{"id":"https://openalex.org/W2744289931","doi":"https://doi.org/10.1109/icicdt.2017.7993501","title":"Microstructure and ferroelectricity of barium titanate thin films on Si for integrated photonics","display_name":"Microstructure and ferroelectricity of barium titanate thin films on Si for integrated photonics","publication_year":2017,"publication_date":"2017-05-01","ids":{"openalex":"https://openalex.org/W2744289931","doi":"https://doi.org/10.1109/icicdt.2017.7993501","mag":"2744289931"},"language":"en","primary_location":{"id":"doi:10.1109/icicdt.2017.7993501","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icicdt.2017.7993501","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE International Conference on IC Design and Technology (ICICDT)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5037763937","display_name":"Kristy J. Kormondy","orcid":"https://orcid.org/0000-0002-1148-4915"},"institutions":[{"id":"https://openalex.org/I86519309","display_name":"The University of Texas at Austin","ror":"https://ror.org/00hj54h04","country_code":"US","type":"education","lineage":["https://openalex.org/I86519309"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Kristy J. Kormondy","raw_affiliation_strings":["Department of Physics, The University of Texas at Austin, Austin, TX, USA"],"affiliations":[{"raw_affiliation_string":"Department of Physics, The University of Texas at Austin, Austin, TX, USA","institution_ids":["https://openalex.org/I86519309"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080915325","display_name":"Alexander A. Demkov","orcid":"https://orcid.org/0000-0003-4241-3519"},"institutions":[{"id":"https://openalex.org/I86519309","display_name":"The University of Texas at Austin","ror":"https://ror.org/00hj54h04","country_code":"US","type":"education","lineage":["https://openalex.org/I86519309"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Alexander A. Demkov","raw_affiliation_strings":["Department of Physics, The University of Texas at Austin, Austin, TX, USA"],"affiliations":[{"raw_affiliation_string":"Department of Physics, The University of Texas at Austin, Austin, TX, USA","institution_ids":["https://openalex.org/I86519309"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063603864","display_name":"Youri Popoff","orcid":null},"institutions":[{"id":"https://openalex.org/I4210126328","display_name":"IBM Research - Zurich","ror":"https://ror.org/02js37d36","country_code":"CH","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210126328"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Youri Popoff","raw_affiliation_strings":["IBM Research \u2013 Zurich, R\u00fcschlikon, Switzerland"],"affiliations":[{"raw_affiliation_string":"IBM Research \u2013 Zurich, R\u00fcschlikon, Switzerland","institution_ids":["https://openalex.org/I4210126328"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108862832","display_name":"Marilyne Sousa","orcid":null},"institutions":[{"id":"https://openalex.org/I4210126328","display_name":"IBM Research - Zurich","ror":"https://ror.org/02js37d36","country_code":"CH","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210126328"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Marilyne Sousa","raw_affiliation_strings":["IBM Research \u2013 Zurich, R\u00fcschlikon, Switzerland"],"affiliations":[{"raw_affiliation_string":"IBM Research \u2013 Zurich, R\u00fcschlikon, Switzerland","institution_ids":["https://openalex.org/I4210126328"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011685763","display_name":"Felix Eltes","orcid":"https://orcid.org/0000-0003-3882-8121"},"institutions":[{"id":"https://openalex.org/I4210126328","display_name":"IBM Research - Zurich","ror":"https://ror.org/02js37d36","country_code":"CH","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210126328"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Felix Eltes","raw_affiliation_strings":["IBM Research \u2013 Zurich, R\u00fcschlikon, Switzerland"],"affiliations":[{"raw_affiliation_string":"IBM Research \u2013 Zurich, R\u00fcschlikon, Switzerland","institution_ids":["https://openalex.org/I4210126328"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067104396","display_name":"Daniele Caimi","orcid":null},"institutions":[{"id":"https://openalex.org/I4210126328","display_name":"IBM Research - Zurich","ror":"https://ror.org/02js37d36","country_code":"CH","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210126328"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Daniele Caimi","raw_affiliation_strings":["IBM Research \u2013 Zurich, R\u00fcschlikon, Switzerland"],"affiliations":[{"raw_affiliation_string":"IBM Research \u2013 Zurich, R\u00fcschlikon, Switzerland","institution_ids":["https://openalex.org/I4210126328"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057571653","display_name":"Chiara Marchiori","orcid":"https://orcid.org/0000-0001-8983-2863"},"institutions":[{"id":"https://openalex.org/I4210126328","display_name":"IBM Research - Zurich","ror":"https://ror.org/02js37d36","country_code":"CH","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210126328"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Chiara Marchiori","raw_affiliation_strings":["IBM Research \u2013 Zurich, R\u00fcschlikon, Switzerland"],"affiliations":[{"raw_affiliation_string":"IBM Research \u2013 Zurich, R\u00fcschlikon, Switzerland","institution_ids":["https://openalex.org/I4210126328"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074033253","display_name":"J. Fompeyrine","orcid":"https://orcid.org/0000-0002-3528-4758"},"institutions":[{"id":"https://openalex.org/I4210126328","display_name":"IBM Research - Zurich","ror":"https://ror.org/02js37d36","country_code":"CH","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210126328"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Jean Fompeyrine","raw_affiliation_strings":["IBM Research \u2013 Zurich, R\u00fcschlikon, Switzerland"],"affiliations":[{"raw_affiliation_string":"IBM Research \u2013 Zurich, R\u00fcschlikon, Switzerland","institution_ids":["https://openalex.org/I4210126328"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5085766788","display_name":"Stefan