{"id":"https://openalex.org/W2907332709","doi":"https://doi.org/10.1109/icarcv.2018.8581134","title":"Detection and Compensation of Motion Error for Nanomanipulation Platform in Scanning Electron Microscope","display_name":"Detection and Compensation of Motion Error for Nanomanipulation Platform in Scanning Electron Microscope","publication_year":2018,"publication_date":"2018-11-01","ids":{"openalex":"https://openalex.org/W2907332709","doi":"https://doi.org/10.1109/icarcv.2018.8581134","mag":"2907332709"},"language":"en","primary_location":{"id":"doi:10.1109/icarcv.2018.8581134","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icarcv.2018.8581134","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 15th International Conference on Control, Automation, Robotics and Vision (ICARCV)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100350110","display_name":"Mingyu Wang","orcid":"https://orcid.org/0000-0002-5055-7443"},"institutions":[{"id":"https://openalex.org/I3923682","display_name":"Soochow University","ror":"https://ror.org/05t8y2r12","country_code":"CN","type":"education","lineage":["https://openalex.org/I3923682"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Mingyu Wang","raw_affiliation_strings":["Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation, Soochow University, Suzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation, Soochow University, Suzhou, China","institution_ids":["https://openalex.org/I3923682"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100622126","display_name":"Yaqiong Wang","orcid":"https://orcid.org/0000-0002-7041-102X"},"institutions":[{"id":"https://openalex.org/I3923682","display_name":"Soochow University","ror":"https://ror.org/05t8y2r12","country_code":"CN","type":"education","lineage":["https://openalex.org/I3923682"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yaqiong Wang","raw_affiliation_strings":["Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation, Soochow University, Suzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation, Soochow University, Suzhou, China","institution_ids":["https://openalex.org/I3923682"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5008979930","display_name":"Zhan Yang","orcid":"https://orcid.org/0000-0002-3063-4819"},"institutions":[{"id":"https://openalex.org/I3923682","display_name":"Soochow University","ror":"https://ror.org/05t8y2r12","country_code":"CN","type":"education","lineage":["https://openalex.org/I3923682"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhan Yang","raw_affiliation_strings":["Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation, Soochow University, Suzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation, Soochow University, Suzhou, China","institution_ids":["https://openalex.org/I3923682"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052423709","display_name":"Tao Chen","orcid":"https://orcid.org/0000-0003-2051-7798"},"institutions":[{"id":"https://openalex.org/I3923682","display_name":"Soochow University","ror":"https://ror.org/05t8y2r12","country_code":"CN","type":"education","lineage":["https://openalex.org/I3923682"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tao Chen","raw_affiliation_strings":["Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation, Soochow University, Suzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation, Soochow University, Suzhou, China","institution_ids":["https://openalex.org/I3923682"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028713186","display_name":"Lining Sun","orcid":"https://orcid.org/0000-0001-5557-3509"},"institutions":[{"id":"https://openalex.org/I3923682","display_name":"Soochow University","ror":"https://ror.org/05t8y2r12","country_code":"CN","type":"education","lineage":["https://openalex.org/I3923682"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lining Sun","raw_affiliation_strings":["Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation, Soochow University, Suzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation, Soochow University, Suzhou, China","institution_ids":["https://openalex.org/I3923682"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5065569192","display_name":"Toshio Fukuda","orcid":"https://orcid.org/0000-0002-3885-7152"},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Toshio Fukuda","raw_affiliation_strings":["Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya, Japan","institution_ids":["https://openalex.org/I60134161"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.16939277,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"91","issue":null,"first_page":"98","last_page":"102"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10857","display_name":"Advanced Electron Microscopy Techniques and Applications","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/1315","display_name":"Structural Biology"},"field":{"id":"https://openalex.org/fields/13","display_name":"Biochemistry, Genetics and Molecular Biology"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.996399998664856,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/feed-forward","display_name":"Feed forward","score":0.63072669506073},{"id":"https://openalex.org/keywords/compensation","display_name":"Compensation (psychology)","score":0.6238037347793579},{"id":"https://openalex.org/keywords/operability","display_name":"Operability","score":0.6007751822471619},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5692370533943176},{"id":"https://openalex.org/keywords/computer-vision","display_name":"Computer