{"id":"https://openalex.org/W2115676924","doi":"https://doi.org/10.1109/icmens.2004.1508967","title":"Advanced MEMS and Integrated-Optic Components for Multifunctional Integrated Optical Micromachines","display_name":"Advanced MEMS and Integrated-Optic Components for Multifunctional Integrated Optical Micromachines","publication_year":2006,"publication_date":"2006-10-11","ids":{"openalex":"https://openalex.org/W2115676924","doi":"https://doi.org/10.1109/icmens.2004.1508967","mag":"2115676924"},"language":"en","primary_location":{"id":"doi:10.1109/icmens.2004.1508967","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icmens.2004.1508967","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5000514179","display_name":"Roman V. Kruzelecky","orcid":null},"institutions":[{"id":"https://openalex.org/I2802071214","display_name":"MRV Communications (United States)","ror":"https://ror.org/030nbqh22","country_code":"US","type":"company","lineage":["https://openalex.org/I2802071214"]},{"id":"https://openalex.org/I4210159018","display_name":"MPB Technologies & Communications (Canada)","ror":"https://ror.org/05c0j1j47","country_code":"CA","type":"company","lineage":["https://openalex.org/I4210159018"]}],"countries":["CA","US"],"is_corresponding":true,"raw_author_name":"R.V. Kruzelecky","raw_affiliation_strings":["MPB Communications, Inc., Canada","MPB Communications Inc"],"affiliations":[{"raw_affiliation_string":"MPB Communications, Inc., Canada","institution_ids":["https://openalex.org/I4210159018"]},{"raw_affiliation_string":"MPB Communications Inc","institution_ids":["https://openalex.org/I2802071214"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023034578","display_name":"Brian J. F. Wong","orcid":"https://orcid.org/0000-0001-6318-7384"},"institutions":[{"id":"https://openalex.org/I2802071214","display_name":"MRV Communications (United States)","ror":"https://ror.org/030nbqh22","country_code":"US","type":"company","lineage":["https://openalex.org/I2802071214"]},{"id":"https://openalex.org/I4210159018","display_name":"MPB Technologies & Communications (Canada)","ror":"https://ror.org/05c0j1j47","country_code":"CA","type":"company","lineage":["https://openalex.org/I4210159018"]}],"countries":["CA","US"],"is_corresponding":false,"raw_author_name":"B. Wong","raw_affiliation_strings":["MPB Communications, Inc., Canada","MPB Communications Inc"],"affiliations":[{"raw_affiliation_string":"MPB Communications, Inc., Canada","institution_ids":["https://openalex.org/I4210159018"]},{"raw_affiliation_string":"MPB Communications Inc","institution_ids":["https://openalex.org/I2802071214"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010357586","display_name":"Jing Zou","orcid":"https://orcid.org/0000-0002-3618-9672"},"institutions":[{"id":"https://openalex.org/I2802071214","display_name":"MRV Communications (United States)","ror":"https://ror.org/030nbqh22","country_code":"US","type":"company","lineage":["https://openalex.org/I2802071214"]},{"id":"https://openalex.org/I4210159018","display_name":"MPB Technologies & Communications (Canada)","ror":"https://ror.org/05c0j1j47","country_code":"CA","type":"company","lineage":["https://openalex.org/I4210159018"]}],"countries":["CA","US"],"is_corresponding":false,"raw_author_name":"J. Zou","raw_affiliation_strings":["MPB Communications, Inc., Canada","MPB Communications Inc"],"affiliations":[{"raw_affiliation_string":"MPB Communications, Inc., Canada","institution_ids":["https://openalex.org/I4210159018"]},{"raw_affiliation_string":"MPB Communications Inc","institution_ids":["https://openalex.org/I2802071214"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109545926","display_name":"E. Haddad","orcid":null},"institutions":[{"id":"https://openalex.org/I2802071214","display_name":"MRV Communications (United States)","ror":"https://ror.org/030nbqh22","country_code":"US","type":"company","lineage":["https://openalex.org/I2802071214"]},{"id":"https://openalex.org/I4210159018","display_name":"MPB Technologies & Communications (Canada)","ror":"https://ror.org/05c0j1j47","country_code":"CA","type":"company","lineage":["https://openalex.org/I4210159018"]}],"countries":["CA","US"],"is_corresponding":false,"raw_author_name":"E. Haddad","raw_affiliation_strings":["MPB Communications, Inc., Canada","MPB Communications Inc"],"affiliations":[{"raw_affiliation_string":"MPB