{"id":"https://openalex.org/W4312775191","doi":"https://doi.org/10.1109/ickii55100.2022.9983549","title":"Fabrication and Electrical Properties of Novel ZnTiO<sub>3</sub>/Si Capacitors with Various Zn(NO<sub>3</sub>)<sub>2</sub> Concentrations","display_name":"Fabrication and Electrical Properties of Novel ZnTiO<sub>3</sub>/Si Capacitors with Various Zn(NO<sub>3</sub>)<sub>2</sub> Concentrations","publication_year":2022,"publication_date":"2022-07-22","ids":{"openalex":"https://openalex.org/W4312775191","doi":"https://doi.org/10.1109/ickii55100.2022.9983549"},"language":"en","primary_location":{"id":"doi:10.1109/ickii55100.2022.9983549","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ickii55100.2022.9983549","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE 5th International Conference on Knowledge Innovation and Invention (ICKII )","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5036697257","display_name":"Chih\u2010Feng Yen","orcid":"https://orcid.org/0000-0002-5419-2605"},"institutions":[{"id":"https://openalex.org/I118692353","display_name":"University of Science and Technology","ror":"https://ror.org/05bj7sh33","country_code":"YE","type":"education","lineage":["https://openalex.org/I118692353"]},{"id":"https://openalex.org/I4387154394","display_name":"National Kaohsiung University of Science and Technology","ror":"https://ror.org/00hfj7g70","country_code":null,"type":"education","lineage":["https://openalex.org/I4387154394"]},{"id":"https://openalex.org/I43518871","display_name":"National Kaohsiung Marine University","ror":"https://ror.org/00ca6fy54","country_code":"TW","type":"education","lineage":["https://openalex.org/I43518871"]},{"id":"https://openalex.org/I109289231","display_name":"National Kaohsiung First University of Science and Technology","ror":"https://ror.org/03858r716","country_code":"TW","type":"education","lineage":["https://openalex.org/I109289231"]}],"countries":["TW","YE"],"is_corresponding":true,"raw_author_name":"Chih-Feng Yen","raw_affiliation_strings":["National Kaohsiung University of Science and Technology,Department of Microelectronics Engineering,Kaohsiung,Taiwan","Department of Microelectronics Engineering, National Kaohsiung University of Science and Technology, Kaohsiung, Taiwan"],"affiliations":[{"raw_affiliation_string":"National Kaohsiung University of Science and Technology,Department of Microelectronics Engineering,Kaohsiung,Taiwan","institution_ids":["https://openalex.org/I43518871","https://openalex.org/I118692353","https://openalex.org/I4387154394","https://openalex.org/I109289231"]},{"raw_affiliation_string":"Department of Microelectronics Engineering, National Kaohsiung University of Science and Technology, Kaohsiung, Taiwan","institution_ids":["https://openalex.org/I4387154394","https://openalex.org/I4387154394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057466122","display_name":"Shen-Hao Tsao","orcid":null},"institutions":[{"id":"https://openalex.org/I4387154394","display_name":"National Kaohsiung University of Science and Technology","ror":"https://ror.org/00hfj7g70","country_code":null,"type":"education","lineage":["https://openalex.org/I4387154394"]},{"id":"https://openalex.org/I43518871","display_name":"National Kaohsiung Marine University","ror":"https://ror.org/00ca6fy54","country_code":"TW","type":"education","lineage":["https://openalex.org/I43518871"]},{"id":"https://openalex.org/I109289231","display_name":"National Kaohsiung First University of Science and Technology","ror":"https://ror.org/03858r716","country_code":"TW","type":"education","lineage":["https://openalex.org/I109289231"]},{"id":"https://openalex.org/I118692353","display_name":"University of Science and Technology","ror":"https://ror.org/05bj7sh33","country_code":"YE","type":"education","lineage":["https://openalex.org/I118692353"]}],"countries":["TW","YE"],"is_corresponding":false,"raw_author_name":"Shen-Hao Tsao","raw_affiliation_strings":["National Kaohsiung University of Science and Technology,Department of Microelectronics Engineering,Kaohsiung,Taiwan","Department of Microelectronics Engineering, National Kaohsiung University of Science and Technology, Kaohsiung, Taiwan"],"affiliations":[{"raw_affiliation_string":"National