{"id":"https://openalex.org/W4389372524","doi":"https://doi.org/10.1109/icicdt59917.2023.10332292","title":"High-Frequency Operation of Low-Power Single-Flux-Quantum Circuits Fabricated Using 250 A/cm<sup>2</sup> Nb/AlO<sub>x</sub>/Nb Planarization Process","display_name":"High-Frequency Operation of Low-Power Single-Flux-Quantum Circuits Fabricated Using 250 A/cm<sup>2</sup> Nb/AlO<sub>x</sub>/Nb Planarization Process","publication_year":2023,"publication_date":"2023-09-25","ids":{"openalex":"https://openalex.org/W4389372524","doi":"https://doi.org/10.1109/icicdt59917.2023.10332292"},"language":"en","primary_location":{"id":"doi:10.1109/icicdt59917.2023.10332292","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/icicdt59917.2023.10332292","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 International Conference on IC Design and Technology (ICICDT)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5019744439","display_name":"Masamitsu Tanaka","orcid":"https://orcid.org/0000-0001-8577-3819"},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Masamitsu Tanaka","raw_affiliation_strings":["Nagoya University,Department of Engineering,Nagoya,Japan","Department of Engineering, Nagoya University, Nagoya, Japan"],"affiliations":[{"raw_affiliation_string":"Nagoya University,Department of Engineering,Nagoya,Japan","institution_ids":["https://openalex.org/I60134161"]},{"raw_affiliation_string":"Department of Engineering, Nagoya University, Nagoya, Japan","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022519339","display_name":"Yoshihiro Kitagawa","orcid":null},"institutions":[{"id":"https://openalex.org/I118347220","display_name":"NEC (Japan)","ror":"https://ror.org/04jndar25","country_code":"JP","type":"company","lineage":["https://openalex.org/I118347220"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yoshihiro Kitagawa","raw_affiliation_strings":["Secure System Platform Research Laboratories NEC Corporation,Kawasaki,Japan","Secure System Platform Research Laboratories NEC Corporation, Kawasaki, Japan"],"affiliations":[{"raw_affiliation_string":"Secure System Platform Research Laboratories NEC Corporation,Kawasaki,Japan","institution_ids":["https://openalex.org/I118347220"]},{"raw_affiliation_string":"Secure System Platform Research Laboratories NEC Corporation, Kawasaki, Japan","institution_ids":["https://openalex.org/I118347220"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039445455","display_name":"T. Satoh","orcid":"https://orcid.org/0000-0001-8965-7663"},"institutions":[{"id":"https://openalex.org/I118347220","display_name":"NEC (Japan)","ror":"https://ror.org/04jndar25","country_code":"JP","type":"company","lineage":["https://openalex.org/I118347220"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Tetsuro Satoh","raw_affiliation_strings":["Secure System Platform Research Laboratories NEC Corporation,Kawasaki,Japan","Secure System Platform Research Laboratories NEC Corporation, Kawasaki, Japan"],"affiliations":[{"raw_affiliation_string":"Secure System Platform Research Laboratories NEC Corporation,Kawasaki,Japan","institution_ids":["https://openalex.org/I118347220"]},{"raw_affiliation_string":"Secure System Platform Research Laboratories NEC Corporation, Kawasaki, Japan","institution_ids":["https://openalex.org/I118347220"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5046026372","display_name":"Tsuyoshi Yamamoto","orcid":"https://orcid.org/0000-0002-2804-5994"},"institutions":[{"id":"https://openalex.org/I118347220","display_name":"NEC (Japan)","ror":"https://ror.org/04jndar25","country_code":"JP","type":"company","lineage":["https://openalex.org/I118347220"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Tsuyoshi Yamamoto","raw_affiliation_strings":["Secure System Platform Research Laboratories NEC Corporation,Kawasaki,Japan","Secure System Platform Research Laboratories NEC Corporation, Kawasaki, Japan"],"affiliations":[{"raw_affiliation_string":"Secure System Platform Research Laboratories NEC Corporation,Kawasaki,Japan","institution_ids":["https://openalex.org/I118347220"]},{"raw_affiliation_string":"Secure System Platform Research Laboratories NEC Corporation, Kawasaki, Japan","institution_ids":["https://openalex.org/I118347220"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5019744439"],"corresponding_institution_ids":["https://openalex.org/I60134161"],"apc_list":null,"apc_paid":null,"fwci":0.202,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.51090136,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"E86-C","issue":null,"first_page":"84","last_page":"87"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10037","display_name":"Physics of Superconductivity and Magnetism","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10037","display_name":"Physics of Superconductivity and Magnetism","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10382","display_name":"Quantum and electron transport phenomena","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10022","display_name":"Semiconductor Quantum Structures and Devices","score":0.9980999827384949,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/magnetic-flux-quantum","display_name":"Magnetic flux quantum","score":0.7963129281997681},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5990495681762695},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5898690819740295},{"id":"https://openalex.org/keywords/electronic-circuit","display_name":"Electronic circuit","score":0.5866662263870239},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5461210012435913},{"id":"https://openalex.org/keywords/rapid-single-flux-quantum","display_name":"Rapid single flux quantum","score":0.5086294412612915},{"id":"https://openalex.org/keywords/resistor","display_name":"Resistor","score":0.5036019682884216},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.48828673362731934},{"id":"https://openalex.org/keywords/chemical-mechanical-planarization","display_name":"Chemical-mechanical planarization","score":0.4618356227874756},{"id":"https://openalex.org/keywords/integrated-circuit","display_name":"Integrated