{"id":"https://openalex.org/W2053042003","doi":"https://doi.org/10.1109/eurocon.2013.6625271","title":"A monolithic CMOS/MEMS accelerometer with zero-g calibration readout circuit","display_name":"A monolithic CMOS/MEMS accelerometer with zero-g calibration readout circuit","publication_year":2013,"publication_date":"2013-07-01","ids":{"openalex":"https://openalex.org/W2053042003","doi":"https://doi.org/10.1109/eurocon.2013.6625271","mag":"2053042003"},"language":"en","primary_location":{"id":"doi:10.1109/eurocon.2013.6625271","is_oa":false,"landing_page_url":"https://doi.org/10.1109/eurocon.2013.6625271","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Eurocon 2013","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5010192120","display_name":"Yu-Sian Liu","orcid":"https://orcid.org/0000-0003-1456-2840"},"institutions":[{"id":"https://openalex.org/I148366613","display_name":"National Yang Ming Chiao Tung University","ror":"https://ror.org/00se2k293","country_code":"TW","type":"education","lineage":["https://openalex.org/I148366613"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Yu-Sian Liu","raw_affiliation_strings":["Institute of Electronic Engineering, National Chiao Tung University, Hsinchu, Taiwan","Inst. of Electron. Eng., Nat. Chiao-Tung Univ., Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Institute of Electronic Engineering, National Chiao Tung University, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I148366613"]},{"raw_affiliation_string":"Inst. of Electron. Eng., Nat. Chiao-Tung Univ., Hsinchu, Taiwan","institution_ids":["https://openalex.org/I148366613"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087912408","display_name":"Chien-Jo Huang","orcid":null},"institutions":[{"id":"https://openalex.org/I148366613","display_name":"National Yang Ming Chiao Tung University","ror":"https://ror.org/00se2k293","country_code":"TW","type":"education","lineage":["https://openalex.org/I148366613"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chien-Jo Huang","raw_affiliation_strings":["Institute of Electronic Engineering, National Chiao Tung University, Hsinchu, Taiwan","Inst. of Electron. Eng., Nat. Chiao-Tung Univ., Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Institute of Electronic Engineering, National Chiao Tung University, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I148366613"]},{"raw_affiliation_string":"Inst. of Electron. Eng., Nat. Chiao-Tung Univ., Hsinchu, Taiwan","institution_ids":["https://openalex.org/I148366613"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022362638","display_name":"Fu-Yen Kuo","orcid":"https://orcid.org/0000-0001-9014-489X"},"institutions":[{"id":"https://openalex.org/I148366613","display_name":"National Yang Ming Chiao Tung University","ror":"https://ror.org/00se2k293","country_code":"TW","type":"education","lineage":["https://openalex.org/I148366613"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Fu-Yen Kuo","raw_affiliation_strings":["Institute of Electronic Engineering, National Chiao Tung University, Hsinchu, Taiwan","Inst. of Electron. Eng., Nat. Chiao-Tung Univ., Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Institute of Electronic Engineering, National Chiao Tung University, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I148366613"]},{"raw_affiliation_string":"Inst. of Electron. Eng., Nat. Chiao-Tung Univ., Hsinchu, Taiwan","institution_ids":["https://openalex.org/I148366613"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111983056","display_name":"Kuei-Ann Wen","orcid":null},"institutions":[{"id":"https://openalex.org/I148366613","display_name":"National Yang Ming Chiao Tung University","ror":"https://ror.org/00se2k293","country_code":"TW","type":"education","lineage":["https://openalex.org/I148366613"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Kuei-Ann Wen","raw_affiliation_strings":["Institute of Electronic Engineering, National Chiao Tung University, Hsinchu, Taiwan","Inst. of Electron. Eng., Nat. Chiao-Tung Univ., Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Institute of Electronic Engineering, National Chiao Tung University, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I148366613"]},{"raw_affiliation_string":"Inst. of Electron. Eng., Nat. Chiao-Tung Univ., Hsinchu, Taiwan","institution_ids":["https://openalex.org/I148366613"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103555810","display_name":"Long-Sheng Fan","orcid":null},"institutions":[{"id":"https://openalex.org/I148366613","display_name":"National Yang Ming Chiao Tung University","ror":"https://ror.org/00se2k293","country_code":"TW","type":"education","lineage":["https://openalex.org/I148366613"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Long-Sheng Fan","raw_affiliation_strings":["Institute of Electronic Engineering, Institute of Nano Engineering and MicroSystems, National Chiao Tung University, Hsinchu, Taiwan","Inst. of Electron. Eng., Nat. Chiao-Tung Univ., Hsinchu, Taiwan"],"affiliations":[{"raw_affiliation_string":"Institute of Electronic Engineering, Institute of Nano Engineering and MicroSystems, National Chiao Tung University, Hsinchu, Taiwan","institution_ids":["https://openalex.org/I148366613"]},{"raw_affiliation_string":"Inst. of Electron. Eng., Nat. Chiao-Tung