Kaohsiung University of Science and Technology,Department of Microelectronics Engineering,Kaohsiung,Taiwan","institution_ids":["https://openalex.org/I43518871","https://openalex.org/I118692353","https://openalex.org/I4387154394","https://openalex.org/I109289231"]},{"raw_affiliation_string":"Department of Microelectronics Engineering, National Kaohsiung University of Science and Technology, Kaohsiung, Taiwan","institution_ids":["https://openalex.org/I4387154394","https://openalex.org/I4387154394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5035841732","display_name":"Yu-Ya Huang","orcid":null},"institutions":[{"id":"https://openalex.org/I118692353","display_name":"University of Science and Technology","ror":"https://ror.org/05bj7sh33","country_code":"YE","type":"education","lineage":["https://openalex.org/I118692353"]},{"id":"https://openalex.org/I109289231","display_name":"National Kaohsiung First University of Science and Technology","ror":"https://ror.org/03858r716","country_code":"TW","type":"education","lineage":["https://openalex.org/I109289231"]},{"id":"https://openalex.org/I4387154394","display_name":"National Kaohsiung University of Science and Technology","ror":"https://ror.org/00hfj7g70","country_code":null,"type":"education","lineage":["https://openalex.org/I4387154394"]},{"id":"https://openalex.org/I43518871","display_name":"National Kaohsiung Marine University","ror":"https://ror.org/00ca6fy54","country_code":"TW","type":"education","lineage":["https://openalex.org/I43518871"]}],"countries":["TW","YE"],"is_corresponding":false,"raw_author_name":"Yu-Ya Huang","raw_affiliation_strings":["National Kaohsiung University of Science and Technology,Department of Microelectronics Engineering,Kaohsiung,Taiwan","Department of Microelectronics Engineering, National Kaohsiung University of Science and Technology, Kaohsiung, Taiwan"],"affiliations":[{"raw_affiliation_string":"National Kaohsiung University of Science and Technology,Department of Microelectronics Engineering,Kaohsiung,Taiwan","institution_ids":["https://openalex.org/I43518871","https://openalex.org/I118692353","https://openalex.org/I4387154394","https://openalex.org/I109289231"]},{"raw_affiliation_string":"Department of Microelectronics Engineering, National Kaohsiung University of Science and Technology, Kaohsiung, Taiwan","institution_ids":["https://openalex.org/I4387154394","https://openalex.org/I4387154394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101493127","display_name":"Hung-Chang Hsu","orcid":"https://orcid.org/0009-0007-2445-3855"},"institutions":[{"id":"https://openalex.org/I43518871","display_name":"National Kaohsiung Marine University","ror":"https://ror.org/00ca6fy54","country_code":"TW","type":"education","lineage":["https://openalex.org/I43518871"]},{"id":"https://openalex.org/I109289231","display_name":"National Kaohsiung First University of Science and Technology","ror":"https://ror.org/03858r716","country_code":"TW","type":"education","lineage":["https://openalex.org/I109289231"]},{"id":"https://openalex.org/I118692353","display_name":"University of Science and Technology","ror":"https://ror.org/05bj7sh33","country_code":"YE","type":"education","lineage":["https://openalex.org/I118692353"]},{"id":"https://openalex.org/I4387154394","display_name":"National Kaohsiung University of Science and Technology","ror":"https://ror.org/00hfj7g70","country_code":null,"type":"education","lineage":["https://openalex.org/I4387154394"]}],"countries":["TW","YE"],"is_corresponding":false,"raw_author_name":"Hung-Chang Hsu","raw_affiliation_strings":["National Kaohsiung University of Science and Technology,Department of Microelectronics Engineering,Kaohsiung,Taiwan","Department of Microelectronics Engineering, National Kaohsiung University of Science and Technology, Kaohsiung, Taiwan"],"affiliations":[{"raw_affiliation_string":"National Kaohsiung University of Science and Technology,Department of Microelectronics Engineering,Kaohsiung,Taiwan","institution_ids":["https://openalex.org/I43518871","https://openalex.org/I118692353","https://openalex.org/I4387154394","https://openalex.org/I109289231"]},{"raw_affiliation_string":"Department of Microelectronics