{"id":"https://openalex.org/W3157552011","doi":"https://doi.org/10.1109/icaiic51459.2021.9415241","title":"A Chemical Monitoring and Prediction System in Semiconductor Manufacturing Process Using Bigdata and AI Techniques","display_name":"A Chemical Monitoring and Prediction System in Semiconductor Manufacturing Process Using Bigdata and AI Techniques","publication_year":2021,"publication_date":"2021-04-13","ids":{"openalex":"https://openalex.org/W3157552011","doi":"https://doi.org/10.1109/icaiic51459.2021.9415241","mag":"3157552011"},"language":"en","primary_location":{"id":"doi:10.1109/icaiic51459.2021.9415241","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icaiic51459.2021.9415241","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 International Conference on Artificial Intelligence in Information and Communication (ICAIIC)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5011182339","display_name":"Hyung-Min Cho","orcid":null},"institutions":[{"id":"https://openalex.org/I4210142764","display_name":"Healing Foundation","ror":"https://ror.org/041kwj007","country_code":"AU","type":"other","lineage":["https://openalex.org/I4210142764"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Hyung-Min Cho","raw_affiliation_strings":["Healingsoft, Co., Ltd"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Healingsoft, Co., Ltd","institution_ids":["https://openalex.org/I4210142764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100773245","display_name":"Kyung\u2010Hee Lee","orcid":"https://orcid.org/0000-0002-2307-7866"},"institutions":[{"id":"https://openalex.org/I4210099077","display_name":"Blazegraph (United States)","ror":"https://ror.org/00vwzq490","country_code":"US","type":"company","lineage":["https://openalex.org/I4210099077"]},{"id":"https://openalex.org/I4210142764","display_name":"Healing Foundation","ror":"https://ror.org/041kwj007","country_code":"AU","type":"other","lineage":["https://openalex.org/I4210142764"]}],"countries":["AU","US"],"is_corresponding":false,"raw_author_name":"Kyung-Hee Lee","raw_affiliation_strings":["Healingsoft, Co., Ltd. and Bigdatalabs Co., Ltd"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Healingsoft, Co., Ltd. and Bigdatalabs Co., Ltd","institution_ids":["https://openalex.org/I4210099077","https://openalex.org/I4210142764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017001301","display_name":"Peter Shim","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Peter Shim","raw_affiliation_strings":["SIMMTECH Co., Ltd, Cheongju-si, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SIMMTECH Co., Ltd, Cheongju-si, Republic of Korea","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5073735921","display_name":"Anthony Park","orcid":"https://orcid.org/0000-0002-5686-839X"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Anthony Park","raw_affiliation_strings":["SIMMTECH Co., Ltd, Cheongju-si, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"SIMMTECH Co., Ltd, Cheongju-si, Republic of Korea","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.394,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.45164947,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"488","last_page":"491"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9014999866485596,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9014999866485596,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.7501808404922485},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6281158328056335},{"id":"https://openalex.org/keywords/repeatability","display_name":"Repeatability","score":0.6077286601066589},{"id":"https://openalex.org/keywords/scrap","display_name":"Scrap","score":0.6004567742347717},{"id":"https://openalex.org/keywords/process-control","display_name":"Process control","score":0.5410898923873901},{"id":"https://openalex.org/keywords/big-data","display_name":"Big data","score":0.5083076357841492},{"id":"https://openalex.org/keywords/robustness","display_name":"Robustness (evolution)","score":0.4917767345905304},{"id":"https://openalex.org/keywords/adapter","display_name":"Adapter (computing)","score":0.4899710714817047},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.4720110595226288},{"id":"https://openalex.org/keywords/alarm","display_name":"ALARM","score":0.443544864654541},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.36699533462524414},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.3373977541923523},{"id":"https://openalex.org/keywords/real-time-computing","display_name":"Real-time computing","score":0.3349318206310272},{"id":"https://openalex.org/keywords/data-mining","display_name":"Data mining","score":0.2688021659851074},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.19714781641960144},{"id":"https://openalex.org/keywords/computer-hardware","display_name":"Computer