{"id":"https://openalex.org/W2970316598","doi":"https://doi.org/10.1109/icinfa.2018.8812366","title":"Design of a Vacuum-Assisted Soft UV-Imprint System for Micro-Nano Structures Patterning on Nonplanar Surfaces","display_name":"Design of a Vacuum-Assisted Soft UV-Imprint System for Micro-Nano Structures Patterning on Nonplanar Surfaces","publication_year":2018,"publication_date":"2018-08-01","ids":{"openalex":"https://openalex.org/W2970316598","doi":"https://doi.org/10.1109/icinfa.2018.8812366","mag":"2970316598"},"language":"en","primary_location":{"id":"doi:10.1109/icinfa.2018.8812366","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icinfa.2018.8812366","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE International Conference on Information and Automation (ICIA)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5007799399","display_name":"Yaoxin Chen","orcid":null},"institutions":[{"id":"https://openalex.org/I4210145761","display_name":"Shenzhen Institutes of Advanced Technology","ror":"https://ror.org/04gh4er46","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210145761"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Yaoxin Chen","raw_affiliation_strings":["Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, Guangdong, China"],"affiliations":[{"raw_affiliation_string":"Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, Guangdong, China","institution_ids":["https://openalex.org/I4210145761"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102866810","display_name":"Cui Ma","orcid":"https://orcid.org/0000-0003-3586-5138"},"institutions":[{"id":"https://openalex.org/I4210145761","display_name":"Shenzhen Institutes of Advanced Technology","ror":"https://ror.org/04gh4er46","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210145761"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Cui Ma","raw_affiliation_strings":["Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, Guangdong, China"],"affiliations":[{"raw_affiliation_string":"Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, Guangdong, China","institution_ids":["https://openalex.org/I4210145761"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037268984","display_name":"Ming Yu","orcid":"https://orcid.org/0000-0001-7080-167X"},"institutions":[{"id":"https://openalex.org/I4210145761","display_name":"Shenzhen Institutes of Advanced Technology","ror":"https://ror.org/04gh4er46","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210145761"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ming Yu","raw_affiliation_strings":["Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, Guangdong, China"],"affiliations":[{"raw_affiliation_string":"Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, Guangdong, China","institution_ids":["https://openalex.org/I4210145761"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113179840","display_name":"Jiamin Yu","orcid":null},"institutions":[{"id":"https://openalex.org/I204553293","display_name":"China University of Petroleum, Beijing","ror":"https://ror.org/041qf4r12","country_code":"CN","type":"education","lineage":["https://openalex.org/I204553293"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jiamin Yu","raw_affiliation_strings":["College of Chemical Engineering, China University of Petroleum, Beijing, China"],"affiliations":[{"raw_affiliation_string":"College of Chemical Engineering, China University of Petroleum, Beijing, China","institution_ids":["https://openalex.org/I204553293"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100384035","display_name":"Hui Lin","orcid":"https://orcid.org/0000-0002-9145-6630"},"institutions":[{"id":"https://openalex.org/I4210145761","display_name":"Shenzhen Institutes of Advanced Technology","ror":"https://ror.org/04gh4er46","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210145761"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hui Lin","raw_affiliation_strings":["Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, Guangdong, China"],"affiliations":[{"raw_affiliation_string":"Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, Guangdong, China","institution_ids":["https://openalex.org/I4210145761"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5007799399"],"corresponding_institution_ids":["https://openalex.org/I4210145761"],"apc_list":null,"apc_paid":null,"fwci":0.109,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.48318993,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"20","issue":null,"first_page":"1037","last_page":"1041"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10412","display_name":"Microfluidic and Capillary Electrophoresis