{"id":"https://openalex.org/W3149715914","doi":"https://doi.org/10.1109/iccad.2011.6105297","title":"Layout decomposition for triple patterning lithography","display_name":"Layout decomposition for triple patterning lithography","publication_year":2011,"publication_date":"2011-11-01","ids":{"openalex":"https://openalex.org/W3149715914","doi":"https://doi.org/10.1109/iccad.2011.6105297","mag":"3149715914"},"language":"en","primary_location":{"id":"doi:10.1109/iccad.2011.6105297","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iccad.2011.6105297","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 IEEE/ACM International Conference on Computer-Aided Design (ICCAD)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["arxiv","crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://arxiv.org/pdf/1402.2459","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5051340429","display_name":"Bei Yu","orcid":"https://orcid.org/0000-0001-6406-4810"},"institutions":[{"id":"https://openalex.org/I86519309","display_name":"The University of Texas at Austin","ror":"https://ror.org/00hj54h04","country_code":"US","type":"education","lineage":["https://openalex.org/I86519309"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Bei Yu","raw_affiliation_strings":["ECE Dept. University of Texas at Austin, Austin, TX USA 78712"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ECE Dept. University of Texas at Austin, Austin, TX USA 78712","institution_ids":["https://openalex.org/I86519309"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101737780","display_name":"Kun Yuan","orcid":"https://orcid.org/0000-0001-7104-2847"},"institutions":[{"id":"https://openalex.org/I66217453","display_name":"Cadence Design Systems (United States)","ror":"https://ror.org/04w8xa018","country_code":"US","type":"company","lineage":["https://openalex.org/I66217453"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Kun Yuan","raw_affiliation_strings":["Cadence Design Systems, Inc., San Jose, CA USA 95134"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Cadence Design Systems, Inc., San Jose, CA USA 95134","institution_ids":["https://openalex.org/I66217453"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100677428","display_name":"Boyang Zhang","orcid":"https://orcid.org/0000-0003-3454-4009"},"institutions":[{"id":"https://openalex.org/I86519309","display_name":"The University of Texas at Austin","ror":"https://ror.org/00hj54h04","country_code":"US","type":"education","lineage":["https://openalex.org/I86519309"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Boyang Zhang","raw_affiliation_strings":["ECE Dept. University of Texas at Austin, Austin, TX USA 78712"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ECE Dept. University of Texas at Austin, Austin, TX USA 78712","institution_ids":["https://openalex.org/I86519309"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110183841","display_name":"Duo Ding","orcid":null},"institutions":[{"id":"https://openalex.org/I86519309","display_name":"The University of Texas at Austin","ror":"https://ror.org/00hj54h04","country_code":"US","type":"education","lineage":["https://openalex.org/I86519309"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Duo Ding","raw_affiliation_strings":["ECE Dept. University of Texas at Austin, Austin, TX USA 78712"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ECE Dept. University of Texas at Austin, Austin, TX USA 78712","institution_ids":["https://openalex.org/I86519309"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5011883763","display_name":"David Z. Pan","orcid":"https://orcid.org/0000-0002-5705-2501"},"institutions":[{"id":"https://openalex.org/I86519309","display_name":"The University of Texas at Austin","ror":"https://ror.org/00hj54h04","country_code":"US","type":"education","lineage":["https://openalex.org/I86519309"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"David Z. Pan","raw_affiliation_strings":["ECE Dept. University of Texas at Austin, Austin, TX USA 78712"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ECE Dept. University of Texas at Austin, Austin, TX USA 78712","institution_ids":["https://openalex.org/I86519309"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5011883763"],"corresponding_institution_ids":["https://openalex.org/I86519309"],"apc_list":null,"apc_paid":null,"fwci":14.765,"has_fulltext":true,"cited_by_count":92,"citation_normalized_percentile":{"value":0.99495812,"is_in_top_1_percent":true,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":100},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"8"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10996","display_name":"Computational