{"id":"https://openalex.org/W2108462443","doi":"https://doi.org/10.1109/icecs.2008.4674839","title":"Improvement of the architecture for MEMS resonator quality factor measurement","display_name":"Improvement of the architecture for MEMS resonator quality factor measurement","publication_year":2008,"publication_date":"2008-08-01","ids":{"openalex":"https://openalex.org/W2108462443","doi":"https://doi.org/10.1109/icecs.2008.4674839","mag":"2108462443"},"language":"en","primary_location":{"id":"doi:10.1109/icecs.2008.4674839","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icecs.2008.4674839","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2008 15th IEEE International Conference on Electronics, Circuits and Systems","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5088548874","display_name":"Minglun Zhang","orcid":"https://orcid.org/0000-0001-7793-6884"},"institutions":[{"id":"https://openalex.org/I102197404","display_name":"Universit\u00e9 Paris-Sud","ror":"https://ror.org/028rypz17","country_code":"FR","type":"education","lineage":["https://openalex.org/I102197404"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I204730241","display_name":"Universit\u00e9 Paris Cit\u00e9","ror":"https://ror.org/05f82e368","country_code":"FR","type":"education","lineage":["https://openalex.org/I204730241"]},{"id":"https://openalex.org/I277688954","display_name":"Universit\u00e9 Paris-Saclay","ror":"https://ror.org/03xjwb503","country_code":"FR","type":"education","lineage":["https://openalex.org/I277688954"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Ming Zhang","raw_affiliation_strings":["MiNaSys IEF Bat 220, University of Paris XI CNRS, Orsay, France","CNRS, Univ. of Paris XI, Orsay"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MiNaSys IEF Bat 220, University of Paris XI CNRS, Orsay, France","institution_ids":["https://openalex.org/I102197404","https://openalex.org/I1294671590","https://openalex.org/I277688954"]},{"raw_affiliation_string":"CNRS, Univ. of Paris XI, Orsay","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I204730241","https://openalex.org/I277688954"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025626406","display_name":"Nicolas Llaser","orcid":null},"institutions":[{"id":"https://openalex.org/I102197404","display_name":"Universit\u00e9 Paris-Sud","ror":"https://ror.org/028rypz17","country_code":"FR","type":"education","lineage":["https://openalex.org/I102197404"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I204730241","display_name":"Universit\u00e9 Paris Cit\u00e9","ror":"https://ror.org/05f82e368","country_code":"FR","type":"education","lineage":["https://openalex.org/I204730241"]},{"id":"https://openalex.org/I277688954","display_name":"Universit\u00e9 Paris-Saclay","ror":"https://ror.org/03xjwb503","country_code":"FR","type":"education","lineage":["https://openalex.org/I277688954"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Nicolas Llaser","raw_affiliation_strings":["MiNaSys IEF Bat 220, University of Paris XI CNRS, Orsay, France","CNRS, Univ. of Paris XI, Orsay"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MiNaSys IEF Bat 220, University of Paris XI CNRS, Orsay, France","institution_ids":["https://openalex.org/I102197404","https://openalex.org/I1294671590","https://openalex.org/I277688954"]},{"raw_affiliation_string":"CNRS, Univ. of Paris XI, Orsay","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I204730241","https://openalex.org/I277688954"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5031033968","display_name":"H. Mathias","orcid":"https://orcid.org/0009-0000-0685-0143"},"institutions":[{"id":"https://openalex.org/I102197404","display_name":"Universit\u00e9 Paris-Sud","ror":"https://ror.org/028rypz17","country_code":"FR","type":"education","lineage":["https://openalex.org/I102197404"]},{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I204730241","display_name":"Universit\u00e9 Paris Cit\u00e9","ror":"https://ror.org/05f82e368","country_code":"FR","type":"education","lineage":["https://openalex.org/I204730241"]},{"id":"https://openalex.org/I277688954","display_name":"Universit\u00e9 Paris-Saclay","ror":"https://ror.org/03xjwb503","country_code":"FR","type":"education","lineage":["https://openalex.org/I277688954"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Herve Mathias","raw_affiliation_strings":["MiNaSys IEF Bat 220, University of Paris XI CNRS, Orsay, France","CNRS, Univ. of Paris XI, Orsay"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MiNaSys IEF Bat 220, University of Paris XI CNRS, Orsay, France","institution_ids":["https://openalex.org/I102197404","https://openalex.org/I1294671590","https://openalex.org/I277688954"]},{"raw_affiliation_string":"CNRS, Univ. of Paris XI, Orsay","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I204730241","https://openalex.org/I277688954"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":"484","issue":null,"first_page":"255","last_page":"258"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9980999827384949,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.9973000288009644,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7077432870864868},{"id":"https://openalex.org/keywords/architecture","display_name":"Architecture","score":0.68565434217453},{"id":"https://openalex.org/keywords/block","display_name":"Block (permutation group theory)","score":0.6725906729698181},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.6438471078872681},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6039457321166992},{"id":"https://openalex.org/keywords/factor","display_name":"Factor (programming language)","score":0.5797728896141052},{"id":"https://openalex.org/keywords/q-factor","display_name":"Q factor","score":0.5667998790740967},{"id":"https://openalex.org/keywords/quality","display_name":"Quality (philosophy)","score":0.49510279297828674},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.42863041162490845},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.26494520902633667},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.1604176163673401},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.10609528422355652},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.0820489227771759},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.07617461681365967},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.07502013444900513}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7077432870864868},{"id":"https://openalex.org/C123657996","wikidata":"https://www.wikidata.org/wiki/Q12271","display_name":"Architecture","level":2,"score":0.68565434217453},{"id":"https://openalex.org/C2777210771","wikidata":"https://www.wikidata.org/wiki/Q4927124","display_name":"Block (permutation group theory)","level":2,"score":0.6725906729698181},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.6438471078872681},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6039457321166992},{"id":"https://openalex.org/C2781039887","wikidata":"https://www.wikidata.org/wiki/Q1391724","display_name":"Factor (programming language)","level":2,"score":0.5797728896141052},{"id":"https://openalex.org/C187725362","wikidata":"https://www.wikidata.org/wiki/Q830521","display_name":"Q factor","level":3,"score":0.5667998790740967},{"id":"https://openalex.org/C2779530757","wikidata":"https://www.wikidata.org/wiki/Q1207505","display_name":"Quality (philosophy)","level":2,"score":0.49510279297828674},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.42863041162490845},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.26494520902633667},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1604176163673401},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.10609528422355652},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0820489227771759},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.07617461681365967},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.07502013444900513},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C142362112","wikidata":"https://www.wikidata.org/wiki/Q735","display_name":"Art","level":0,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C153349607","wikidata":"https://www.wikidata.org/wiki/Q36649","display_name":"Visual arts","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icecs.2008.4674839","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icecs.2008.4674839","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2008 15th IEEE International Conference on Electronics, Circuits and Systems","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/11","display_name":"Sustainable cities and communities","score":0.5099999904632568}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":3,"referenced_works":["https://openalex.org/W2122640006","https://openalex.org/W2155197681","https://openalex.org/W6683131096"],"related_works":["https://openalex.org/W2537716684","https://openalex.org/W2152087047","https://openalex.org/W2766999340","https://openalex.org/W2735139788","https://openalex.org/W2054124615","https://openalex.org/W2670482320","https://openalex.org/W2532341012","https://openalex.org/W3217179084","https://openalex.org/W4245281580","https://openalex.org/W4283755933"],"abstract_inverted_index":{"In":[0,60],"this":[1,58],"paper,":[2],"the":[3,24,31,38,41,48,53,64,73],"performance":[4],"analysis":[5,34],"of":[6,26,30,40,43,57,83],"our":[7],"previously":[8],"proposed":[9],"architecture":[10,68],"for":[11],"MEMS":[12],"resonator":[13],"quality":[14],"factor":[15,82],"measurement":[16,49,55,74],"is":[17,69],"carried":[18],"out":[19],"in":[20,36],"taking":[21],"into":[22],"account":[23],"imperfection":[25,42],"each":[27,44],"functional":[28,45],"block":[29,46],"architecture.":[32,59],"This":[33],"puts":[35],"evidence":[37],"impact":[39],"on":[47],"precision":[50,56,75],"and":[51],"predicts":[52],"attainable":[54],"order":[61],"to":[62],"improve":[63],"performance,":[65],"an":[66],"improved":[67,78],"proposed,":[70],"with":[71],"which":[72],"can":[76],"be":[77],"at":[79],"least":[80],"a":[81],"2.":[84]},"counts_by_year":[{"year":2021,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2013,"cited_by_count":1}],"updated_date":"2026-07-22T07:51:19.307946","created_date":"2025-10-10T00:00:00"}