{"id":"https://openalex.org/W1619560782","doi":"https://doi.org/10.1109/icinfa.2015.7279425","title":"Design and fabrication of a two-axis micro-motion machine for precision alignment","display_name":"Design and fabrication of a two-axis micro-motion machine for precision alignment","publication_year":2015,"publication_date":"2015-08-01","ids":{"openalex":"https://openalex.org/W1619560782","doi":"https://doi.org/10.1109/icinfa.2015.7279425","mag":"1619560782"},"language":"en","primary_location":{"id":"doi:10.1109/icinfa.2015.7279425","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icinfa.2015.7279425","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE International Conference on Information and Automation","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5012050607","display_name":"Man Kit Law","orcid":null},"institutions":[{"id":"https://openalex.org/I204512498","display_name":"University of Macau","ror":"https://ror.org/01r4q9n85","country_code":"MO","type":"education","lineage":["https://openalex.org/I204512498"]}],"countries":["MO"],"is_corresponding":true,"raw_author_name":"Man Kit Law","raw_affiliation_strings":["Department of Electromechanical Engineering, University of Macau, Macau, China","[Department of Electromechanical Engineering, University of Macau, Macao, China]"],"affiliations":[{"raw_affiliation_string":"Department of Electromechanical Engineering, University of Macau, Macau, China","institution_ids":["https://openalex.org/I204512498"]},{"raw_affiliation_string":"[Department of Electromechanical Engineering, University of Macau, Macao, China]","institution_ids":["https://openalex.org/I204512498"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034264754","display_name":"Ka Cheong Chiang","orcid":null},"institutions":[{"id":"https://openalex.org/I204512498","display_name":"University of Macau","ror":"https://ror.org/01r4q9n85","country_code":"MO","type":"education","lineage":["https://openalex.org/I204512498"]}],"countries":["MO"],"is_corresponding":false,"raw_author_name":"Ka Cheong Chiang","raw_affiliation_strings":["Department of Electromechanical Engineering, University of Macau, Macau, China","[Department of Electromechanical Engineering, University of Macau, Macao, China]"],"affiliations":[{"raw_affiliation_string":"Department of Electromechanical Engineering, University of Macau, Macau, China","institution_ids":["https://openalex.org/I204512498"]},{"raw_affiliation_string":"[Department of Electromechanical Engineering, University of Macau, Macao, China]","institution_ids":["https://openalex.org/I204512498"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100763750","display_name":"Qingsong Xu","orcid":"https://orcid.org/0000-0002-1700-322X"},"institutions":[{"id":"https://openalex.org/I204512498","display_name":"University of Macau","ror":"https://ror.org/01r4q9n85","country_code":"MO","type":"education","lineage":["https://openalex.org/I204512498"]}],"countries":["MO"],"is_corresponding":false,"raw_author_name":"Qingsong Xu","raw_affiliation_strings":["Department of Electromechanical Engineering, University of Macau, Macau, China","[Department of Electromechanical Engineering, University of Macau, Macao, China]"],"affiliations":[{"raw_affiliation_string":"Department of Electromechanical Engineering, University of Macau, Macau, China","institution_ids":["https://openalex.org/I204512498"]},{"raw_affiliation_string":"[Department of Electromechanical Engineering, University of Macau, Macao, China]","institution_ids":["https://openalex.org/I204512498"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5012050607"],"corresponding_institution_ids":["https://openalex.org/I204512498"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.04196592,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"42","issue":null,"first_page":"958","last_page":"963"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/decoupling","display_name":"Decoupling (probability)","score":0.7803865671157837},{"id":"https://openalex.org/keywords/mechanism","display_name":"Mechanism (biology)","score":0.6431001424789429},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5497629046440125},{"id":"https://openalex.org/keywords/machine-tool","display_name":"Machine tool","score":0.5162922739982605},{"id":"https://openalex.org/keywords/electromagnetic-coil","display_name":"Electromagnetic coil","score":0.5139250755310059},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5138554573059082},{"id":"https://openalex.org/keywords/voice-coil","display_name":"Voice coil","score":0.4999959468841553},{"id":"https://openalex.org/keywords/software","display_name":"Software","score":0.4996018409729004},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.4624623954296112},{"id":"https://openalex.org/keywords/motion-analysis","display_name":"Motion