{"id":"https://openalex.org/W2559656255","doi":"https://doi.org/10.1109/iceee.2016.7751218","title":"Study of optoelectronics properties of indium tin oxide films fabricated by sputtering in oxygen atmosphere","display_name":"Study of optoelectronics properties of indium tin oxide films fabricated by sputtering in oxygen atmosphere","publication_year":2016,"publication_date":"2016-09-01","ids":{"openalex":"https://openalex.org/W2559656255","doi":"https://doi.org/10.1109/iceee.2016.7751218","mag":"2559656255"},"language":"en","primary_location":{"id":"doi:10.1109/iceee.2016.7751218","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iceee.2016.7751218","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 13th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"S. Vazquez","orcid":null},"institutions":[{"id":"https://openalex.org/I39824353","display_name":"National Institute of Astrophysics, Optics and Electronics","ror":"https://ror.org/00bpmmc63","country_code":"MX","type":"facility","lineage":["https://openalex.org/I39824353"]}],"countries":["MX"],"is_corresponding":true,"raw_author_name":"S. Vazquez","raw_affiliation_strings":["Instituto Nacional de Astrofisica, Optica y Electr\u00f3nica\u00b9"],"affiliations":[{"raw_affiliation_string":"Instituto Nacional de Astrofisica, Optica y Electr\u00f3nica\u00b9","institution_ids":["https://openalex.org/I39824353"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050096235","display_name":"Antonio J. Olivares","orcid":"https://orcid.org/0000-0001-9291-7374"},"institutions":[{"id":"https://openalex.org/I39824353","display_name":"National Institute of Astrophysics, Optics and Electronics","ror":"https://ror.org/00bpmmc63","country_code":"MX","type":"facility","lineage":["https://openalex.org/I39824353"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"A. Olivares","raw_affiliation_strings":["Instituto Nacional de Astrofisica, Optica y Electr\u00f3nica\u00b9"],"affiliations":[{"raw_affiliation_string":"Instituto Nacional de Astrofisica, Optica y Electr\u00f3nica\u00b9","institution_ids":["https://openalex.org/I39824353"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039341004","display_name":"Ismael Cosme","orcid":"https://orcid.org/0000-0003-1403-6023"},"institutions":[{"id":"https://openalex.org/I39824353","display_name":"National Institute of Astrophysics, Optics and Electronics","ror":"https://ror.org/00bpmmc63","country_code":"MX","type":"facility","lineage":["https://openalex.org/I39824353"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"I. Cosme","raw_affiliation_strings":["Instituto Nacional de Astrofisica, Optica y Electr\u00f3nica\u00b9"],"affiliations":[{"raw_affiliation_string":"Instituto Nacional de Astrofisica, Optica y Electr\u00f3nica\u00b9","institution_ids":["https://openalex.org/I39824353"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001192651","display_name":"Svetlana Mansurova","orcid":"https://orcid.org/0000-0002-7341-8323"},"institutions":[{"id":"https://openalex.org/I39824353","display_name":"National Institute of Astrophysics, Optics and Electronics","ror":"https://ror.org/00bpmmc63","country_code":"MX","type":"facility","lineage":["https://openalex.org/I39824353"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"S. Mansurova","raw_affiliation_strings":["Instituto Nacional de Astrofisica, Optica y Electr\u00f3nica\u00b9"],"affiliations":[{"raw_affiliation_string":"Instituto Nacional de Astrofisica, Optica y Electr\u00f3nica\u00b9","institution_ids":["https://openalex.org/I39824353"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003836710","display_name":"A. Kosarev","orcid":"https://orcid.org/0000-0002-5201-6923"},"institutions":[{"id":"https://openalex.org/I39824353","display_name":"National Institute of Astrophysics, Optics and Electronics","ror":"https://ror.org/00bpmmc63","country_code":"MX","type":"facility","lineage":["https://openalex.org/I39824353"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"A. Kosarev","raw_affiliation_strings":["Instituto Nacional de Astrofisica, Optica y Electr\u00f3nica\u00b9"],"affiliations":[{"raw_affiliation_string":"Instituto Nacional de Astrofisica, Optica y