{"id":"https://openalex.org/W4308273741","doi":"https://doi.org/10.1109/icicdt56182.2022.9933131","title":"Innovations in Transistor Architecture and Device Connectivity for Advanced Logic Scaling","display_name":"Innovations in Transistor Architecture and Device Connectivity for Advanced Logic Scaling","publication_year":2022,"publication_date":"2022-09-21","ids":{"openalex":"https://openalex.org/W4308273741","doi":"https://doi.org/10.1109/icicdt56182.2022.9933131"},"language":"en","primary_location":{"id":"doi:10.1109/icicdt56182.2022.9933131","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icicdt56182.2022.9933131","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 International Conference on IC Design and Technology (ICICDT)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5081272792","display_name":"A. Veloso","orcid":"https://orcid.org/0000-0001-7546-0261"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"A. Veloso","raw_affiliation_strings":["Imec,Leuven,Belgium,3001"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075183384","display_name":"Geert Eneman","orcid":"https://orcid.org/0000-0002-5849-3384"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"G. Eneman","raw_affiliation_strings":["Imec,Leuven,Belgium,3001"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056543688","display_name":"A. De Keersgieter","orcid":"https://orcid.org/0000-0002-5527-8582"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"A. De Keersgieter","raw_affiliation_strings":["Imec,Leuven,Belgium,3001"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053724730","display_name":"Paola Favia","orcid":"https://orcid.org/0000-0002-1019-3497"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"P. Favia","raw_affiliation_strings":["Imec,Leuven,Belgium,3001"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5035980017","display_name":"Andriy Hikavyy","orcid":"https://orcid.org/0000-0002-8201-075X"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"A. Hikavyy","raw_affiliation_strings":["Imec,Leuven,Belgium,3001"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102796393","display_name":"Rongmei Chen","orcid":"https://orcid.org/0000-0003-1205-0585"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"R. Chen","raw_affiliation_strings":["Imec,Leuven,Belgium,3001"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053182757","display_name":"A. Jourdain","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"A. Jourdain","raw_affiliation_strings":["Imec,Leuven,Belgium,3001"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5065113949","display_name":"Naoto Horiguchi","orcid":"https://orcid.org/0000-0001-5490-0416"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"N. Horiguchi","raw_affiliation_strings":["Imec,Leuven,Belgium,3001"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec,Leuven,Belgium,3001","institution_ids":["https://openalex.org/I4210114974"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210114974"],"apc_list":null,"apc_paid":null,"fwci":0.4616,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.6150373,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"51","last_page":"54"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10361","display_name":"Silicon Carbide Semiconductor Technologies","score":0.9976999759674072,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/parasitic-extraction","display_name":"Parasitic extraction","score":0.8393296599388123},{"id":"https://openalex.org/keywords/transistor","display_name":"Transistor","score":0.5972576141357422},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4705738425254822},{"id":"https://openalex.org/keywords/scaling","display_name":"Scaling","score":0.4580163061618805},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.456022709608078},{"id":"https://openalex.org/keywords/electronic-circuit","display_name":"Electronic circuit","score":0.4378894567489624},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.4372757077217102},{"id":"https://openalex.org/keywords/logic-gate","display_name":"Logic gate","score":0.4226738214492798},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.38762176036834717},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.34497618675231934},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.32724660634994507},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.1485101282596588}],"concepts":[{"id":"https://openalex.org/C159818811","wikidata":"https://www.wikidata.org/wiki/Q7135947","display_name":"Parasitic extraction","level":2,"score":0.8393296599388123},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.5972576141357422},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4705738425254822},{"id":"https://openalex.org/C99844830","wikidata":"https://www.wikidata.org/wiki/Q102441924","display_name":"Scaling","level":2,"score":0.4580163061618805},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.456022709608078},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.4378894567489624},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.4372757077217102},{"id":"https://openalex.org/C131017901","wikidata":"https://www.wikidata.org/wiki/Q170451","display_name":"Logic gate","level":2,"score":0.4226738214492798},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.38762176036834717},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.34497618675231934},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.32724660634994507},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.1485101282596588},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icicdt56182.2022.9933131","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icicdt56182.2022.9933131","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 International Conference on IC Design and Technology (ICICDT)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":2,"referenced_works":["https://openalex.org/W3087814219","https://openalex.org/W3162580338"],"related_works":["https://openalex.org/W2899084033","https://openalex.org/W2128838529","https://openalex.org/W2103682945","https://openalex.org/W1986429936","https://openalex.org/W2150567034","https://openalex.org/W2487780539","https://openalex.org/W1518014641","https://openalex.org/W2584544613","https://openalex.org/W1582066898","https://openalex.org/W3199501896"],"abstract_inverted_index":{"We":[0],"report":[1],"on":[2,9,53],"vertically":[3],"stacked":[4],"nanosheet":[5],"(NS)":[6],"FETs,":[7],"focusing":[8],"the":[10,31,91],"combined":[11],"inner":[12],"spacers":[13],"and":[14,33,37,78,84,106],"source/drain":[15],"(S/D)":[16],"epitaxial":[17],"growth":[18],"modules":[19],"sequence,":[20],"a":[21],"key":[22],"integration":[23],"flow":[24],"differentiator":[25],"as":[26,97],"compared":[27],"to":[28,69,93,98],"finFETs,":[29],"addressing":[30],"impact":[32],"control":[34],"of":[35,43],"parasitics":[36],"channel":[38],"strain":[39],"engineering.":[40],"The":[41],"use":[42],"both":[44],"wafer":[45,60],"sides":[46],"for":[47,72,107],"device":[48],"connection,":[49],"via":[50],"nTSVs":[51],"landing":[52],"buried":[54],"power":[55],"rails":[56],"(BPR)":[57],"after":[58],"extreme":[59],"thinning,":[61],"is":[62,67],"also":[63,89],"discussed.":[64],"This":[65],"configuration":[66],"shown":[68],"be":[70],"advantageous":[71],"obtaining":[73],"reduced":[74],"IR":[75],"drop":[76],"values":[77],"for,":[79],"overall,":[80],"enabling":[81],"enhanced":[82],"performance":[83],"additional":[85],"area":[86],"scaling.":[87],"It":[88],"has":[90],"potential":[92],"further":[94],"expand":[95],"such":[96],"include":[99],"extra":[100],"options,":[101],"together":[102],"with":[103],"novel":[104],"devices/circuits":[105],"various":[108],"applications.":[109]},"counts_by_year":[{"year":2025,"cited_by_count":4},{"year":2024,"cited_by_count":1}],"updated_date":"2026-06-26T08:34:08.712188","created_date":"2025-10-10T00:00:00"}