Geometry and Mesh Generation","score":0.9944999814033508,"subfield":{"id":"https://openalex.org/subfields/1704","display_name":"Computer Graphics and Computer-Aided Design"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11522","display_name":"VLSI and FPGA Design Techniques","score":0.9918000102043152,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/speedup","display_name":"Speedup","score":0.7029687166213989},{"id":"https://openalex.org/keywords/integer-programming","display_name":"Integer programming","score":0.6647537350654602},{"id":"https://openalex.org/keywords/computation","display_name":"Computation","score":0.6330640912055969},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6262284517288208},{"id":"https://openalex.org/keywords/scalability","display_name":"Scalability","score":0.5896123051643372},{"id":"https://openalex.org/keywords/parallel-computing","display_name":"Parallel computing","score":0.4788251221179962},{"id":"https://openalex.org/keywords/decomposition","display_name":"Decomposition","score":0.47424668073654175},{"id":"https://openalex.org/keywords/linear-programming","display_name":"Linear programming","score":0.4683113992214203},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.45571067929267883},{"id":"https://openalex.org/keywords/semidefinite-programming","display_name":"Semidefinite programming","score":0.45126181840896606},{"id":"https://openalex.org/keywords/acceleration","display_name":"Acceleration","score":0.4204111397266388},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.3976982831954956},{"id":"https://openalex.org/keywords/mathematical-optimization","display_name":"Mathematical optimization","score":0.36052948236465454},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.24271273612976074}],"concepts":[{"id":"https://openalex.org/C68339613","wikidata":"https://www.wikidata.org/wiki/Q1549489","display_name":"Speedup","level":2,"score":0.7029687166213989},{"id":"https://openalex.org/C56086750","wikidata":"https://www.wikidata.org/wiki/Q6042592","display_name":"Integer programming","level":2,"score":0.6647537350654602},{"id":"https://openalex.org/C45374587","wikidata":"https://www.wikidata.org/wiki/Q12525525","display_name":"Computation","level":2,"score":0.6330640912055969},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6262284517288208},{"id":"https://openalex.org/C48044578","wikidata":"https://www.wikidata.org/wiki/Q727490","display_name":"Scalability","level":2,"score":0.5896123051643372},{"id":"https://openalex.org/C173608175","wikidata":"https://www.wikidata.org/wiki/Q232661","display_name":"Parallel computing","level":1,"score":0.4788251221179962},{"id":"https://openalex.org/C124681953","wikidata":"https://www.wikidata.org/wiki/Q339062","display_name":"Decomposition","level":2,"score":0.47424668073654175},{"id":"https://openalex.org/C41045048","wikidata":"https://www.wikidata.org/wiki/Q202843","display_name":"Linear programming","level":2,"score":0.4683113992214203},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.45571067929267883},{"id":"https://openalex.org/C101901036","wikidata":"https://www.wikidata.org/wiki/Q2269096","display_name":"Semidefinite programming","level":2,"score":0.45126181840896606},{"id":"https://openalex.org/C117896860","wikidata":"https://www.wikidata.org/wiki/Q11376","display_name":"Acceleration","level":2,"score":0.4204111397266388},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.3976982831954956},{"id":"https://openalex.org/C126255220","wikidata":"https://www.wikidata.org/wiki/Q141495","display_name":"Mathematical optimization","level":1,"score":0.36052948236465454},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.24271273612976074},{"id":"https://openalex.org/C77088390","wikidata":"https://www.wikidata.org/wiki/Q8513","display_name":"Database","level":1,"score":0.0},{"id":"https://openalex.org/C153349607","wikidata":"https://www.wikidata.org/wiki/Q36649","display_name":"Visual arts","level":1,"score":0.0},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C18903297","wikidata":"https://www.wikidata.org/wiki/Q7150","display_name":"Ecology","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C142362112","wikidata":"https://www.wikidata.org/wiki/Q735","display_name":"Art","level":0,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/iccad.2011.6105297","is_oa":false,"landing_page_url":"https://doi.org/10.1109/iccad.2011.6105297","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 