{"id":"https://openalex.org/W2534982632","doi":"https://doi.org/10.1109/iceac.2011.6136675","title":"A Cr-Ni thermoelectric MEMS energy harvester for low profile applications","display_name":"A Cr-Ni thermoelectric MEMS energy harvester for low profile applications","publication_year":2011,"publication_date":"2011-11-01","ids":{"openalex":"https://openalex.org/W2534982632","doi":"https://doi.org/10.1109/iceac.2011.6136675","mag":"2534982632"},"language":"en","primary_location":{"id":"doi:10.1109/iceac.2011.6136675","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iceac.2011.6136675","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 International Conference on Energy Aware Computing","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://hdl.handle.net/11511/55897","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5032572930","display_name":"Emre Tan Topal","orcid":null},"institutions":[{"id":"https://openalex.org/I201799495","display_name":"Middle East Technical University","ror":"https://ror.org/014weej12","country_code":"TR","type":"education","lineage":["https://openalex.org/I201799495"]}],"countries":["TR"],"is_corresponding":false,"raw_author_name":"Emre Tan Topal","raw_affiliation_strings":["METU-MEMS Center, Middle East Technical University, Ankara, Turkey"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"METU-MEMS Center, Middle East Technical University, Ankara, Turkey","institution_ids":["https://openalex.org/I201799495"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5090114436","display_name":"\u00d6zge Zorlu","orcid":"https://orcid.org/0000-0002-9570-0434"},"institutions":[{"id":"https://openalex.org/I201799495","display_name":"Middle East Technical University","ror":"https://ror.org/014weej12","country_code":"TR","type":"education","lineage":["https://openalex.org/I201799495"]}],"countries":["TR"],"is_corresponding":false,"raw_author_name":"Ozge Zorlu","raw_affiliation_strings":["METU-MEMS Center, Middle East Technical University, Ankara, Turkey"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"METU-MEMS Center, Middle East Technical University, Ankara, Turkey","institution_ids":["https://openalex.org/I201799495"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045177705","display_name":"Haluk K\u00fclah","orcid":"https://orcid.org/0000-0003-1331-4474"},"institutions":[{"id":"https://openalex.org/I201799495","display_name":"Middle East Technical University","ror":"https://ror.org/014weej12","country_code":"TR","type":"education","lineage":["https://openalex.org/I201799495"]}],"countries":["TR"],"is_corresponding":false,"raw_author_name":"Haluk Kulah","raw_affiliation_strings":["METU-MEMS Center, Middle East Technical University, Ankara, Turkey"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"METU-MEMS Center, Middle East Technical University, Ankara, Turkey","institution_ids":["https://openalex.org/I201799495"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5055415632","display_name":"Ali Muhtaro\u011flu","orcid":"https://orcid.org/0000-0001-8986-2587"},"institutions":[{"id":"https://openalex.org/I201799495","display_name":"Middle East Technical University","ror":"https://ror.org/014weej12","country_code":"TR","type":"education","lineage":["https://openalex.org/I201799495"]}],"countries":["TR"],"is_corresponding":false,"raw_author_name":"Ali Muhtaroglu","raw_affiliation_strings":["METU NCC REDAR, Middle East Technical University, Guzelyurt, Turkey"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"METU NCC REDAR, Middle East Technical University, Guzelyurt, Turkey","institution_ids":["https://openalex.org/I201799495"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I201799495"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.28491796,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":97},"biblio":{"volume":"20","issue":null,"first_page":"1","last_page":"6"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10440","display_name":"Advanced Thermoelectric Materials and Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10440","display_name":"Advanced Thermoelectric Materials and Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11230","display_name":"Innovative Energy Harvesting Technologies","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11392","display_name":"Energy Harvesting in Wireless Networks","score":0.9965999722480774,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/thermoelectric-effect","display_name":"Thermoelectric effect","score":0.7428964972496033},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.735684871673584},{"id":"https://openalex.org/keywords/energy-harvesting","display_name":"Energy harvesting","score":0.6846073865890503},{"id":"https://openalex.org/keywords/thermocouple","display_name":"Thermocouple","score":0.6732761859893799},{"id":"https://openalex.org/keywords/thermoelectric-generator","display_name":"Thermoelectric generator","score":0.6432649493217468},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5436716079711914},{"id":"https://openalex.org/keywords/thermoelectric-materials","display_name":"Thermoelectric materials","score":0.5153772234916687},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.5130583047866821},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.4820305109024048},{"id":"https://openalex.org/keywords/seebeck-coefficient","display_name":"Seebeck coefficient","score":0.4596559405326843},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.44468769431114197},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.4248027205467224},{"id":"https://openalex.org/keywords/electric-potential-energy","display_name":"Electric potential energy","score":0.41160136461257935},{"id":"https://openalex.org/keywords/automotive-engineering","display_name":"Automotive engineering","score":0.38941818475723267},{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.35295891761779785},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3446032404899597},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3409072160720825},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.252409428358078},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.19047963619232178},{"id":"https://openalex.org/keywords/thermodynamics","display_name":"Thermodynamics","score":0.07325488328933716}],"concepts":[{"id":"https://openalex.org/C63024428","wikidata":"https://www.wikidata.org/wiki/Q552456","display_name":"Thermoelectric