{"id":"https://openalex.org/W1995458137","doi":"https://doi.org/10.1109/iceee.2013.6676083","title":"MEMS capacitive sensor using FGMOS","display_name":"MEMS capacitive sensor using FGMOS","publication_year":2013,"publication_date":"2013-09-01","ids":{"openalex":"https://openalex.org/W1995458137","doi":"https://doi.org/10.1109/iceee.2013.6676083","mag":"1995458137"},"language":"en","primary_location":{"id":"doi:10.1109/iceee.2013.6676083","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iceee.2013.6676083","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2013 10th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5027013819","display_name":"Griselda Stephany Abarca-Jim\u00e9nez","orcid":"https://orcid.org/0000-0002-7811-6471"},"institutions":[{"id":"https://openalex.org/I68368234","display_name":"Centro de Investigaci\u00f3n y de Estudios Avanzados del Instituto Polit\u00e9cnico Nacional","ror":"https://ror.org/009eqmr18","country_code":"MX","type":"facility","lineage":["https://openalex.org/I59361560","https://openalex.org/I68368234"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"G. S. Abarca-Jimenez","raw_affiliation_strings":["Department of Electrical Engineering, CINVESTAV, Mexico City, Mexico","Dept. of Electr. Eng., CINVESTAV, Mexico City, Mexico"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, CINVESTAV, Mexico City, Mexico","institution_ids":["https://openalex.org/I68368234"]},{"raw_affiliation_string":"Dept. of Electr. Eng., CINVESTAV, Mexico City, Mexico","institution_ids":["https://openalex.org/I68368234"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012359830","display_name":"M. A. Reyes\u2013Barranca","orcid":null},"institutions":[{"id":"https://openalex.org/I68368234","display_name":"Centro de Investigaci\u00f3n y de Estudios Avanzados del Instituto Polit\u00e9cnico Nacional","ror":"https://ror.org/009eqmr18","country_code":"MX","type":"facility","lineage":["https://openalex.org/I59361560","https://openalex.org/I68368234"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"M. A. Reyes-Barranca","raw_affiliation_strings":["Department of Electrical Engineering, CINVESTAV, Mexico City, Mexico","Dept. of Electr. Eng., CINVESTAV, Mexico City, Mexico"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, CINVESTAV, Mexico City, Mexico","institution_ids":["https://openalex.org/I68368234"]},{"raw_affiliation_string":"Dept. of Electr. Eng., CINVESTAV, Mexico City, Mexico","institution_ids":["https://openalex.org/I68368234"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5045463247","display_name":"S. Mendoza-Acevedo","orcid":"https://orcid.org/0000-0002-6989-0406"},"institutions":[{"id":"https://openalex.org/I59361560","display_name":"Instituto Polit\u00e9cnico Nacional","ror":"https://ror.org/059sp8j34","country_code":"MX","type":"education","lineage":["https://openalex.org/I59361560"]}],"countries":["MX"],"is_corresponding":false,"raw_author_name":"S. Mendoza-Acevedo","raw_affiliation_strings":["Computing Research Center, IPN, Mexico City, Mexico","Comput. Res. Center, IPN, Mexico City, Mexico"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Computing Research Center, IPN, Mexico City, Mexico","institution_ids":["https://openalex.org/I59361560"]},{"raw_affiliation_string":"Comput. Res. Center, IPN, Mexico City, Mexico","institution_ids":["https://openalex.org/I59361560"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.24,"has_fulltext":false,"cited_by_count":7,"citation_normalized_percentile":{"value":0.59262221,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"421","last_page":"426"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.8691866993904114},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.7924515604972839},{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.678937554359436},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.659679651260376},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6207794547080994},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.6106148958206177},{"id":"https://openalex.org/keywords/capacitor","display_name":"Capacitor","score":0.5676225423812866},{"id":"https://openalex.org/keywords/variable-capacitor","display_name":"Variable capacitor","score":0.5040687322616577},{"id":"https://openalex.org/keywords/transistor","display_name":"Transistor","score":0.46596673130989075},{"id":"https://openalex.org/keywords/transducer","display_name":"Transducer","score":0.45571446418762207},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.44782131910324097},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.4205777645111084},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4132179021835327},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.3532368838787079},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2529195547103882},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.25074830651283264},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.10557329654693604},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.09449514746665955},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.06780064105987549}],"concepts":[{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.8691866993904114},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.7924515604972839},{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.678937554359436},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.659679651260376},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6207794547080994},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.6106148958206177},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.5676225423812866},{"id":"https://openalex.org/C171496939","wikidata":"https://www.wikidata.org/wiki/Q1347410","display_name":"Variable capacitor","level":4,"score":0.5040687322616577},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.46596673130989075},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.45571446418762207},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.44782131910324097},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.4205777645111084},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4132179021835327},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3532368838787079},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2529195547103882},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.25074830651283264},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.10557329654693604},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.09449514746665955},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.06780064105987549},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iceee.2013.6676083","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iceee.2013.6676083","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2013 10th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.8500000238418579}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":2,"referenced_works":["https://openalex.org/W602197117","https://openalex.org/W2062784181"],"related_works":["https://openalex.org/W3161496874","https://openalex.org/W2160325238","https://openalex.org/W2902633157","https://openalex.org/W2612970077","https://openalex.org/W2026330382","https://openalex.org/W2915680872","https://openalex.org/W2287189152","https://openalex.org/W2502505565","https://openalex.org/W756886103","https://openalex.org/W1897132364"],"abstract_inverted_index":{"In":[0],"this":[1,46,66],"paper,":[2],"a":[3,14,29,58,63,70,112],"capacitance":[4,47,76],"structure":[5,48,119],"configured":[6],"with":[7,28],"two":[8],"plates":[9,44],"to":[10],"be":[11,104],"used":[12,25,86],"as":[13,34],"MEMS-sensor":[15],"is":[16,49,60,67],"presented.":[17],"This":[18,74],"capacitor":[19],"was":[20],"designed":[21],"primarily":[22],"for":[23,117],"being":[24],"in":[26,87],"combination":[27],"floating-gate":[30],"MOS":[31],"transistor":[32],"(FGMOS)":[33],"the":[35,43,52,80,84,88,90,100,118],"transducer":[36],"device":[37],"of":[38,42,45,83],"an":[39],"accelerometer.":[40],"One":[41],"fixed":[50],"and":[51,96],"other":[53],"plate":[54],"will":[55],"move":[56],"when":[57],"force":[59],"applied,":[61],"causing":[62],"variable":[64,75],"capacitance,":[65],"achieved":[68],"by":[69,94,111],"lateral":[71],"comb":[72],"configuration.":[73],"depends":[77],"either":[78],"on":[79],"mechanical":[81],"properties":[82],"material":[85],"structure,":[89],"undesired":[91],"displacement":[92],"caused":[93],"gravity":[95],"pull-in":[97],"effect.":[98],"Furthermore,":[99],"proposed":[101],"design":[102],"can":[103],"fabricated":[105],"using":[106],"standard":[107],"CMOS":[108],"technologies":[109],"followed":[110],"sacrificial":[113],"layer":[114],"etching":[115],"needed":[116],"release.":[120]},"counts_by_year":[{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}