{"id":"https://openalex.org/W1490014831","doi":"https://doi.org/10.1109/icmens.2004.1509002","title":"A π Small-Signal Model of MEMS Series Switches Based on the Parameter- Extraction Method","display_name":"A π Small-Signal Model of MEMS Series Switches Based on the Parameter- Extraction Method","publication_year":2006,"publication_date":"2006-10-11","ids":{"openalex":"https://openalex.org/W1490014831","doi":"https://doi.org/10.1109/icmens.2004.1509002","mag":"1490014831"},"language":"en","primary_location":{"id":"doi:10.1109/icmens.2004.1509002","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icmens.2004.1509002","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100415738","display_name":"Jae Wook Lee","orcid":"https://orcid.org/0000-0002-8756-0195"},"institutions":[{"id":"https://openalex.org/I142401562","display_name":"Electronics and Telecommunications Research Institute","ror":"https://ror.org/03ysstz10","country_code":"KR","type":"facility","lineage":["https://openalex.org/I142401562","https://openalex.org/I2801339556","https://openalex.org/I4210144908","https://openalex.org/I4387152098"]}],"countries":["KR"],"is_corresponding":true,"raw_author_name":"Jaewoo Lee","raw_affiliation_strings":["Basic Research Laboratory, Electronics and Telecommunications Research Institute, Daejeon, South Korea","Electronics and Telecommunications, Research Institute#TAB#"],"affiliations":[{"raw_affiliation_string":"Basic Research Laboratory, Electronics and Telecommunications Research Institute, Daejeon, South Korea","institution_ids":["https://openalex.org/I142401562"]},{"raw_affiliation_string":"Electronics and Telecommunications, Research Institute#TAB#","institution_ids":["https://openalex.org/I142401562"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051937422","display_name":"Wooseok Yang","orcid":"https://orcid.org/0000-0001-8750-5682"},"institutions":[{"id":"https://openalex.org/I142401562","display_name":"Electronics and Telecommunications Research Institute","ror":"https://ror.org/03ysstz10","country_code":"KR","type":"facility","lineage":["https://openalex.org/I142401562","https://openalex.org/I2801339556","https://openalex.org/I4210144908","https://openalex.org/I4387152098"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Woo-Seok Yang","raw_affiliation_strings":["Basic Research Laboratory, Electronics and Telecommunications Research Institute, Daejeon, South Korea","Electronics and Telecommunications, Research Institute#TAB#"],"affiliations":[{"raw_affiliation_string":"Basic Research Laboratory, Electronics and Telecommunications Research Institute, Daejeon, South Korea","institution_ids":["https://openalex.org/I142401562"]},{"raw_affiliation_string":"Electronics and Telecommunications, Research Institute#TAB#","institution_ids":["https://openalex.org/I142401562"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039448573","display_name":"Chang\u2010Hee Hyoung","orcid":"https://orcid.org/0000-0002-9012-2217"},"institutions":[{"id":"https://openalex.org/I142401562","display_name":"Electronics and Telecommunications Research Institute","ror":"https://ror.org/03ysstz10","country_code":"KR","type":"facility","lineage":["https://openalex.org/I142401562","https://openalex.org/I2801339556","https://openalex.org/I4210144908","https://openalex.org/I4387152098"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Changhee Hyoung","raw_affiliation_strings":["Basic Research Laboratory, Electronics and Telecommunications Research Institute, Daejeon, South Korea","Electronics and Telecommunications, Research Institute#TAB#"],"affiliations":[{"raw_affiliation_string":"Basic Research Laboratory, Electronics and Telecommunications Research Institute, Daejeon, South Korea","institution_ids":["https://openalex.org/I142401562"]},{"raw_affiliation_string":"Electronics and Telecommunications, Research Institute#TAB#","institution_ids":["https://openalex.org/I142401562"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5105818178","display_name":"Sungweon Kang","orcid":null},"institutions":[{"id":"https://openalex.org/I142401562","display_name":"Electronics and Telecommunications Research Institute","ror":"https://ror.org/03ysstz10","country_code":"KR","type":"facility","lineage":["https://openalex.org/I142401562","https://openalex.org/I2801339556","https://openalex.org/I4210144908","https://openalex.org/I4387152098"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Sungweon Kang","raw_affiliation_strings":["Basic Research Laboratory, Electronics and Telecommunications Research Institute, Daejeon, South Korea","Electronics and Telecommunications, Research Institute#TAB#"],"affiliations":[{"raw_affiliation_string":"Basic Research Laboratory, Electronics and Telecommunications Research Institute, Daejeon, South Korea","institution_ids":["https://openalex.org/I142401562"]},{"raw_affiliation_string":"Electronics and Telecommunications, Research Institute#TAB#","institution_ids":["https://openalex.org/I142401562"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5113635676","display_name":"Chang-Auck Choi","orcid":null},"institutions":[{"id":"https://openalex.org/I142401562","display_name":"Electronics and Telecommunications Research Institute","ror":"https://ror.org/03ysstz10","country_code":"KR","type":"facility","lineage":["https://openalex.org/I142401562","https://openalex.org/I2801339556","https://openalex.org/I4210144908","https://openalex.org/I4387152098"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Chang-Auck Choi","raw_affiliation_strings":["Basic Research Laboratory, Electronics and Telecommunications Research Institute, Daejeon, South Korea","Electronics and Telecommunications, Research Institute#TAB#"],"affiliations":[{"raw_affiliation_string":"Basic Research Laboratory, Electronics and Telecommunications Research Institute, Daejeon, South Korea","institution_ids":["https://openalex.org/I142401562"]},{"raw_affiliation_string":"Electronics and Telecommunications, Research Institute#TAB#","institution_ids":["https://openalex.org/I142401562"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5100415738"],"corresponding_institution_ids":["https://openalex.org/I142401562"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.03002931,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"51","issue":null,"first_page":"502","last_page":"508"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.6933529376983643},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.636419951915741},{"id":"https://openalex.org/keywords/small-signal-model","display_name":"Small-signal