{"id":"https://openalex.org/W2043394888","doi":"https://doi.org/10.1109/etsym.2010.5512728","title":"A multi-mode MEMS sensor design to support system test and health & usage monitoring applications","display_name":"A multi-mode MEMS sensor design to support system test and health & usage monitoring applications","publication_year":2010,"publication_date":"2010-05-01","ids":{"openalex":"https://openalex.org/W2043394888","doi":"https://doi.org/10.1109/etsym.2010.5512728","mag":"2043394888"},"language":"en","primary_location":{"id":"doi:10.1109/etsym.2010.5512728","is_oa":false,"landing_page_url":"https://doi.org/10.1109/etsym.2010.5512728","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 15th IEEE European Test Symposium","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5073210334","display_name":"Zhou Xu","orcid":"https://orcid.org/0000-0001-7302-5100"},"institutions":[{"id":"https://openalex.org/I67415387","display_name":"Lancaster University","ror":"https://ror.org/04f2nsd36","country_code":"GB","type":"education","lineage":["https://openalex.org/I67415387"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Z. Xu","raw_affiliation_strings":["Department of Engineering, Lancaster University, Lancaster, UK","Department of Engineering , Lancaster University , Lancaster, LA1 4YR, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Engineering, Lancaster University, Lancaster, UK","institution_ids":["https://openalex.org/I67415387"]},{"raw_affiliation_string":"Department of Engineering , Lancaster University , Lancaster, LA1 4YR, UK","institution_ids":["https://openalex.org/I67415387"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078600785","display_name":"A. Richardson","orcid":"https://orcid.org/0000-0002-8166-257X"},"institutions":[{"id":"https://openalex.org/I67415387","display_name":"Lancaster University","ror":"https://ror.org/04f2nsd36","country_code":"GB","type":"education","lineage":["https://openalex.org/I67415387"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"A. Richardson","raw_affiliation_strings":["Department of Engineering, Lancaster University, Lancaster, UK","Department of Engineering , Lancaster University , Lancaster, LA1 4YR, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Engineering, Lancaster University, Lancaster, UK","institution_ids":["https://openalex.org/I67415387"]},{"raw_affiliation_string":"Department of Engineering , Lancaster University , Lancaster, LA1 4YR, UK","institution_ids":["https://openalex.org/I67415387"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100617506","display_name":"Lijie Li","orcid":"https://orcid.org/0000-0003-4630-7692"},"institutions":[{"id":"https://openalex.org/I2799593479","display_name":"Education Scotland","ror":"https://ror.org/05yapj268","country_code":"GB","type":"government","lineage":["https://openalex.org/I2799593479","https://openalex.org/I2801269068"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"L. Li","raw_affiliation_strings":["BREC Solutions, Lancaster, UK","Institute for System Level Integration, Livingston, EH54 7EG, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"BREC Solutions, Lancaster, UK","institution_ids":[]},{"raw_affiliation_string":"Institute for System Level Integration, Livingston, EH54 7EG, UK","institution_ids":["https://openalex.org/I2799593479"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043269309","display_name":"M. Begbie","orcid":"https://orcid.org/0000-0003-3385-6027"},"institutions":[{"id":"https://openalex.org/I2799593479","display_name":"Education Scotland","ror":"https://ror.org/05yapj268","country_code":"GB","type":"government","lineage":["https://openalex.org/I2799593479","https://openalex.org/I2801269068"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"M. Begbie","raw_affiliation_strings":["Institute for System Level Integration, Livingston, UK","Institute for System Level Integration, Livingston, EH54 7EG, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute for System Level Integration, Livingston, UK","institution_ids":["https://openalex.org/I2799593479"]},{"raw_affiliation_string":"Institute for System Level Integration, Livingston, EH54 7EG, UK","institution_ids":["https://openalex.org/I2799593479"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023618242","display_name":"Denis Koltsov","orcid":"https://orcid.org/0000-0002-9660-5893"},"institutions":[{"id":"https://openalex.org/I2799593479","display_name":"Education Scotland","ror":"https://ror.org/05yapj268","country_code":"GB","type":"government","lineage":["https://openalex.org/I2799593479","https://openalex.org/I2801269068"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"D. Koltsov","raw_affiliation_strings":["Institute for System Level Integration, Livingston, UK","BREC Solutions, Lancaster, LA1 2DG, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute for System Level Integration, Livingston, UK","institution_ids":["https://openalex.org/I2799593479"]},{"raw_affiliation_string":"BREC Solutions, Lancaster, LA1 2DG, UK","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5072134422","display_name":"C. H. Wang","orcid":null},"institutions":[{"id":"https://openalex.org/I32062511","display_name":"Heriot-Watt University","ror":"https://ror.org/04mghma93","country_code":"GB","type":"education","lineage":["https://openalex.org/I32062511"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"C. H. Wang","raw_affiliation_strings":["School of Engineering & Physical Sciences, Heriot-Watt University, Edinburgh, UK","School of Engineering and Physical Sciences, Heriot\u2010Watt University, Edinburgh, EH14 4AS (UK)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Engineering & Physical Sciences, Heriot-Watt University, Edinburgh, UK","institution_ids":["https://openalex.org/I32062511"]},{"raw_affiliation_string":"School of Engineering and Physical Sciences, Heriot\u2010Watt University, Edinburgh, EH14 4AS (UK)","institution_ids":["https://openalex.org/I32062511"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.1123012,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"263","last_page":"263"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9955000281333923,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9955000281333923,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9932000041007996,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9861999750137329,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wireless-sensor-network","display_name":"Wireless sensor network","score":0.6421189308166504},{"id":"https://openalex.org/keywords/reliability","display_name":"Reliability (semiconductor)","score":0.6046408414840698},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5634326338768005},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.5144169926643372},{"id":"https://openalex.org/keywords/condition-monitoring","display_name":"Condition monitoring","score":0.4496295750141144},{"id":"https://openalex.org/keywords/fault-detection-and-isolation","display_name":"Fault detection and isolation","score":0.44820550084114075},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.4271829426288605},{"id":"https://openalex.org/keywords/real-time-computing","display_name":"Real-time computing","score":0.3581618666648865},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.34971383213996887},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.32061561942100525},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.1977001428604126},{"id":"https://openalex.org/keywords/computer-network","display_name":"Computer network","score":0.13414207100868225},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.09118464589118958}],"concepts":[{"id":"https://openalex.org/C24590314","wikidata":"https://www.wikidata.org/wiki/Q336038","display_name":"Wireless sensor network","level":2,"score":0.6421189308166504},{"id":"https://openalex.org/C43214815","wikidata":"https://www.wikidata.org/wiki/Q7310987","display_name":"Reliability (semiconductor)","level":3,"score":0.6046408414840698},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5634326338768005},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.5144169926643372},{"id":"https://openalex.org/C2775846686","wikidata":"https://www.wikidata.org/wiki/Q643012","display_name":"Condition monitoring","level":2,"score":0.4496295750141144},{"id":"https://openalex.org/C152745839","wikidata":"https://www.wikidata.org/wiki/Q5438153","display_name":"Fault detection and isolation","level":3,"score":0.44820550084114075},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.4271829426288605},{"id":"https://openalex.org/C79403827","wikidata":"https://www.wikidata.org/wiki/Q3988","display_name":"Real-time computing","level":1,"score":0.3581618666648865},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.34971383213996887},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.32061561942100525},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1977001428604126},{"id":"https://openalex.org/C31258907","wikidata":"https://www.wikidata.org/wiki/Q1301371","display_name":"Computer network","level":1,"score":0.13414207100868225},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.09118464589118958},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.0},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/etsym.2010.5512728","is_oa":false,"landing_page_url":"https://doi.org/10.1109/etsym.2010.5512728","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2010 15th IEEE European Test Symposium","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W1975451135","https://openalex.org/W374694393","https://openalex.org/W2378757965","https://openalex.org/W2890570089","https://openalex.org/W4224903346","https://openalex.org/W2989915292","https://openalex.org/W2295628284","https://openalex.org/W1593262897","https://openalex.org/W2372869593","https://openalex.org/W3148968234"],"abstract_inverted_index":{"Health":[0],"and":[1,16,47,63,94,96,123,137],"usage":[2],"monitoring":[3],"(HUMS)":[4],"as":[5,20],"a":[6,21,34,51,58,75,89,108,139,156],"technique":[7,152],"for":[8,24,99],"online":[9],"test,":[10],"diagnosis":[11],"or":[12,53],"prognosis":[13],"of":[14,30,36,41,50,67,74,101,144,159],"structures":[15],"systems":[17],"has":[18,88,129,153],"evolved":[19],"key":[22],"technology":[23,32],"future":[25,148],"critical":[26],"systems.":[27],"The":[28,86,127,151],"application":[29],"HUMS":[31,149],"requires":[33],"portfolio":[35],"reliable":[37],"miniaturized":[38],"sensors,":[39],"capable":[40],"delivering":[42],"\"intelligence\"":[43],"on":[44,113],"the":[45,65,72,97,114,130,142],"internal":[46],"external":[48],"environment":[49],"system":[52,135],"structure.":[54],"This":[55],"paper":[56],"proposes":[57],"fault":[59],"tolerant":[60],"sensor":[61,80,87,110,116,164],"architecture":[62,70,128],"demonstrates":[64],"feasibility":[66],"realising":[68],"this":[69],"through":[71],"design":[73],"dual":[76],"mode":[77],"humidity/pressure":[78],"MEMS":[79],"with":[81],"an":[82],"integrated":[83],"temperature":[84],"function.":[85],"simple":[90],"structure,":[91],"good":[92],"linearity":[93],"sensitivity,":[95],"potential":[98,131,154],"implementation":[100],"built-in":[102],"Self-test":[103],"features.":[104],"We":[105],"also":[106],"propose":[107],"re-configurable":[109],"network":[111],"based":[112],"multi-functional":[115],"concept":[117],"that":[118],"supports":[119,138],"both":[120],"normal":[121],"operational":[122],"fail":[124],"safe":[125],"modes.":[126],"to":[132],"significantly":[133],"increase":[134],"reliability":[136],"reduction":[140],"in":[141,147,155],"number":[143],"sensors":[145],"required":[146],"devices.":[150],"wide":[157],"range":[158],"applications,":[160],"especially":[161],"within":[162],"wireless":[163],"networks.":[165]},"counts_by_year":[],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}