Abel","orcid":"https://orcid.org/0000-0001-9688-7168"},"institutions":[{"id":"https://openalex.org/I4210126328","display_name":"IBM Research - Zurich","ror":"https://ror.org/02js37d36","country_code":"CH","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210126328"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Stefan Abel","raw_affiliation_strings":["IBM Research \u2013 Zurich, R\u00fcschlikon, Switzerland"],"affiliations":[{"raw_affiliation_string":"IBM Research \u2013 Zurich, R\u00fcschlikon, Switzerland","institution_ids":["https://openalex.org/I4210126328"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":9,"corresponding_author_ids":["https://openalex.org/A5037763937"],"corresponding_institution_ids":["https://openalex.org/I86519309"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.09622003,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"2"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11050","display_name":"Photorefractive and Nonlinear Optics","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10666","display_name":"Photonic Crystals and Applications","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.758826494216919},{"id":"https://openalex.org/keywords/photonics","display_name":"Photonics","score":0.7397032976150513},{"id":"https://openalex.org/keywords/barium-titanate","display_name":"Barium titanate","score":0.6756047010421753},{"id":"https://openalex.org/keywords/nanophotonics","display_name":"Nanophotonics","score":0.6454697847366333},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.6362813711166382},{"id":"https://openalex.org/keywords/chemical-vapor-deposition","display_name":"Chemical vapor deposition","score":0.5650666952133179},{"id":"https://openalex.org/keywords/ferroelectricity","display_name":"Ferroelectricity","score":0.5419235825538635},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.515245258808136},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.473276823759079},{"id":"https://openalex.org/keywords/pockels-effect","display_name":"Pockels effect","score":0.4146060347557068},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.40811413526535034},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.23332998156547546},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.21015334129333496},{"id":"https://openalex.org/keywords/laser","display_name":"Laser","score":0.16027066111564636}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.758826494216919},{"id":"https://openalex.org/C20788544","wikidata":"https://www.wikidata.org/wiki/Q467054","display_name":"Photonics","level":2,"score":0.7397032976150513},{"id":"https://openalex.org/C2779159579","wikidata":"https://www.wikidata.org/wiki/Q415484","display_name":"Barium titanate","level":3,"score":0.6756047010421753},{"id":"https://openalex.org/C27289702","wikidata":"https://www.wikidata.org/wiki/Q2475861","display_name":"Nanophotonics","level":2,"score":0.6454697847366333},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6362813711166382},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.5650666952133179},{"id":"https://openalex.org/C79090758","wikidata":"https://www.wikidata.org/wiki/Q1045739","display_name":"Ferroelectricity","level":3,"score":0.5419235825538635},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.515245258808136},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.473276823759079},{"id":"https://openalex.org/C186419263","wikidata":"https://www.wikidata.org/wiki/Q899456","display_name":"Pockels effect","level":3,"score":0.4146060347557068},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.40811413526535034},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.23332998156547546},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.21015334129333496},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.16027066111564636},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icicdt.2017.7993501","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icicdt.2017.7993501","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2017 IEEE International Conference on IC Design and Technology (ICICDT)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":3,"referenced_works":["https://openalex.org/W2035298899","https://openalex.org/W2037530588","https://openalex.org/W2560996255"],"related_works":["https://openalex.org/W2534290920","https://openalex.org/W3092019542","https://openalex.org/W2027368534","https://openalex.org/W2004173666","https://openalex.org/W2088730276","https://openalex.org/W2005632092","https://openalex.org/W2016209467","https://openalex.org/W2081778677","https://openalex.org/W2008553745","https://openalex.org/W4400433643"],"abstract_inverted_index":{"Significant":[0],"progress":[1],"has":[2],"been":[3],"made":[4],"in":[5,77,90],"integrating":[6],"novel":[7,91],"materials":[8],"into":[9],"silicon":[10],"photonic":[11,18],"structures":[12],"to":[13,57,83],"extend":[14],"the":[15,70,86],"functionality":[16],"of":[17,21,74],"circuits.":[19],"One":[20],"these":[22],"promising":[23],"optical":[24],"materials,":[25],"BaTiO":[26],"<sub":[27],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[28],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">3</sub>":[29],"(BTO),":[30],"exhibits":[31],"a":[32,81],"large":[33],"Pockels":[34],"coefficient":[35],"as":[36,49],"required":[37],"for":[38],"high-speed":[39],"light":[40],"modulators.":[41],"Here,":[42],"we":[43,79],"employ":[44],"several":[45],"deposition":[46,56],"methods":[47],"such":[48],"molecular":[50],"beam":[51],"epitaxy":[52],"and":[53,65],"chemical":[54],"vapor":[55],"realize":[58],"BTO":[59],"thin":[60],"films":[61],"with":[62],"different":[63],"morphology":[64],"crystalline":[66],"structure.":[67],"By":[68],"identifying":[69],"key":[71],"structural":[72],"predictors":[73],"electro-optic":[75,88],"response":[76],"BTO/Si,":[78],"provide":[80],"roadmap":[82],"fully":[84],"exploit":[85],"linear":[87],"effect":[89],"hybrid":[92],"oxide/semiconductor":[93],"nanophotonic":[94],"devices.":[95]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}
