{"id":"https://openalex.org/W4408861808","doi":"https://doi.org/10.1109/icm62621.2025.10934833","title":"Quick Response Valve for Active Control of Pneumatic Vibration Isolation Tables","display_name":"Quick Response Valve for Active Control of Pneumatic Vibration Isolation Tables","publication_year":2025,"publication_date":"2025-02-28","ids":{"openalex":"https://openalex.org/W4408861808","doi":"https://doi.org/10.1109/icm62621.2025.10934833"},"language":"en","primary_location":{"id":"doi:10.1109/icm62621.2025.10934833","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icm62621.2025.10934833","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 IEEE International Conference on Mechatronics (ICM)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5111666826","display_name":"Kazuki Goto","orcid":null},"institutions":[{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Kazuki Goto","raw_affiliation_strings":["Faculty of Engineering The University of Tokyo, The University of Tokyo,Bunkyo-ku, Tokyo,Japan"],"affiliations":[{"raw_affiliation_string":"Faculty of Engineering The University of Tokyo, The University of Tokyo,Bunkyo-ku, Tokyo,Japan","institution_ids":["https://openalex.org/I74801974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103848651","display_name":"Koki Hattori","orcid":null},"institutions":[{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Koki Hattori","raw_affiliation_strings":["Graduate School of Engineering, The University of Tokyo,Bunkyo-ku, Tokyo,Japan"],"affiliations":[{"raw_affiliation_string":"Graduate School of Engineering, The University of Tokyo,Bunkyo-ku, Tokyo,Japan","institution_ids":["https://openalex.org/I74801974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111205168","display_name":"Kohei Hashimoto","orcid":null},"institutions":[{"id":"https://openalex.org/I4210108534","display_name":"Kurashiki Medical Center","ror":"https://ror.org/01kv8e326","country_code":"JP","type":"healthcare","lineage":["https://openalex.org/I4210108534"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kohei Hashimoto","raw_affiliation_strings":["Kurashiki Kako Co., Ltd,Electronic Vibration Control Division,Kurashiki, Okayama,Japan"],"affiliations":[{"raw_affiliation_string":"Kurashiki Kako Co., Ltd,Electronic Vibration Control Division,Kurashiki, Okayama,Japan","institution_ids":["https://openalex.org/I4210108534"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5002254054","display_name":"Ichiro Kishimoto","orcid":"https://orcid.org/0000-0002-8322-0230"},"institutions":[{"id":"https://openalex.org/I4210108534","display_name":"Kurashiki Medical Center","ror":"https://ror.org/01kv8e326","country_code":"JP","type":"healthcare","lineage":["https://openalex.org/I4210108534"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Ichiro Kishimoto","raw_affiliation_strings":["Kurashiki Kako Co., Ltd,Electronic Vibration Control Division,Kurashiki, Okayama,Japan"],"affiliations":[{"raw_affiliation_string":"Kurashiki Kako Co., Ltd,Electronic Vibration Control Division,Kurashiki, Okayama,Japan","institution_ids":["https://openalex.org/I4210108534"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080584195","display_name":"Takafumi Koseki","orcid":"https://orcid.org/0000-0003-3922-0652"},"institutions":[{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Takafumi Koseki","raw_affiliation_strings":["Graduate School of Engineering, The University of Tokyo,Bunkyo-ku, Tokyo,Japan"],"affiliations":[{"raw_affiliation_string":"Graduate School of Engineering, The University of Tokyo,Bunkyo-ku, Tokyo,Japan","institution_ids":["https://openalex.org/I74801974"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5024663550","display_name":"Wataru Ohnishi","orcid":"https://orcid.org/0000-0002-4221-9305"},"institutions":[{"id":"https://openalex.org/I74801974","display_name":"The University of Tokyo","ror":"https://ror.org/057zh3y96","country_code":"JP","type":"education","lineage":["https://openalex.org/I74801974"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Wataru Ohnishi","raw_affiliation_strings":["Graduate School of Engineering, The University of Tokyo,Bunkyo-ku, Tokyo,Japan"],"affiliations":[{"raw_affiliation_string":"Graduate School of Engineering, The University of Tokyo,Bunkyo-ku, Tokyo,Japan","institution_ids":["https://openalex.org/I74801974"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5111666826"],"corresponding_institution_ids":["https://openalex.org/I74801974"],"apc_list":null,"apc_paid":null,"fwci":0.7736,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.66355029,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"6"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11372","display_name":"Hydraulic and Pneumatic Systems","score":0.9876000285148621,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11372","display_name":"Hydraulic and Pneumatic Systems","score":0.9876000285148621,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10534","display_name":"Structural Health Monitoring Techniques","score":0.9502000212669373,"subfield":{"id":"https://openalex.org/subfields/2205","display_name":"Civil and