{"id":"https://openalex.org/W4389388516","doi":"https://doi.org/10.1109/icicdt59917.2023.10332324","title":"Anomalous Wafer Map Detection and Localization using Unsupervised Learning","display_name":"Anomalous Wafer Map Detection and Localization using Unsupervised Learning","publication_year":2023,"publication_date":"2023-09-25","ids":{"openalex":"https://openalex.org/W4389388516","doi":"https://doi.org/10.1109/icicdt59917.2023.10332324"},"language":"en","primary_location":{"id":"doi:10.1109/icicdt59917.2023.10332324","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/icicdt59917.2023.10332324","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 International Conference on IC Design and Technology (ICICDT)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100351935","display_name":"Lin Zhao","orcid":"https://orcid.org/0000-0003-2567-627X"},"institutions":[{"id":"https://openalex.org/I172675005","display_name":"Nanyang Technological University","ror":"https://ror.org/02e7b5302","country_code":"SG","type":"education","lineage":["https://openalex.org/I172675005"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Lin Zhao","raw_affiliation_strings":["Nanyang Technological Uinversity,School of Computer Science and Engineering,Singapore","School of Computer Science and Engineering, Nanyang Technological Uinversity, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanyang Technological Uinversity,School of Computer Science and Engineering,Singapore","institution_ids":["https://openalex.org/I172675005"]},{"raw_affiliation_string":"School of Computer Science and Engineering, Nanyang Technological Uinversity, Singapore","institution_ids":["https://openalex.org/I172675005"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5006146465","display_name":"Chai Kiat Yeo","orcid":"https://orcid.org/0000-0002-7618-1472"},"institutions":[{"id":"https://openalex.org/I172675005","display_name":"Nanyang Technological University","ror":"https://ror.org/02e7b5302","country_code":"SG","type":"education","lineage":["https://openalex.org/I172675005"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Chai Kiat Yeo","raw_affiliation_strings":["Nanyang Technological Uinversity,School of Computer Science and Engineering,Singapore","School of Computer Science and Engineering, Nanyang Technological Uinversity, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanyang Technological Uinversity,School of Computer Science and Engineering,Singapore","institution_ids":["https://openalex.org/I172675005"]},{"raw_affiliation_string":"School of Computer Science and Engineering, Nanyang Technological Uinversity, Singapore","institution_ids":["https://openalex.org/I172675005"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I172675005"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"80","last_page":"83"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13114","display_name":"Image Processing Techniques and Applications","score":0.983299970626831,"subfield":{"id":"https://openalex.org/subfields/2214","display_name":"Media Technology"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.7381049990653992},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6640049815177917},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.6499319076538086},{"id":"https://openalex.org/keywords/pixel","display_name":"Pixel","score":0.5870348215103149},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.5599363446235657},{"id":"https://openalex.org/keywords/pattern-recognition","display_name":"Pattern recognition (psychology)","score":0.5222833156585693},{"id":"https://openalex.org/keywords/wafer-fabrication","display_name":"Wafer fabrication","score":0.4976055920124054},{"id":"https://openalex.org/keywords/unsupervised-learning","display_name":"Unsupervised learning","score":0.4869000017642975},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.48125216364860535},{"id":"https://openalex.org/keywords/quality-assurance","display_name":"Quality assurance","score":0.4553445279598236},{"id":"https://openalex.org/keywords/quality","display_name":"Quality (philosophy)","score":0.439191997051239},{"id":"https://openalex.org/keywords/identification","display_name":"Identification (biology)","score":0.41122424602508545},{"id":"https://openalex.org/keywords/data-mining","display_name":"Data mining","score":0.37551480531692505},{"id":"https://openalex.org/keywords/machine-learning","display_name":"Machine learning","score":0.32315248250961304},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1694401204586029}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.7381049990653992},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6640049815177917},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.6499319076538086},{"id":"https://openalex.org/C160633673","wikidata":"https://www.wikidata.org/wiki/Q355198","display_name":"Pixel","level":2,"score":0.5870348215103149},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.5599363446235657},{"id":"https://openalex.org/C153180895","wikidata":"https://www.wikidata.org/wiki/Q7148389","display_name":"Pattern recognition (psychology)","level":2,"score":0.5222833156585693},{"id":"https://openalex.org/C35750839","wikidata":"https://www.wikidata.org/wiki/Q7959421","display_name":"Wafer