{"id":"https://openalex.org/W2485422112","doi":"https://doi.org/10.1109/i2mtc.2016.7520377","title":"Energy method for the optimization of a silicon resonant accelerometer","display_name":"Energy method for the optimization of a silicon resonant accelerometer","publication_year":2016,"publication_date":"2016-05-01","ids":{"openalex":"https://openalex.org/W2485422112","doi":"https://doi.org/10.1109/i2mtc.2016.7520377","mag":"2485422112"},"language":"en","primary_location":{"id":"doi:10.1109/i2mtc.2016.7520377","is_oa":false,"landing_page_url":"https://doi.org/10.1109/i2mtc.2016.7520377","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE International Instrumentation and Measurement Technology Conference Proceedings","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100720055","display_name":"Jing Zhang","orcid":"https://orcid.org/0000-0001-5367-0532"},"institutions":[{"id":"https://openalex.org/I36399199","display_name":"Nanjing University of Science and Technology","ror":"https://ror.org/00xp9wg62","country_code":"CN","type":"education","lineage":["https://openalex.org/I36399199"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Jing Zhang","raw_affiliation_strings":["School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, P.R. China"],"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, P.R. China","institution_ids":["https://openalex.org/I36399199"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060989854","display_name":"Qin Shi","orcid":"https://orcid.org/0000-0002-7703-9574"},"institutions":[{"id":"https://openalex.org/I36399199","display_name":"Nanjing University of Science and Technology","ror":"https://ror.org/00xp9wg62","country_code":"CN","type":"education","lineage":["https://openalex.org/I36399199"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qin Shi","raw_affiliation_strings":["School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, P.R. China"],"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, P.R. China","institution_ids":["https://openalex.org/I36399199"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029830698","display_name":"Yan Su","orcid":"https://orcid.org/0000-0001-9295-348X"},"institutions":[{"id":"https://openalex.org/I36399199","display_name":"Nanjing University of Science and Technology","ror":"https://ror.org/00xp9wg62","country_code":"CN","type":"education","lineage":["https://openalex.org/I36399199"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yan Su","raw_affiliation_strings":["School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, P.R. China"],"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, P.R. China","institution_ids":["https://openalex.org/I36399199"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5054042379","display_name":"Anping Qiu","orcid":"https://orcid.org/0000-0002-5869-5621"},"institutions":[{"id":"https://openalex.org/I36399199","display_name":"Nanjing University of Science and Technology","ror":"https://ror.org/00xp9wg62","country_code":"CN","type":"education","lineage":["https://openalex.org/I36399199"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"An-Ping Qiu","raw_affiliation_strings":["School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, P.R. China"],"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, P.R. China","institution_ids":["https://openalex.org/I36399199"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5100720055"],"corresponding_institution_ids":["https://openalex.org/I36399199"],"apc_list":null,"apc_paid":null,"fwci":0.1838,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.56802078,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"5","issue":null,"first_page":"1","last_page":"6"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.8079841136932373},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.7531828880310059},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.7446441650390625},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7022557258605957},{"id":"https://openalex.org/keywords/energy","display_name":"Energy (signal processing)","score":0.6147737503051758},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.5852282643318176},{"id":"https://openalex.org/keywords/energy-conservation","display_name":"Energy conservation","score":0.4952937662601471},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.48107337951660156},{"id":"https://openalex.org/keywords/proof-mass","display_name":"Proof mass","score":0.46470868587493896},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.46382132172584534},{"id":"https://openalex.org/keywords/energy-minimization","display_name":"Energy minimization","score":0.4552918076515198},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3851715922355652},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3727054297924042},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.35914090275764465},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.3463398814201355},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3087735176086426},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.269320547580719},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.20522838830947876},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1843750774860382}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.8079841136932373},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.7531828880310059},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.7446441650390625},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7022557258605957},{"id":"https://openalex.org/C186370098","wikidata":"https://www.wikidata.org/wiki/Q442787","display_name":"Energy (signal processing)","level":2,"score":0.6147737503051758},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5852282643318176},{"id":"https://openalex.org/C520301825","wikidata":"https://www.wikidata.org/wiki/Q380170","display_name":"Energy conservation","level":2,"score":0.4952937662601471},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.48107337951660156},{"id":"https://openalex.org/C2780330379","wikidata":"https://www.wikidata.org/wiki/Q16990023","display_name":"Proof mass","level":3,"score":0.46470868587493896},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.46382132172584534},{"id":"https://openalex.org/C14961307","wikidata":"https://www.wikidata.org/wiki/Q5377176","display_name":"Energy minimization","level":2,"score":0.4552918076515198},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3851715922355652},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3727054297924042},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.35914090275764465},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.3463398814201355},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3087735176086426},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.269320547580719},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.20522838830947876},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1843750774860382},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/i2mtc.2016.7520377","is_oa":false,"landing_page_url":"https://doi.org/10.1109/i2mtc.2016.7520377","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2016 IEEE International Instrumentation and Measurement Technology Conference Proceedings","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320328844","display_name":"China Electronics Technology Group Corporation","ror":"https://ror.org/0098hst83"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W113714581","https://openalex.org/W1552625989","https://openalex.org/W1970486571","https://openalex.org/W1981752087","https://openalex.org/W1996336650","https://openalex.org/W2011900623","https://openalex.org/W2056587368","https://openalex.org/W2097977675","https://openalex.org/W2127484235","https://openalex.org/W2154038711","https://openalex.org/W2154759250","https://openalex.org/W2171074980","https://openalex.org/W2176356627","https://openalex.org/W2219933160","https://openalex.org/W4301502943","https://openalex.org/W6604710003","https://openalex.org/W6688971506"],"related_works":["https://openalex.org/W4245472411","https://openalex.org/W3161496874","https://openalex.org/W2045042928","https://openalex.org/W4379746342","https://openalex.org/W4232743211","https://openalex.org/W2145387305","https://openalex.org/W2026330382","https://openalex.org/W2915680872","https://openalex.org/W2978594305","https://openalex.org/W2006014592"],"abstract_inverted_index":{"This":[0,135],"study":[1],"investigated":[2],"the":[3,24,46,55,58,74,86,90,114],"application":[4],"of":[5,23,57,73,102],"energy-consume":[6,139],"concept":[7],"on":[8,45,54,145],"a":[9,142],"silicon":[10],"resonant":[11],"accelerometer":[12],"(SRA)":[13],"to":[14,40,83,89,98],"address":[15],"design":[16],"issues.":[17],"Constrained":[18],"by":[19,28],"micro-fabrication":[20],"technology,":[21],"structure":[22,56,75],"SRA":[25,128],"is":[26],"formed":[27],"resonators,":[29],"micro-lever":[30],"mechanisms,":[31],"proof":[32],"mass":[33],"and":[34,63,104],"multi":[35],"flexures.":[36],"They":[37],"are":[38],"referred":[39],"as":[41],"compliant":[42],"mechanisms.":[43],"Based":[44],"energy":[47,51,87],"conservation":[48],"law,":[49],"an":[50],"theoretical":[52],"model":[53],"sensor":[59],"has":[60,78,93,141],"been":[61,79,94],"built":[62],"structural":[64],"parameters":[65],"were":[66],"obtained":[67],"using":[68],"this":[69,138],"novel":[70],"method.":[71],"Sensitivity":[72],"after":[76,133],"optimization":[77],"increased":[80,95],"from":[81,96],"127Hz/g":[82],"157.4Hz/g,":[84],"while":[85],"transmitted":[88],"force":[91],"resonators":[92],"24.33%":[97],"nearly":[99],"60%.":[100],"Results":[101],"closed-form":[103],"tests":[105],"exhibited":[106],"in":[107],"good":[108,131,143],"agreement.":[109],"The":[110,119,127],"bias":[111],"stability(1\u03c3)":[112],"removing":[113],"start":[115],"time":[116],"was":[117,125],"13.7\u03bcg.":[118],"sensitivity":[120],"nolinearity":[121],"within":[122],"\u00b1":[123],"40g":[124],"136.6ppm.":[126],"showed":[129],"very":[130],"properties":[132],"optimization.":[134],"indicates":[136],"that":[137],"method":[140],"potential":[144],"MEMS":[146],"sensors":[147],"geometrical":[148],"design.":[149]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2019,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}