circuit","score":0.44440677762031555},{"id":"https://openalex.org/keywords/digital-electronics","display_name":"Digital electronics","score":0.4316663146018982},{"id":"https://openalex.org/keywords/logic-gate","display_name":"Logic gate","score":0.418447881937027},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.41796618700027466},{"id":"https://openalex.org/keywords/shift-register","display_name":"Shift register","score":0.41448426246643066},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3238767385482788},{"id":"https://openalex.org/keywords/superconductivity","display_name":"Superconductivity","score":0.24567431211471558},{"id":"https://openalex.org/keywords/josephson-effect","display_name":"Josephson effect","score":0.22831624746322632},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.16017824411392212},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.15922138094902039},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.14242082834243774},{"id":"https://openalex.org/keywords/condensed-matter-physics","display_name":"Condensed matter physics","score":0.12839838862419128}],"concepts":[{"id":"https://openalex.org/C39197057","wikidata":"https://www.wikidata.org/wiki/Q2265632","display_name":"Magnetic flux quantum","level":4,"score":0.7963129281997681},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5990495681762695},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5898690819740295},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.5866662263870239},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5461210012435913},{"id":"https://openalex.org/C150206757","wikidata":"https://www.wikidata.org/wiki/Q7294230","display_name":"Rapid single flux quantum","level":4,"score":0.5086294412612915},{"id":"https://openalex.org/C137488568","wikidata":"https://www.wikidata.org/wiki/Q5321","display_name":"Resistor","level":3,"score":0.5036019682884216},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.48828673362731934},{"id":"https://openalex.org/C180088628","wikidata":"https://www.wikidata.org/wiki/Q1069404","display_name":"Chemical-mechanical planarization","level":3,"score":0.4618356227874756},{"id":"https://openalex.org/C530198007","wikidata":"https://www.wikidata.org/wiki/Q80831","display_name":"Integrated circuit","level":2,"score":0.44440677762031555},{"id":"https://openalex.org/C81843906","wikidata":"https://www.wikidata.org/wiki/Q173156","display_name":"Digital electronics","level":3,"score":0.4316663146018982},{"id":"https://openalex.org/C131017901","wikidata":"https://www.wikidata.org/wiki/Q170451","display_name":"Logic gate","level":2,"score":0.418447881937027},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.41796618700027466},{"id":"https://openalex.org/C49654631","wikidata":"https://www.wikidata.org/wiki/Q746165","display_name":"Shift register","level":3,"score":0.41448426246643066},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3238767385482788},{"id":"https://openalex.org/C54101563","wikidata":"https://www.wikidata.org/wiki/Q124131","display_name":"Superconductivity","level":2,"score":0.24567431211471558},{"id":"https://openalex.org/C12038964","wikidata":"https://www.wikidata.org/wiki/Q764228","display_name":"Josephson effect","level":3,"score":0.22831624746322632},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.16017824411392212},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.15922138094902039},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.14242082834243774},{"id":"https://openalex.org/C26873012","wikidata":"https://www.wikidata.org/wiki/Q214781","display_name":"Condensed matter physics","level":1,"score":0.12839838862419128},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icicdt59917.2023.10332292","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/icicdt59917.2023.10332292","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 International Conference on IC Design and Technology (ICICDT)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.7900000214576721,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1580987494","https://openalex.org/W1586616006","https://openalex.org/W2039545910","https://openalex.org/W2047695881","https://openalex.org/W2119587409","https://openalex.org/W2809239255","https://openalex.org/W2963069249","https://openalex.org/W3101640821","https://openalex.org/W3138826588","https://openalex.org/W4233259546","https://openalex.org/W4323029853","https://openalex.org/W6634561596","https://openalex.org/W6704722796"],"related_works":["https://openalex.org/W2097693241","https://openalex.org/W2073493963","https://openalex.org/W2133998576","https://openalex.org/W2053666872","https://openalex.org/W2243465465","https://openalex.org/W2002312591","https://openalex.org/W2136110274","https://openalex.org/W2067946613","https://openalex.org/W1543777494","https://openalex.org/W1576984977"],"abstract_inverted_index":{"Superconductor":[0],"single-flux-quantum":[1],"(SFQ)":[2],"integrated":[3,43],"circuits":[4,24],"can":[5],"provide":[6],"classical,":[7],"general-purpose":[8],"digital":[9,76],"processing":[10],"at":[11,60,65],"cryogenic":[12],"temperature":[13],"near":[14],"quantum":[15,79],"bits.":[16],"We":[17,36],"report":[18],"high-frequency":[19],"operation":[20],"of":[21,78],"low-power":[22],"SFQ":[23,55],"using":[25,81],"a":[26,39,51],"lowered":[27],"critical":[28],"current":[29],"density":[30],"fabrication":[31],"process":[32],"and":[33,50],"low-voltage":[34],"design.":[35],"are":[37],"developing":[38],"standard-cell":[40],"library":[41],"with":[42],"devices":[44],"featuring":[45],"four":[46],"planarized":[47],"Nb":[48],"layers":[49],"Pd":[52],"resistor":[53],"layer.":[54],"shift":[56],"registers":[57],"successfully":[58],"operated":[59],"up":[61],"to":[62],"11":[63],"GHz":[64],"0.3":[66],"K.":[67],"The":[68],"measured":[69],"operating":[70],"frequency":[71],"is":[72],"sufficient":[73],"for":[74],"SFQ-based":[75],"controlling":[77],"bits":[80],"impulse-shaped":[82],"voltage":[83],"pulses.":[84]},"counts_by_year":[{"year":2024,"cited_by_count":1}],"updated_date":"2025-12-21T01:58:51.020947","created_date":"2025-10-10T00:00:00"}