Electr\u00f3nica\u00b9","institution_ids":["https://openalex.org/I39824353"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5024286799","display_name":"A. Itzmoyot","orcid":null},"institutions":[{"id":"https://openalex.org/I39824353","display_name":"National Institute of Astrophysics, Optics and Electronics","ror":"https://ror.org/00bpmmc63","country_code":"MX","type":"facility","lineage":["https://openalex.org/I39824353"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"A. Itzmoyot","raw_affiliation_strings":["Instituto Nacional de Astrofisica, Optica y Electr\u00f3nica\u00b9"],"affiliations":[{"raw_affiliation_string":"Instituto Nacional de Astrofisica, Optica y Electr\u00f3nica\u00b9","institution_ids":["https://openalex.org/I39824353"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I39824353"],"apc_list":null,"apc_paid":null,"fwci":0.1591,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.56973068,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"177","issue":null,"first_page":"1","last_page":"5"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10090","display_name":"ZnO doping and properties","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10090","display_name":"ZnO doping and properties","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10045","display_name":"Organic Electronics and Photovoltaics","score":0.9973000288009644,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/indium-tin-oxide","display_name":"Indium tin oxide","score":0.7593791484832764},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6426407694816589},{"id":"https://openalex.org/keywords/sheet-resistance","display_name":"Sheet resistance","score":0.551198422908783},{"id":"https://openalex.org/keywords/oxygen","display_name":"Oxygen","score":0.5439363718032837},{"id":"https://openalex.org/keywords/sputter-deposition","display_name":"Sputter deposition","score":0.5120568871498108},{"id":"https://openalex.org/keywords/transmittance","display_name":"Transmittance","score":0.49404245615005493},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.4767502248287201},{"id":"https://openalex.org/keywords/sputtering","display_name":"Sputtering","score":0.44166266918182373},{"id":"https://openalex.org/keywords/tin","display_name":"Tin","score":0.43559741973876953},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.40762996673583984},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2972661256790161},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.20044150948524475},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.17487052083015442},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.10460224747657776},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.1028754711151123},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.08711129426956177}],"concepts":[{"id":"https://openalex.org/C32737372","wikidata":"https://www.wikidata.org/wiki/Q417718","display_name":"Indium tin oxide","level":3,"score":0.7593791484832764},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6426407694816589},{"id":"https://openalex.org/C66825105","wikidata":"https://www.wikidata.org/wiki/Q354718","display_name":"Sheet resistance","level":3,"score":0.551198422908783},{"id":"https://openalex.org/C540031477","wikidata":"https://www.wikidata.org/wiki/Q629","display_name":"Oxygen","level":2,"score":0.5439363718032837},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.5120568871498108},{"id":"https://openalex.org/C150493377","wikidata":"https://www.wikidata.org/wiki/Q1427863","display_name":"Transmittance","level":2,"score":0.49404245615005493},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.4767502248287201},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.44166266918182373},{"id":"https://openalex.org/C525849907","wikidata":"https://www.wikidata.org/wiki/Q1096","display_name":"Tin","level":2,"score":0.43559741973876953},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.40762996673583984},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2972661256790161},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.20044150948524475},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.17487052083015442},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.10460224747657776},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.1028754711151123},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.08711129426956177}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iceee.2016.7751218","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iceee.2016.7751218","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 