{"id":"https://openalex.org/W2810830313","doi":"https://doi.org/10.1109/icicdt.2018.8399777","title":"Sequential 3D: Key integration challenges and opportunities for advanced semiconductor scaling","display_name":"Sequential 3D: Key integration challenges and opportunities for advanced semiconductor scaling","publication_year":2018,"publication_date":"2018-06-01","ids":{"openalex":"https://openalex.org/W2810830313","doi":"https://doi.org/10.1109/icicdt.2018.8399777","mag":"2810830313"},"language":"en","primary_location":{"id":"doi:10.1109/icicdt.2018.8399777","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icicdt.2018.8399777","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 International Conference on IC Design & Technology (ICICDT)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5019061501","display_name":"A. Vandooren","orcid":"https://orcid.org/0000-0002-2412-0176"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":true,"raw_author_name":"A. Vandooren","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060988237","display_name":"Liesbeth Witters","orcid":"https://orcid.org/0000-0002-0772-5501"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"L. Witters","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068577719","display_name":"J. Franco","orcid":"https://orcid.org/0000-0002-7382-8605"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"J. Franco","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112620345","display_name":"A. Mallik","orcid":"https://orcid.org/0009-0005-8706-4318"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"A. Mallik","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085080900","display_name":"Bertrand Parvais","orcid":"https://orcid.org/0000-0003-0769-7069"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"B. Parvais","raw_affiliation_strings":["Dept. of Electronics and Informatics, also with VUB, Brussels, Belgium"],"affiliations":[{"raw_affiliation_string":"Dept. of Electronics and Informatics, also with VUB, Brussels, Belgium","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028152513","display_name":"Zhicheng Wu","orcid":"https://orcid.org/0000-0002-0745-9012"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Z. Wu","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023029650","display_name":"A. Walke","orcid":"https://orcid.org/0000-0001-8406-8122"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"A. Walke","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060135252","display_name":"Veeresh Deshpande","orcid":"https://orcid.org/0000-0002-0349-4857"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"V. Deshpande","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029989684","display_name":"Erik Rosseel","orcid":"https://orcid.org/0000-0002-2737-8391"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"E. Rosseel","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5035980017","display_name":"Andriy Hikavyy","orcid":"https://orcid.org/0000-0002-8201-075X"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"A. Hikavyy","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026030934","display_name":"W. Li","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"W. Li","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050000000","display_name":"Lan Peng","orcid":"https://orcid.org/0009-0002-2327-1754"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"L. Peng","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074709658","display_name":"Nouredine Rassoul","orcid":"https://orcid.org/0000-0001-9489-3396"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"N. Rassoul","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011207297","display_name":"Geraldine Jamieson","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"G. Jamieson","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046776334","display_name":"Fumihiro Inoue","orcid":"https://orcid.org/0000-0003-2292-846X"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"F. Inoue","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026414092","display_name":"Greet Verbinnen","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"G. Verbinnen","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049232971","display_name":"K. Devriendt","orcid":"https://orcid.org/0000-0002-0662-7926"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"K. Devriendt","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079435576","display_name":"Lieve Teugels","orcid":"https://orcid.org/0000-0002-6613-9414"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"L. Teugels","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069736243","display_name":"N. Heylen","orcid":"https://orcid.org/0009-0008-0490-0993"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"N. Heylen","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009081483","display_name":"E. Vecchio","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"E. Vecchio","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053363959","display_name":"T. Zheng","orcid":"https://orcid.org/0000-0002-7805-7168"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"T. Zheng","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069706368","display_name":"Niamh Waldron","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"N. Waldron","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021458154","display_name":"V. De Heyn","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"V. De Heyn","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049394620","display_name":"D. Mocuta","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"D. Mocuta","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5046242688","display_name":"Nadine Collaert","orcid":"https://orcid.org/0000-0002-8062-3165"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"N. Collaert","raw_affiliation_strings":["imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":25,"corresponding_author_ids":["https://openalex.org/A5019061501"],"corresponding_institution_ids":["https://openalex.org/I4210114974"],"apc_list":null,"apc_paid":null,"fwci":0.7725,"has_fulltext":false,"cited_by_count":14,"citation_normalized_percentile":{"value":0.73534191,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"145","last_page":"148"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12808","display_name":"Ferroelectric