{"id":"https://openalex.org/W1969695223","doi":"https://doi.org/10.1109/i2mtc.2014.6860920","title":"Design and simulation of 10 MHz MEMS oscillator","display_name":"Design and simulation of 10 MHz MEMS oscillator","publication_year":2014,"publication_date":"2014-05-01","ids":{"openalex":"https://openalex.org/W1969695223","doi":"https://doi.org/10.1109/i2mtc.2014.6860920","mag":"1969695223"},"language":"en","primary_location":{"id":"doi:10.1109/i2mtc.2014.6860920","is_oa":false,"landing_page_url":"https://doi.org/10.1109/i2mtc.2014.6860920","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) Proceedings","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5053997211","display_name":"Syamsi Taufik","orcid":null},"institutions":[{"id":"https://openalex.org/I4164984","display_name":"International Islamic University Malaysia","ror":"https://ror.org/03s9hs139","country_code":"MY","type":"education","lineage":["https://openalex.org/I4164984"]}],"countries":["MY"],"is_corresponding":true,"raw_author_name":"Syamsi Taufik","raw_affiliation_strings":["International Islamic University Malaysia, Kuala Lumpur, Wilayah Persekutuan, MY","ECE Dept., Int. Islamic Univ. Malaysia, Kuala Lumpur, Malaysia"],"affiliations":[{"raw_affiliation_string":"International Islamic University Malaysia, Kuala Lumpur, Wilayah Persekutuan, MY","institution_ids":["https://openalex.org/I4164984"]},{"raw_affiliation_string":"ECE Dept., Int. Islamic Univ. Malaysia, Kuala Lumpur, Malaysia","institution_ids":["https://openalex.org/I4164984"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057997579","display_name":"Sheroz Khan","orcid":"https://orcid.org/0000-0002-5749-8538"},"institutions":[{"id":"https://openalex.org/I4164984","display_name":"International Islamic University Malaysia","ror":"https://ror.org/03s9hs139","country_code":"MY","type":"education","lineage":["https://openalex.org/I4164984"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"S. Khan","raw_affiliation_strings":["International Islamic University Malaysia, Kuala Lumpur, Wilayah Persekutuan, MY","ECE Dept., Int. Islamic Univ. Malaysia, Kuala Lumpur, Malaysia"],"affiliations":[{"raw_affiliation_string":"International Islamic University Malaysia, Kuala Lumpur, Wilayah Persekutuan, MY","institution_ids":["https://openalex.org/I4164984"]},{"raw_affiliation_string":"ECE Dept., Int. Islamic Univ. Malaysia, Kuala Lumpur, Malaysia","institution_ids":["https://openalex.org/I4164984"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085557085","display_name":"Anis Nurashikin Nordin","orcid":"https://orcid.org/0000-0002-8301-4365"},"institutions":[{"id":"https://openalex.org/I4164984","display_name":"International Islamic University Malaysia","ror":"https://ror.org/03s9hs139","country_code":"MY","type":"education","lineage":["https://openalex.org/I4164984"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"A. N. Nordin","raw_affiliation_strings":["International Islamic University Malaysia, Kuala Lumpur, Wilayah Persekutuan, MY","ECE Dept., Int. Islamic Univ. Malaysia, Kuala Lumpur, Malaysia"],"affiliations":[{"raw_affiliation_string":"International Islamic University Malaysia, Kuala Lumpur, Wilayah Persekutuan, MY","institution_ids":["https://openalex.org/I4164984"]},{"raw_affiliation_string":"ECE Dept., Int. Islamic Univ. Malaysia, Kuala Lumpur, Malaysia","institution_ids":["https://openalex.org/I4164984"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5011909922","display_name":"Ahmad Anwar Zainuddin","orcid":"https://orcid.org/0000-0001-6822-0075"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"A. Zainuddin","raw_affiliation_strings":["Silterra Malaysia., Lot 8, Phase II Kulim Hi-Tech Park, 09000 Kedah, Malaysia","Silterra Malaysia., Kulim, Malaysia"],"affiliations":[{"raw_affiliation_string":"Silterra Malaysia., Lot 8, Phase II Kulim Hi-Tech Park, 09000 Kedah, Malaysia","institution_ids":[]},{"raw_affiliation_string":"Silterra Malaysia., Kulim, Malaysia","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5053997211"],"corresponding_institution_ids":["https://openalex.org/I4164984"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.04140835,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1134","last_page":"1138"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/pierce-oscillator","display_name":"Pierce oscillator","score":0.7410444021224976},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.7364436984062195},{"id":"https://openalex.org/keywords/vack\u00e1\u0159-oscillator","display_name":"Vack\u00e1\u0159 oscillator","score":0.7078691720962524},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.6471834778785706},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.595981776714325},{"id":"https://openalex.org/keywords/cadence","display_name":"Cadence","score":0.5637764930725098},{"id":"https://openalex.org/keywords/rlc-circuit","display_name":"RLC