{"id":"https://openalex.org/W2967209464","doi":"https://doi.org/10.1109/icicdt.2019.8790911","title":"A Gas Medium Approach To Sensitivity Improvement Of MEMS-Based Thermal Acoustic Particle Velocity Sensors","display_name":"A Gas Medium Approach To Sensitivity Improvement Of MEMS-Based Thermal Acoustic Particle Velocity Sensors","publication_year":2019,"publication_date":"2019-06-01","ids":{"openalex":"https://openalex.org/W2967209464","doi":"https://doi.org/10.1109/icicdt.2019.8790911","mag":"2967209464"},"language":"en","primary_location":{"id":"doi:10.1109/icicdt.2019.8790911","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icicdt.2019.8790911","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 International Conference on IC Design and Technology (ICICDT)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5012099361","display_name":"Wen\u2010Han Chang","orcid":"https://orcid.org/0000-0002-2071-7258"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Wenhan Chang","raw_affiliation_strings":["National Key Laboratory of Nano/Micro Fabrication Technology, Peking University"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Nano/Micro Fabrication Technology, Peking University","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100356686","display_name":"Zhe Li","orcid":"https://orcid.org/0000-0002-9377-9652"},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhe Li","raw_affiliation_strings":["National Key Laboratory of Nano/Micro Fabrication Technology, Peking University"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Nano/Micro Fabrication Technology, Peking University","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080071809","display_name":"Shengzhan Cheng","orcid":null},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shengzhan Cheng","raw_affiliation_strings":["National Key Laboratory of Nano/Micro Fabrication Technology, Peking University"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Nano/Micro Fabrication Technology, Peking University","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073842579","display_name":"Shoule Sun","orcid":null},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shoule Sun","raw_affiliation_strings":["National Key Laboratory of Nano/Micro Fabrication Technology, Peking University"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Nano/Micro Fabrication Technology, Peking University","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112932365","display_name":"Chengchen Gao","orcid":null},"institutions":[{"id":"https://openalex.org/I20231570","display_name":"Peking University","ror":"https://ror.org/02v51f717","country_code":"CN","type":"education","lineage":["https://openalex.org/I20231570"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chengchen Gao","raw_affiliation_strings":["National Key Laboratory of Nano/Micro Fabrication Technology, Peking University"],"affiliations":[{"raw_affiliation_string":"National Key Laboratory of Nano/Micro Fabrication Technology, Peking University","institution_ids":["https://openalex.org/I20231570"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100934292","display_name":"Yilong Hao","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Yilong Hao","raw_affiliation_strings":["Innovation Center for Micro-Nano-electronics and Integrated System, Beijing, China"],"affiliations":[{"raw_affiliation_string":"Innovation Center for Micro-Nano-electronics and Integrated System, Beijing, China","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5012099361"],"corresponding_institution_ids":["https://openalex.org/I20231570"],"apc_list":null,"apc_paid":null,"fwci":0.1192,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.45635448,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":93},"biblio":{"volume":"28","issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9975000023841858,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9975000023841858,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.995199978351593,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9934999942779541,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.8104985952377319},{"id":"https://openalex.org/keywords/thermistor","display_name":"Thermistor","score":0.7251495718955994},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.6868367195129395},{"id":"https://openalex.org/keywords/particle-velocity","display_name":"Particle velocity","score":0.5735330581665039},{"id":"https://openalex.org/keywords/thermal","display_name":"Thermal","score":0.565546452999115},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5505620241165161},{"id":"https://openalex.org/keywords/sound-pressure","display_name":"Sound pressure","score":0.5471205115318298},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5170129537582397},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.5092509984970093},{"id":"https://openalex.org/keywords/sulfur-hexafluoride","display_name":"Sulfur hexafluoride","score":0.4580823481082916},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.4499446451663971},{"id":"https://openalex.org/keywords/heat-transfer","display_name":"Heat