{"id":"https://openalex.org/W2021153780","doi":"https://doi.org/10.1109/iccd.2010.5647713","title":"Efficient provably good OPC modeling and its applications to interconnect optimization","display_name":"Efficient provably good OPC modeling and its applications to interconnect optimization","publication_year":2010,"publication_date":"2010-10-01","ids":{"openalex":"https://openalex.org/W2021153780","doi":"https://doi.org/10.1109/iccd.2010.5647713","mag":"2021153780"},"language":"en","primary_location":{"id":"doi:10.1109/iccd.2010.5647713","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iccd.2010.5647713","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE International Conference on Computer Design","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5025534919","display_name":"Shih\u2010Lun Huang","orcid":"https://orcid.org/0000-0002-1157-3758"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Shih-Lun Huang","raw_affiliation_strings":["Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan","Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan#TAB#"],"affiliations":[{"raw_affiliation_string":"Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]},{"raw_affiliation_string":"Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan#TAB#","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080854858","display_name":"Chung\u2010Wei Lin","orcid":"https://orcid.org/0000-0001-8309-7028"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chung-Wei Lin","raw_affiliation_strings":["Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan","Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan#TAB#"],"affiliations":[{"raw_affiliation_string":"Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]},{"raw_affiliation_string":"Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan#TAB#","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5018371636","display_name":"Yao\u2010Wen Chang","orcid":"https://orcid.org/0000-0002-0564-5719"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Yao-Wen Chang","raw_affiliation_strings":["Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan","Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan#TAB#"],"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]},{"raw_affiliation_string":"Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan#TAB#","institution_ids":["https://openalex.org/I16733864"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5025534919"],"corresponding_institution_ids":["https://openalex.org/I16733864"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.09435331,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"336","last_page":"341"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11522","display_name":"VLSI and FPGA Design Techniques","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11032","display_name":"VLSI and Analog Circuit Testing","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/1708","display_name":"Hardware and Architecture"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/interconnection","display_name":"Interconnection","score":0.7397311925888062},{"id":"https://openalex.org/keywords/optical-proximity-correction","display_name":"Optical proximity correction","score":0.7158336639404297},{"id":"https://openalex.org/keywords/router","display_name":"Router","score":0.6289766430854797},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5996124148368835},{"id":"https://openalex.org/keywords/superposition-principle","display_name":"Superposition principle","score":0.5966858267784119},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.5569639801979065},{"id":"https://openalex.org/keywords/photolithography","display_name":"Photolithography","score":0.4798262119293213},{"id":"https://openalex.org/keywords/mathematical-optimization","display_name":"Mathematical optimization","score":0.3733149766921997},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.34397953748703003},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.15112003684043884},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.13271939754486084}],"concepts":[{"id":"https://openalex.org/C123745756","wikidata":"https://www.wikidata.org/wiki/Q1665949","display_name":"Interconnection","level":2,"score":0.7397311925888062},{"id":"https://openalex.org/C78371743","wikidata":"https://www.wikidata.org/wiki/Q1672829","display_name":"Optical proximity correction","level":3,"score":0.7158336639404297},{"id":"https://openalex.org/C2775896111","wikidata":"https://www.wikidata.org/wiki/Q642560","display_name":"Router","level":2,"score":0.6289766430854797},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5996124148368835},{"id":"https://openalex.org/C27753989","wikidata":"https://www.wikidata.org/wiki/Q284885","display_name":"Superposition principle","level":2,"score":0.5966858267784119},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.5569639801979065},{"id":"https://openalex.org/C105487726","wikidata":"https://www.wikidata.org/wiki/Q622938","display_name":"Photolithography","level":2,"score":0.4798262119293213},{"id":"https://openalex.org/C126255220","wikidata":"https://www.wikidata.org/wiki/Q141495","display_name":"Mathematical optimization","level":1,"score":0.3733149766921997},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.34397953748703003},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.15112003684043884},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.13271939754486084},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.0},{"id":"https://openalex.org/C31258907","wikidata":"https://www.wikidata.org/wiki/Q1301371","display_name":"Computer network","level":1,"score":0.0},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.0},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iccd.2010.5647713","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iccd.2010.5647713","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE International Conference on Computer Design","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W1594489858","https://openalex.org/W1982352410","https://openalex.org/W2002330922","https://openalex.org/W2002428239","https://openalex.org/W2081213809","https://openalex.org/W2105474957","https://openalex.org/W2108961335","https://openalex.org/W2115092649","https://openalex.org/W2120447706","https://openalex.org/W2125031708","https://openalex.org/W2159944793","https://openalex.org/W2538200522","https://openalex.org/W4243445950","https://openalex.org/W6646203201","https://openalex.org/W6678158783"],"related_works":["https://openalex.org/W3190396005","https://openalex.org/W2134420999","https://openalex.org/W2149415078","https://openalex.org/W2625379356","https://openalex.org/W2020522377","https://openalex.org/W1977680521","https://openalex.org/W1987381242","https://openalex.org/W2532313240","https://openalex.org/W2802459864","https://openalex.org/W2035734563"],"abstract_inverted_index":{"Optical":[0],"Proximity":[1],"Correction":[2],"(OPC)":[3],"is":[4,76],"the":[5,52,68,73,98,104,113,118,132,141,146],"most":[6],"popular":[7],"technique":[8],"to":[9,30],"handle":[10],"design":[11],"shape":[12],"distortions":[13],"arising":[14],"from":[15],"subwavelength":[16],"lithography.":[17],"Existing":[18],"OPC":[19,46,60,125,133,164,176],"models":[20],"are":[21],"typically":[22],"very":[23],"computationally":[24],"expensive":[25],"and":[26,62],"thus":[27],"not":[28],"efficient":[29],"be":[31],"incorporated":[32],"for":[33,59,91,116,124],"layout":[34],"optimization.":[35,94,126],"In":[36],"this":[37,81],"paper,":[38],"we":[39,84,128],"present":[40],"an":[41,64,86],"efficient,":[42],"yet":[43],"sufficiently":[44],"accurate":[45],"cost":[47,82,134],"model":[48],"which":[49,109],"can":[50,110,129,159],"predict":[51],"optimal":[53,119],"location":[54,120],"of":[55,67,100,121,135,145,148,150],"a":[56,136,167,173],"wire":[57,88,101,123,137],"segment":[58],"optimization":[61],"give":[63],"upper":[65],"bound":[66],"interference":[69,74],"amount,":[70],"guaranteeing":[71],"that":[72,97,156],"amount":[75],"never":[77],"underestimated.":[78],"Based":[79],"on":[80,172],"model,":[83],"propose":[85],"OPC-aware":[87],"perturbation":[89,102],"algorithm":[90,158],"post-layout":[92],"interconnect":[93],"We":[95],"show":[96,155],"effects":[99],"have":[103],"concavity":[105],"or":[106],"monotonicity":[107],"property":[108,147],"dramatically":[111],"reduce":[112],"search":[114],"space":[115],"finding":[117],"each":[122],"Further,":[127],"incrementally":[130],"update":[131],"by":[138],"recomputing":[139],"only":[140],"affected":[142],"wires":[143],"because":[144],"superposition":[149],"our":[151,157],"model.":[152],"Experimental":[153],"results":[154,165],"efficiently":[160],"obtain":[161],"much":[162],"better":[163],"than":[166],"state-of-the-art":[168],"OPC-friendly":[169],"router,":[170],"based":[171],"leading":[174],"commercial":[175],"tool.":[177]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}