{"id":"https://openalex.org/W2091765906","doi":"https://doi.org/10.1109/ewdts.2013.6673112","title":"Simulation features of diffusion doping process by means of software package of synopsys company","display_name":"Simulation features of diffusion doping process by means of software package of synopsys company","publication_year":2013,"publication_date":"2013-09-01","ids":{"openalex":"https://openalex.org/W2091765906","doi":"https://doi.org/10.1109/ewdts.2013.6673112","mag":"2091765906"},"language":"en","primary_location":{"id":"doi:10.1109/ewdts.2013.6673112","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ewdts.2013.6673112","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"East-West Design &amp; Test Symposium (EWDTS 2013)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5069284369","display_name":"N.L. Lagunovich","orcid":"https://orcid.org/0009-0007-9370-8006"},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"N.L. Lagunovich","raw_affiliation_strings":["Openly Join-Stock Company \u00abINTEGRAL\u00bb, Minsk, Republic of Belarus","Openly Join-Stock Co. INTEGRAL, Minsk, Belarus"],"affiliations":[{"raw_affiliation_string":"Openly Join-Stock Company \u00abINTEGRAL\u00bb, Minsk, Republic of Belarus","institution_ids":[]},{"raw_affiliation_string":"Openly Join-Stock Co. INTEGRAL, Minsk, Belarus","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069698085","display_name":"\u0412. \u041c. \u0411\u043e\u0440\u0437\u0434\u043e\u0432","orcid":null},"institutions":[{"id":"https://openalex.org/I291386647","display_name":"Belarusian State University","ror":"https://ror.org/021036w13","country_code":"BY","type":"education","lineage":["https://openalex.org/I291386647"]}],"countries":["BY"],"is_corresponding":false,"raw_author_name":"V.M. Borzdov","raw_affiliation_strings":["Belarusian State University, Minsk, Republic of Belarus","Belarusian State University, Minsk, Belarus"],"affiliations":[{"raw_affiliation_string":"Belarusian State University, Minsk, Republic of Belarus","institution_ids":["https://openalex.org/I291386647"]},{"raw_affiliation_string":"Belarusian State University, Minsk, Belarus","institution_ids":["https://openalex.org/I291386647"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5091719581","display_name":"\u0410. \u0421. \u0422\u0443\u0440\u0446\u0435\u0432\u0438\u0447","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"A.S. Turtsevich","raw_affiliation_strings":["Openly Join-Stock Company \u00abINTEGRAL\u00bb, Minsk, Republic of Belarus","Openly Join-Stock Co. INTEGRAL, Minsk, Belarus"],"affiliations":[{"raw_affiliation_string":"Openly Join-Stock Company \u00abINTEGRAL\u00bb, Minsk, Republic of Belarus","institution_ids":[]},{"raw_affiliation_string":"Openly Join-Stock Co. INTEGRAL, Minsk, Belarus","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5069284369"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.12489102,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"3"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.9919999837875366,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.9919999837875366,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11169","display_name":"Silicon Nanostructures and Photoluminescence","score":0.9524000287055969,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.9279000163078308,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ohm","display_name":"Ohm","score":0.8645570278167725},{"id":"https://openalex.org/keywords/doping","display_name":"Doping","score":0.7333887815475464},{"id":"https://openalex.org/keywords/diffusion","display_name":"Diffusion","score":0.6757326126098633},{"id":"https://openalex.org/keywords/electrical-resistivity-and-conductivity","display_name":"Electrical resistivity and conductivity","score":0.5278581976890564},{"id":"https://openalex.org/keywords/software","display_name":"Software","score":0.4956148862838745},{"id":"https://openalex.org/keywords/diffusion-process","display_name":"Diffusion process","score":0.45804423093795776},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.44606369733810425},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.42604124546051025},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.41586318612098694},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3991735577583313},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.32398533821105957},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3087102174758911},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.26521962881088257},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.26018691062927246},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.22558069229125977},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.19282713532447815},{"id":"https://openalex.org/keywords/thermodynamics","display_name":"Thermodynamics","score":0.19047757983207703},{"id":"https://openalex.org/keywords/programming-language","display_name":"Programming language","score":0.17556053400039673},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.09911155700683594}],"concepts":[{"id":"https://openalex.org/C32211213","wikidata":"https://www.wikidata.org/wiki/Q47083","display_name":"Ohm","level":2,"score":0.8645570278167725},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.7333887815475464},{"id":"https://openalex.org/C69357855","wikidata":"https://www.wikidata.org/wiki/Q163214","display_name":"Diffusion","level":2,"score":0.6757326126098633},{"id":"https://openalex.org/C69990965","wikidata":"https://www.wikidata.org/wiki/Q65402698","display_name":"Electrical resistivity and conductivity","level":2,"score":0.5278581976890564},{"id":"https://openalex.org/C2777904410","wikidata":"https://www.wikidata.org/wiki/Q7397","display_name":"Software","level":2,"score":0.4956148862838745},{"id":"https://openalex.org/C68710425","wikidata":"https://www.wikidata.org/wiki/Q5275442","display_name":"Diffusion process","level":3,"score":0.45804423093795776},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.44606369733810425},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.42604124546051025},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.41586318612098694},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3991735577583313},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.32398533821105957},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3087102174758911},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.26521962881088257},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.26018691062927246},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.22558069229125977},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.19282713532447815},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.19047757983207703},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.17556053400039673},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.09911155700683594},{"id":"https://openalex.org/C56739046","wikidata":"https://www.wikidata.org/wiki/Q192060","display_name":"Knowledge management","level":1,"score":0.0},{"id":"https://openalex.org/C3017618536","wikidata":"https://www.wikidata.org/wiki/Q304994","display_name":"Innovation diffusion","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/ewdts.2013.6673112","is_oa":false,"landing_page_url":"https://doi.org/10.1109/ewdts.2013.6673112","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"East-West Design &amp; Test Symposium (EWDTS 2013)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W1990013222","https://openalex.org/W2386796262","https://openalex.org/W2354853573","https://openalex.org/W2064306826","https://openalex.org/W2807797544","https://openalex.org/W2924020013","https://openalex.org/W2057463076","https://openalex.org/W2383408482","https://openalex.org/W1511383268","https://openalex.org/W2097757605"],"abstract_inverted_index":{"Two":[0],"methods":[1,46,59],"of":[2,13,24,36,47,60],"diffusion":[3,15,61],"doping":[4,16],"process":[5],"simulation":[6],"are":[7,63],"proposed.":[8],"There":[9,49],"were":[10,50],"performed":[11],"simulations":[12],"phosphor":[14],"into":[17],"p-type":[18],"silicon":[19],"substrates":[20],"with":[21,33],"the":[22,34],"resistivity":[23,35],"\u03c1":[25,37],"<sub":[26,38],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[27,39],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">v</sub>":[28,40],"=":[29,41],"10":[30],"Ohm\u00b7cm":[31,43],"and":[32],"0.01":[42],"using":[44],"two":[45,56],"simulation.":[48],"defined":[51],"that":[52],"results":[53],"received":[54],"by":[55],"different":[57],"programme":[58],"description":[62],"almost":[64],"equal.":[65]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}