{"id":"https://openalex.org/W2177463166","doi":"https://doi.org/10.1109/ias.2010.5614482","title":"Emission Spectroscopy of Pulsed Powered Microplasma for Surface Treatment of PEN Film","display_name":"Emission Spectroscopy of Pulsed Powered Microplasma for Surface Treatment of PEN Film","publication_year":2010,"publication_date":"2010-10-01","ids":{"openalex":"https://openalex.org/W2177463166","doi":"https://doi.org/10.1109/ias.2010.5614482","mag":"2177463166"},"language":"en","primary_location":{"id":"doi:10.1109/ias.2010.5614482","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ias.2010.5614482","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE Industry Applications Society Annual Meeting","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5007286494","display_name":"Marius Blajan","orcid":"https://orcid.org/0000-0002-1035-8087"},"institutions":[{"id":"https://openalex.org/I1298590031","display_name":"Shizuoka University","ror":"https://ror.org/01w6wtk13","country_code":"JP","type":"education","lineage":["https://openalex.org/I1298590031"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Marius Blajan","raw_affiliation_strings":["Innovation and Joint Research Center, Shizuoka University, Nakaku, Japan"],"affiliations":[{"raw_affiliation_string":"Innovation and Joint Research Center, Shizuoka University, Nakaku, Japan","institution_ids":["https://openalex.org/I1298590031"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081103046","display_name":"Akira Umeda","orcid":null},"institutions":[{"id":"https://openalex.org/I1298590031","display_name":"Shizuoka University","ror":"https://ror.org/01w6wtk13","country_code":"JP","type":"education","lineage":["https://openalex.org/I1298590031"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Akira Umeda","raw_affiliation_strings":["Innovation and Joint Research Center, Shizuoka University, Nakaku, Japan"],"affiliations":[{"raw_affiliation_string":"Innovation and Joint Research Center, Shizuoka University, Nakaku, Japan","institution_ids":["https://openalex.org/I1298590031"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5035274797","display_name":"Shuichi Muramatsu","orcid":null},"institutions":[{"id":"https://openalex.org/I1298590031","display_name":"Shizuoka University","ror":"https://ror.org/01w6wtk13","country_code":"JP","type":"education","lineage":["https://openalex.org/I1298590031"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Shuichi Muramatsu","raw_affiliation_strings":["Innovation and Joint Research Center, Shizuoka University, Nakaku, Japan"],"affiliations":[{"raw_affiliation_string":"Innovation and Joint Research Center, Shizuoka University, Nakaku, Japan","institution_ids":["https://openalex.org/I1298590031"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5062053001","display_name":"Kazuo Shimizu","orcid":"https://orcid.org/0000-0001-9914-671X"},"institutions":[{"id":"https://openalex.org/I1298590031","display_name":"Shizuoka University","ror":"https://ror.org/01w6wtk13","country_code":"JP","type":"education","lineage":["https://openalex.org/I1298590031"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kazuo Shimizu","raw_affiliation_strings":["Innovation and Joint Research Center, Shizuoka University, Nakaku, Japan"],"affiliations":[{"raw_affiliation_string":"Innovation and Joint Research Center, Shizuoka University, Nakaku, Japan","institution_ids":["https://openalex.org/I1298590031"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5007286494"],"corresponding_institution_ids":["https://openalex.org/I1298590031"],"apc_list":null,"apc_paid":null,"fwci":0.4844,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.71104306,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"33","issue":null,"first_page":"1","last_page":"8"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10642","display_name":"Plasma Applications and Diagnostics","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2741","display_name":"Radiology, Nuclear Medicine and Imaging"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}},"topics":[{"id":"https://openalex.org/T10642","display_name":"Plasma Applications and Diagnostics","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2741","display_name":"Radiology, Nuclear Medicine and Imaging"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}},{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10313","display_name":"Surface Modification and Superhydrophobicity","score":0.9937000274658203,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microplasma","display_name":"Microplasma","score":0.9704861640930176},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5922714471817017},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.5576916933059692},{"id":"https://openalex.org/keywords/x-ray-photoelectron-spectroscopy","display_name":"X-ray photoelectron spectroscopy","score":0.5424652099609375},{"id":"https://openalex.org/keywords/contact-angle","display_name":"Contact angle","score":0.4646878242492676},{"id":"https://openalex.org/keywords/wetting","display_name":"Wetting","score":0.43814700841903687},{"id":"https://openalex.org/keywords/spectrometer","display_name":"Spectrometer","score":0.42659124732017517},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.2412775754928589},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.20063427090644836},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.15141227841377258},{"id":"https://openalex.org/keywords/nuclear-magnetic-resonance","display_name":"Nuclear magnetic resonance","score":0.14776062965393066},{"id":"https://openalex.org/keywords/plasma","display_name":"Plasma","score":0.11650225520133972},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.09473016858100891},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.08947503566741943}],"concepts":[{"id":"https://openalex.org/C70420769","wikidata":"https://www.wikidata.org/wiki/Q6839915","display_name":"Microplasma","level":3,"score":0.9704861640930176},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5922714471817017},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.5576916933059692},{"id":"https://openalex.org/C175708663","wikidata":"https://www.wikidata.org/wiki/Q899559","display_name":"X-ray