Communications, Inc., Canada","institution_ids":["https://openalex.org/I4210159018"]},{"raw_affiliation_string":"MPB Communications Inc","institution_ids":["https://openalex.org/I2802071214"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062952002","display_name":"Wes Jamroz","orcid":null},"institutions":[{"id":"https://openalex.org/I2802071214","display_name":"MRV Communications (United States)","ror":"https://ror.org/030nbqh22","country_code":"US","type":"company","lineage":["https://openalex.org/I2802071214"]},{"id":"https://openalex.org/I4210159018","display_name":"MPB Technologies & Communications (Canada)","ror":"https://ror.org/05c0j1j47","country_code":"CA","type":"company","lineage":["https://openalex.org/I4210159018"]}],"countries":["CA","US"],"is_corresponding":false,"raw_author_name":"W. Jamroz","raw_affiliation_strings":["MPB Communications, Inc., Canada","MPB Communications Inc"],"affiliations":[{"raw_affiliation_string":"MPB Communications, Inc., Canada","institution_ids":["https://openalex.org/I4210159018"]},{"raw_affiliation_string":"MPB Communications Inc","institution_ids":["https://openalex.org/I2802071214"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5014608481","display_name":"A. Yelon","orcid":"https://orcid.org/0000-0001-7020-7822"},"institutions":[{"id":"https://openalex.org/I142476485","display_name":"\u00c9cole Polytechnique","ror":"https://ror.org/05hy3tk52","country_code":"FR","type":"education","lineage":["https://openalex.org/I142476485","https://openalex.org/I4210145102"]},{"id":"https://openalex.org/I45683168","display_name":"Polytechnique Montr\u00e9al","ror":"https://ror.org/05f8d4e86","country_code":"CA","type":"education","lineage":["https://openalex.org/I45683168"]}],"countries":["CA","FR"],"is_corresponding":false,"raw_author_name":"A. Yelon","raw_affiliation_strings":["Ecole Polytechnique de Montr\u00e8al, Canada","Ecole Polytechnique de Montr??al"],"affiliations":[{"raw_affiliation_string":"Ecole Polytechnique de Montr\u00e8al, Canada","institution_ids":["https://openalex.org/I45683168"]},{"raw_affiliation_string":"Ecole Polytechnique de Montr??al","institution_ids":["https://openalex.org/I142476485","https://openalex.org/I45683168"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5062151829","display_name":"R. Beaudry","orcid":null},"institutions":[{"id":"https://openalex.org/I142476485","display_name":"\u00c9cole Polytechnique","ror":"https://ror.org/05hy3tk52","country_code":"FR","type":"education","lineage":["https://openalex.org/I142476485","https://openalex.org/I4210145102"]},{"id":"https://openalex.org/I45683168","display_name":"Polytechnique Montr\u00e9al","ror":"https://ror.org/05f8d4e86","country_code":"CA","type":"education","lineage":["https://openalex.org/I45683168"]}],"countries":["CA","FR"],"is_corresponding":false,"raw_author_name":"R. Beaudry","raw_affiliation_strings":["Ecole Polytechnique de Montr\u00e8al, Canada","Ecole Polytechnique de Montr??al"],"affiliations":[{"raw_affiliation_string":"Ecole Polytechnique de Montr\u00e8al, Canada","institution_ids":["https://openalex.org/I45683168"]},{"raw_affiliation_string":"Ecole Polytechnique de Montr??al","institution_ids":["https://openalex.org/I142476485","https://openalex.org/I45683168"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071408306","display_name":"O. Grenier","orcid":null},"institutions":[{"id":"https://openalex.org/I142476485","display_name":"\u00c9cole Polytechnique","ror":"https://ror.org/05hy3tk52","country_code":"FR","type":"education","lineage":["https://openalex.org/I142476485","https://openalex.org/I4210145102"]},{"id":"https://openalex.org/I45683168","display_name":"Polytechnique Montr\u00e9al","ror":"https://ror.org/05f8d4e86","country_code":"CA","type":"education","lineage":["https://openalex.org/I45683168"]}],"countries":["CA","FR"],"is_corresponding":false,"raw_author_name":"O. Grenier","raw_affiliation_strings":["Ecole Polytechnique de Montr\u00e8al, Canada","Ecole Polytechnique de Montr??al"],"affiliations":[{"raw_affiliation_string":"Ecole Polytechnique de Montr\u00e8al, Canada","institution_ids":["https://openalex.org/I45683168"]},{"raw_affiliation_string":"Ecole Polytechnique de Montr??al","institution_ids":["https://openalex.org/I142476485","https://openalex.org/I45683168"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054811974","display_name":"Wanping