Engineering, National Kaohsiung University of Science and Technology, Kaohsiung, Taiwan","institution_ids":["https://openalex.org/I4387154394","https://openalex.org/I4387154394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027370534","display_name":"You-Ru Zhong","orcid":null},"institutions":[{"id":"https://openalex.org/I109289231","display_name":"National Kaohsiung First University of Science and Technology","ror":"https://ror.org/03858r716","country_code":"TW","type":"education","lineage":["https://openalex.org/I109289231"]},{"id":"https://openalex.org/I43518871","display_name":"National Kaohsiung Marine University","ror":"https://ror.org/00ca6fy54","country_code":"TW","type":"education","lineage":["https://openalex.org/I43518871"]},{"id":"https://openalex.org/I118692353","display_name":"University of Science and Technology","ror":"https://ror.org/05bj7sh33","country_code":"YE","type":"education","lineage":["https://openalex.org/I118692353"]},{"id":"https://openalex.org/I4387154394","display_name":"National Kaohsiung University of Science and Technology","ror":"https://ror.org/00hfj7g70","country_code":null,"type":"education","lineage":["https://openalex.org/I4387154394"]}],"countries":["TW","YE"],"is_corresponding":false,"raw_author_name":"You-Ru Zhong","raw_affiliation_strings":["National Kaohsiung University of Science and Technology,Department of Microelectronics Engineering,Kaohsiung,Taiwan","Department of Microelectronics Engineering, National Kaohsiung University of Science and Technology, Kaohsiung, Taiwan"],"affiliations":[{"raw_affiliation_string":"National Kaohsiung University of Science and Technology,Department of Microelectronics Engineering,Kaohsiung,Taiwan","institution_ids":["https://openalex.org/I43518871","https://openalex.org/I118692353","https://openalex.org/I4387154394","https://openalex.org/I109289231"]},{"raw_affiliation_string":"Department of Microelectronics Engineering, National Kaohsiung University of Science and Technology, Kaohsiung, Taiwan","institution_ids":["https://openalex.org/I4387154394","https://openalex.org/I4387154394"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103077807","display_name":"Po\u2010Chih Chen","orcid":"https://orcid.org/0009-0009-0061-5172"},"institutions":[{"id":"https://openalex.org/I118692353","display_name":"University of Science and Technology","ror":"https://ror.org/05bj7sh33","country_code":"YE","type":"education","lineage":["https://openalex.org/I118692353"]},{"id":"https://openalex.org/I43518871","display_name":"National Kaohsiung Marine University","ror":"https://ror.org/00ca6fy54","country_code":"TW","type":"education","lineage":["https://openalex.org/I43518871"]},{"id":"https://openalex.org/I109289231","display_name":"National Kaohsiung First University of Science and Technology","ror":"https://ror.org/03858r716","country_code":"TW","type":"education","lineage":["https://openalex.org/I109289231"]},{"id":"https://openalex.org/I4387154394","display_name":"National Kaohsiung University of Science and Technology","ror":"https://ror.org/00hfj7g70","country_code":null,"type":"education","lineage":["https://openalex.org/I4387154394"]}],"countries":["TW","YE"],"is_corresponding":false,"raw_author_name":"Po-Chih Chen","raw_affiliation_strings":["National Kaohsiung University of Science and Technology,Department of Microelectronics Engineering,Kaohsiung,Taiwan","Department of Microelectronics Engineering, National Kaohsiung University of Science and Technology, Kaohsiung, Taiwan"],"affiliations":[{"raw_affiliation_string":"National Kaohsiung University of Science and Technology,Department of Microelectronics Engineering,Kaohsiung,Taiwan","institution_ids":["https://openalex.org/I43518871","https://openalex.org/I118692353","https://openalex.org/I4387154394","https://openalex.org/I109289231"]},{"raw_affiliation_string":"Department of Microelectronics Engineering, National Kaohsiung University of Science and Technology, Kaohsiung, Taiwan","institution_ids":["https://openalex.org/I4387154394","https://openalex.org/I4387154394"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5053213851","display_name":"Zhongwei Pan","orcid":null},"institutions":[{"id":"https://openalex.org/I4387154394","display_name":"National