circuit","score":0.5628892183303833},{"id":"https://openalex.org/keywords/amplifier","display_name":"Amplifier","score":0.5015137195587158},{"id":"https://openalex.org/keywords/voltage-controlled-oscillator","display_name":"Voltage-controlled oscillator","score":0.42414551973342896},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.40134498476982117},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3922758996486664},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.33210986852645874},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2898549735546112},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.28366705775260925},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.15306982398033142},{"id":"https://openalex.org/keywords/capacitor","display_name":"Capacitor","score":0.12937337160110474}],"concepts":[{"id":"https://openalex.org/C41611521","wikidata":"https://www.wikidata.org/wiki/Q856336","display_name":"Pierce oscillator","level":5,"score":0.7410444021224976},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.7364436984062195},{"id":"https://openalex.org/C111657199","wikidata":"https://www.wikidata.org/wiki/Q2300256","display_name":"Vack\u00e1\u0159 oscillator","level":4,"score":0.7078691720962524},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.6471834778785706},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.595981776714325},{"id":"https://openalex.org/C2777125575","wikidata":"https://www.wikidata.org/wiki/Q14088448","display_name":"Cadence","level":2,"score":0.5637764930725098},{"id":"https://openalex.org/C89880566","wikidata":"https://www.wikidata.org/wiki/Q323477","display_name":"RLC circuit","level":4,"score":0.5628892183303833},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.5015137195587158},{"id":"https://openalex.org/C5291336","wikidata":"https://www.wikidata.org/wiki/Q852341","display_name":"Voltage-controlled oscillator","level":3,"score":0.42414551973342896},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.40134498476982117},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3922758996486664},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.33210986852645874},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2898549735546112},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.28366705775260925},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.15306982398033142},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.12937337160110474}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/i2mtc.2014.6860920","is_oa":false,"landing_page_url":"https://doi.org/10.1109/i2mtc.2014.6860920","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2014 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) Proceedings","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.8399999737739563,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W1566916904","https://openalex.org/W1967109116","https://openalex.org/W2030013474","https://openalex.org/W2040339884","https://openalex.org/W2095929384","https://openalex.org/W2114304616","https://openalex.org/W2215436320","https://openalex.org/W2533675480"],"related_works":["https://openalex.org/W1950287302","https://openalex.org/W2125674241","https://openalex.org/W2041566470","https://openalex.org/W2125046106","https://openalex.org/W2533133627","https://openalex.org/W2373727627","https://openalex.org/W3197208440","https://openalex.org/W2587875672","https://openalex.org/W2185636354","https://openalex.org/W1557347312"],"abstract_inverted_index":{"Design":[0,101],"and":[1,65],"analysis":[2],"of":[3,58,62,67,88,93],"a":[4,31,48,56],"10MHz":[5,78],"CMOS-MEMS":[6,16],"oscillator":[7,12,41,84,96],"is":[8,22,75,97],"presented.":[9],"To":[10],"perform":[11],"circuit":[13,28],"simulations,":[14],"the":[15,86],"Clamped-Clamped":[17],"beam":[18],"(CC-beam)":[19],"resonator":[20,33,80],"structure":[21],"modeled":[23],"using":[24,99],"its":[25],"RLC":[26],"equivalent":[27],"approach.":[29],"For":[30],"MEMS":[32],"to":[34,37,44,81],"be":[35,45],"able":[36],"function":[38],"as":[39],"an":[40,83],"it":[42],"needs":[43],"coupled":[46],"with":[47,77,90],"supporting":[49],"amplifier":[50],"circuit.":[51],"The":[52,70,95],"OP":[53,73],"AMP":[54,74],"achieves":[55],"gain":[57,92],"21dB":[59],"at":[60,85],"VDD":[61],"1.8":[63],"V":[64],"VSS":[66],"\u22121.8":[68],"V.":[69],"two-stage":[71],"CMOS":[72],"combined":[76],"CC-beam":[79],"create":[82],"frequency":[87],"\u223c10MHz":[89],"loop":[91],"16dB.":[94],"simulated":[98],"Cadence":[100],"Systems\u2122.":[102]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}