{"id":"https://openalex.org/W2117669248","doi":"https://doi.org/10.1109/icecs.2009.5410846","title":"A MEMS-based vacuum sensor with a PLL frequency-to-voltage converter","display_name":"A MEMS-based vacuum sensor with a PLL frequency-to-voltage converter","publication_year":2009,"publication_date":"2009-12-01","ids":{"openalex":"https://openalex.org/W2117669248","doi":"https://doi.org/10.1109/icecs.2009.5410846","mag":"2117669248"},"language":"en","primary_location":{"id":"doi:10.1109/icecs.2009.5410846","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icecs.2009.5410846","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 16th IEEE International Conference on Electronics, Circuits and Systems - (ICECS 2009)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5113550654","display_name":"Karim Allidina","orcid":null},"institutions":[{"id":"https://openalex.org/I5023651","display_name":"McGill University","ror":"https://ror.org/01pxwe438","country_code":"CA","type":"education","lineage":["https://openalex.org/I5023651"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"K. Allidina","raw_affiliation_strings":["McGill University, Montreal, Canada","McGill University; Montreal; Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"McGill University, Montreal, Canada","institution_ids":["https://openalex.org/I5023651"]},{"raw_affiliation_string":"McGill University; Montreal; Canada","institution_ids":["https://openalex.org/I5023651"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042357637","display_name":"Mohammad Taghvaei","orcid":"https://orcid.org/0009-0002-3337-9291"},"institutions":[{"id":"https://openalex.org/I5023651","display_name":"McGill University","ror":"https://ror.org/01pxwe438","country_code":"CA","type":"education","lineage":["https://openalex.org/I5023651"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"M. A. Taghvaei","raw_affiliation_strings":["McGill University, Montreal, Canada","McGill University; Montreal; Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"McGill University, Montreal, Canada","institution_ids":["https://openalex.org/I5023651"]},{"raw_affiliation_string":"McGill University; Montreal; Canada","institution_ids":["https://openalex.org/I5023651"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058919102","display_name":"Fr\u00e9d\u00e9ric Nabki","orcid":"https://orcid.org/0000-0002-2281-7172"},"institutions":[{"id":"https://openalex.org/I5023651","display_name":"McGill University","ror":"https://ror.org/01pxwe438","country_code":"CA","type":"education","lineage":["https://openalex.org/I5023651"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"F. Nabki","raw_affiliation_strings":["McGill University, Montreal, Canada","McGill University; Montreal; Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"McGill University, Montreal, Canada","institution_ids":["https://openalex.org/I5023651"]},{"raw_affiliation_string":"McGill University; Montreal; Canada","institution_ids":["https://openalex.org/I5023651"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086765627","display_name":"Paul-Vah\u00e9 Cicek","orcid":"https://orcid.org/0000-0002-3665-0721"},"institutions":[{"id":"https://openalex.org/I5023651","display_name":"McGill University","ror":"https://ror.org/01pxwe438","country_code":"CA","type":"education","lineage":["https://openalex.org/I5023651"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"P.-V. Cicek","raw_affiliation_strings":["McGill University, Montreal, Canada","McGill University; Montreal; Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"McGill University, Montreal, Canada","institution_ids":["https://openalex.org/I5023651"]},{"raw_affiliation_string":"McGill University; Montreal; Canada","institution_ids":["https://openalex.org/I5023651"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103375516","display_name":"Mourad N. El-Gamal","orcid":null},"institutions":[{"id":"https://openalex.org/I5023651","display_name":"McGill University","ror":"https://ror.org/01pxwe438","country_code":"CA","type":"education","lineage":["https://openalex.org/I5023651"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"M. N. El-Gamal","raw_affiliation_strings":["McGill University, Montreal, Canada","McGill University; Montreal; Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"McGill University, Montreal, Canada","institution_ids":["https://openalex.org/I5023651"]},{"raw_affiliation_string":"McGill University; Montreal; Canada","institution_ids":["https://openalex.org/I5023651"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I5023651"],"apc_list":null,"apc_paid":null,"fwci":0.4854,"has_fulltext":false,"cited_by_count":7,"citation_normalized_percentile":{"value":0.59620303,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"52","issue":null,"first_page":"583","last_page":"586"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11417","display_name":"Advancements in PLL and VCO Technologies","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11417","display_name":"Advancements in PLL and VCO Technologies","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10187","display_name":"Radio Frequency Integrated Circuit