{"id":"https://openalex.org/W4387251484","doi":"https://doi.org/10.1109/essderc59256.2023.10268536","title":"RF performance of Standard, High-Resistivity and Trap-Rich Silicon substrates down to cryogenic temperature","display_name":"RF performance of Standard, High-Resistivity and Trap-Rich Silicon substrates down to cryogenic temperature","publication_year":2023,"publication_date":"2023-09-11","ids":{"openalex":"https://openalex.org/W4387251484","doi":"https://doi.org/10.1109/essderc59256.2023.10268536"},"language":"en","primary_location":{"id":"doi:10.1109/essderc59256.2023.10268536","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc59256.2023.10268536","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ESSDERC 2023 - IEEE 53rd European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5047660617","display_name":"Quentin Berlingard","orcid":null},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4210139715","display_name":"Institut de Micro\u00e9lectronique, Electromagn\u00e9tisme et Photonique","ror":"https://ror.org/03taa9n66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I106785703","https://openalex.org/I1294671590","https://openalex.org/I4210095849","https://openalex.org/I4210139715","https://openalex.org/I70900168","https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":true,"raw_author_name":"Q. Berlingard","raw_affiliation_strings":["CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000","CNRS IMEP-LAHC, Grenoble, France"],"affiliations":[{"raw_affiliation_string":"CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]},{"raw_affiliation_string":"CNRS IMEP-LAHC, Grenoble, France","institution_ids":["https://openalex.org/I4210139715","https://openalex.org/I1294671590"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055481810","display_name":"Maxime Moulin","orcid":null},"institutions":[{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"M. Moulin","raw_affiliation_strings":["CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000"],"affiliations":[{"raw_affiliation_string":"CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030331603","display_name":"J. Michel","orcid":null},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"J.-P. Michel","raw_affiliation_strings":["CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000"],"affiliations":[{"raw_affiliation_string":"CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034717875","display_name":"T. Fache","orcid":"https://orcid.org/0000-0002-0255-0570"},"institutions":[{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"T. Fache","raw_affiliation_strings":["CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000"],"affiliations":[{"raw_affiliation_string":"CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077730921","display_name":"I. Charlet","orcid":"https://orcid.org/0000-0001-5668-442X"},"institutions":[{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"I. Charlet","raw_affiliation_strings":["CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000"],"affiliations":[{"raw_affiliation_string":"CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040121627","display_name":"Christophe Plantier","orcid":null},"institutions":[{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"C. Plantier","raw_affiliation_strings":["CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000"],"affiliations":[{"raw_affiliation_string":"CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072752426","display_name":"Zdenek Chalupa","orcid":null},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Z. Chalupa","raw_affiliation_strings":["CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000"],"affiliations":[{"raw_affiliation_string":"CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020151675","display_name":"J. Lugo-Alvarez","orcid":"https://orcid.org/0000-0002-9748-4130"},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"J. Lugo-Alvarez","raw_affiliation_strings":["CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000"],"affiliations":[{"raw_affiliation_string":"CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075705263","display_name":"Jean\u2010Pierre Raskin","orcid":"https://orcid.org/0000-0001-9715-9699"},"institutions":[{"id":"https://openalex.org/I95674353","display_name":"UCLouvain","ror":"https://ror.org/02495e989","country_code":"BE","type":"education","lineage":["https://openalex.org/I95674353"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"J.