{"id":"https://openalex.org/W2141445561","doi":"https://doi.org/10.1109/iccd.2009.5413181","title":"Statistical timing analysis based on simulation of lithographic process","display_name":"Statistical timing analysis based on simulation of lithographic process","publication_year":2009,"publication_date":"2009-10-01","ids":{"openalex":"https://openalex.org/W2141445561","doi":"https://doi.org/10.1109/iccd.2009.5413181","mag":"2141445561"},"language":"en","primary_location":{"id":"doi:10.1109/iccd.2009.5413181","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iccd.2009.5413181","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 IEEE International Conference on Computer Design","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5008433592","display_name":"Aswin Sreedhar","orcid":null},"institutions":[{"id":"https://openalex.org/I24603500","display_name":"University of Massachusetts Amherst","ror":"https://ror.org/0072zz521","country_code":"US","type":"education","lineage":["https://openalex.org/I24603500"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Aswin Sreedhar","raw_affiliation_strings":["University of Massachusetts, Amherst, USA","University of Massachusetts at Amherst"],"affiliations":[{"raw_affiliation_string":"University of Massachusetts, Amherst, USA","institution_ids":["https://openalex.org/I24603500"]},{"raw_affiliation_string":"University of Massachusetts at Amherst","institution_ids":["https://openalex.org/I24603500"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5054064879","display_name":"Sandip Kundu","orcid":"https://orcid.org/0000-0001-8221-3824"},"institutions":[{"id":"https://openalex.org/I24603500","display_name":"University of Massachusetts Amherst","ror":"https://ror.org/0072zz521","country_code":"US","type":"education","lineage":["https://openalex.org/I24603500"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Sandip Kundu","raw_affiliation_strings":["University of Massachusetts, Amherst, USA","University of Massachusetts at Amherst"],"affiliations":[{"raw_affiliation_string":"University of Massachusetts, Amherst, USA","institution_ids":["https://openalex.org/I24603500"]},{"raw_affiliation_string":"University of Massachusetts at Amherst","institution_ids":["https://openalex.org/I24603500"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5008433592"],"corresponding_institution_ids":["https://openalex.org/I24603500"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.15804776,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"4692","issue":null,"first_page":"29","last_page":"34"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11032","display_name":"VLSI and Analog Circuit Testing","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/1708","display_name":"Hardware and Architecture"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10363","display_name":"Low-power high-performance VLSI design","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/design-for-manufacturability","display_name":"Design for manufacturability","score":0.6115931272506714},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.5913718342781067},{"id":"https://openalex.org/keywords/skew","display_name":"Skew","score":0.55809485912323},{"id":"https://openalex.org/keywords/gaussian","display_name":"Gaussian","score":0.5481909513473511},{"id":"https://openalex.org/keywords/transistor","display_name":"Transistor","score":0.5387952923774719},{"id":"https://openalex.org/keywords/static-timing-analysis","display_name":"Static timing analysis","score":0.5349788665771484},{"id":"https://openalex.org/keywords/spice","display_name":"Spice","score":0.5265331864356995},{"id":"https://openalex.org/keywords/process-corners","display_name":"Process corners","score":0.5228897929191589},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5152750015258789},{"id":"https://openalex.org/keywords/process-variation","display_name":"Process variation","score":0.5035461783409119},{"id":"https://openalex.org/keywords/process-window","display_name":"Process window","score":0.4955180883407593},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.4770752191543579},{"id":"https://openalex.org/keywords/optical-proximity-correction","display_name":"Optical proximity