and Negative Capacitance Devices","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/stacking","display_name":"Stacking","score":0.8399320244789124},{"id":"https://openalex.org/keywords/key","display_name":"Key (lock)","score":0.7137231826782227},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.6630257368087769},{"id":"https://openalex.org/keywords/transistor","display_name":"Transistor","score":0.6145356297492981},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5811164379119873},{"id":"https://openalex.org/keywords/scaling","display_name":"Scaling","score":0.5581172108650208},{"id":"https://openalex.org/keywords/computer-architecture","display_name":"Computer architecture","score":0.5045346021652222},{"id":"https://openalex.org/keywords/three-dimensional-integrated-circuit","display_name":"Three-dimensional integrated circuit","score":0.4887826144695282},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.47624707221984863},{"id":"https://openalex.org/keywords/electronic-circuit","display_name":"Electronic circuit","score":0.4338104724884033},{"id":"https://openalex.org/keywords/integrated-circuit","display_name":"Integrated circuit","score":0.41239356994628906},{"id":"https://openalex.org/keywords/computer-engineering","display_name":"Computer engineering","score":0.35360804200172424},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.27083322405815125},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.18757760524749756},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.07562631368637085},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.07078546285629272}],"concepts":[{"id":"https://openalex.org/C33347731","wikidata":"https://www.wikidata.org/wiki/Q285210","display_name":"Stacking","level":2,"score":0.8399320244789124},{"id":"https://openalex.org/C26517878","wikidata":"https://www.wikidata.org/wiki/Q228039","display_name":"Key (lock)","level":2,"score":0.7137231826782227},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.6630257368087769},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.6145356297492981},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5811164379119873},{"id":"https://openalex.org/C99844830","wikidata":"https://www.wikidata.org/wiki/Q102441924","display_name":"Scaling","level":2,"score":0.5581172108650208},{"id":"https://openalex.org/C118524514","wikidata":"https://www.wikidata.org/wiki/Q173212","display_name":"Computer architecture","level":1,"score":0.5045346021652222},{"id":"https://openalex.org/C59088047","wikidata":"https://www.wikidata.org/wiki/Q229370","display_name":"Three-dimensional integrated circuit","level":3,"score":0.4887826144695282},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.47624707221984863},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.4338104724884033},{"id":"https://openalex.org/C530198007","wikidata":"https://www.wikidata.org/wiki/Q80831","display_name":"Integrated circuit","level":2,"score":0.41239356994628906},{"id":"https://openalex.org/C113775141","wikidata":"https://www.wikidata.org/wiki/Q428691","display_name":"Computer engineering","level":1,"score":0.35360804200172424},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.27083322405815125},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.18757760524749756},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.07562631368637085},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.07078546285629272},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C46141821","wikidata":"https://www.wikidata.org/wiki/Q209402","display_name":"Nuclear magnetic resonance","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C38652104","wikidata":"https://www.wikidata.org/wiki/Q3510521","display_name":"Computer security","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/icicdt.2018.8399777","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icicdt.2018.8399777","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 International Conference on IC Design & Technology (ICICDT)","raw_type":"proceedings-article"},{"id":"pmh:oai:vubissmart:VUBISSMART:2000:119521","is_oa":false,"landing_page_url":"https://biblio.vub.ac.be/vubir/(56f2854f-ef13-4f20-927a-ecc724bc480c).html","pdf_url":null,"source":{"id":"https://openalex.org/S4306402573","display_name":"VUBIR (Vrije Universiteit Brussel)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I13469542","host_organization_name":"Vrije Universiteit Brussel","host_organization_lineage":["https://openalex.org/I13469542"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.550000011920929,"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":10,"referenced_works":["https://openalex.org/W2146704626","https://openalex.org/W2522655502","https://openalex.org/W2527225530","https://openalex.org/W2578508866","https://openalex.org/W2621282813","https://openalex.org/W2743583792","https://openalex.org/W2787438330","https://openalex.org/W2790568924","https://openalex.org/W6738830750","https://openalex.org/W6747909744"],"related_works":["https://openalex.org/W2016970881","https://openalex.org/W1990828594","https://openalex.org/W2333804548","https://openalex.org/W3093450488","https://openalex.org/W3163301441","https://openalex.org/W2027159884","https://openalex.org/W2016589506","https://openalex.org/W2501578203","https://openalex.org/W2113108952","https://openalex.org/W4300584862"],"abstract_inverted_index":{"In":[0],"this":[1],"paper,":[2],"we":[3,24],"review":[4],"the":[5,14,19,26],"current":[6],"progress":[7],"on":[8],"3D":[9,30],"sequential":[10,31],"device":[11],"stacking,":[12],"highlighting":[13],"main":[15],"integration":[16],"challenges":[17],"and":[18,38],"possible":[20],"technological":[21],"solutions.":[22],"Next,":[23],"explore":[25],"potential":[27],"benefits":[28],"of":[29],"stacking":[32],"at":[33],"transistor":[34],"level,":[35],"CMOS":[36],"level":[37],"for":[39],"hybrid":[40],"circuits.":[41]},"counts_by_year":[{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":4},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":3},{"year":2019,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}