Kaohsiung University of Science and Technology","ror":"https://ror.org/00hfj7g70","country_code":null,"type":"education","lineage":["https://openalex.org/I4387154394"]},{"id":"https://openalex.org/I109289231","display_name":"National Kaohsiung First University of Science and Technology","ror":"https://ror.org/03858r716","country_code":"TW","type":"education","lineage":["https://openalex.org/I109289231"]},{"id":"https://openalex.org/I43518871","display_name":"National Kaohsiung Marine University","ror":"https://ror.org/00ca6fy54","country_code":"TW","type":"education","lineage":["https://openalex.org/I43518871"]},{"id":"https://openalex.org/I118692353","display_name":"University of Science and Technology","ror":"https://ror.org/05bj7sh33","country_code":"YE","type":"education","lineage":["https://openalex.org/I118692353"]}],"countries":["TW","YE"],"is_corresponding":false,"raw_author_name":"Zhong-Wei Pan","raw_affiliation_strings":["National Kaohsiung University of Science and Technology,Department of Microelectronics Engineering,Kaohsiung,Taiwan","Department of Microelectronics Engineering, National Kaohsiung University of Science and Technology, Kaohsiung, Taiwan"],"affiliations":[{"raw_affiliation_string":"National Kaohsiung University of Science and Technology,Department of Microelectronics Engineering,Kaohsiung,Taiwan","institution_ids":["https://openalex.org/I43518871","https://openalex.org/I118692353","https://openalex.org/I4387154394","https://openalex.org/I109289231"]},{"raw_affiliation_string":"Department of Microelectronics Engineering, National Kaohsiung University of Science and Technology, Kaohsiung, Taiwan","institution_ids":["https://openalex.org/I4387154394","https://openalex.org/I4387154394"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5036697257"],"corresponding_institution_ids":["https://openalex.org/I109289231","https://openalex.org/I118692353","https://openalex.org/I43518871","https://openalex.org/I4387154394"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.11629038,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"221","last_page":"224"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10107","display_name":"Ferroelectric and Piezoelectric Materials","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12529","display_name":"Ga2O3 and related materials","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/zinc-nitrate","display_name":"Zinc nitrate","score":0.6144988536834717},{"id":"https://openalex.org/keywords/zinc","display_name":"Zinc","score":0.6089017987251282},{"id":"https://openalex.org/keywords/annealing","display_name":"Annealing (glass)","score":0.5229295492172241},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4543033540248871},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.35181349515914917},{"id":"https://openalex.org/keywords/nuclear-chemistry","display_name":"Nuclear chemistry","score":0.3445586562156677},{"id":"https://openalex.org/keywords/mineralogy","display_name":"Mineralogy","score":0.3219829797744751},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.280203640460968},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.2017880380153656},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.1021789014339447}],"concepts":[{"id":"https://openalex.org/C2780793984","wikidata":"https://www.wikidata.org/wiki/Q204863","display_name":"Zinc nitrate","level":3,"score":0.6144988536834717},{"id":"https://openalex.org/C535196362","wikidata":"https://www.wikidata.org/wiki/Q758","display_name":"Zinc","level":2,"score":0.6089017987251282},{"id":"https://openalex.org/C2777855556","wikidata":"https://www.wikidata.org/wiki/Q4339544","display_name":"Annealing (glass)","level":2,"score":0.5229295492172241},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4543033540248871},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.35181349515914917},{"id":"https://openalex.org/C13965031","wikidata":"https://www.wikidata.org/wiki/Q243545","display_name":"Nuclear