{"id":"https://openalex.org/W1512458701","doi":"https://doi.org/10.1109/icicdt.2015.7165900","title":"Plasma induced damage investigation in the fully depleted SOI technology","display_name":"Plasma induced damage investigation in the fully depleted SOI technology","publication_year":2015,"publication_date":"2015-06-01","ids":{"openalex":"https://openalex.org/W1512458701","doi":"https://doi.org/10.1109/icicdt.2015.7165900","mag":"1512458701"},"language":"en","primary_location":{"id":"doi:10.1109/icicdt.2015.7165900","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icicdt.2015.7165900","pdf_url":null,"source":{"id":"https://openalex.org/S7407087356","display_name":"International Conference on IC Design & Technology (ICICDT)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 International Conference on IC Design & Technology (ICICDT)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5011990640","display_name":"Madjid Akbal","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"M. Akbal","raw_affiliation_strings":["STMicroelectronics, LTM/CNRS, Grenoble, France","STMicroelectronics, 38926 Crolles, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics, LTM/CNRS, Grenoble, France","institution_ids":["https://openalex.org/I4210104693"]},{"raw_affiliation_string":"STMicroelectronics, 38926 Crolles, France","institution_ids":["https://openalex.org/I4210104693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108775755","display_name":"G. Ribes","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"G. Ribes","raw_affiliation_strings":["STMicroelectronics"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5002534389","display_name":"Marc Guillermet","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I4210128684","display_name":"Laboratoire des Technologies de la Micro\u00e9lectronique","ror":"https://ror.org/036zswm25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210095849","https://openalex.org/I4210128684","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"M. Guillermet","raw_affiliation_strings":["LTM/CNRS","CEA/LETI, 38054 Grenoble, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"LTM/CNRS","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210128684"]},{"raw_affiliation_string":"CEA/LETI, 38054 Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5113627775","display_name":"L. Vallier","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I3020098449","display_name":"CEA Grenoble","ror":"https://ror.org/02mg6n827","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I3020098449"]},{"id":"https://openalex.org/I4210128684","display_name":"Laboratoire des Technologies de la Micro\u00e9lectronique","ror":"https://ror.org/036zswm25","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210095849","https://openalex.org/I4210128684","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"L. Vallier","raw_affiliation_strings":["CEA/LETI, Grenoble, France","LTM/CNRS"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"CEA/LETI, Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I3020098449","https://openalex.org/I4210150049"]},{"raw_affiliation_string":"LTM/CNRS","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210128684"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.8226,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.62388864,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.5360999703407288,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.5360999703407288,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.3059000074863434,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.026200000196695328,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/plasma-induced-damage","display_name":"plasma damage","score":0.9760000109672546},{"id":"https://openalex.org/keywords/fully-depleted-soi","display_name":"fully depleted SOI","score":0.9860000014305115},{"id":"https://openalex.org/keywords/charging-damage","display_name":"charging damage","score":0.8610000014305115},{"id":"https://openalex.org/keywords/hot-carrier-injection","display_name":"hot carrier injection","score":0.9869999885559082},{"id":"https://openalex.org/keywords/bias-temperature-instability","display_name":"bias temperature instability","score":0.996999979019165},{"id":"https://openalex.org/keywords/device-degradation-mechanisms","display_name":"device degradation mechanisms","score":0.5830000042915344}],"concepts":[{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.7041335105895996},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.49012836813926697},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.419930636882782},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.38190484046936035},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.31162384152412415},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1935165524482727},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.16288116574287415},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.08683517575263977}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icicdt.2015.7165900","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icicdt.2015.7165900","pdf_url":null,"source":{"id":"https://openalex.org/S7407087356","display_name":"International Conference on IC Design & Technology (ICICDT)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 International Conference on IC Design & Technology (ICICDT)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":16,"referenced_works":["https://openalex.org/W1580267680","https://openalex.org/W1971802494","https://openalex.org/W1975428362","https://openalex.org/W1975485196","https://openalex.org/W1982532544","https://openalex.org/W1987044828","https://openalex.org/W2021433466","https://openalex.org/W2081421305","https://openalex.org/W2096581954","https://openalex.org/W2103821368","https://openalex.org/W2108123286","https://openalex.org/W2121074806","https://openalex.org/W2136206408","https://openalex.org/W3147297448","https://openalex.org/W6676068047","https://openalex.org/W6678000946"],"related_works":["https://openalex.org/W2899084033","https://openalex.org/W2902546961","https://openalex.org/W2058676402","https://openalex.org/W2399397734","https://openalex.org/W2099376691","https://openalex.org/W2292675962","https://openalex.org/W2139871202","https://openalex.org/W3127524829","https://openalex.org/W2769410768","https://openalex.org/W4313653414"],"abstract_inverted_index":{"Plasma":[0],"induced":[1],"damage":[2],"(PID)":[3],"in":[4,23],"the":[5,33,41,46,51,80],"Fully":[6],"Depleted":[7],"SOI":[8],"devices":[9],"was":[10,54],"studied":[11],"for":[12],"two":[13],"etch":[14],"plasma":[15,28],"processes.":[16],"Different":[17],"antenna":[18],"test":[19,47],"structures":[20,48],"were":[21],"used":[22],"order":[24],"to":[25,50,62],"show":[26],"that":[27],"non-uniformity":[29],"can":[30,59],"occur":[31],"between":[32,45],"device":[34,81],"nodes":[35],"inducing":[36],"severe":[37],"charging":[38,77],"damage.":[39],"Also,":[40],"PID":[42],"behavior":[43],"disparity":[44],"related":[49],"antennas":[52],"architecture":[53],"observed.":[55],"These":[56],"different":[57],"behaviors":[58],"be":[60],"compared":[61],"degradation":[63],"mechanism":[64],"as":[65],"hot":[66],"carrier":[67],"injection":[68],"(HCI)":[69],"or":[70],"bias":[71],"temperature":[72],"instability":[73],"(BTI)":[74],"depending":[75],"of":[76],"distribution":[78],"over":[79],"node.":[82]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2022,"cited_by_count":2},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1}],"updated_date":"2026-10-05T09:50:58.205359","created_date":"2025-10-10T00:00:00"}