{"id":"https://openalex.org/W4406208848","doi":"https://doi.org/10.1109/icarcv63323.2024.10821598","title":"Discrete Event Control for the Automation of Reactive Sputter Plants","display_name":"Discrete Event Control for the Automation of Reactive Sputter Plants","publication_year":2024,"publication_date":"2024-12-12","ids":{"openalex":"https://openalex.org/W4406208848","doi":"https://doi.org/10.1109/icarcv63323.2024.10821598"},"language":"en","primary_location":{"id":"doi:10.1109/icarcv63323.2024.10821598","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icarcv63323.2024.10821598","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 18th International Conference on Control, Automation, Robotics and Vision (ICARCV)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5027169523","display_name":"F. R. N. Schneider","orcid":"https://orcid.org/0000-0002-5965-1022"},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Fabian Schneider","raw_affiliation_strings":["Ruhr University,Chair of Automation,Bochum,Germany,44801"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ruhr University,Chair of Automation,Bochum,Germany,44801","institution_ids":["https://openalex.org/I904495901"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016841027","display_name":"Alexander Fay","orcid":"https://orcid.org/0000-0002-1922-654X"},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Alexander Fay","raw_affiliation_strings":["Ruhr University,Chair of Automation,Bochum,Germany,44801"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ruhr University,Chair of Automation,Bochum,Germany,44801","institution_ids":["https://openalex.org/I904495901"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5021723488","display_name":"Christian Woelfel","orcid":"https://orcid.org/0000-0003-0937-1927"},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Christian Woelfel","raw_affiliation_strings":["Ruhr University,Chair of Automation,Bochum,Germany,44801"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ruhr University,Chair of Automation,Bochum,Germany,44801","institution_ids":["https://openalex.org/I904495901"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I904495901"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"131","last_page":"138"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10791","display_name":"Advanced Control Systems Optimization","score":0.92330002784729,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10791","display_name":"Advanced Control Systems Optimization","score":0.92330002784729,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/automation","display_name":"Automation","score":0.7029581665992737},{"id":"https://openalex.org/keywords/sputtering","display_name":"Sputtering","score":0.5823664665222168},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.534545361995697},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5113505721092224},{"id":"https://openalex.org/keywords/event","display_name":"Event (particle physics)","score":0.471168577671051},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2744182348251343},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.16461056470870972},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.09443590044975281},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.09151893854141235},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.08245190978050232},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.06246688961982727}],"concepts":[{"id":"https://openalex.org/C115901376","wikidata":"https://www.wikidata.org/wiki/Q184199","display_name":"Automation","level":2,"score":0.7029581665992737},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.5823664665222168},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.534545361995697},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5113505721092224},{"id":"https://openalex.org/C2779662365","wikidata":"https://www.wikidata.org/wiki/Q5416694","display_name":"Event (particle physics)","level":2,"score":0.471168577671051},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2744182348251343},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.16461056470870972},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.09443590044975281},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.09151893854141235},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.08245190978050232},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.06246688961982727},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icarcv63323.2024.10821598","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icarcv63323.2024.10821598","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 18th International Conference on Control, Automation, Robotics and Vision (ICARCV)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W1505489763","https://openalex.org/W1595871524","https://openalex.org/W1626739009","https://openalex.org/W1980929018","https://openalex.org/W1987933165","https://openalex.org/W2034433960","https://openalex.org/W2145787996","https://openalex.org/W2901380934","https://openalex.org/W2962812972","https://openalex.org/W2972590064","https://openalex.org/W3095675653","https://openalex.org/W3129251958","https://openalex.org/W3133461330","https://openalex.org/W3193907335","https://openalex.org/W4251403278","https://openalex.org/W4366775201","https://openalex.org/W4386952941"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2899084033","https://openalex.org/W2748952813","https://openalex.org/W2035249489","https://openalex.org/W1967383351","https://openalex.org/W850150341","https://openalex.org/W2066362799","https://openalex.org/W2295922851","https://openalex.org/W142388841","https://openalex.org/W1969082957"],"abstract_inverted_index":{"In":[0],"this":[1],"contribution":[2],"a":[3,13,16,29,73,77],"new":[4,46],"discrete":[5,93],"event":[6,94],"control":[7,24,58,67,75,95],"scheme":[8,25,96],"is":[9,26,49],"proposed":[10],"to":[11,51,87],"ensure":[12],"defined":[14],"and":[15,38,72,97],"reproducible":[17],"process":[18,70,81],"in":[19],"reactive":[20],"sputtering":[21],"plants.":[22],"The":[23],"based":[27],"on":[28],"novel":[30],"hybrid":[31],"model":[32],"that":[33],"describes":[34],"the":[35,39,53,57,89,92,99],"pressure":[36],"behaviour":[37,41],"electrical":[40],"of":[42,56,62,80,91,98],"such":[43],"processes.":[44],"A":[45],"automation":[47,100],"system":[48],"developed":[50],"allow":[52],"experimental":[54],"validation":[55],"scheme,":[59],"which":[60],"consists":[61],"two":[63],"parts.":[64],"An":[65],"interlock":[66],"prevents":[68],"prohibited":[69],"states":[71],"sequence":[74,79],"ensures":[76],"desired":[78],"states.":[82],"Experimental":[83],"data":[84],"are":[85],"shown":[86],"demonstrate":[88],"applicability":[90],"system.":[101]},"counts_by_year":[],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}