chemistry","level":1,"score":0.3445586562156677},{"id":"https://openalex.org/C199289684","wikidata":"https://www.wikidata.org/wiki/Q83353","display_name":"Mineralogy","level":1,"score":0.3219829797744751},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.280203640460968},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.2017880380153656},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.1021789014339447}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/ickii55100.2022.9983549","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ickii55100.2022.9983549","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 IEEE 5th International Conference on Knowledge Innovation and Invention (ICKII )","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W1990087174","https://openalex.org/W1998562196","https://openalex.org/W2016162937","https://openalex.org/W2025516544","https://openalex.org/W2060329875","https://openalex.org/W2083215608","https://openalex.org/W2130028915","https://openalex.org/W2272479957","https://openalex.org/W2322276060","https://openalex.org/W2514352836","https://openalex.org/W2954703367"],"related_works":["https://openalex.org/W2067936761","https://openalex.org/W2003947327","https://openalex.org/W2047842011","https://openalex.org/W4200550291","https://openalex.org/W3012338659","https://openalex.org/W2012891347","https://openalex.org/W2068745329","https://openalex.org/W2071970059","https://openalex.org/W2905881354","https://openalex.org/W2802733232"],"abstract_inverted_index":{"LPD":[0,23],"method":[1,24],"has":[2,218],"many":[3],"advantages":[4],"such":[5],"as":[6,109],"low-temperature":[7],"deposition,":[8],"large":[9],"deposition":[10],"area,":[11],"good":[12,16,219],"film":[13,91,211],"uniformity,":[14],"and":[15,53,83,102,143,182,217],"step":[17],"coverage.":[18],"Therefore,":[19],"we":[20,86],"choose":[21],"the":[22,77,88,110,203],"to":[25,70],"deposit":[26],"zinc":[27,54,72,81,94,204],"titanate":[28,73,205],"(ZnTiO":[29,206],"<inf":[30,40,44,48,57,61,65,121,139,148,207],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[31,41,45,49,58,62,66,122,140,149,159,163,175,179,187,191,195,208],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">3</inf>":[32,59,209],")":[33,43,51,60,142,151,210],"thin":[34,90],"films,":[35],"using":[36,107],"hexafluorotitanium":[37],"ammonia":[38],"((NH":[39],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">4</inf>":[42],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</inf>":[46,63,67],"TiF":[47],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">6</inf>":[50],"powder":[52,69],"nitrate":[55,82,95],"(Zn(NO":[56],"\u20226H":[64],"O)":[68],"synthesize":[71],"film.":[74],"By":[75],"changing":[76],"molar":[78,99],"concentration":[79,101],"of":[80],"post-deposition":[84,111],"annealing,":[85],"obtain":[87],"best":[89],"data.":[92],"When":[93],"was":[96],"1.3":[97],"M":[98],"volume":[100],"annealed":[103],"for":[104],"one":[105],"hour":[106],"nitrogen":[108],"annealing":[112],"gas,":[113],"measured":[114],"electrical":[115,220],"properties":[116],"including":[117],"oxide":[118,131,135],"capacitance":[119],"(C":[120],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">ox</inf>":[123],"),":[124],"leakage":[125],"current":[126],"Density,":[127],"k":[128],"value,":[129],"equivalent":[130],"thickness":[132],"(EOT)":[133],"effective":[134],"charge":[136],"density":[137,146],"(Q":[138],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">EFF</inf>":[141],"interface":[144],"state":[145],"(D":[147],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">it</inf>":[150],"are":[152],"50.1":[153],"pF,":[154],"1.94":[155],"\u00d7":[156,172,184],"10":[157,173,185],"<sup":[158,162,174,178,186,190,194],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">-5</sup>":[160],"A/cm":[161],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sup>":[164],"at":[165],"+5":[166],"V,":[167],"16.95,":[168],"48.8":[169],"nm,":[170],"1.76":[171],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">11</sup>":[176,188],"cm":[177,189],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">-2</sup>":[180,192],",":[181,197],"6.2":[183],"eV":[193],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">-1</sup>":[196],"respectively.":[198],"The":[199],"data":[200],"reveal":[201],"that":[202],"is":[212],"successfully":[213],"deposited":[214],"on":[215],"Si":[216],"properties.":[221]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}