{"id":"https://openalex.org/W3162352536","doi":"https://doi.org/10.1109/iccae51876.2021.9426127","title":"Noncyclic Scheduling of Multi-cluster Tools with Multi-type Wafers Based on Pareto Optimization","display_name":"Noncyclic Scheduling of Multi-cluster Tools with Multi-type Wafers Based on Pareto Optimization","publication_year":2021,"publication_date":"2021-03-20","ids":{"openalex":"https://openalex.org/W3162352536","doi":"https://doi.org/10.1109/iccae51876.2021.9426127","mag":"3162352536"},"language":"en","primary_location":{"id":"doi:10.1109/iccae51876.2021.9426127","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iccae51876.2021.9426127","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 13th International Conference on Computer and Automation Engineering (ICCAE)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5041481860","display_name":"Yuanyuan Yan","orcid":"https://orcid.org/0000-0003-0245-341X"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yuanyuan Yan","raw_affiliation_strings":["Tsinghua University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071569011","display_name":"Qinghua Tao","orcid":"https://orcid.org/0000-0001-9705-7748"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qinghua Tao","raw_affiliation_strings":["Tsinghua University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076015499","display_name":"Huangang Wang","orcid":"https://orcid.org/0000-0002-7322-3446"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Huangang Wang","raw_affiliation_strings":["Tsinghua University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100693811","display_name":"Wenhui Fan","orcid":"https://orcid.org/0000-0002-0040-5759"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wenhui Fan","raw_affiliation_strings":["Tsinghua University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I99065089"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"95","last_page":"99"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11159","display_name":"Manufacturing Process and Optimization","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11814","display_name":"Advanced Manufacturing and Logistics Optimization","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.7115285396575928},{"id":"https://openalex.org/keywords/job-shop-scheduling","display_name":"Job shop scheduling","score":0.691474974155426},{"id":"https://openalex.org/keywords/merge","display_name":"Merge (version control)","score":0.6282554864883423},{"id":"https://openalex.org/keywords/mathematical-optimization","display_name":"Mathematical optimization","score":0.5483454465866089},{"id":"https://openalex.org/keywords/scheduling","display_name":"Scheduling (production processes)","score":0.5316140055656433},{"id":"https://openalex.org/keywords/pareto-optimal","display_name":"Pareto optimal","score":0.46328631043434143},{"id":"https://openalex.org/keywords/normalization","display_name":"Normalization (sociology)","score":0.4366312026977539},{"id":"https://openalex.org/keywords/pareto-principle","display_name":"Pareto principle","score":0.4292576313018799},{"id":"https://openalex.org/keywords/distributed-computing","display_name":"Distributed computing","score":0.3774149715900421},{"id":"https://openalex.org/keywords/multi-objective-optimization","display_name":"Multi-objective optimization","score":0.3651192784309387},{"id":"https://openalex.org/keywords/parallel-computing","display_name":"Parallel computing","score":0.16934457421302795},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.10877224802970886},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.09703254699707031},{"id":"https://openalex.org/keywords/routing","display_name":"Routing (electronic design automation)","score":0.07933568954467773}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.7115285396575928},{"id":"https://openalex.org/C55416958","wikidata":"https://www.wikidata.org/wiki/Q6206757","display_name":"Job shop scheduling","level":3,"score":0.691474974155426},{"id":"https://openalex.org/C197129107","wikidata":"https://www.wikidata.org/wiki/Q1921621","display_name":"Merge (version control)","level":2,"score":0.6282554864883423},{"id":"https://openalex.org/C126255220","wikidata":"https://www.wikidata.org/wiki/Q141495","display_name":"Mathematical optimization","level":1,"score":0.5483454465866089},{"id":"https://openalex.org/C206729178","wikidata":"https://www.wikidata.org/wiki/Q2271896","display_name":"Scheduling (production