vision","score":0.5166435837745667},{"id":"https://openalex.org/keywords/motion-control","display_name":"Motion control","score":0.4923042058944702},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.47407832741737366},{"id":"https://openalex.org/keywords/motion-compensation","display_name":"Motion compensation","score":0.4251856207847595},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2553079128265381},{"id":"https://openalex.org/keywords/robot","display_name":"Robot","score":0.2223358452320099},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.12658819556236267}],"concepts":[{"id":"https://openalex.org/C38858127","wikidata":"https://www.wikidata.org/wiki/Q5441228","display_name":"Feed forward","level":2,"score":0.63072669506073},{"id":"https://openalex.org/C2780023022","wikidata":"https://www.wikidata.org/wiki/Q1338171","display_name":"Compensation (psychology)","level":2,"score":0.6238037347793579},{"id":"https://openalex.org/C126231374","wikidata":"https://www.wikidata.org/wiki/Q1061298","display_name":"Operability","level":2,"score":0.6007751822471619},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5692370533943176},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.5166435837745667},{"id":"https://openalex.org/C145565327","wikidata":"https://www.wikidata.org/wiki/Q852514","display_name":"Motion control","level":3,"score":0.4923042058944702},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.47407832741737366},{"id":"https://openalex.org/C128840427","wikidata":"https://www.wikidata.org/wiki/Q1302174","display_name":"Motion compensation","level":2,"score":0.4251856207847595},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2553079128265381},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.2223358452320099},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.12658819556236267},{"id":"https://openalex.org/C11171543","wikidata":"https://www.wikidata.org/wiki/Q41630","display_name":"Psychoanalysis","level":1,"score":0.0},{"id":"https://openalex.org/C115903868","wikidata":"https://www.wikidata.org/wiki/Q80993","display_name":"Software engineering","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icarcv.2018.8581134","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icarcv.2018.8581134","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 15th International Conference on Control, Automation, Robotics and Vision (ICARCV)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/8","score":0.5699999928474426,"display_name":"Decent work and economic growth"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320335791","display_name":"Beijing Advanced Innovation Center for Intelligent Robots and Systems, Beijing Institute of Technology","ror":null}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W1951071360","https://openalex.org/W1963490529","https://openalex.org/W2017000054","https://openalex.org/W2018858346","https://openalex.org/W2099666505","https://openalex.org/W2109706025","https://openalex.org/W2122986958","https://openalex.org/W2138736802","https://openalex.org/W2152479613","https://openalex.org/W2332872502","https://openalex.org/W2472743159","https://openalex.org/W2515473728","https://openalex.org/W4213218959","https://openalex.org/W4246974435","https://openalex.org/W6825992361"],"related_works":["https://openalex.org/W2125626150","https://openalex.org/W2045316876","https://openalex.org/W2736987351","https://openalex.org/W2255799226","https://openalex.org/W2661918375","https://openalex.org/W2025974577","https://openalex.org/W2370742258","https://openalex.org/W2057244293","https://openalex.org/W1589486833","https://openalex.org/W2116883285"],"abstract_inverted_index":{"Nanomanipulation":[0,40],"system":[1,37,54,91],"based":[2],"on":[3],"scanning":[4],"electron":[5],"microscope(SEM)":[6],"with":[7],"good":[8],"real-time":[9],"visual":[10,70],"feedback":[11,71],"and":[12,48,51,58,72,77,104,121,126,140,146],"nanoscale":[13],"observation":[14],"resolution":[15],"had":[16],"high":[17],"operability":[18],"in":[19,38,88,92,100,117,136],"a":[20,65],"vacuum":[21],"working":[22],"environment.":[23],"Different":[24],"nanomanipulation":[25,36,53,86,90],"tasks":[26],"of":[27,67,82],"carbon":[28],"nanotubes":[29],"(CNTs)":[30],"are":[31],"carried":[32],"out":[33],"through":[34],"the":[35,69,79,83,89,97,101,110,114,118,130,133,137],"SEM.":[39,93],"platform":[41,87],"existed":[42],"inherent":[43],"manufacture":[44],"errors,":[45,50],"installation":[46],"errors":[47],"other":[49],"imprecise":[52],"were":[55],"also":[56],"time-consuming":[57],"laborious":[59],"for":[60],"operators.":[61],"This":[62,94],"paper":[63],"presentes":[64],"method":[66,95],"combining":[68],"feedforward":[73,131],"control":[74],"to":[75,144],"detect":[76],"compensate":[78],"motion":[80,98,115,134],"error":[81,99,116,135],"multi-dimensional":[84],"SmarAct":[85],"reduces":[96,143],"X-Y":[102],"direction":[103,120,123,139,142],"achieved":[105],"higher":[106],"operating":[107],"accuracy.":[108],"At":[109],"different":[111],"step":[112],"speed,":[113],"X":[119,138],"Y":[122,141],"is":[124],"135.7nm":[125],"112.9nm":[127],"respectively.":[128,148],"After":[129],"compensation,":[132],"61.3nm":[145],"54.1nm":[147]},"counts_by_year":[],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}