hardware","score":0.10598811507225037}],"concepts":[{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.7501808404922485},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6281158328056335},{"id":"https://openalex.org/C154020017","wikidata":"https://www.wikidata.org/wiki/Q520171","display_name":"Repeatability","level":2,"score":0.6077286601066589},{"id":"https://openalex.org/C192097918","wikidata":"https://www.wikidata.org/wiki/Q917714","display_name":"Scrap","level":2,"score":0.6004567742347717},{"id":"https://openalex.org/C155386361","wikidata":"https://www.wikidata.org/wiki/Q1649571","display_name":"Process control","level":3,"score":0.5410898923873901},{"id":"https://openalex.org/C75684735","wikidata":"https://www.wikidata.org/wiki/Q858810","display_name":"Big data","level":2,"score":0.5083076357841492},{"id":"https://openalex.org/C63479239","wikidata":"https://www.wikidata.org/wiki/Q7353546","display_name":"Robustness (evolution)","level":3,"score":0.4917767345905304},{"id":"https://openalex.org/C177284502","wikidata":"https://www.wikidata.org/wiki/Q1005390","display_name":"Adapter (computing)","level":2,"score":0.4899710714817047},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.4720110595226288},{"id":"https://openalex.org/C2779119184","wikidata":"https://www.wikidata.org/wiki/Q294350","display_name":"ALARM","level":2,"score":0.443544864654541},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.36699533462524414},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.3373977541923523},{"id":"https://openalex.org/C79403827","wikidata":"https://www.wikidata.org/wiki/Q3988","display_name":"Real-time computing","level":1,"score":0.3349318206310272},{"id":"https://openalex.org/C124101348","wikidata":"https://www.wikidata.org/wiki/Q172491","display_name":"Data mining","level":1,"score":0.2688021659851074},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.19714781641960144},{"id":"https://openalex.org/C9390403","wikidata":"https://www.wikidata.org/wiki/Q3966","display_name":"Computer hardware","level":1,"score":0.10598811507225037},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0},{"id":"https://openalex.org/C104317684","wikidata":"https://www.wikidata.org/wiki/Q7187","display_name":"Gene","level":2,"score":0.0},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.0},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icaiic51459.2021.9415241","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icaiic51459.2021.9415241","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2021 International Conference on Artificial Intelligence in Information and Communication (ICAIIC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":1,"referenced_works":["https://openalex.org/W1761735801"],"related_works":["https://openalex.org/W2520165268","https://openalex.org/W2108148093","https://openalex.org/W2147884659","https://openalex.org/W2002098200","https://openalex.org/W2220800134","https://openalex.org/W2129811905","https://openalex.org/W2012785390","https://openalex.org/W2109685027","https://openalex.org/W2122149637","https://openalex.org/W2145722189"],"abstract_inverted_index":{"Numerous":[0],"chemical":[1,24],"substances":[2,25,75],"are":[3,18,137],"used":[4],"in":[5,26,81,87,149],"the":[6,27,72,96,99,116,150],"semiconductor":[7],"manufacturing":[8],"process,":[9],"and":[10,12,31,41,54,70,84,90,130,133],"homogeneity":[11],"quality":[13],"control":[14,22],"of":[15,23,33,74,118,146],"surface":[16],"treatment":[17],"performed":[19],"through":[20,143],"precise":[21],"process.":[28],"The":[29,127],"repeatability":[30],"reproducibility":[32],"each":[34],"process":[35],"is":[36,103],"a":[37,43,62,82],"fab's":[38],"greatest":[39],"concern,":[40],"even":[42],"slight":[44],"deviation":[45],"from":[46],"specifications":[47],"can":[48],"lead":[49],"to":[50,95,139],"expensive":[51],"equipment":[52],"contamination":[53],"wafer":[55],"scrap.":[56],"In":[57,105],"this":[58],"study,":[59],"we":[60,107],"propose":[61,108],"real-time":[63],"big":[64],"data":[65,123,128],"analysis":[66,129],"system":[67,132],"that":[68,114],"integrates":[69],"manages":[71],"state":[73,117],"being":[76],"measured":[77],"at":[78],"numerous":[79],"points":[80],"factory,":[83],"monitors":[85],"them":[86],"real":[88],"time,":[89],"delivers":[91],"an":[92,109],"alarm":[93],"message":[94],"manager":[97],"when":[98],"preset":[100],"upper/lower":[101],"limit":[102],"exceeded.":[104],"addition,":[106],"artificial":[110],"intelligence":[111],"prediction":[112,135],"model":[113,136],"predicts":[115],"matter":[119],"by":[120],"using":[121],"accumulated":[122],"as":[124],"learning":[125,145],"datasets.":[126],"monitoring":[131],"AI":[134],"designed":[138],"continuously":[140],"improve":[141],"accuracy":[142],"additional":[144],"related":[147],"datasets":[148],"future.":[151]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2023,"cited_by_count":1}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}