{"id":"https://openalex.org/W1589329397","doi":"https://doi.org/10.1109/icicdt.2015.7165895","title":"Impact of device and interconnect process variability on clock distribution","display_name":"Impact of device and interconnect process variability on clock distribution","publication_year":2015,"publication_date":"2015-06-01","ids":{"openalex":"https://openalex.org/W1589329397","doi":"https://doi.org/10.1109/icicdt.2015.7165895","mag":"1589329397"},"language":"en","primary_location":{"id":"doi:10.1109/icicdt.2015.7165895","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icicdt.2015.7165895","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 International Conference on IC Design &amp; Technology (ICICDT)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5067724864","display_name":"Nathalie Fi\u00e9vet","orcid":null},"institutions":[{"id":"https://openalex.org/I132053463","display_name":"Universit\u00e9 Libre de Bruxelles","ror":"https://ror.org/01r9htc13","country_code":"BE","type":"education","lineage":["https://openalex.org/I132053463"]},{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":true,"raw_author_name":"Nathalie Fievet","raw_affiliation_strings":["Universit\u00e9 Libre de Bruxelles, Brussels, Belgium","\u00c2\u2021IMEC Leuven, Belgium","\u2021IMEC Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"Universit\u00e9 Libre de Bruxelles, Brussels, Belgium","institution_ids":["https://openalex.org/I132053463"]},{"raw_affiliation_string":"\u00c2\u2021IMEC Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"\u2021IMEC Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113820250","display_name":"Praveen Raghavan","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Praveen Raghavan","raw_affiliation_strings":["\u00c2\u2021IMEC Leuven, Belgium","\u2021IMEC Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"\u00c2\u2021IMEC Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"\u2021IMEC Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048621313","display_name":"Rogier Baert","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Rogier Baert","raw_affiliation_strings":["\u00c2\u2021IMEC Leuven, Belgium","\u2021IMEC Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"\u00c2\u2021IMEC Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"\u2021IMEC Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101435124","display_name":"Fr\u00e9d\u00e9ric Robert","orcid":"https://orcid.org/0000-0001-6520-5873"},"institutions":[{"id":"https://openalex.org/I132053463","display_name":"Universit\u00e9 Libre de Bruxelles","ror":"https://ror.org/01r9htc13","country_code":"BE","type":"education","lineage":["https://openalex.org/I132053463"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Frederic Robert","raw_affiliation_strings":["Universit\u00e9 Libre de Bruxelles, Brussels, Belgium"],"affiliations":[{"raw_affiliation_string":"Universit\u00e9 Libre de Bruxelles, Brussels, Belgium","institution_ids":["https://openalex.org/I132053463"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032421605","display_name":"A. Mercha","orcid":null},"institutions":[{"id":"https://openalex.org/I132053463","display_name":"Universit\u00e9 Libre de Bruxelles","ror":"https://ror.org/01r9htc13","country_code":"BE","type":"education","lineage":["https://openalex.org/I132053463"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Abdelkarim Mercha","raw_affiliation_strings":["Universit\u00e9 Libre de Bruxelles, Brussels, Belgium"],"affiliations":[{"raw_affiliation_string":"Universit\u00e9 Libre de Bruxelles, Brussels, Belgium","institution_ids":["https://openalex.org/I132053463"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108761749","display_name":"Diederik Verkest","orcid":null},"institutions":[{"id":"https://openalex.org/I132053463","display_name":"Universit\u00e9 Libre de Bruxelles","ror":"https://ror.org/01r9htc13","country_code":"BE","type":"education","lineage":["https://openalex.org/I132053463"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Diederik Verkest","raw_affiliation_strings":["Universit\u00e9 Libre de Bruxelles, Brussels, Belgium"],"affiliations":[{"raw_affiliation_string":"Universit\u00e9 Libre de Bruxelles, Brussels, Belgium","institution_ids":["https://openalex.org/I132053463"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5050315289","display_name":"Aaron Thean","orcid":"https://orcid.org/0000-0003-2418-6404"},"institutions":[{"id":"https://openalex.org/I132053463","display_name":"Universit\u00e9 