correction","score":0.4622134566307068},{"id":"https://openalex.org/keywords/integrated-circuit","display_name":"Integrated circuit","score":0.41902121901512146},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.407473623752594},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.30557045340538025},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1876656413078308},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1820041537284851},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.16317883133888245},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.13415077328681946}],"concepts":[{"id":"https://openalex.org/C62064638","wikidata":"https://www.wikidata.org/wiki/Q553878","display_name":"Design for manufacturability","level":2,"score":0.6115931272506714},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.5913718342781067},{"id":"https://openalex.org/C43711488","wikidata":"https://www.wikidata.org/wiki/Q7534783","display_name":"Skew","level":2,"score":0.55809485912323},{"id":"https://openalex.org/C163716315","wikidata":"https://www.wikidata.org/wiki/Q901177","display_name":"Gaussian","level":2,"score":0.5481909513473511},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.5387952923774719},{"id":"https://openalex.org/C93682380","wikidata":"https://www.wikidata.org/wiki/Q2025226","display_name":"Static timing analysis","level":2,"score":0.5349788665771484},{"id":"https://openalex.org/C2780077345","wikidata":"https://www.wikidata.org/wiki/Q16891888","display_name":"Spice","level":2,"score":0.5265331864356995},{"id":"https://openalex.org/C192615534","wikidata":"https://www.wikidata.org/wiki/Q7247268","display_name":"Process corners","level":3,"score":0.5228897929191589},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5152750015258789},{"id":"https://openalex.org/C93389723","wikidata":"https://www.wikidata.org/wiki/Q7247313","display_name":"Process variation","level":3,"score":0.5035461783409119},{"id":"https://openalex.org/C2777441419","wikidata":"https://www.wikidata.org/wiki/Q16969460","display_name":"Process window","level":3,"score":0.4955180883407593},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4770752191543579},{"id":"https://openalex.org/C78371743","wikidata":"https://www.wikidata.org/wiki/Q1672829","display_name":"Optical proximity correction","level":3,"score":0.4622134566307068},{"id":"https://openalex.org/C530198007","wikidata":"https://www.wikidata.org/wiki/Q80831","display_name":"Integrated circuit","level":2,"score":0.41902121901512146},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.407473623752594},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.30557045340538025},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1876656413078308},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1820041537284851},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.16317883133888245},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.13415077328681946},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.0},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.1109/iccd.2009.5413181","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iccd.2009.5413181","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 IEEE International Conference on Computer Design","raw_type":"proceedings-article"},{"id":"pmh:oai:scholarworks.umass.edu:ece_faculty_pubs-1884","is_oa":false,"landing_page_url":"https://scholarworks.umass.edu/ece_faculty_pubs/885","pdf_url":null,"source":{"id":"https://openalex.org/S4306402057","display_name":"Scholarworks (University of Massachusetts Amherst)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I24603500","host_organization_name":"University of Massachusetts Amherst","host_organization_lineage":["https://openalex.org/I24603500"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Electrical and Computer Engineering Faculty Publication Series","raw_type":"text"},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.398.3201","is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.398.3201","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"http://iccd.et.tudelft.nl/2009/proceedings/29Kundu.pdf","raw_type":"text"},{"id":"pmh:oai:scholarworks.umass.edu:20.500.14394/21569","is_oa":false,"landing_page_url":"https://hdl.handle.net/20.500.14394/21569","pdf_url":null,"source":{"id":"https://openalex.org/S4306402057","display_name":"Scholarworks (University of Massachusetts Amherst)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I24603500","host_organization_name":"University of Massachusetts Amherst","host_organization_lineage":["https://openalex.org/I24603500"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"published","raw_type":"article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":21,"referenced_works":["https://openalex.org/W2006405636","https://openalex.org/W2016717406","https://openalex.org/W2027988274","https://openalex.org/W2059147047","https://openalex.org/W2081213809","https://openalex.org/W2105982376","https://openalex.org/W2114105164","https://openalex.org/W2133665055","https://openalex.org/W2143901474","https://openalex.org/W2149447807","https://openalex.org/W2165740397","https://openalex.org/W2171845131","https://openalex.org/W2172117646","https://openalex.org/W2501873590","https://openalex.org/W4234927513","https://openalex.org/W4253814782","https://openalex.org/W6665089970","https://openalex.org/W6679920692","https://openalex.org/W6682150392","https://openalex.org/W6684189706","https://openalex.org/W6724450053"],"related_works":["https://openalex.org/W1976886430","https://openalex.org/W2072472266","https://openalex.org/W1989945751","https://openalex.org/W2069004321","https://openalex.org/W1983218957","https://openalex.org/W2038980326","https://openalex.org/W2344299637","https://openalex.org/W2955165539","https://openalex.org/W2061902689","https://openalex.org/W2066897999"],"abstract_inverted_index":{"The":[0,164],"length":[1,25,32,37,204],"of":[2,12,18,38,48,98,116,143],"poly-gate":[3],"printed":[4],"on":[5,8,63,94],"silicon":[6],"depends":[7],"exposure":[9],"dose,":[10],"depth":[11],"focus,":[13],"photo-resist":[14],"thickness":[15],"and":[16,214],"planarity":[17],"the":[19,34,46,61,110,202],"surface.":[20],"In":[21,81],"sub-wavelength":[22],"lithography,":[23],"polygate":[24],"also":[26],"varies":[27],"with":[28,206],"layout":[29],"topology.":[30],"Poly-gate":[31],"determines":[33,42],"effective":[35],"channel":[36,148,203],"a":[39,86,117,129,135,140,175],"transistor,":[40],"which":[41],"its":[43],"performance.":[44,218],"Since":[45],"sources":[47],"error":[49],"are":[50],"hard":[51],"to":[52,59,153,180,200],"control,":[53],"statistical":[54,87,156,187],"analysis":[55,159],"can":[56],"be":[57],"used":[58],"measure":[60],"impact":[62],"circuit":[64,100,217],"timing":[65,90,113,158],"characteristics.":[66],"Typical":[67],"lithography-aware":[68],"methodologies":[69],"consider":[70],"only":[71],"systematic":[72],"variation":[73,79],"such":[74],"as":[75],"across":[76],"chip":[77],"linewidth":[78],"(ACLV).":[80],"this":[82],"paper":[83],"we":[84,108],"propose":[85],"technique":[88],"for":[89,169],"yield":[91,114],"prediction,":[92],"based":[93],"variational":[95],"lithography":[96],"modeling":[97],"physical":[99],"layout.":[101],"By":[102],"statistically":[103],"varying":[104],"lithographic":[105],"process":[106,126],"parameters":[107,127],"estimate":[109],"difference":[111],"in":[112,171],"estimation":[115],"design.":[118],"Our":[119,190],"simulation":[120],"results":[121],"show":[122],"that":[123,193],"if":[124],"manufacturing":[125],"follow":[128,134],"Gaussian":[130,176,197],"distribution,":[131,138],"resulting":[132],"transistors":[133],"skewed":[136],"normal":[137,182],"where":[139],"greater":[141],"number":[142],"them":[144],"will":[145],"have":[146],"shorter":[147],"length.":[149],"This":[150],"led":[151],"us":[152],"investigate":[154],"whether":[155],"static":[157],"(SSTA)":[160],"is":[161,174,210],"overly":[162,212],"pessimistic.":[163],"baseline":[165],"delay":[166,177,198],"model":[167,178,199],"assumed":[168],"SSTA":[170],"out":[172],"approach":[173],"fitted":[179],"skew":[181],"distribution":[183],"data":[184,205],"obtained":[185],"from":[186],"litho":[188],"simulation.":[189],"experiments":[191],"showed":[192],"even":[194],"after":[195],"re-centering":[196],"fit":[201],"minimum":[207],"error,":[208],"it":[209],"still":[211],"pessimistic":[213],"significantly":[215],"underestimates":[216]},"counts_by_year":[],"updated_date":"2026-04-05T17:49:38.594831","created_date":"2025-10-10T00:00:00"}