Design","score":0.9970999956130981,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9922999739646912,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/transimpedance-amplifier","display_name":"Transimpedance amplifier","score":0.8629643321037292},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7586637735366821},{"id":"https://openalex.org/keywords/phase-locked-loop","display_name":"Phase-locked loop","score":0.7082460522651672},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.6465595960617065},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.622856616973877},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5665134787559509},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.5298488140106201},{"id":"https://openalex.org/keywords/amplifier","display_name":"Amplifier","score":0.519524872303009},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.5054018497467041},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.45906761288642883},{"id":"https://openalex.org/keywords/voltage-controlled-oscillator","display_name":"Voltage-controlled oscillator","score":0.42073509097099304},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.38265860080718994},{"id":"https://openalex.org/keywords/operational-amplifier","display_name":"Operational amplifier","score":0.27307888865470886},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.26887208223342896},{"id":"https://openalex.org/keywords/phase-noise","display_name":"Phase noise","score":0.23102310299873352}],"concepts":[{"id":"https://openalex.org/C92631468","wikidata":"https://www.wikidata.org/wiki/Q215437","display_name":"Transimpedance amplifier","level":5,"score":0.8629643321037292},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7586637735366821},{"id":"https://openalex.org/C12707504","wikidata":"https://www.wikidata.org/wiki/Q52637","display_name":"Phase-locked loop","level":3,"score":0.7082460522651672},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.6465595960617065},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.622856616973877},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5665134787559509},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.5298488140106201},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.519524872303009},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.5054018497467041},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.45906761288642883},{"id":"https://openalex.org/C5291336","wikidata":"https://www.wikidata.org/wiki/Q852341","display_name":"Voltage-controlled oscillator","level":3,"score":0.42073509097099304},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.38265860080718994},{"id":"https://openalex.org/C145366948","wikidata":"https://www.wikidata.org/wiki/Q178947","display_name":"Operational amplifier","level":4,"score":0.27307888865470886},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.26887208223342896},{"id":"https://openalex.org/C89631360","wikidata":"https://www.wikidata.org/wiki/Q1428766","display_name":"Phase noise","level":2,"score":0.23102310299873352}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icecs.2009.5410846","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icecs.2009.5410846","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 16th IEEE International Conference on Electronics, Circuits and Systems - (ICECS 2009)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.8999999761581421,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1677884181","https://openalex.org/W1997557181","https://openalex.org/W2070875506","https://openalex.org/W2102556727","https://openalex.org/W2111071652","https://openalex.org/W2117977707","https://openalex.org/W2131428104","https://openalex.org/W2132914205","https://openalex.org/W2156050757","https://openalex.org/W2167586120","https://openalex.org/W2168123783","https://openalex.org/W2174603525","https://openalex.org/W2526167378","https://openalex.org/W6679463529"],"related_works":["https://openalex.org/W1548231692","https://openalex.org/W2901662850","https://openalex.org/W2089646818","https://openalex.org/W2976219355","https://openalex.org/W2089131288","https://openalex.org/W1600405202","https://openalex.org/W1486070987","https://openalex.org/W3064661991","https://openalex.org/W2537716684","https://openalex.org/W2152087047"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,9,24,28,44,53,74],"MEMS":[4,19],"resonator-based":[5],"vacuum":[6,41],"sensor":[7,42],"with":[8],"low":[10],"power":[11,62],"transimpedance":[12],"amplifier":[13],"and":[14,27,52],"PLL-based":[15],"frequency-to-voltage":[16],"converter.":[17],"The":[18,40,60],"resonator":[20],"is":[21,33,68],"fabricated":[22],"in":[23],"CMOS-compatible":[25],"process,":[26],"90":[29],"nm":[30],"CMOS":[31],"technology":[32],"used":[34],"to":[35,49],"design":[36],"the":[37,65],"integrated":[38],"circuitry.":[39],"has":[43],"range":[45],"from":[46,73],"10":[47],"mbar":[48,51],"1200":[50],"resolution":[54],"of":[55,64],"less":[56,69],"than":[57,70],"5":[58],"mbar.":[59],"simulated":[61],"consumption":[63],"entire":[66],"system":[67],"520":[71],"\u00bfW":[72],"1":[75],"V":[76],"supply.":[77]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2013,"cited_by_count":2}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}