Structural Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/vibration-isolation","display_name":"Vibration isolation","score":0.7449724674224854},{"id":"https://openalex.org/keywords/isolation","display_name":"Isolation (microbiology)","score":0.5497303009033203},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.5272599458694458},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.47059428691864014},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4575575590133667},{"id":"https://openalex.org/keywords/frequency-response","display_name":"Frequency response","score":0.43574559688568115},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.32544079422950745},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.2922093868255615},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.2727509140968323},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.17331644892692566},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.16282063722610474},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.10420438647270203}],"concepts":[{"id":"https://openalex.org/C45799244","wikidata":"https://www.wikidata.org/wiki/Q109968206","display_name":"Vibration isolation","level":3,"score":0.7449724674224854},{"id":"https://openalex.org/C2775941552","wikidata":"https://www.wikidata.org/wiki/Q25212305","display_name":"Isolation (microbiology)","level":2,"score":0.5497303009033203},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.5272599458694458},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.47059428691864014},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4575575590133667},{"id":"https://openalex.org/C8590192","wikidata":"https://www.wikidata.org/wiki/Q1054694","display_name":"Frequency response","level":2,"score":0.43574559688568115},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.32544079422950745},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.2922093868255615},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.2727509140968323},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.17331644892692566},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.16282063722610474},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.10420438647270203},{"id":"https://openalex.org/C89423630","wikidata":"https://www.wikidata.org/wiki/Q7193","display_name":"Microbiology","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icm62621.2025.10934833","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icm62621.2025.10934833","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 IEEE International Conference on Mechatronics (ICM)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.7799999713897705}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1860431200","https://openalex.org/W1984376061","https://openalex.org/W2016504716","https://openalex.org/W2046236417","https://openalex.org/W2056118042","https://openalex.org/W2070395790","https://openalex.org/W2071323548","https://openalex.org/W2134008762","https://openalex.org/W2333929950","https://openalex.org/W2536217592","https://openalex.org/W4233593176","https://openalex.org/W4401751936","https://openalex.org/W4401913985","https://openalex.org/W6878218746"],"related_works":["https://openalex.org/W2394779770","https://openalex.org/W4388621163","https://openalex.org/W2370968855","https://openalex.org/W2250181617","https://openalex.org/W4386223339","https://openalex.org/W2376189587","https://openalex.org/W4384695366","https://openalex.org/W2894254031","https://openalex.org/W2328871180","https://openalex.org/W1593744347"],"abstract_inverted_index":{"Active":[0],"control":[1,42,68,111,116,133],"of":[2,15,37,43,52,66,69,81,134,143],"pneumatic":[3,38],"vibration":[4,54],"isolation":[5],"tables":[6],"requires":[7],"extreme":[8],"preciseness,":[9],"due":[10],"to":[11,27,126],"the":[12,16,41,49,53,64,67,74,82,85,115,122,127,135,138,144],"rapid":[13],"growth":[14],"demand":[17],"for":[18,40,121],"well":[19,104],"performing":[20],"precision":[21,65],"positioning":[22],"stages.":[23],"And":[24],"in":[25,57,114],"order":[26],"meet":[28],"this":[29,31,94],"need,":[30],"paper":[32],"proposes":[33],"a":[34,96,106],"new":[35,86],"type":[36],"valve":[39,87],"air":[44,50,70,75,123,139],"flow":[45,71,76],"rates":[46,77],"supplied":[47],"into":[48],"spring":[51],"isolator.":[55],"Valves":[56],"general,":[58],"have":[59],"certain":[60],"nonlinearities":[61],"which":[62],"degrade":[63],"rates.":[72],"Since":[73],"are":[78],"mainly":[79],"dependent":[80],"poppet":[83,97,128],"position,":[84],"equips":[88],"an":[89],"internal":[90],"position":[91,98,129],"sensor.":[92],"Using":[93],"sensor,":[95],"inner":[99],"feedback":[100],"(FB)":[101],"control,":[102],"as":[103,105],"model":[107],"based":[108],"feedforward":[109],"(FF)":[110],"is":[112,147],"introduced":[113],"system.":[117],"This":[118],"method":[119],"compensates":[120],"disturbance":[124],"force":[125],"and":[130],"allows":[131],"fast":[132],"pressure":[136,150],"inside":[137],"spring.":[140],"The":[141],"effectiveness":[142],"proposed":[145],"system":[146],"demonstrated":[148],"through":[149],"tracking":[151],"experiments.":[152]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2025-12-23T23:11:35.936235","created_date":"2025-10-10T00:00:00"}