Libre de Bruxelles","ror":"https://ror.org/01r9htc13","country_code":"BE","type":"education","lineage":["https://openalex.org/I132053463"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Aaron Thean","raw_affiliation_strings":["Universit\u00e9 Libre de Bruxelles, Brussels, Belgium"],"affiliations":[{"raw_affiliation_string":"Universit\u00e9 Libre de Bruxelles, Brussels, Belgium","institution_ids":["https://openalex.org/I132053463"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5067724864"],"corresponding_institution_ids":["https://openalex.org/I132053463","https://openalex.org/I4210114974"],"apc_list":null,"apc_paid":null,"fwci":0.2005,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.57023549,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":95},"biblio":{"volume":"25","issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/skew","display_name":"Skew","score":0.7798057794570923},{"id":"https://openalex.org/keywords/clock-skew","display_name":"Clock skew","score":0.6960493326187134},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.6154657602310181},{"id":"https://openalex.org/keywords/interconnection","display_name":"Interconnection","score":0.6018627882003784},{"id":"https://openalex.org/keywords/clock-network","display_name":"Clock network","score":0.5654114484786987},{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.47942131757736206},{"id":"https://openalex.org/keywords/timing-failure","display_name":"Timing failure","score":0.44938814640045166},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3975902497768402},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3682459592819214},{"id":"https://openalex.org/keywords/topology","display_name":"Topology (electrical circuits)","score":0.3378552198410034},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.33271026611328125},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.32055145502090454},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.31392425298690796},{"id":"https://openalex.org/keywords/electronic-circuit","display_name":"Electronic circuit","score":0.24913367629051208},{"id":"https://openalex.org/keywords/clock-signal","display_name":"Clock signal","score":0.22888049483299255},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.20799142122268677},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1781488060951233},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.10859382152557373}],"concepts":[{"id":"https://openalex.org/C43711488","wikidata":"https://www.wikidata.org/wiki/Q7534783","display_name":"Skew","level":2,"score":0.7798057794570923},{"id":"https://openalex.org/C60501442","wikidata":"https://www.wikidata.org/wiki/Q4382014","display_name":"Clock skew","level":4,"score":0.6960493326187134},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.6154657602310181},{"id":"https://openalex.org/C123745756","wikidata":"https://www.wikidata.org/wiki/Q1665949","display_name":"Interconnection","level":2,"score":0.6018627882003784},{"id":"https://openalex.org/C2778182565","wikidata":"https://www.wikidata.org/wiki/Q1752879","display_name":"Clock network","level":5,"score":0.5654114484786987},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.47942131757736206},{"id":"https://openalex.org/C104654189","wikidata":"https://www.wikidata.org/wiki/Q7806740","display_name":"Timing failure","level":5,"score":0.44938814640045166},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3975902497768402},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3682459592819214},{"id":"https://openalex.org/C184720557","wikidata":"https://www.wikidata.org/wiki/Q7825049","display_name":"Topology (electrical circuits)","level":2,"score":0.3378552198410034},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.33271026611328125},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.32055145502090454},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.31392425298690796},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.24913367629051208},{"id":"https://openalex.org/C137059387","wikidata":"https://www.wikidata.org/wiki/Q426882","display_name":"Clock signal","level":3,"score":0.22888049483299255},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.20799142122268677},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1781488060951233},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.10859382152557373},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/icicdt.2015.7165895","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icicdt.2015.7165895","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 