{"id":"https://openalex.org/W2171941025","doi":"https://doi.org/10.1109/icmens.2004.1509003","title":"3D Modelling of MEMS Components for Coupled Elastic — Electrostatic Characterization","display_name":"3D Modelling of MEMS Components for Coupled Elastic — Electrostatic Characterization","publication_year":2006,"publication_date":"2006-10-11","ids":{"openalex":"https://openalex.org/W2171941025","doi":"https://doi.org/10.1109/icmens.2004.1509003","mag":"2171941025"},"language":"en","primary_location":{"id":"doi:10.1109/icmens.2004.1509003","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icmens.2004.1509003","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5086489115","display_name":"O. S\u00f8r\u00e5sen","orcid":null},"institutions":[{"id":"https://openalex.org/I184942183","display_name":"University of Oslo","ror":"https://ror.org/01xtthb56","country_code":"NO","type":"education","lineage":["https://openalex.org/I184942183"]}],"countries":["NO"],"is_corresponding":true,"raw_author_name":"O. Sorasen","raw_affiliation_strings":["Dep of Informatics, University of Oslo, Oslo, Norway"],"affiliations":[{"raw_affiliation_string":"Dep of Informatics, University of Oslo, Oslo, Norway","institution_ids":["https://openalex.org/I184942183"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5088780469","display_name":"Andreas Vogl","orcid":"https://orcid.org/0000-0002-1013-0816"},"institutions":[{"id":"https://openalex.org/I173888879","display_name":"SINTEF","ror":"https://ror.org/01f677e56","country_code":"NO","type":"facility","lineage":["https://openalex.org/I173888879"]}],"countries":["NO"],"is_corresponding":false,"raw_author_name":"A. Vogl","raw_affiliation_strings":["SINTEF Microsystems, Oslo, Norway"],"affiliations":[{"raw_affiliation_string":"SINTEF Microsystems, Oslo, Norway","institution_ids":["https://openalex.org/I173888879"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049536621","display_name":"Xuyuan Chen","orcid":"https://orcid.org/0000-0003-0526-0648"},"institutions":[{"id":"https://openalex.org/I173888879","display_name":"SINTEF","ror":"https://ror.org/01f677e56","country_code":"NO","type":"facility","lineage":["https://openalex.org/I173888879"]}],"countries":["NO"],"is_corresponding":false,"raw_author_name":"Xuyuan Chen","raw_affiliation_strings":["SINTEF Microsystems, Oslo, Norway"],"affiliations":[{"raw_affiliation_string":"SINTEF Microsystems, Oslo, Norway","institution_ids":["https://openalex.org/I173888879"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057360315","display_name":"Liv Furuberg","orcid":null},"institutions":[{"id":"https://openalex.org/I173888879","display_name":"SINTEF","ror":"https://ror.org/01f677e56","country_code":"NO","type":"facility","lineage":["https://openalex.org/I173888879"]}],"countries":["NO"],"is_corresponding":false,"raw_author_name":"L. Furuberg","raw_affiliation_strings":["SINTEF Microsystems, Oslo, Norway"],"affiliations":[{"raw_affiliation_string":"SINTEF Microsystems, Oslo, Norway","institution_ids":["https://openalex.org/I173888879"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5028550921","display_name":"K. M. Johansen","orcid":"https://orcid.org/0000-0002-6268-1740"},"institutions":[{"id":"https://openalex.org/I184942183","display_name":"University of Oslo","ror":"https://ror.org/01xtthb56","country_code":"NO","type":"education","lineage":["https://openalex.org/I184942183"]}],"countries":["NO"],"is_corresponding":false,"raw_author_name":"K.M. Johansen","raw_affiliation_strings":["Dep of Physics, University of Oslo, Oslo, Norway"],"affiliations":[{"raw_affiliation_string":"Dep of Physics, University of Oslo, Oslo, Norway","institution_ids":["https://openalex.org/I184942183"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5086489115"],"corresponding_institution_ids":["https://openalex.org/I184942183"],"apc_list":null,"apc_paid":null,"fwci":0.7522,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.7618809,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"509","last_page":"514"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11263","display_name":"Electromagnetic Simulation and Numerical Methods","score":0.9962999820709229,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.9911999702453613,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.8360552191734314},{"id":"https://openalex.org/keywords/characterization","display_name":"Characterization (materials science)","score":0.6169596910476685},{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.6120345592498779},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.555091381072998},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.5324388742446899},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.515375554561615},{"id":"https://openalex.org/keywords/component","display_name":"Component (thermodynamics)","score":0.5068736672401428},{"id":"https://openalex.org/keywords/simple","display_name":"Simple (philosophy)","score":0.4872240126132965},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.48506322503089905},{"id":"https://openalex.org/keywords/field","display_name":"Field (mathematics)","score":0.44983750581741333},{"id":"https://openalex.org/keywords/electrostatics","display_name":"Electrostatics","score":0.44749706983566284},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3973093628883362},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.38013607263565063},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.24939760565757751},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.20763665437698364},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1418556571006775},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.12213197350502014}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.8360552191734314},{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.6169596910476685},{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.6120345592498779},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.555091381072998},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.5324388742446899},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.515375554561615},{"id":"https://openalex.org/C168167062","wikidata":"https://www.wikidata.org/wiki/Q1117970","display_name":"Component (thermodynamics)","level":2,"score":0.5068736672401428},{"id":"https://openalex.org/C2780586882","wikidata":"https://www.wikidata.org/wiki/Q7520643","display_name":"Simple (philosophy)","level":2,"score":0.4872240126132965},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.48506322503089905},{"id":"https://openalex.org/C9652623","wikidata":"https://www.wikidata.org/wiki/Q190109","display_name":"Field (mathematics)","level":2,"score":0.44983750581741333},{"id":"https://openalex.org/C117626034","wikidata":"https://www.wikidata.org/wiki/Q26336","display_name":"Electrostatics","level":2,"score":0.44749706983566284},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3973093628883362},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.38013607263565063},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.24939760565757751},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.20763665437698364},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1418556571006775},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.12213197350502014},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C202444582","wikidata":"https://www.wikidata.org/wiki/Q837863","display_name":"Pure mathematics","level":1,"score":0.0},{"id":"https://openalex.org/C111472728","wikidata":"https://www.wikidata.org/wiki/Q9471","display_name":"Epistemology","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icmens.2004.1509003","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icmens.2004.1509003","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W599550356","https://openalex.org/W648511115","https://openalex.org/W1517072937","https://openalex.org/W1591608973","https://openalex.org/W2139002947","https://openalex.org/W2587288333","https://openalex.org/W2621919695","https://openalex.org/W3009533109","https://openalex.org/W6618200599","https://openalex.org/W6621264956","https://openalex.org/W6635288764"],"related_works":["https://openalex.org/W2765080098","https://openalex.org/W2385749422","https://openalex.org/W2272290532","https://openalex.org/W2355290145","https://openalex.org/W2353465659","https://openalex.org/W3161496874","https://openalex.org/W2026330382","https://openalex.org/W2915680872","https://openalex.org/W2114051864","https://openalex.org/W1563566515"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,33,42,66,100],"method":[4,76],"for":[5,41,51],"modelling":[6],"MEMS":[7],"components":[8,28],"whereby":[9],"the":[10,59,104],"designer":[11],"can":[12,29],"perform":[13],"precise":[14],"electrical,":[15],"mechanical,":[16],"and":[17,20,25,103],"coupled":[18,105],"electrical":[19],"mechanical":[21],"simulations.":[22],"Both":[23],"surface":[24],"bulk":[26,60,86],"micromachined":[27,87],"be":[30],"modelled":[31,97],"at":[32],"geometrical":[34],"level":[35],"by":[36,98],"defining":[37],"simplified":[38],"pseudo":[39,101],"processes":[40],"commercial":[43],"CAD":[44],"tool":[45],"such":[46],"as":[47],"CovertorWare.":[48],"The":[49],"procedure":[50],"this":[52,75],"approach":[53],"is":[54,77,91],"described":[55,94],"with":[56],"emphasis":[57],"on":[58],"case.":[61],"A":[62,83],"motivating":[63],"example":[64],"of":[65,108],"simple":[67],"comb-finger":[68],"structure":[69],"in":[70],"an":[71],"accelerometer":[72],"shows":[73],"that":[74],"required":[78],"to":[79],"obtain":[80],"adequate":[81],"precision.":[82],"long":[84],"thin":[85],"mirror":[88],"array,":[89],"which":[90],"not":[92],"easily":[93],"analytically,":[95],"was":[96],"using":[99],"process":[102],"field":[106],"problem":[107],"its":[109],"elastic-electrostatic":[110],"behaviour":[111],"has":[112],"been":[113],"investigated.":[114]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}