Applications","score":0.9958000183105469,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9897000193595886,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.762779712677002},{"id":"https://openalex.org/keywords/grating","display_name":"Grating","score":0.7119435667991638},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.6250331401824951},{"id":"https://openalex.org/keywords/nano","display_name":"Nano-","score":0.5716745853424072},{"id":"https://openalex.org/keywords/planar","display_name":"Planar","score":0.4977305233478546},{"id":"https://openalex.org/keywords/diffraction-grating","display_name":"Diffraction grating","score":0.4737732410430908},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.4730100929737091},{"id":"https://openalex.org/keywords/mold","display_name":"Mold","score":0.46632105112075806},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.41967281699180603},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.408790647983551},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.17760252952575684},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.14403313398361206}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.762779712677002},{"id":"https://openalex.org/C2777813233","wikidata":"https://www.wikidata.org/wiki/Q1527816","display_name":"Grating","level":2,"score":0.7119435667991638},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.6250331401824951},{"id":"https://openalex.org/C2780357685","wikidata":"https://www.wikidata.org/wiki/Q154357","display_name":"Nano-","level":2,"score":0.5716745853424072},{"id":"https://openalex.org/C134786449","wikidata":"https://www.wikidata.org/wiki/Q3391255","display_name":"Planar","level":2,"score":0.4977305233478546},{"id":"https://openalex.org/C126753812","wikidata":"https://www.wikidata.org/wiki/Q653294","display_name":"Diffraction grating","level":3,"score":0.4737732410430908},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.4730100929737091},{"id":"https://openalex.org/C2780566776","wikidata":"https://www.wikidata.org/wiki/Q159341","display_name":"Mold","level":2,"score":0.46632105112075806},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.41967281699180603},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.408790647983551},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.17760252952575684},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.14403313398361206},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C121684516","wikidata":"https://www.wikidata.org/wiki/Q7600677","display_name":"Computer graphics (images)","level":1,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icinfa.2018.8812366","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icinfa.2018.8812366","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 IEEE International Conference on Information and Automation (ICIA)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W1980590573","https://openalex.org/W2011686879","https://openalex.org/W2022948920","https://openalex.org/W2027571938","https://openalex.org/W2031647660","https://openalex.org/W2031732057","https://openalex.org/W2032291157","https://openalex.org/W2039123430","https://openalex.org/W2044815094","https://openalex.org/W2062074587","https://openalex.org/W6658448381"],"related_works":["https://openalex.org/W2073524920","https://openalex.org/W4283512484","https://openalex.org/W2240569495","https://openalex.org/W2089749866","https://openalex.org/W2126995815","https://openalex.org/W2351403114","https://openalex.org/W2055615132","https://openalex.org/W2076974829","https://openalex.org/W2548693673","https://openalex.org/W4280537711"],"abstract_inverted_index":{"Fabricating":[0],"micro-nano":[1,60],"structures":[2,61],"on":[3,62,77,143],"nonplanar":[4,63,144],"substrates":[5],"is":[6,88,101,117,131],"technically":[7],"challenging":[8],"and":[9,43,53,112],"high":[10],"cost":[11],"via":[12],"conventional":[13],"processes.":[14],"In":[15],"this":[16],"paper,":[17],"we":[18,69],"present":[19],"a":[20,27,50,71,78,82,91,104],"new":[21],"soft":[22,31,84,98,109],"UV-imprint":[23,32,110],"method,":[24,68],"along":[25],"with":[26],"custom":[28],"designed":[29],"vacuum-assisted":[30],"system":[33,111,139],"that":[34,134],"allows":[35],"precise":[36],"control":[37],"of":[38,127,137],"imprint":[39],"pressure,":[40],"cure":[41],"time":[42],"so":[44],"on.":[45],"The":[46],"proposed":[47],"method":[48],"provides":[49],"highly":[51],"efficient":[52],"low-cost":[54],"way":[55],"to":[56,103,119,140],"fabricate":[57,141],"high-resolution":[58],"patterning":[59],"substrates.":[64,145],"To":[65],"verify":[66],"the":[67,97,113,120,124,128,135],"fabricated":[70],"1600":[72],"nm":[73],"pitch":[74],"blazed":[75,94,114],"grating":[76,115,130],"concave":[79,105,121,129],"substrate.":[80,122],"First,":[81],"flexible":[83],"mold,":[85],"i.e.":[86],"PDMS,":[87],"copied":[89],"from":[90],"commercial":[92],"planar":[93],"grating.":[95],"Second,":[96],"PDMS":[99],"mold":[100],"imprinted":[102],"substrate":[106],"through":[107],"our":[108,138],"profile":[116,126],"transferred":[118],"Finally,":[123],"surface":[125],"tested,":[132],"demonstrating":[133],"capacity":[136],"microstructures":[142]},"counts_by_year":[{"year":2020,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}