Zheng","orcid":"https://orcid.org/0000-0002-3751-2697"},"institutions":[{"id":"https://openalex.org/I2800055578","display_name":"Canadian Space Agency","ror":"https://ror.org/03a1gte98","country_code":"CA","type":"government","lineage":["https://openalex.org/I2800055578"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"W. Zheng","raw_affiliation_strings":["Canadian Space Agency, Canada","Canadian Space Agency"],"affiliations":[{"raw_affiliation_string":"Canadian Space Agency, Canada","institution_ids":["https://openalex.org/I2800055578"]},{"raw_affiliation_string":"Canadian Space Agency","institution_ids":["https://openalex.org/I2800055578"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5108381430","display_name":"Linh Ngo Phong","orcid":null},"institutions":[{"id":"https://openalex.org/I2800055578","display_name":"Canadian Space Agency","ror":"https://ror.org/03a1gte98","country_code":"CA","type":"government","lineage":["https://openalex.org/I2800055578"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"L.N. Phong","raw_affiliation_strings":["Canadian Space Agency, Canada","Canadian Space Agency"],"affiliations":[{"raw_affiliation_string":"Canadian Space Agency, Canada","institution_ids":["https://openalex.org/I2800055578"]},{"raw_affiliation_string":"Canadian Space Agency","institution_ids":["https://openalex.org/I2800055578"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":10,"corresponding_author_ids":["https://openalex.org/A5000514179"],"corresponding_institution_ids":["https://openalex.org/I2802071214","https://openalex.org/I4210159018"],"apc_list":null,"apc_paid":null,"fwci":1.1495,"has_fulltext":false,"cited_by_count":9,"citation_normalized_percentile":{"value":0.80377059,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"315","last_page":"321"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11128","display_name":"Transition Metal Oxide Nanomaterials","score":0.9973999857902527,"subfield":{"id":"https://openalex.org/subfields/2507","display_name":"Polymers and Plastics"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12611","display_name":"Neural Networks and Reservoir Computing","score":0.9944999814033508,"subfield":{"id":"https://openalex.org/subfields/1702","display_name":"Artificial Intelligence"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6324490904808044},{"id":"https://openalex.org/keywords/photonics","display_name":"Photonics","score":0.5696744918823242},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.5609655976295471},{"id":"https://openalex.org/keywords/spacecraft","display_name":"Spacecraft","score":0.5584739446640015},{"id":"https://openalex.org/keywords/optical-fiber","display_name":"Optical fiber","score":0.5402202010154724},{"id":"https://openalex.org/keywords/photonic-integrated-circuit","display_name":"Photonic integrated circuit","score":0.534296452999115},{"id":"https://openalex.org/keywords/optical-switch","display_name":"Optical switch","score":0.5231893658638},{"id":"https://openalex.org/keywords/electronic-circuit","display_name":"Electronic circuit","score":0.5172858238220215},{"id":"https://openalex.org/keywords/integrated-circuit","display_name":"Integrated circuit","score":0.47121042013168335},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.46698302030563354},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3490476608276367},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2486932873725891},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.23125410079956055},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.21182939410209656},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.15015071630477905},{"id":"https://openalex.org/keywords/aerospace-engineering","display_name":"Aerospace engineering","score":0.12405663728713989}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6324490904808044},{"id":"https://openalex.org/C20788544","wikidata":"https://www.wikidata.org/wiki/Q467054","display_name":"Photonics","level":2,"score":0.5696744918823242},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.5609655976295471},{"id":"https://openalex.org/C29829512","wikidata":"https://www.wikidata.org/wiki/Q40218","display_name":"Spacecraft","level":2,"score":0.5584739446640015},{"id":"https://openalex.org/C194232370","wikidata":"https://www.wikidata.org/wiki/Q162","display_name":"Optical