IEEE/ACM International Conference on Computer-Aided Design (ICCAD)","raw_type":"proceedings-article"},{"id":"pmh:oai:arXiv.org:1402.2459","is_oa":true,"landing_page_url":"http://arxiv.org/abs/1402.2459","pdf_url":"https://arxiv.org/pdf/1402.2459","source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"text"}],"best_oa_location":{"id":"pmh:oai:arXiv.org:1402.2459","is_oa":true,"landing_page_url":"http://arxiv.org/abs/1402.2459","pdf_url":"https://arxiv.org/pdf/1402.2459","source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"text"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3149715914.pdf"},"referenced_works_count":27,"referenced_works":["https://openalex.org/W1899379166","https://openalex.org/W1997420670","https://openalex.org/W1999613943","https://openalex.org/W2001046226","https://openalex.org/W2005296219","https://openalex.org/W2018868256","https://openalex.org/W2030087828","https://openalex.org/W2050817421","https://openalex.org/W2069816168","https://openalex.org/W2082863594","https://openalex.org/W2108352706","https://openalex.org/W2118966355","https://openalex.org/W2161958538","https://openalex.org/W2164380619","https://openalex.org/W2175772671","https://openalex.org/W2752885492","https://openalex.org/W2912522929","https://openalex.org/W3150135088","https://openalex.org/W4238726164","https://openalex.org/W4242370932","https://openalex.org/W4245120272","https://openalex.org/W4252446356","https://openalex.org/W4253680680","https://openalex.org/W4254569978","https://openalex.org/W6651686230","https://openalex.org/W6662888458","https://openalex.org/W6681657607"],"related_works":["https://openalex.org/W2058965144","https://openalex.org/W2164382479","https://openalex.org/W2146343568","https://openalex.org/W4285278887","https://openalex.org/W2365237642","https://openalex.org/W2995925505","https://openalex.org/W2773399470","https://openalex.org/W3116484972","https://openalex.org/W2941986668","https://openalex.org/W4232431455"],"abstract_inverted_index":{"As":[0],"minimum":[1],"feature":[2],"size":[3],"and":[4,72,96,126,175],"pitch":[5],"spacing":[6],"further":[7,161],"decrease,":[8],"triple":[9],"patterning":[10,23],"lithography":[11,24],"(TPL)":[12],"is":[13,28,45],"a":[14,46,57,118],"possible":[15],"193nm":[16],"extension":[17],"along":[18],"the":[19,139,150,157,169,176],"paradigm":[20],"of":[21],"double":[22],"(DPL).":[25],"However,":[26,180],"there":[27],"very":[29,78,100,182],"little":[30],"study":[31],"on":[32],"TPL":[33,42,64,124],"layout":[34,43,65,93],"decomposition.":[35],"In":[36],"this":[37],"paper,":[38],"we":[39,81,116],"show":[40,137],"that":[41,51,138],"decomposition":[44,66],"more":[47],"difficult":[48],"problem":[49],"than":[50],"for":[52,63,123,181],"DPL.":[53],"We":[54],"then":[55],"propose":[56,82,117],"general":[58],"integer":[59],"linear":[60],"programming":[61,121,132],"formulation":[62,109,122],"which":[67],"can":[68,144,159,188],"simultaneously":[69],"minimize":[70],"conflict":[71,177],"stitch":[73,170],"numbers.":[74],"Since":[75],"ILP":[76,108,140],"has":[77],"poor":[79],"scalability,":[80],"three":[83],"acceleration":[84,142],"techniques":[85,143],"without":[86],"sacrificing":[87],"solution":[88],"quality:":[89],"independent":[90],"component":[91],"computation,":[92],"graph":[94],"simplification,":[95],"bridge":[97],"computation.":[98],"For":[99],"dense":[101,183],"layouts,":[102,184],"even":[103,192],"with":[104,141,165,194],"these":[105],"speedup":[106],"techniques,":[107],"may":[110],"still":[111],"be":[112,160],"too":[113],"slow.":[114],"Therefore,":[115],"novel":[119],"vector":[120],"decomposition,":[125],"solve":[127],"it":[128],"through":[129],"effective":[130],"semidefinite":[131],"(SDP)":[133],"approximation.":[134],"Experimental":[135],"results":[136],"reduce":[145],"82%":[146],"runtime":[147,158],"compared":[148,193],"to":[149],"baseline":[151],"ILP.":[152,196],"Using":[153],"SDP":[154,185],"based":[155,186],"algorithm,":[156],"reduced":[162],"by":[163,173],"42%":[164],"some":[166],"tradeoff":[167],"in":[168],"number":[171],"(reduced":[172],"7%)":[174],"(9%":[178],"more).":[179],"algorithm":[187],"achieve":[189],"140x":[190],"speed-up":[191],"accelerated":[195]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":13},{"year":2016,"cited_by_count":11},{"year":2015,"cited_by_count":23},{"year":2014,"cited_by_count":16},{"year":2013,"cited_by_count":10},{"year":2012,"cited_by_count":7}],"updated_date":"2026-08-05T07:39:15.569665","created_date":"2025-10-10T00:00:00"}