photoelectron spectroscopy","level":2,"score":0.5424652099609375},{"id":"https://openalex.org/C6556556","wikidata":"https://www.wikidata.org/wiki/Q899239","display_name":"Contact angle","level":2,"score":0.4646878242492676},{"id":"https://openalex.org/C134514944","wikidata":"https://www.wikidata.org/wiki/Q817136","display_name":"Wetting","level":2,"score":0.43814700841903687},{"id":"https://openalex.org/C33390570","wikidata":"https://www.wikidata.org/wiki/Q188463","display_name":"Spectrometer","level":2,"score":0.42659124732017517},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.2412775754928589},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.20063427090644836},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.15141227841377258},{"id":"https://openalex.org/C46141821","wikidata":"https://www.wikidata.org/wiki/Q209402","display_name":"Nuclear magnetic resonance","level":1,"score":0.14776062965393066},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.11650225520133972},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.09473016858100891},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.08947503566741943},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/ias.2010.5614482","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ias.2010.5614482","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 IEEE Industry Applications Society Annual Meeting","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/15","score":0.4099999964237213,"display_name":"Life in Land"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":32,"referenced_works":["https://openalex.org/W36201963","https://openalex.org/W1964991707","https://openalex.org/W1966186018","https://openalex.org/W1967310276","https://openalex.org/W1969904099","https://openalex.org/W1976022950","https://openalex.org/W1983686110","https://openalex.org/W2014453288","https://openalex.org/W2024343957","https://openalex.org/W2031129554","https://openalex.org/W2032640926","https://openalex.org/W2034656131","https://openalex.org/W2040107762","https://openalex.org/W2043376987","https://openalex.org/W2049426589","https://openalex.org/W2052846163","https://openalex.org/W2053643547","https://openalex.org/W2056006680","https://openalex.org/W2068343486","https://openalex.org/W2070662961","https://openalex.org/W2073465741","https://openalex.org/W2084938292","https://openalex.org/W2092890039","https://openalex.org/W2094711554","https://openalex.org/W2148773263","https://openalex.org/W2150606751","https://openalex.org/W2156901032","https://openalex.org/W2162682519","https://openalex.org/W2170428838","https://openalex.org/W2416253084","https://openalex.org/W4285719527","https://openalex.org/W6716599042"],"related_works":["https://openalex.org/W2928547925","https://openalex.org/W205077278","https://openalex.org/W3110121864","https://openalex.org/W2321855875","https://openalex.org/W2321743568","https://openalex.org/W2390206784","https://openalex.org/W2007634794","https://openalex.org/W2890620599","https://openalex.org/W2050440705","https://openalex.org/W2375596248"],"abstract_inverted_index":{"Microplasma":[0,87],"can":[1],"be":[2,29],"found":[3],"in":[4,183,226,236,256,262],"many":[5],"applications.":[6],"The":[7,17,111,268],"technology":[8],"is":[9,24],"used":[10,103],"also":[11],"for":[12,233,246,252],"surface":[13,20,60,141],"treatment":[14,21,61],"of":[15,19,51,64,74,128,149,171,180,229,270],"polymers.":[16],"process":[18,88],"by":[22,62,91,116,163],"microplasma":[23,63,140,181,234,254,271],"environmental":[25],"friendly":[26],"and":[27,48,54,72,81,122,137,208,223,231,273,279],"could":[28],"realized":[30],"at":[31],"low":[32,38,277],"cost":[33],"due":[34],"to":[35,175],"the":[36,59,139,169,253],"relatively":[37],"discharge":[39,182,235,255],"voltage":[40,108],"(around":[41],"1":[42,266],"kV)":[43],"even":[44],"under":[45],"atmospheric":[46],"pressure":[47],"small":[49],"size":[50],"power":[52,109],"supply":[53],"reactor.":[55],"This":[56],"paper":[57],"presents":[58],"PEN":[65,129,150],"(polyethylene":[66],"naphthalate)":[67],"film":[68,130,151],"using":[69],"Ar":[70,75,190,263],"gas":[71],"mixtures":[73],"with":[76,99,155],"N":[77,194,209,247,258],"<sub":[78,83,157,185,195,204,210,219,238,248,259],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[79,84,158,186,196,205,211,220,239,249,260],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[80,85,159,187,197,206,212,221,240,250,261],"O":[82,156,237],".":[86],"was":[89,102,131,144,152,264],"analyzed":[90],"emission":[92,112,244],"spectroscopy":[93],"method.":[94],"An":[95],"experimental":[96],"Marx":[97],"generator":[98],"MOSFET":[100],"switches":[101],"as":[104],"a":[105,120,123,224],"pulsed":[106],"high":[107,280],"supply.":[110],"spectra":[113],"were":[114],"measured":[115],"an":[117],"ICCD":[118],"camera,":[119],"spectrometer,":[121],"photomultiplier":[124],"tube.":[125],"Surface":[126],"wettability":[127],"confirmed":[132],"measuring":[133],"contact":[134,147],"angle":[135,148],"before":[136],"after":[138],"treatment.":[142],"It":[143],"observed":[145],"that":[146],"decreased":[153],"especially":[154],"/Ar":[160,241],"mixture.":[161,242],"Analysis":[162],"X-ray":[164],"photoelectron":[165],"spectrometer":[166],"(XPS)":[167],"showed":[168,189],"decrease":[170,225],"C1s,":[172],"which":[173],"correspond":[174],"C-H":[176],"bond.":[177],"Emission":[178],"spectrum":[179],"Ar/N":[184],"mixture":[188],"peaks,":[191,193],"OH":[192,232],"second":[198],"positive":[199,214],"band":[200,215],"system":[201,216],"peaks":[202,217,227],"(N":[203,218],"SPS)":[207],"first":[213],"FPS)":[222],"intensities":[228],"ArI":[230],"Lifetime":[243],"signals":[245],"SPS":[251],"0.25%":[257],"around":[265],"\u03bcs.":[267],"calculation":[269],"rotational":[272,278],"electron":[274,281],"temperatures":[275],"show":[276],"temperature.":[282]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}