analysis","score":0.45261555910110474},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.4168369770050049},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.31034547090530396},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.2310488522052765},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.1974932849407196},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.10392415523529053},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.08841127157211304}],"concepts":[{"id":"https://openalex.org/C205606062","wikidata":"https://www.wikidata.org/wiki/Q5249645","display_name":"Decoupling (probability)","level":2,"score":0.7803865671157837},{"id":"https://openalex.org/C89611455","wikidata":"https://www.wikidata.org/wiki/Q6804646","display_name":"Mechanism (biology)","level":2,"score":0.6431001424789429},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5497629046440125},{"id":"https://openalex.org/C5941749","wikidata":"https://www.wikidata.org/wiki/Q19768","display_name":"Machine tool","level":2,"score":0.5162922739982605},{"id":"https://openalex.org/C30403606","wikidata":"https://www.wikidata.org/wiki/Q2981904","display_name":"Electromagnetic coil","level":2,"score":0.5139250755310059},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5138554573059082},{"id":"https://openalex.org/C131513009","wikidata":"https://www.wikidata.org/wiki/Q1369121","display_name":"Voice coil","level":3,"score":0.4999959468841553},{"id":"https://openalex.org/C2777904410","wikidata":"https://www.wikidata.org/wiki/Q7397","display_name":"Software","level":2,"score":0.4996018409729004},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.4624623954296112},{"id":"https://openalex.org/C2777036941","wikidata":"https://www.wikidata.org/wiki/Q6917771","display_name":"Motion analysis","level":2,"score":0.45261555910110474},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.4168369770050049},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.31034547090530396},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.2310488522052765},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.1974932849407196},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.10392415523529053},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.08841127157211304},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icinfa.2015.7279425","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icinfa.2015.7279425","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 IEEE International Conference on Information and Automation","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1984377271","https://openalex.org/W1994283401","https://openalex.org/W2010842940","https://openalex.org/W2033208252","https://openalex.org/W2038514957","https://openalex.org/W2042693342","https://openalex.org/W2054877676","https://openalex.org/W2088984380","https://openalex.org/W2090519327","https://openalex.org/W2123896125","https://openalex.org/W2127404755","https://openalex.org/W2160933598","https://openalex.org/W2377595891"],"related_works":["https://openalex.org/W3151157253","https://openalex.org/W2353459685","https://openalex.org/W2639723818","https://openalex.org/W2022087018","https://openalex.org/W1512992826","https://openalex.org/W2349362451","https://openalex.org/W2792653693","https://openalex.org/W2333775395","https://openalex.org/W2548680753","https://openalex.org/W2004416123"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"the":[3,40,71,89,119,128,132],"design,":[4],"analysis,":[5],"fabrication,":[6],"and":[7,34],"experimental":[8,114],"testing":[9],"of":[10,113,131],"a":[11,24,35,58,103],"two-axis":[12,72],"micro-motion":[13],"machine":[14,22,105],"dedicated":[15],"to":[16,69],"precision":[17],"alignment":[18,26],"applications.":[19],"The":[20,43,74],"designed":[21],"features":[23],"long":[25],"distance":[27],"over":[28,93],"\u00b15":[29],"mm":[30,95],"in":[31,39,99],"each":[32,100],"axis":[33],"well":[36],"decoupling":[37],"motion":[38,96],"two":[41],"axes.":[42],"design":[44,77],"is":[45,78,106],"devised":[46],"using":[47,122],"metal":[48],"flexure":[49,75],"mechanisms":[50],"based":[51],"on":[52,118],"multistage":[53],"leaf":[54],"spring,":[55],"which":[56],"allows":[57],"precise":[59],"movement":[60],"without":[61,97],"friction.":[62],"Two":[63],"voice":[64],"coil":[65],"motors":[66],"are":[67,116],"used":[68],"produce":[70],"motion.":[73],"mechanism":[76,90],"validated":[79],"by":[80,121],"finiteelement":[81],"analysis":[82],"(FEA)":[83],"simulation":[84],"study.":[85],"Results":[86],"confirm":[87],"that":[88],"can":[91],"provide":[92],"\u00b17":[94],"failure":[98],"axis.":[101],"Moreover,":[102],"prototype":[104,120],"fabricated":[107],"via":[108],"EDM":[109],"process.":[110],"A":[111],"series":[112],"studies":[115],"performed":[117],"LabVIEW":[123],"software.":[124],"Experimented":[125],"results":[126],"demonstrate":[127],"satisfactory":[129],"performance":[130],"developed":[133],"machine.":[134]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}
