{"id":"https://openalex.org/W2548968001","doi":"https://doi.org/10.1109/icacci.2016.7732084","title":"A novel design microstage based on piezoeletric actuation","display_name":"A novel design microstage based on piezoeletric actuation","publication_year":2016,"publication_date":"2016-09-01","ids":{"openalex":"https://openalex.org/W2548968001","doi":"https://doi.org/10.1109/icacci.2016.7732084","mag":"2548968001"},"language":"en","primary_location":{"id":"doi:10.1109/icacci.2016.7732084","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icacci.2016.7732084","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 International Conference on Advances in Computing, Communications and Informatics (ICACCI)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5056757661","display_name":"Kiran Junagal","orcid":null},"institutions":[{"id":"https://openalex.org/I159219196","display_name":"Rajasthan Technical University","ror":"https://ror.org/056bber35","country_code":"IN","type":"education","lineage":["https://openalex.org/I159219196"]}],"countries":["IN"],"is_corresponding":true,"raw_author_name":"Kiran Junagal","raw_affiliation_strings":["Department of Electronics Engineering, Rajasthan Technical University, Kota, India"],"affiliations":[{"raw_affiliation_string":"Department of Electronics Engineering, Rajasthan Technical University, Kota, India","institution_ids":["https://openalex.org/I159219196"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5080095234","display_name":"Ram Swaroop Meena","orcid":"https://orcid.org/0000-0002-7119-8646"},"institutions":[{"id":"https://openalex.org/I159219196","display_name":"Rajasthan Technical University","ror":"https://ror.org/056bber35","country_code":"IN","type":"education","lineage":["https://openalex.org/I159219196"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"R. S. Meena","raw_affiliation_strings":["Department of Electronics Engineering, Rajasthan Technical University, Kota, India"],"affiliations":[{"raw_affiliation_string":"Department of Electronics Engineering, Rajasthan Technical University, Kota, India","institution_ids":["https://openalex.org/I159219196"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5056757661"],"corresponding_institution_ids":["https://openalex.org/I159219196"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.11657701,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"12","issue":null,"first_page":"437","last_page":"441"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9968000054359436,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9968000054359436,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.996399998664856,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.994700014591217,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/multiphysics","display_name":"Multiphysics","score":0.9208366870880127},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.8167083263397217},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.8067792057991028},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.7903684377670288},{"id":"https://openalex.org/keywords/displacement","display_name":"Displacement (psychology)","score":0.6825526356697083},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.6753040552139282},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.6523599624633789},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.5117942690849304},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4947468638420105},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.49407246708869934},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.4665484130382538},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4173443019390106},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3717596232891083},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.32934558391571045},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2716679573059082},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.18927788734436035},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.18514618277549744},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.09342744946479797}],"concepts":[{"id":"https://openalex.org/C46435376","wikidata":"https://www.wikidata.org/wiki/Q1829750","display_name":"Multiphysics","level":3,"score":0.9208366870880127},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.8167083263397217},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.8067792057991028},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.7903684377670288},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.6825526356697083},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.6753040552139282},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.6523599624633789},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.5117942690849304},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4947468638420105},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.49407246708869934},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4665484130382538},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4173443019390106},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3717596232891083},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.32934558391571045},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2716679573059082},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.18927788734436035},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.18514618277549744},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.09342744946479797},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icacci.2016.7732084","is_oa":false,"landing_page_url":"https://doi.org/10.1109/icacci.2016.7732084","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 International Conference on Advances in Computing, Communications and Informatics (ICACCI)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.6899999976158142,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W1494338343","https://openalex.org/W1973488714","https://openalex.org/W1987809691","https://openalex.org/W2034767287","https://openalex.org/W2077294028","https://openalex.org/W2080038336","https://openalex.org/W2178294985","https://openalex.org/W2929466278","https://openalex.org/W6685492445"],"related_works":["https://openalex.org/W2084426624","https://openalex.org/W3026055904","https://openalex.org/W2792869497","https://openalex.org/W4312133600","https://openalex.org/W2567205727","https://openalex.org/W2361803029","https://openalex.org/W2010566957","https://openalex.org/W2304501688","https://openalex.org/W4312747563","https://openalex.org/W2066459308"],"abstract_inverted_index":{"In":[0],"this":[1,77],"paper,":[2],"a":[3],"newly":[4],"modeled":[5],"3D":[6],"MEMS":[7],"piezoelectric":[8],"actuated":[9],"microstage":[10,47,63],"has":[11],"been":[12],"designed":[13,49],"and":[14,68],"simulated":[15],"using":[16],"COMSOL":[17],"Multiphysics":[18],"based":[19],"on":[20],"finite":[21],"element":[22],"method":[23],"(FEM).":[24],"Piezoelectric":[25],"actuation":[26,56],"is":[27,48,74],"most":[28],"widely":[29],"used":[30,75],"for":[31,66],"providing":[32],"immediate":[33],"output,":[34],"small":[35],"input":[36],"voltage,":[37],"high":[38,44],"accuracy":[39],"in":[40],"positioning":[41],"with":[42],"required":[43],"frequency.":[45],"The":[46],"containing":[50],"moonie":[51],"structure":[52],"which":[53],"amplifies":[54],"the":[55,80],"of":[57,62],"PZT":[58],"actuator.":[59],"Two":[60],"designs":[61],"are":[64],"presented":[65],"Micropositioning":[67],"Nanopositioning.":[69],"During":[70],"designing":[71],"poly-silicon":[72],"material":[73,78],"as":[76],"increases":[79],"displacement.":[81]},"counts_by_year":[{"year":2020,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}