fiber","level":2,"score":0.5402202010154724},{"id":"https://openalex.org/C22799297","wikidata":"https://www.wikidata.org/wiki/Q523846","display_name":"Photonic integrated circuit","level":3,"score":0.534296452999115},{"id":"https://openalex.org/C101336846","wikidata":"https://www.wikidata.org/wiki/Q17105111","display_name":"Optical switch","level":2,"score":0.5231893658638},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.5172858238220215},{"id":"https://openalex.org/C530198007","wikidata":"https://www.wikidata.org/wiki/Q80831","display_name":"Integrated circuit","level":2,"score":0.47121042013168335},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.46698302030563354},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3490476608276367},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2486932873725891},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.23125410079956055},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.21182939410209656},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.15015071630477905},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.12405663728713989}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icmens.2004.1508967","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icmens.2004.1508967","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.7300000190734863,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320318240","display_name":"European Space Agency","ror":"https://ror.org/03wd9za21"},{"id":"https://openalex.org/F4320334436","display_name":"Canadian Space Agency","ror":"https://ror.org/03a1gte98"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1523221933","https://openalex.org/W1528516025","https://openalex.org/W1987038303","https://openalex.org/W2026738575","https://openalex.org/W2037595295","https://openalex.org/W2046717976","https://openalex.org/W2075689277","https://openalex.org/W2080627543","https://openalex.org/W2098255590","https://openalex.org/W2102069613","https://openalex.org/W2116955354","https://openalex.org/W2123230069","https://openalex.org/W6631527854"],"related_works":["https://openalex.org/W2059727952","https://openalex.org/W2347886316","https://openalex.org/W2106952446","https://openalex.org/W4401184804","https://openalex.org/W2900569785","https://openalex.org/W2144160407","https://openalex.org/W2038696491","https://openalex.org/W1970766200","https://openalex.org/W3176635967","https://openalex.org/W123209287"],"abstract_inverted_index":{"Optical":[0],"technologies":[1,136],"can":[2],"play":[3],"a":[4,66,115],"strategic":[5],"role":[6],"in":[7],"improving":[8,148],"the":[9,14,51,60,83,96,106,141,144,150],"performance,":[10],"functionality,":[11],"and":[12,29,36,42,74,90,102,110,134],"reducing":[13],"mass":[15],"of":[16,62,85,118,131,143],"various":[17,125],"spacecraft":[18],"technologies,":[19],"such":[20],"as":[21],"true":[22],"time-delay":[23],"T/R":[24],"modules":[25],"for":[26,33,53,124],"phased-array":[27],"antennas":[28],"optical":[30,63,72,87,100],"sensor":[31],"systems":[32,37,44],"satellite":[34],"navigation":[35],"status.":[38],"However,":[39],"current":[40],"photonic":[41,135],"fiber-optic":[43],"tend":[45],"to":[46,50,69,77,92,139],"be":[47],"bulky":[48],"relative":[49],"requirements":[52],"space":[54,126],"applications.":[55],"Micro":[56],"integrated-optic":[57,120],"circuits":[58,121],"increase":[59],"integration":[61],"components":[64],"on":[65,122,149],"single":[67],"substrate,":[68],"provide":[70],"multi-function":[71],"processing":[73],"switching":[75],"similar":[76],"electronic":[78],"integrated":[79],"circuits.":[80],"This":[81,112],"minimizes":[82],"number":[84],"external":[86,93],"interconnections":[88],"required":[89],"sensitivity":[91],"vibrations;":[94],"maximizing":[95],"system":[97,108],"information":[98],"capacity,":[99],"throughput,":[101],"reliability,":[103],"while":[104,147],"minimizing":[105],"overall":[107],"size":[109,142],"weight.":[111],"paper":[113],"considers":[114],"systematic":[116],"development":[117],"MEMS":[119],"SOI":[123],"application.":[127],"A":[128],"unique":[129],"blend":[130],"MEMS,":[132],"smart-material":[133],"is":[137],"employed":[138],"miniaturize":[140],"basic":[145],"components,":[146],"attainable":[151],"performance.":[152]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2014,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-04-24T08:23:43.765630","created_date":"2025-10-10T00:00:00"}