processes)","level":2,"score":0.5316140055656433},{"id":"https://openalex.org/C2986314615","wikidata":"https://www.wikidata.org/wiki/Q36829","display_name":"Pareto optimal","level":3,"score":0.46328631043434143},{"id":"https://openalex.org/C136886441","wikidata":"https://www.wikidata.org/wiki/Q926129","display_name":"Normalization (sociology)","level":2,"score":0.4366312026977539},{"id":"https://openalex.org/C137635306","wikidata":"https://www.wikidata.org/wiki/Q182667","display_name":"Pareto principle","level":2,"score":0.4292576313018799},{"id":"https://openalex.org/C120314980","wikidata":"https://www.wikidata.org/wiki/Q180634","display_name":"Distributed computing","level":1,"score":0.3774149715900421},{"id":"https://openalex.org/C68781425","wikidata":"https://www.wikidata.org/wiki/Q2052203","display_name":"Multi-objective optimization","level":2,"score":0.3651192784309387},{"id":"https://openalex.org/C173608175","wikidata":"https://www.wikidata.org/wiki/Q232661","display_name":"Parallel computing","level":1,"score":0.16934457421302795},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.10877224802970886},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.09703254699707031},{"id":"https://openalex.org/C74172769","wikidata":"https://www.wikidata.org/wiki/Q1446839","display_name":"Routing (electronic design automation)","level":2,"score":0.07933568954467773},{"id":"https://openalex.org/C144024400","wikidata":"https://www.wikidata.org/wiki/Q21201","display_name":"Sociology","level":0,"score":0.0},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.0},{"id":"https://openalex.org/C19165224","wikidata":"https://www.wikidata.org/wiki/Q23404","display_name":"Anthropology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iccae51876.2021.9426127","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iccae51876.2021.9426127","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 13th International Conference on Computer and Automation Engineering (ICCAE)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure","score":0.5}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W1981704280","https://openalex.org/W2012629892","https://openalex.org/W2053195438","https://openalex.org/W2093499484","https://openalex.org/W2093812099","https://openalex.org/W2103693167","https://openalex.org/W2143862160","https://openalex.org/W2342897103","https://openalex.org/W2597321818","https://openalex.org/W2784034600","https://openalex.org/W2893504464","https://openalex.org/W3022502563","https://openalex.org/W3034457223","https://openalex.org/W4235937090","https://openalex.org/W6755098249"],"related_works":["https://openalex.org/W1963790170","https://openalex.org/W2073298047","https://openalex.org/W2033790662","https://openalex.org/W2090178682","https://openalex.org/W2586328217","https://openalex.org/W2049264236","https://openalex.org/W2001591765","https://openalex.org/W4241467429","https://openalex.org/W2073147994","https://openalex.org/W1588199609"],"abstract_inverted_index":{"In":[0,29],"semiconductor":[1],"manufacturing,":[2],"multi-cluster":[3],"tools":[4],"are":[5,82],"widely":[6],"used.":[7],"Recently,":[8],"the":[9,20,35,91,105,108,115],"variety":[10],"of":[11,22,39,96,107],"wafer":[12],"types":[13],"has":[14],"attracted":[15],"increasing":[16],"interests":[17],"due":[18],"to":[19,51,84],"demand":[21],"diversification":[23],"and":[24,58,78,88],"efficiency":[25,98],"in":[26,42,73,111],"industrial":[27],"production.":[28],"this":[30],"paper,":[31],"we":[32],"focus":[33],"on":[34,70,114],"noncyclic":[36,116],"scheduling":[37,117],"problem":[38,54],"multi-type":[40,119],"wafers":[41],"multicluster":[43],"tools.":[44],"Firstly,":[45],"a":[46,75,79],"universal":[47],"model":[48],"is":[49,67,99],"constructed":[50],"describe":[52],"such":[53],"for":[55],"both":[56],"single-armed":[57],"dual-armed":[59],"robots.":[60],"Correspondingly,":[61],"an":[62],"improved":[63],"dynamic":[64],"programming":[65],"algorithm":[66,110],"proposed":[68,109],"based":[69],"Pareto":[71],"optimization,":[72],"which":[74],"renumber":[76],"rule":[77,81],"normalization":[80],"introduced":[83],"merge":[85],"redundant":[86],"states":[87],"further":[89],"increase":[90],"searching":[92],"efficiency.":[93],"Theoretical":[94],"analysis":[95],"computational":[97],"also":[100],"discussed.":[101],"Numerical":[102],"experiments":[103],"verify":[104],"effectiveness":[106],"minimizing":[112],"makespan":[113],"with":[118],"wafers.":[120]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1}],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}