_name":"Tingting Leng","orcid":null},"institutions":[{"id":"https://openalex.org/I55538621","display_name":"China Jiliang University","ror":"https://ror.org/05v1y0t93","country_code":"CN","type":"education","lineage":["https://openalex.org/I55538621"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tingting Leng","raw_affiliation_strings":["China Jiliang University,Department of Applied Mathematics,Hangzhou,P. R. China","Department of Applied Mathematics, China Jiliang University, Hangzhou, P. R. China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"China Jiliang University,Department of Applied Mathematics,Hangzhou,P. R. China","institution_ids":["https://openalex.org/I55538621"]},{"raw_affiliation_string":"Department of Applied Mathematics, China Jiliang University, Hangzhou, P. R. China","institution_ids":["https://openalex.org/I55538621"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5083829548","display_name":"Jufeng Wang","orcid":"https://orcid.org/0000-0002-0900-3174"},"institutions":[{"id":"https://openalex.org/I55538621","display_name":"China Jiliang University","ror":"https://ror.org/05v1y0t93","country_code":"CN","type":"education","lineage":["https://openalex.org/I55538621"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jufeng Wang","raw_affiliation_strings":["College of Science, China Jiliang University,Hangzhou,P. R. China","College of Science, China Jiliang University, Hangzhou, P. R. China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Science, China Jiliang University,Hangzhou,P. R. China","institution_ids":["https://openalex.org/I55538621"]},{"raw_affiliation_string":"College of Science, China Jiliang University, Hangzhou, P. R. China","institution_ids":["https://openalex.org/I55538621"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100631269","display_name":"Chunfeng Liu","orcid":"https://orcid.org/0000-0003-1792-1714"},"institutions":[{"id":"https://openalex.org/I50760025","display_name":"Hangzhou Dianzi University","ror":"https://ror.org/0576gt767","country_code":"CN","type":"education","lineage":["https://openalex.org/I50760025"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chunfeng Liu","raw_affiliation_strings":["School of Management Hangzhou Dianzi University,Hangzhou,P. R. China","School of Management Hangzhou Dianzi University, Hangzhou, P. R. China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Management Hangzhou Dianzi University,Hangzhou,P. R. China","institution_ids":["https://openalex.org/I50760025"]},{"raw_affiliation_string":"School of Management Hangzhou Dianzi University, Hangzhou, P. R. China","institution_ids":["https://openalex.org/I50760025"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.31251351,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"33","issue":null,"first_page":"1","last_page":"6"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11814","display_name":"Advanced Manufacturing and Logistics Optimization","score":0.9973999857902527,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12288","display_name":"Optimization and Search Problems","score":0.9950000047683716,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.7593425512313843},{"id":"https://openalex.org/keywords/scheduling","display_name":"Scheduling (production processes)","score":0.6774641871452332},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.6118332147598267},{"id":"https://openalex.org/keywords/distributed-computing","display_name":"Distributed computing","score":0.4836886525154114},{"id":"https://openalex.org/keywords/cluster","display_name":"Cluster (spacecraft)","score":0.4306018352508545},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.36961880326271057},{"id":"https://openalex.org/keywords/operating-system","display_name":"Operating system","score":0.2291746735572815},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.11510276794433594}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.7593425512313843},{"id":"https://openalex.org/C206729178","wikidata":"https://www.wikidata.org/wiki/Q2271896","display_name":"Scheduling (production processes)","level":2,"score":0.6774641871452332},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6118332147598267},{"id":"https://openalex.org/C120314980","wikidata":"https://www.wikidata.org/wiki/Q180634","display_name":"Distributed computing","level":1,"score":0.4836886525154114},{"id":"https://openalex.org/C164866538","wikidata":"https://www.wikidata.org/wiki/Q367351","display_name":"Cluster (spacecraft)","level":2,"score":0.4306018352508545},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.36961880326271057},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.2291746735572815},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.11510276794433594},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C21547014","wikidata":"https://www.wikidata.org/wiki/Q1423657","display_name":"Operations management","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icnsc55942.2022.10004192","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/icnsc55942.2022.10004192","pdf_url":null,"source":{"id":"https://openalex.org/S4363608241","display_name":"2022 IEEE International Conference on Networking, Sensing and Control (ICNSC)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE International Conference on Networking, Sensing and Control (ICNSC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W2011121744","https://openalex.org/W2073229720","https://openalex.org/W2110050374","https://openalex.org/W2115936082","https://openalex.org/W2431129084","https://openalex.org/W2511769035","https://openalex.org/W2739664263","https://openalex.org/W2901776478","https://openalex.org/W2904830152","https://openalex.org/W2922346524","https://openalex.org/W2933410908","https://openalex.org/W3004600292","https://openalex.org/W3038129514","https://openalex.org/W3058230660","https://openalex.org/W3134776935","https://openalex.org/W3160324401","https://openalex.org/W3204522058"],"related_works":["https://openalex.org/W1998662473","https://openalex.org/W1988252515","https://openalex.org/W2075391483","https://openalex.org/W2742348144","https://openalex.org/W2038820605","https://openalex.org/W1985417357","https://openalex.org/W2115053376","https://openalex.org/W2367528910","https://openalex.org/W1991489478","https://openalex.org/W2121416564"],"abstract_inverted_index":{"This":[0],"paper":[1],"studies":[2],"the":[3,31,41,50,62,73,79,94,99],"scheduling":[4,51],"problem":[5],"of":[6,16,33,84,98],"single-arm":[7,54],"cluster":[8,55],"tools":[9],"that":[10],"mixedly":[11],"process":[12,37],"two":[13],"different":[14],"kinds":[15],"wafers":[17],"without":[18],"sharing":[19],"and":[20,39,96],"revisiting":[21],"processing":[22],"modules":[23],"(PMs).":[24],"We":[25,48,65,88],"balance":[26,40],"internal":[27],"workloads":[28,43],"by":[29,44],"adjusting":[30],"number":[32],"PMs":[34,70,86],"used":[35],"to":[36,71,92],"wafers,":[38],"external":[42],"configuring":[45],"virtual":[46,85],"PMs.":[47],"derive":[49],"conditions":[52],"for":[53],"tools,":[56],"which":[57],"are":[58],"more":[59],"relaxed":[60],"than":[61],"existing":[63,80],"ones.":[64],"can":[66],"also":[67],"use":[68],"less":[69],"get":[72],"same":[74],"production":[75],"cycle":[76],"time":[77],"as":[78],"literature":[81],"using":[82],"configuration":[83],"only.":[87],"give":[89],"some":[90],"examples":[91],"show":[93],"application":[95],"power":[97],"theory.":[100]},"counts_by_year":[],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}