effect","level":2,"score":0.7428964972496033},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.735684871673584},{"id":"https://openalex.org/C101518730","wikidata":"https://www.wikidata.org/wiki/Q930236","display_name":"Energy harvesting","level":3,"score":0.6846073865890503},{"id":"https://openalex.org/C168068576","wikidata":"https://www.wikidata.org/wiki/Q190241","display_name":"Thermocouple","level":2,"score":0.6732761859893799},{"id":"https://openalex.org/C117127486","wikidata":"https://www.wikidata.org/wiki/Q11569191","display_name":"Thermoelectric generator","level":3,"score":0.6432649493217468},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5436716079711914},{"id":"https://openalex.org/C207365445","wikidata":"https://www.wikidata.org/wiki/Q15020929","display_name":"Thermoelectric materials","level":3,"score":0.5153772234916687},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.5130583047866821},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.4820305109024048},{"id":"https://openalex.org/C112625512","wikidata":"https://www.wikidata.org/wiki/Q1091448","display_name":"Seebeck coefficient","level":3,"score":0.4596559405326843},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.44468769431114197},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.4248027205467224},{"id":"https://openalex.org/C98576551","wikidata":"https://www.wikidata.org/wiki/Q841798","display_name":"Electric potential energy","level":3,"score":0.41160136461257935},{"id":"https://openalex.org/C171146098","wikidata":"https://www.wikidata.org/wiki/Q124192","display_name":"Automotive engineering","level":1,"score":0.38941818475723267},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.35295891761779785},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3446032404899597},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3409072160720825},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.252409428358078},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.19047963619232178},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.07325488328933716},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/iceac.2011.6136675","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iceac.2011.6136675","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 International Conference on Energy Aware Computing","raw_type":"proceedings-article"},{"id":"pmh:oai:open.metu.edu.tr:11511/55897","is_oa":true,"landing_page_url":"https://hdl.handle.net/11511/55897","pdf_url":null,"source":{"id":"https://openalex.org/S4306402495","display_name":"OpenMETU (Middle East Technical University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I201799495","host_organization_name":"Middle East Technical University","host_organization_lineage":["https://openalex.org/I201799495"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-nc-nd","license_id":"https://openalex.org/licenses/cc-by-nc-nd","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Conference Paper"}],"best_oa_location":{"id":"pmh:oai:open.metu.edu.tr:11511/55897","is_oa":true,"landing_page_url":"https://hdl.handle.net/11511/55897","pdf_url":null,"source":{"id":"https://openalex.org/S4306402495","display_name":"OpenMETU (Middle East Technical University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I201799495","host_organization_name":"Middle East Technical University","host_organization_lineage":["https://openalex.org/I201799495"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-nc-nd","license_id":"https://openalex.org/licenses/cc-by-nc-nd","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Conference Paper"},"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.7099999785423279,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320307102","display_name":"Intel Corporation","ror":"https://ror.org/01ek73717"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W1519892046","https://openalex.org/W1966716486","https://openalex.org/W1968507861","https://openalex.org/W1976822956","https://openalex.org/W2005054921","https://openalex.org/W2056643237","https://openalex.org/W2066350383","https://openalex.org/W2102109582","https://openalex.org/W2116391240","https://openalex.org/W2122074230","https://openalex.org/W2535125846"],"related_works":["https://openalex.org/W2313253132","https://openalex.org/W4205778619","https://openalex.org/W2027463546","https://openalex.org/W1532356289","https://openalex.org/W2573590587","https://openalex.org/W2128275150","https://openalex.org/W2080573930","https://openalex.org/W2038454371","https://openalex.org/W2490922261","https://openalex.org/W3000652821"],"abstract_inverted_index":{"Energy":[0],"harvesting":[1,28],"from":[2],"heat":[3],"has":[4,11,29],"been":[5,88],"investigated":[6],"for":[7,69,76],"many":[8,15],"decades":[9],"and":[10,23,47,54,64,85,107,122],"found":[12],"place":[13],"in":[14,36],"areas":[16],"such":[17],"as":[18,39],"space":[19],"industry,":[20],"aviation,":[21],"automotive":[22],"industrial":[24],"applications.":[25,72],"Thermoelectric":[26],"energy":[27,59,82],"a":[30,51,91,116],"valuable":[31],"potential":[32],"to":[33],"be":[34,113],"used":[35],"mobile":[37,70],"systems":[38],"well.":[40],"In":[41],"this":[42],"study,":[43],"the":[44,80,100],"design,":[45],"fabrication":[46],"test":[48],"results":[49],"of":[50,62,79,94],"low":[52,55],"cost":[53],"profile":[56],"MEMS":[57],"thermoelectric":[58,81],"harvester":[60],"composed":[61],"Cr":[63],"Ni":[65],"thermocouples":[66],"is":[67,97],"introduced":[68],"computing":[71],"Finite":[73],"element":[74],"modelling":[75],"performance":[77],"optimization":[78],"harvester,":[83,102],"fabrication,":[84],"validation":[86],"have":[87],"completed.":[89],"When":[90],"temperature":[92],"difference":[93],"10":[95],"K":[96],"supplied":[98],"across":[99],"TE":[101],"1.71":[103],"V":[104],"Seebeck":[105],"voltage":[106],"1.1":[108],"\u03bcW":[109],"electrical":[110],"power":[111],"can":[112],"generated":[114],"within":[115],"1cm":[117],"<sup":[118],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[119],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sup>":[120],"area":[121],"600":[123],"\u03bcm":[124],"z-dimension":[125],"thickness":[126],"limitation.":[127]},"counts_by_year":[{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":1}],"updated_date":"2026-07-02T09:51:11.867554","created_date":"2025-10-10T00:00:00"}