fabrication","level":3,"score":0.4976055920124054},{"id":"https://openalex.org/C8038995","wikidata":"https://www.wikidata.org/wiki/Q1152135","display_name":"Unsupervised learning","level":2,"score":0.4869000017642975},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.48125216364860535},{"id":"https://openalex.org/C106436119","wikidata":"https://www.wikidata.org/wiki/Q836575","display_name":"Quality assurance","level":3,"score":0.4553445279598236},{"id":"https://openalex.org/C2779530757","wikidata":"https://www.wikidata.org/wiki/Q1207505","display_name":"Quality (philosophy)","level":2,"score":0.439191997051239},{"id":"https://openalex.org/C116834253","wikidata":"https://www.wikidata.org/wiki/Q2039217","display_name":"Identification (biology)","level":2,"score":0.41122424602508545},{"id":"https://openalex.org/C124101348","wikidata":"https://www.wikidata.org/wiki/Q172491","display_name":"Data mining","level":1,"score":0.37551480531692505},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.32315248250961304},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1694401204586029},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C59822182","wikidata":"https://www.wikidata.org/wiki/Q441","display_name":"Botany","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C111472728","wikidata":"https://www.wikidata.org/wiki/Q9471","display_name":"Epistemology","level":1,"score":0.0},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C2778618615","wikidata":"https://www.wikidata.org/wiki/Q4008393","display_name":"External quality assessment","level":2,"score":0.0},{"id":"https://openalex.org/C21547014","wikidata":"https://www.wikidata.org/wiki/Q1423657","display_name":"Operations management","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icicdt59917.2023.10332324","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/icicdt59917.2023.10332324","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 International Conference on IC Design and Technology (ICICDT)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.6600000262260437,"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W2020286945","https://openalex.org/W2109706083","https://openalex.org/W2194775991","https://openalex.org/W3023868590","https://openalex.org/W3137048602","https://openalex.org/W3169651898","https://openalex.org/W3183929517","https://openalex.org/W3193550730","https://openalex.org/W4213243056","https://openalex.org/W4317619503","https://openalex.org/W4360995496","https://openalex.org/W6777869702","https://openalex.org/W6798738871"],"related_works":["https://openalex.org/W2170726572","https://openalex.org/W2146435486","https://openalex.org/W2006086900","https://openalex.org/W1483119123","https://openalex.org/W2377558694","https://openalex.org/W2992897358","https://openalex.org/W2394172622","https://openalex.org/W1594978932","https://openalex.org/W2083418455","https://openalex.org/W2140718007"],"abstract_inverted_index":{"Semiconductor":[0],"manufacturing":[1,46,100],"has":[2],"achieved":[3],"significant":[4],"advancement":[5],"with":[6,57,93],"the":[7,28,44,87,99,137,154,158,181],"help":[8],"of":[9,22,32,40,51,61,162,172,178],"data":[10,164],"engineering":[11],"and":[12,30,83,150,174],"artificial":[13],"intelligence.":[14],"Wafer":[15],"map":[16],"inspection":[17],"is":[18,55,68,96,151],"an":[19,107,169],"essential":[20],"aspect":[21],"quality":[23],"assurance":[24],"because":[25],"it":[26],"enables":[27],"detection":[29],"identification":[31],"abnormal":[33,62],"wafer":[34,53,63,115,128],"maps":[35,54,116],"among":[36],"a":[37,48,58,69,91,175],"large":[38],"quantity":[39],"normal":[41,52],"ones.":[42],"In":[43,102,130],"actual":[45],"process,":[47],"substantial":[49],"volume":[50],"generated":[56],"rare":[59],"number":[60],"maps.":[64,129],"Detecting":[65],"such":[66],"occurrences":[67],"challenging":[70],"task.":[71],"Most":[72],"existing":[73],"works":[74],"employ":[75],"various":[76],"supervised":[77,155],"techniques":[78],"which":[79,112],"require":[80],"extensive":[81],"time":[82],"effort":[84],"to":[85,124,153],"label":[86],"data.":[88],"Moreover,":[89],"obtaining":[90],"dataset":[92],"balanced":[94],"distribution":[95],"impractical":[97],"in":[98,111],"industry.":[101],"this":[103],"paper,":[104],"we":[105],"introduce":[106],"unsupervised":[108,148],"end-to-end":[109],"approach":[110,134,145],"only":[113],"unlabelled":[114],"(i.e.":[117],"mostly":[118],"normal)":[119],"are":[120],"utilized":[121],"for":[122,160,165],"training":[123],"efficiently":[125],"identify":[126],"anomalous":[127,163],"addition,":[131],"our":[132,144],"proposed":[133],"can":[135],"localize":[136],"defective":[138],"regions.":[139],"Experimental":[140],"results":[141],"show":[142],"that":[143],"outperforms":[146],"other":[147],"methods":[149],"comparable":[152],"approaches":[156],"without":[157],"need":[159],"annotation":[161],"training.":[166],"We":[167],"achieve":[168],"image-level":[170],"AUROC":[171,177],"0.97":[173],"pixel-level":[176],"0.949":[179],"on":[180],"WM-811K":[182],"dataset.":[183]},"counts_by_year":[],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}