International Conference on IC Design &amp; Technology (ICICDT)","raw_type":"proceedings-article"},{"id":"pmh:oai:dipot.ulb.ac.be:2013/265433","is_oa":false,"landing_page_url":"http://hdl.handle.net/2013/ULB-DIPOT:oai:dipot.ulb.ac.be:2013/265433","pdf_url":null,"source":{"id":"https://openalex.org/S4306401063","display_name":"D\u00e9p\u00f4t institutionnel de l'Universit\u00e9 libre de Bruxelles (Universit\u00e9 Libre de Bruxelles)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I132053463","host_organization_name":"Universit\u00e9 Libre de Bruxelles","host_organization_lineage":["https://openalex.org/I132053463"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"In: International Conference on IC Design & Technology (ICICDT)","raw_type":"info:ulb-repo/semantics/openurl/proceeding"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.8799999952316284}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W194034902","https://openalex.org/W2025640338","https://openalex.org/W2059229417","https://openalex.org/W2109820278","https://openalex.org/W2117336505","https://openalex.org/W2125169487","https://openalex.org/W2143035400","https://openalex.org/W2150946561","https://openalex.org/W2167066618","https://openalex.org/W2170428543","https://openalex.org/W2478848959","https://openalex.org/W6684422033"],"related_works":["https://openalex.org/W2116259070","https://openalex.org/W4247180033","https://openalex.org/W2144282137","https://openalex.org/W2088914741","https://openalex.org/W2163318442","https://openalex.org/W2559451387","https://openalex.org/W2087612346","https://openalex.org/W2123512677","https://openalex.org/W2028052815","https://openalex.org/W2066822161"],"abstract_inverted_index":{"For":[0,210],"sub-28nm,":[1],"process":[2,135],"variations":[3,14],"became":[4],"more":[5,107,166],"important.":[6],"Clock":[7],"distribution":[8],"networks":[9],"are":[10,42],"sensitive":[11,108],"to":[12,18,24,64,109,147,170,186,219],"those":[13],"because":[15],"they":[16],"lead":[17],"increased":[19],"clock":[20,62,86],"skew,":[21],"which":[22],"translates":[23],"a":[25,139,194,211],"deterioration":[26],"of":[27,61,74,77,94,112,114,121,123,154,159,173,179,205,213,215],"the":[28,35,59,72,75,78,81,85,92,104,110,115,124,152,155,157,171,177,187,190,203,216,220,223,228,233],"performance.":[29],"In":[30,189],"this":[31],"scope,":[32],"it":[33],"is":[34,106],"first":[36],"time":[37],"that":[38,103],"different":[39],"existing":[40],"processes":[41],"compared.":[43],"We":[44,89],"consider":[45],"self-aligned":[46],"double":[47],"patterning":[48],"(SADP)":[49],"and":[50,67,84,120,138,199],"triple":[51,53],"expose":[52],"etch":[54],"(LELELE).":[55],"First":[56],"we":[57,70,130,192],"study":[58],"sensitivity":[60],"skew":[63,105,164,200,234],"interconnect":[65],"capacitance":[66,122,217],"resistance.":[68],"Next":[69],"present":[71],"influence":[73,162],"geometry":[76],"tree":[79,87,156],"as":[80,176,232],"chip":[82],"size":[83],"depth.":[88,188],"also":[90],"investigate":[91],"performance":[93],"adding":[95],"air":[96,206,221],"gaps":[97,207],"between":[98,196,208],"wires.":[99,209],"The":[100],"results":[101],"show":[102],"variation":[111],"resistance":[113],"lower":[116],"metal":[117,126,141],"layers":[118,127],"(Mx)":[119],"upper":[125],"(Mz).":[128],"Thus":[129],"choose":[131],"triple-expose":[132],"triple-etching":[133],"(LELELE)":[134],"for":[136,143],"Mx":[137],"relaxed":[140],"pitch":[142],"Mz":[144],"in":[145],"order":[146],"optimize":[148],"RC-variations.":[149],"By":[150],"increasing":[151],"depth":[153],"front-end":[158],"line":[160,174],"(FEOL)":[161],"on":[163],"becomes":[165],"dominant":[167],"with":[168,184,202],"respect":[169,185],"back-end":[172],"(BEOL)":[175],"number":[178],"drivers":[180],"grows":[181],"up":[182],"exponentially":[183],"end,":[191],"find":[193],"trade-off":[195],"power":[197,224],"consumption":[198,225],"deviation":[201],"introduction":[204],"reduction":[212],"9%":[214],"thanks":[218],"gaps,":[222],"decreases":[226],"by":[227],"same":[229],"percentage":[230],"(6%)":[231],"deviation.":[235]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2016,"cited_by_count":1}],"updated_date":"2026-04-04T16:13:02.066488","created_date":"2025-10-10T00:00:00"}
