{"id":"https://openalex.org/W2170323840","doi":"https://doi.org/10.1109/icecs.2009.5410976","title":"Low actuation voltage silicon carbide RF switches for MEMS above IC","display_name":"Low actuation voltage silicon carbide RF switches for MEMS above IC","publication_year":2009,"publication_date":"2009-12-01","ids":{"openalex":"https://openalex.org/W2170323840","doi":"https://doi.org/10.1109/icecs.2009.5410976","mag":"2170323840"},"language":"en","primary_location":{"id":"doi:10.1109/icecs.2009.5410976","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icecs.2009.5410976","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 16th IEEE International Conference on Electronics, Circuits and Systems - (ICECS 2009)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5086765627","display_name":"Paul-Vah\u00e9 Cicek","orcid":"https://orcid.org/0000-0002-3665-0721"},"institutions":[{"id":"https://openalex.org/I5023651","display_name":"McGill University","ror":"https://ror.org/01pxwe438","country_code":"CA","type":"education","lineage":["https://openalex.org/I5023651"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"P.-V. Cicek","raw_affiliation_strings":["McGill University, Montreal, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"McGill University, Montreal, Canada","institution_ids":["https://openalex.org/I5023651"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031272570","display_name":"S. Mahdavi","orcid":null},"institutions":[{"id":"https://openalex.org/I5023651","display_name":"McGill University","ror":"https://ror.org/01pxwe438","country_code":"CA","type":"education","lineage":["https://openalex.org/I5023651"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"S. Mahdavi","raw_affiliation_strings":["McGill University, Montreal, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"McGill University, Montreal, Canada","institution_ids":["https://openalex.org/I5023651"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058919102","display_name":"Fr\u00e9d\u00e9ric Nabki","orcid":"https://orcid.org/0000-0002-2281-7172"},"institutions":[{"id":"https://openalex.org/I5023651","display_name":"McGill University","ror":"https://ror.org/01pxwe438","country_code":"CA","type":"education","lineage":["https://openalex.org/I5023651"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"F. Nabki","raw_affiliation_strings":["McGill University, Montreal, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"McGill University, Montreal, Canada","institution_ids":["https://openalex.org/I5023651"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103375516","display_name":"Mourad N. El-Gamal","orcid":null},"institutions":[{"id":"https://openalex.org/I5023651","display_name":"McGill University","ror":"https://ror.org/01pxwe438","country_code":"CA","type":"education","lineage":["https://openalex.org/I5023651"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"M. N. El-Gamal","raw_affiliation_strings":["McGill University, Montreal, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"McGill University, Montreal, Canada","institution_ids":["https://openalex.org/I5023651"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I5023651"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.27591052,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":96},"biblio":{"volume":"82","issue":null,"first_page":"223","last_page":"226"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":0.9979000091552734,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.8201605081558228},{"id":"https://openalex.org/keywords/silicon-carbide","display_name":"Silicon carbide","score":0.7235596179962158},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.6557210683822632},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.6483426094055176},{"id":"https://openalex.org/keywords/reliability","display_name":"Reliability (semiconductor)","score":0.6414605379104614},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.5171365141868591},{"id":"https://openalex.org/keywords/durability","display_name":"Durability","score":0.5104726552963257},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.46005648374557495},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.44477176666259766},{"id":"https://openalex.org/keywords/low-voltage","display_name":"Low voltage","score":0.42994797229766846},{"id":"https://openalex.org/keywords/rf-switch","display_name":"RF switch","score":0.41316521167755127},{"id":"https://openalex.org/keywords/radio-frequency","display_name":"Radio frequency","score":0.4009062647819519},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.35983216762542725},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3258315920829773},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.18971335887908936},{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.06872794032096863}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.8201605081558228},{"id":"https://openalex.org/C2780722187","wikidata":"https://www.wikidata.org/wiki/Q412356","display_name":"Silicon carbide","level":2,"score":0.7235596179962158},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.6557210683822632},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.6483426094055176},{"id":"https://openalex.org/C43214815","wikidata":"https://www.wikidata.org/wiki/Q7310987","display_name":"Reliability (semiconductor)","level":3,"score":0.6414605379104614},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.5171365141868591},{"id":"https://openalex.org/C104304963","wikidata":"https://www.wikidata.org/wiki/Q5316114","display_name":"Durability","level":2,"score":0.5104726552963257},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.46005648374557495},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.44477176666259766},{"id":"https://openalex.org/C128624480","wikidata":"https://www.wikidata.org/wiki/Q1504817","display_name":"Low voltage","level":3,"score":0.42994797229766846},{"id":"https://openalex.org/C2781283035","wikidata":"https://www.wikidata.org/wiki/Q571939","display_name":"RF switch","level":3,"score":0.41316521167755127},{"id":"https://openalex.org/C74064498","wikidata":"https://www.wikidata.org/wiki/Q3396184","display_name":"Radio frequency","level":2,"score":0.4009062647819519},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.35983216762542725},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3258315920829773},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.18971335887908936},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.06872794032096863},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icecs.2009.5410976","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icecs.2009.5410976","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 16th IEEE International Conference on Electronics, Circuits and Systems - (ICECS 2009)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.5099999904632568,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1543424262","https://openalex.org/W1919375411","https://openalex.org/W2005807727","https://openalex.org/W2012457726","https://openalex.org/W2013821483","https://openalex.org/W2018019678","https://openalex.org/W2100424833","https://openalex.org/W2121341028","https://openalex.org/W2130228556","https://openalex.org/W2131852660","https://openalex.org/W2135810614","https://openalex.org/W2526167378","https://openalex.org/W4243313184","https://openalex.org/W6680163601"],"related_works":["https://openalex.org/W2172277242","https://openalex.org/W3147236441","https://openalex.org/W2311177591","https://openalex.org/W2743147755","https://openalex.org/W1480077593","https://openalex.org/W4311168406","https://openalex.org/W4386631493","https://openalex.org/W2390476730","https://openalex.org/W1519471010","https://openalex.org/W2353750844"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3],"CMOS-compatible":[4],"RF":[5],"MEMS":[6],"technology":[7],"to":[8,21,31,49],"build":[9],"low":[10],"actuation":[11],"voltage":[12,39],"switches.":[13],"SiC":[14],"increases":[15],"the":[16,19,54],"stiffness":[17],"of":[18],"switches":[20],"improve":[22],"reliability":[23],"and":[24,43],"durability.":[25],"A":[26],"design":[27],"methodology":[28],"is":[29],"introduced":[30],"optimize":[32],"tradeoffs":[33],"between":[34],"important":[35],"system":[36],"criteria,":[37],"i.e.,":[38],"levels,":[40],"signal":[41],"performance":[42],"switching":[44],"speed.":[45],"Simulations":[46],"are":[47],"used":[48],"evaluate":[50],"devices":[51],"designed":[52],"with":[53],"technology.":[55]},"counts_by_year":[{"year":2013,"cited_by_count":2}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}