13th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.5799999833106995,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":31,"referenced_works":["https://openalex.org/W1968115489","https://openalex.org/W1974601726","https://openalex.org/W1980378828","https://openalex.org/W1980387314","https://openalex.org/W1991627792","https://openalex.org/W1995827852","https://openalex.org/W2000357830","https://openalex.org/W2000929128","https://openalex.org/W2002787266","https://openalex.org/W2003664682","https://openalex.org/W2004907704","https://openalex.org/W2006342174","https://openalex.org/W2010487930","https://openalex.org/W2025741484","https://openalex.org/W2026390882","https://openalex.org/W2033947273","https://openalex.org/W2034359128","https://openalex.org/W2035777734","https://openalex.org/W2041800061","https://openalex.org/W2057241639","https://openalex.org/W2061367436","https://openalex.org/W2075704882","https://openalex.org/W2077188122","https://openalex.org/W2081283116","https://openalex.org/W2083846387","https://openalex.org/W2095989357","https://openalex.org/W2104092695","https://openalex.org/W2107934961","https://openalex.org/W2140924227","https://openalex.org/W2146628585","https://openalex.org/W2163680990"],"related_works":["https://openalex.org/W3083677898","https://openalex.org/W2350440453","https://openalex.org/W1732267426","https://openalex.org/W2047063580","https://openalex.org/W4205741711","https://openalex.org/W2362680953","https://openalex.org/W2075809560","https://openalex.org/W2948575315","https://openalex.org/W2944200126","https://openalex.org/W2098819546"],"abstract_inverted_index":{"Indium":[0],"tin":[1],"oxide":[2],"(ITO)":[3],"thin":[4],"films":[5,27,62],"were":[6,28,63,135],"deposited":[7,29],"by":[8,30,65],"magnetron":[9],"sputtering":[10],"with":[11,36,99,159,174,186],"different":[12],"oxygen":[13,77,87,109,163],"flows":[14],"rates":[15],"(%O":[16],"<sub":[17,124,166],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[18,125,167],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[19,168],"=":[20,41,48,54,105,127,151,169,178],"1":[21],"%":[22,153,171,180],"to":[23],"0":[24],"%).":[25],"The":[26,142],"RF":[31,38],"discharge":[32],"in":[33,86,108,137,147,172],"argon/oxygen":[34],"atmosphere":[35,88,110],"a":[37,157,183],"power":[39,144],"W":[40,43],"150":[42],"at":[44,103,162],"substrate":[45],"temperature":[46],"T":[47,104],"175\u00b0":[49],"C":[50],"and":[51,69,117],"pressure":[52],"P":[53],"6":[55],"mTorrs.":[56],"Photoelectric":[57],"parameters":[58],"of":[59,120],"fabricated":[60,85,161,185],"ITO":[61,160],"characterized":[64],"four-point":[66],"probe":[67],"method":[68],"transmittance":[70,90,114],"measurements.":[71],"It":[72],"was":[73,154],"found":[74],"that":[75],"reducing":[76],"concentration":[78,164],"the":[79,89,97,112,131],"sheet":[80,121],"resistance":[81,122],"decreases.":[82],"For":[83],"samples":[84],"reached":[91],"values":[92],"above":[93],"90":[94],"%.":[95],"However,":[96],"sample":[98],"post-deposition":[100],"thermal":[101],"treatment":[102],"300":[106],"\u00b0C":[107],"shows":[111],"best":[113,143],"(95":[115],"%)":[116],"lowest":[118],"value":[119],"(R":[123],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">s</sub>":[126],"27":[128],"ohms-square).":[129],"Finally,":[130],"transparent":[132],"conducting":[133],"oxides":[134],"applied":[136],"hybrid":[138],"organic-inorganic":[139],"photovoltaic":[140],"structures.":[141],"conversion":[145],"efficiency":[146,176],"AM-1":[148],"sunlight":[149],"\u03b7":[150,177],"2.13":[152],"obtained":[155,181],"for":[156,182],"structure":[158,184],"%O":[165],"0.25":[170],"comparison":[173],"an":[175],"1.87":[179],"commercial":[187],"ITO.":[188]},"counts_by_year":[{"year":2018,"cited_by_count":1}],"updated_date":"2026-04-16T08:26:57.006410","created_date":"2025-10-10T00:00:00"}