transfer","score":0.4423144459724426},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.4403139054775238},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.27705085277557373},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2182227373123169},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.20561596751213074},{"id":"https://openalex.org/keywords/mechanics","display_name":"Mechanics","score":0.1991073191165924},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.1804814338684082},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.1490190625190735},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.12625527381896973},{"id":"https://openalex.org/keywords/meteorology","display_name":"Meteorology","score":0.08590760827064514}],"concepts":[{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.8104985952377319},{"id":"https://openalex.org/C66726788","wikidata":"https://www.wikidata.org/wiki/Q175973","display_name":"Thermistor","level":2,"score":0.7251495718955994},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.6868367195129395},{"id":"https://openalex.org/C35515768","wikidata":"https://www.wikidata.org/wiki/Q336894","display_name":"Particle velocity","level":2,"score":0.5735330581665039},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.565546452999115},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5505620241165161},{"id":"https://openalex.org/C68115822","wikidata":"https://www.wikidata.org/wiki/Q1068172","display_name":"Sound pressure","level":2,"score":0.5471205115318298},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5170129537582397},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.5092509984970093},{"id":"https://openalex.org/C2778282533","wikidata":"https://www.wikidata.org/wiki/Q279055","display_name":"Sulfur hexafluoride","level":2,"score":0.4580823481082916},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.4499446451663971},{"id":"https://openalex.org/C50517652","wikidata":"https://www.wikidata.org/wiki/Q179635","display_name":"Heat transfer","level":2,"score":0.4423144459724426},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.4403139054775238},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.27705085277557373},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2182227373123169},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.20561596751213074},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.1991073191165924},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1804814338684082},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.1490190625190735},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.12625527381896973},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.08590760827064514},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icicdt.2019.8790911","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icicdt.2019.8790911","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 International Conference on IC Design and Technology (ICICDT)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.8299999833106995,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W2057763316","https://openalex.org/W2095273600","https://openalex.org/W2104974144","https://openalex.org/W2114522223","https://openalex.org/W2793877156"],"related_works":["https://openalex.org/W2128009421","https://openalex.org/W2901871306","https://openalex.org/W3092052710","https://openalex.org/W2095974140","https://openalex.org/W3167781130","https://openalex.org/W3089221197","https://openalex.org/W2010483324","https://openalex.org/W2120134686","https://openalex.org/W2891986061","https://openalex.org/W3003012806","https://openalex.org/W2105104634","https://openalex.org/W2095122576","https://openalex.org/W109160978","https://openalex.org/W2804807382","https://openalex.org/W3010974815","https://openalex.org/W2564143679","https://openalex.org/W2910840067","https://openalex.org/W2018924863","https://openalex.org/W2110563091","https://openalex.org/W2040895317"],"abstract_inverted_index":{"Micro-fabricated":[0],"thermal":[1,20,49],"acoustic":[2,50],"vector":[3],"sensor":[4,32,82],"can":[5],"directly":[6],"measure":[7],"the":[8,17,28,31,46,53,78,81,108,115,123],"vibration":[9],"velocity":[10],"of":[11,19,22,30,44,48,80,110],"sound":[12],"particles.":[13],"However,":[14],"due":[15],"to":[16,69,125],"limitation":[18],"capacity":[21],"thermistor":[23],"and":[24,63],"heat":[25],"transfer":[26],"rate,":[27],"sensitivity":[29,47,79],"is":[33],"very":[34],"low":[35],"at":[36,114],"high":[37],"frequencies.":[38],"This":[39],"paper":[40],"presents":[41],"a":[42,87],"method":[43],"improving":[45],"sensors":[51],"for":[52],"first":[54],"time":[55],"by":[56],"changing":[57],"its":[58],"working":[59],"medium.":[60],"Both":[61],"simulation":[62,74,105],"experiment":[64],"have":[65],"been":[66,129],"carried":[67],"out":[68],"verify":[70],"this":[71],"method.":[72],"The":[73,98],"results":[75,100],"showed":[76,101],"that":[77,95],"in":[83,96,118],"sulfur":[84],"hexafluoride":[85],"under":[86],"standard":[88],"atmospheric":[89],"pressure":[90],"was":[91,112],"14dB":[92],"higher":[93],"than":[94],"air.":[97],"experimental":[99],"good":[102],"agreement":[103],"with":[104],"results.":[106],"Besides,":[107],"noise":[109,126],"APVS":[111],"almost":[113],"same":[116],"level":[117],"different":[119],"gas":[120],"mediums.":[121],"Therefore,":[122],"signal":[124],"ratio":[127],"has":[128],"improved.":[130]},"counts_by_year":[{"year":2021,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}