{"id":"https://openalex.org/W4386493133","doi":"https://doi.org/10.1109/iccsce58721.2023.10237164","title":"Implementation of Artificial Intelligence Chatbot in Semiconductor Manufacturing to Optimize Overall Equipment Effectiveness","display_name":"Implementation of Artificial Intelligence Chatbot in Semiconductor Manufacturing to Optimize Overall Equipment Effectiveness","publication_year":2023,"publication_date":"2023-08-25","ids":{"openalex":"https://openalex.org/W4386493133","doi":"https://doi.org/10.1109/iccsce58721.2023.10237164"},"language":"en","primary_location":{"id":"doi:10.1109/iccsce58721.2023.10237164","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iccsce58721.2023.10237164","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE 13th International Conference on Control System, Computing and Engineering (ICCSCE)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5068426200","display_name":"Siu Hong Loh","orcid":"https://orcid.org/0000-0002-4192-1477"},"institutions":[{"id":"https://openalex.org/I931681460","display_name":"Universiti Tunku Abdul Rahman","ror":"https://ror.org/050pq4m56","country_code":"MY","type":"education","lineage":["https://openalex.org/I931681460"]}],"countries":["MY"],"is_corresponding":true,"raw_author_name":"Siu Hong Loh","raw_affiliation_strings":["Universiti Tunku Abdul Rahman,Kampar,Malaysia","Universiti Tunku Abdul Rahman, Kampar, Malaysia"],"affiliations":[{"raw_affiliation_string":"Universiti Tunku Abdul Rahman,Kampar,Malaysia","institution_ids":["https://openalex.org/I931681460"]},{"raw_affiliation_string":"Universiti Tunku Abdul Rahman, Kampar, Malaysia","institution_ids":["https://openalex.org/I931681460"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5092825449","display_name":"Vincent Jascha Jeuk","orcid":null},"institutions":[{"id":"https://openalex.org/I931681460","display_name":"Universiti Tunku Abdul Rahman","ror":"https://ror.org/050pq4m56","country_code":"MY","type":"education","lineage":["https://openalex.org/I931681460"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Vincent Jascha Jeuk","raw_affiliation_strings":["Universiti Tunku Abdul Rahman,Kampar,Malaysia","Universiti Tunku Abdul Rahman, Kampar, Malaysia"],"affiliations":[{"raw_affiliation_string":"Universiti Tunku Abdul Rahman,Kampar,Malaysia","institution_ids":["https://openalex.org/I931681460"]},{"raw_affiliation_string":"Universiti Tunku Abdul Rahman, Kampar, Malaysia","institution_ids":["https://openalex.org/I931681460"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091602157","display_name":"Jia Jia Sim","orcid":null},"institutions":[{"id":"https://openalex.org/I931681460","display_name":"Universiti Tunku Abdul Rahman","ror":"https://ror.org/050pq4m56","country_code":"MY","type":"education","lineage":["https://openalex.org/I931681460"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Jia Jia Sim","raw_affiliation_strings":["Universiti Tunku Abdul Rahman,Kampar,Malaysia","Universiti Tunku Abdul Rahman, Kampar, Malaysia"],"affiliations":[{"raw_affiliation_string":"Universiti Tunku Abdul Rahman,Kampar,Malaysia","institution_ids":["https://openalex.org/I931681460"]},{"raw_affiliation_string":"Universiti Tunku Abdul Rahman, Kampar, Malaysia","institution_ids":["https://openalex.org/I931681460"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5041305483","display_name":"Kim Ho Yeap","orcid":"https://orcid.org/0000-0001-7043-649X"},"institutions":[{"id":"https://openalex.org/I931681460","display_name":"Universiti Tunku Abdul Rahman","ror":"https://ror.org/050pq4m56","country_code":"MY","type":"education","lineage":["https://openalex.org/I931681460"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Kim Ho Yeap","raw_affiliation_strings":["Universiti Tunku Abdul Rahman,Kampar,Malaysia","Universiti Tunku Abdul Rahman, Kampar, Malaysia"],"affiliations":[{"raw_affiliation_string":"Universiti Tunku Abdul Rahman,Kampar,Malaysia","institution_ids":["https://openalex.org/I931681460"]},{"raw_affiliation_string":"Universiti Tunku Abdul Rahman, Kampar, Malaysia","institution_ids":["https://openalex.org/I931681460"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5068426200"],"corresponding_institution_ids":["https://openalex.org/I931681460"],"apc_list":null,"apc_paid":null,"fwci":1.2447,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.82441145,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"220","last_page":"225"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9769999980926514,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9769999980926514,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10763","display_name":"Digital Transformation in Industry","score":0.9721999764442444,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/chatbot","display_name":"Chatbot","score":0.9099975824356079},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6948100924491882},{"id":"https://openalex.org/keywords/software-engineering","display_name":"Software engineering","score":0.5199121832847595},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.4792487621307373},{"id":"https://openalex.org/keywords/service","display_name":"Service (business)","score":0.4762409031391144},{"id":"https://openalex.org/keywords/software","display_name":"Software","score":0.45407402515411377},{"id":"https://openalex.org/keywords/user-story","display_name":"User story","score":0.44099700450897217},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.32879185676574707},{"id":"https://openalex.org/keywords/software-development","display_name":"Software development","score":0.29699304699897766},{"id":"https://openalex.org/keywords/operating-system","display_name":"Operating system","score":0.10551437735557556}],"concepts":[{"id":"https://openalex.org/C2779041454","wikidata":"https://www.wikidata.org/wiki/Q870780","display_name":"Chatbot","level":2,"score":0.9099975824356079},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6948100924491882},{"id":"https://openalex.org/C115903868","wikidata":"https://www.wikidata.org/wiki/Q80993","display_name":"Software engineering","level":1,"score":0.5199121832847595},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.4792487621307373},{"id":"https://openalex.org/C2780378061","wikidata":"https://www.wikidata.org/wiki/Q25351891","display_name":"Service (business)","level":2,"score":0.4762409031391144},{"id":"https://openalex.org/C2777904410","wikidata":"https://www.wikidata.org/wiki/Q7397","display_name":"Software","level":2,"score":0.45407402515411377},{"id":"https://openalex.org/C11189718","wikidata":"https://www.wikidata.org/wiki/Q218152","display_name":"User story","level":4,"score":0.44099700450897217},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.32879185676574707},{"id":"https://openalex.org/C529173508","wikidata":"https://www.wikidata.org/wiki/Q638608","display_name":"Software development","level":3,"score":0.29699304699897766},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.10551437735557556},{"id":"https://openalex.org/C136264566","wikidata":"https://www.wikidata.org/wiki/Q159810","display_name":"Economy","level":1,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iccsce58721.2023.10237164","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iccsce58721.2023.10237164","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE 13th International Conference on Control System, Computing and Engineering (ICCSCE)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W2187257231","https://openalex.org/W2786947513","https://openalex.org/W3010566484","https://openalex.org/W3015900183","https://openalex.org/W4386782323","https://openalex.org/W6686763503","https://openalex.org/W7055920149"],"related_works":["https://openalex.org/W4383501580","https://openalex.org/W4214931137","https://openalex.org/W4313813117","https://openalex.org/W4382052417","https://openalex.org/W3192088754","https://openalex.org/W4387007686","https://openalex.org/W3084631705","https://openalex.org/W3176146353","https://openalex.org/W4387501513","https://openalex.org/W4379743714"],"abstract_inverted_index":{"In":[0,24],"this":[1,25,126],"paper,":[2],"a":[3,27,39],"chatbot":[4],"specifically":[5],"designed":[6],"to":[7,86,136],"assist":[8],"industrial":[9],"engineers":[10],"in":[11,18,96],"analyzing":[12],"big":[13],"amount":[14],"of":[15,41,120,125],"equipment":[16],"data":[17],"semiconductor":[19],"manufacturing":[20],"process":[21],"is":[22],"presented.":[23],"work,":[26],"first":[28],"prototype":[29,116],"was":[30,48,56,65,84],"developed":[31],"from":[32],"scratch":[33],"which":[34,93],"can":[35,117,128],"be":[36,130],"used":[37,131],"as":[38,143],"Proof":[40],"Concept":[42],"(PoC).":[43],"A":[44],"suitable":[45],"Chatbot":[46],"architecture":[47],"worked":[49],"out":[50],"and":[51,152],"the":[52,68,98,109,133],"software":[53,59],"development":[54,60],"framework":[55],"chosen.":[57],"For":[58],"framework,":[61],"Microsoft":[62],"Bot":[63],"Framework":[64],"selected":[66],"with":[67],"integrated":[69],"Natural":[70],"Language":[71],"Processing":[72],"(NLP)":[73],"unit":[74],"LUIS":[75],"(Language":[76],"Understanding":[77],"Intelligence":[78],"Service).":[79],"With":[80],"these":[81],"instruments":[82],"it":[83],"possible":[85],"develop":[87],"an":[88],"artificial":[89],"intelligence":[90],"(AI)":[91],"chatbot,":[92],"shows":[94],"high-performance":[95],"understanding":[97],"users":[99],"text":[100],"input.":[101],"The":[102,123],"validation":[103],"by":[104,132],"batch":[105],"testing":[106],"showed":[107],"that":[108],"Overall":[110],"Equipment":[111],"Effectiveness":[112],"Artificial":[113],"Intelligence-Bot":[114],"(OEEAI-Bot)":[115],"understand":[118],"98%":[119],"user\u2019s":[121],"questions.":[122],"result":[124],"PoC":[127],"now":[129],"project":[134],"manager":[135],"make":[137],"decisions":[138],"about":[139],"future":[140,148],"steps,":[141],"such":[142],"estimating":[144],"IT":[145],"resources":[146],"for":[147],"development,":[149],"cross-site":[150],"scaling":[151],"subsequent":[153],"maintenance.":[154]},"counts_by_year":[{"year":2025,"cited_by_count":4},{"year":2024,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}