model","score":0.6045204401016235},{"id":"https://openalex.org/keywords/series","display_name":"Series (stratigraphy)","score":0.5521961450576782},{"id":"https://openalex.org/keywords/electrical-impedance","display_name":"Electrical impedance","score":0.5275219082832336},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5206988453865051},{"id":"https://openalex.org/keywords/extraction","display_name":"Extraction (chemistry)","score":0.5032626986503601},{"id":"https://openalex.org/keywords/equivalent-series-resistance","display_name":"Equivalent series resistance","score":0.48404353857040405},{"id":"https://openalex.org/keywords/estimation-theory","display_name":"Estimation theory","score":0.45524710416793823},{"id":"https://openalex.org/keywords/port","display_name":"Port (circuit theory)","score":0.4491156339645386},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.42514321208000183},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.39149296283721924},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.37861794233322144},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.3178849518299103},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2479451298713684},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.24704673886299133},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.21376752853393555},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.21214178204536438},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.17186325788497925},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.16581645607948303},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.09349754452705383},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.09231248497962952}],"concepts":[{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.6933529376983643},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.636419951915741},{"id":"https://openalex.org/C2781038218","wikidata":"https://www.wikidata.org/wiki/Q1773875","display_name":"Small-signal model","level":3,"score":0.6045204401016235},{"id":"https://openalex.org/C143724316","wikidata":"https://www.wikidata.org/wiki/Q312468","display_name":"Series (stratigraphy)","level":2,"score":0.5521961450576782},{"id":"https://openalex.org/C17829176","wikidata":"https://www.wikidata.org/wiki/Q179043","display_name":"Electrical impedance","level":2,"score":0.5275219082832336},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5206988453865051},{"id":"https://openalex.org/C4725764","wikidata":"https://www.wikidata.org/wiki/Q844704","display_name":"Extraction (chemistry)","level":2,"score":0.5032626986503601},{"id":"https://openalex.org/C14485415","wikidata":"https://www.wikidata.org/wiki/Q5384730","display_name":"Equivalent series resistance","level":3,"score":0.48404353857040405},{"id":"https://openalex.org/C167928553","wikidata":"https://www.wikidata.org/wiki/Q1376021","display_name":"Estimation theory","level":2,"score":0.45524710416793823},{"id":"https://openalex.org/C32802771","wikidata":"https://www.wikidata.org/wiki/Q2443617","display_name":"Port (circuit theory)","level":2,"score":0.4491156339645386},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.42514321208000183},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.39149296283721924},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.37861794233322144},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.3178849518299103},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2479451298713684},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.24704673886299133},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.21376752853393555},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.21214178204536438},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.17186325788497925},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.16581645607948303},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.09349754452705383},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.09231248497962952},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.0},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icmens.2004.1509002","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icmens.2004.1509002","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.4399999976158142}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W2021672237","https://openalex.org/W2114689113","https://openalex.org/W2135000245","https://openalex.org/W2144559188","https://openalex.org/W2152192422","https://openalex.org/W2157849892","https://openalex.org/W2794132280","https://openalex.org/W2946723398","https://openalex.org/W4229594554"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2120483398","https://openalex.org/W1530711136","https://openalex.org/W1763916368","https://openalex.org/W2319192085","https://openalex.org/W2081869101","https://openalex.org/W2033713540","https://openalex.org/W1993634921","https://openalex.org/W2070292851","https://openalex.org/W2161202291"],"abstract_inverted_index":{"A":[0],"novel":[1],"\u03c0":[2,48,100],"small-signal":[3,95],"model":[4,49,63,78,86,101],"of":[5,26,44,55,60,64,105],"MEMS":[6],"series":[7],"switches":[8],"is":[9,50,69,73,79],"presented":[10],"based":[11],"on":[12],"a":[13,19,33],"parameter-extraction":[14],"method,":[15],"which":[16],"can":[17],"determine":[18],"fringing":[20],"capacitance":[21],"(C_f)":[22],"in":[23,52],"the":[24,41,47,53,61,76,84,98,103,106],"end":[25],"each":[27],"signal":[28],"line":[29],"as":[30,32],"well":[31],"contact":[34],"resistance":[35],"(R_c).":[36],"For":[37],"an":[38],"on-state":[39,85],"modeling,":[40],"average":[42],"error":[43],"S\u2081\u2081":[45],"for":[46,83],"5.1%":[51],"range":[54],"5~35":[56],"GHz,":[57],"whereas":[58],"that":[59,75],"conventional":[62,77],"two-port":[65],"series-impedance":[66],"without":[67],"C_f":[68,88],"167.2":[70],"%.":[71],"It":[72],"noted":[74],"not":[80],"valid":[81],"anymore":[82],"and":[87],"should":[89],"be":[90],"taken":[91],"into":[92],"account.":[93],"The":[94],"modeling":[96],"by":[97],"proposed":[99],"demonstrates":[102],"validity":[104],"approach.":[107]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}