Univ., Hsinchu, Taiwan","institution_ids":["https://openalex.org/I148366613"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5010192120"],"corresponding_institution_ids":["https://openalex.org/I148366613"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.1119981,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"2106","last_page":"2110"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.7432475090026855},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.6621612310409546},{"id":"https://openalex.org/keywords/calibration","display_name":"Calibration","score":0.6512472033500671},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6158324480056763},{"id":"https://openalex.org/keywords/offset","display_name":"Offset (computer science)","score":0.6073047518730164},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.5576380491256714},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.5573781132698059},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.5187680721282959},{"id":"https://openalex.org/keywords/capacitor","display_name":"Capacitor","score":0.49509063363075256},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.4847557246685028},{"id":"https://openalex.org/keywords/input-offset-voltage","display_name":"Input offset voltage","score":0.4233139157295227},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.41094234585762024},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4007214307785034},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.29416507482528687},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.29227250814437866},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2759614586830139},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.22733479738235474},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.22532570362091064},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.11253836750984192},{"id":"https://openalex.org/keywords/operational-amplifier","display_name":"Operational amplifier","score":0.1088695228099823}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.7432475090026855},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.6621612310409546},{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.6512472033500671},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6158324480056763},{"id":"https://openalex.org/C175291020","wikidata":"https://www.wikidata.org/wiki/Q1156822","display_name":"Offset (computer science)","level":2,"score":0.6073047518730164},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.5576380491256714},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.5573781132698059},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.5187680721282959},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.49509063363075256},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.4847557246685028},{"id":"https://openalex.org/C63651839","wikidata":"https://www.wikidata.org/wiki/Q478566","display_name":"Input offset voltage","level":5,"score":0.4233139157295227},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.41094234585762024},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4007214307785034},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.29416507482528687},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.29227250814437866},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2759614586830139},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.22733479738235474},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.22532570362091064},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.11253836750984192},{"id":"https://openalex.org/C145366948","wikidata":"https://www.wikidata.org/wiki/Q178947","display_name":"Operational amplifier","level":4,"score":0.1088695228099823},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/eurocon.2013.6625271","is_oa":false,"landing_page_url":"https://doi.org/10.1109/eurocon.2013.6625271","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Eurocon 2013","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.8899999856948853,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320321040","display_name":"National Science Council","ror":"https://ror.org/02kv4zf79"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":11,"referenced_works":["https://openalex.org/W1561101564","https://openalex.org/W2081905393","https://openalex.org/W2094025868","https://openalex.org/W2100484040","https://openalex.org/W2103198996","https://openalex.org/W2106284235","https://openalex.org/W2110180702","https://openalex.org/W2138918281","https://openalex.org/W2144637390","https://openalex.org/W2153265319","https://openalex.org/W4241743979"],"related_works":["https://openalex.org/W3161496874","https://openalex.org/W2026330382","https://openalex.org/W2915680872","https://openalex.org/W2134590745","https://openalex.org/W2913250844","https://openalex.org/W2951387119","https://openalex.org/W3068605328","https://openalex.org/W2472717445","https://openalex.org/W3214591077","https://openalex.org/W2580309824"],"abstract_inverted_index":{"A":[0],"monolithic":[1],"accelerometer":[2],"design":[3],"with":[4,7],"zero-g":[5],"calibration":[6,19],"TSMC":[8],"0.18":[9],"\u03bcm":[10],"mixed-signal":[11],"1P6M":[12],"process":[13,31],"is":[14,57,64],"presented.":[15],"On-chip":[16],"digital":[17],"offset":[18,25],"enables":[20],"compensation":[21],"of":[22],"random":[23],"mechanical":[24],"in":[26],"the":[27,47],"sensor":[28],"due":[29],"to":[30],"variation.":[32],"The":[33,42,54,61],"maximum":[34],"21":[35],"fF":[36],"capacitance":[37],"mismatch":[38],"can":[39],"be":[40],"calibrated.":[41],"simulation":[43],"results":[44],"show":[45],"that":[46],"whole":[48],"system":[49],"have":[50],"452.1":[51],"mV/g":[52],"sensitivity.":[53],"power":[55],"consumption":[56],"about":[58],"1.16":[59],"mW.":[60],"output":[62],"noise":[63],"26.85":[65],"\u03bcg/\u221aHz":[66],"at":[67],"1KHz.":[68]},"counts_by_year":[{"year":2023,"cited_by_count":3},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}