-P. Raskin","raw_affiliation_strings":["Universit&#x00E9; Catholique de Louvain,Louvain-la-Neuve,Belgium"],"affiliations":[{"raw_affiliation_string":"Universit&#x00E9; Catholique de Louvain,Louvain-la-Neuve,Belgium","institution_ids":["https://openalex.org/I95674353"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065001562","display_name":"Louis Hutin","orcid":"https://orcid.org/0000-0001-6429-3867"},"institutions":[{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"L. Hutin","raw_affiliation_strings":["CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000"],"affiliations":[{"raw_affiliation_string":"CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5066815409","display_name":"M. Cass\u00e9","orcid":"https://orcid.org/0000-0002-4934-2445"},"institutions":[{"id":"https://openalex.org/I899635006","display_name":"Universit\u00e9 Grenoble Alpes","ror":"https://ror.org/02rx3b187","country_code":"FR","type":"education","lineage":["https://openalex.org/I899635006"]},{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"M. Cass\u00e9","raw_affiliation_strings":["CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000"],"affiliations":[{"raw_affiliation_string":"CEA-Leti, Univ. Grenoble Alpes,Grenoble,France,F-38000","institution_ids":["https://openalex.org/I899635006","https://openalex.org/I4210150049","https://openalex.org/I2738703131"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":11,"corresponding_author_ids":["https://openalex.org/A5047660617"],"corresponding_institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2738703131","https://openalex.org/I4210139715","https://openalex.org/I4210150049","https://openalex.org/I899635006"],"apc_list":null,"apc_paid":null,"fwci":0.4011,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.6071245,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"148","last_page":"151"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10187","display_name":"Radio Frequency Integrated Circuit Design","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10187","display_name":"Radio Frequency Integrated Circuit Design","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7240884304046631},{"id":"https://openalex.org/keywords/trap","display_name":"Trap (plumbing)","score":0.6943269371986389},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.6687427163124084},{"id":"https://openalex.org/keywords/electrical-resistivity-and-conductivity","display_name":"Electrical resistivity and conductivity","score":0.6150379180908203},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.6097849011421204},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5461528897285461},{"id":"https://openalex.org/keywords/dielectric","display_name":"Dielectric","score":0.5009360313415527},{"id":"https://openalex.org/keywords/cryogenic-temperature","display_name":"Cryogenic temperature","score":0.4705904722213745},{"id":"https://openalex.org/keywords/thermal-conduction","display_name":"Thermal conduction","score":0.46716582775115967},{"id":"https://openalex.org/keywords/temperature-measurement","display_name":"Temperature measurement","score":0.46666091680526733},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.24117511510849},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.2025637924671173},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.06343811750411987}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7240884304046631},{"id":"https://openalex.org/C121099081","wikidata":"https://www.wikidata.org/wiki/Q665580","display_name":"Trap (plumbing)","level":2,"score":0.6943269371986389},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6687427163124084},{"id":"https://openalex.org/C69990965","wikidata":"https://www.wikidata.org/wiki/Q65402698","display_name":"Electrical resistivity and conductivity","level":2,"score":0.6150379180908203},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.6097849011421204},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5461528897285461},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.5009360313415527},{"id":"https://openalex.org/C2985130431","wikidata":"https://www.wikidata.org/wiki/Q192116","display_name":"Cryogenic temperature","level":2,"score":0.4705904722213745},{"id":"https://openalex.org/C172100665","wikidata":"https://www.wikidata.org/wiki/Q7465774","display_name":"Thermal conduction","level":2,"score":0.46716582775115967},{"id":"https://openalex.org/C72293138","wikidata":"https://www.wikidata.org/wiki/Q909741","display_name":"Temperature measurement","level":2,"score":0.46666091680526733},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.24117511510849},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.2025637924671173},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.06343811750411987},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/essderc59256.2023.10268536","is_oa":false,"landing_page_url":"https://doi.org/10.1109/essderc59256.2023.10268536","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"ESSDERC 2023 - IEEE 53rd European Solid-State Device Research Conference (ESSDERC)","raw_type":"proceedings-article"},{"id":"pmh:oai:HAL:cea-04628941v1","is_oa":false,"landing_page_url":"https://cea.hal.science/cea-04628941","pdf_url":null,"source":{"id":"https://openalex.org/S4406922461","display_name":"SPIRE - Sciences Po Institutional REpository","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"https://ieeexplore.ieee.org/document/10268536","raw_type":"Conference papers"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320322364","display_name":"Labex","ror":"https://ror.org/01cvsyf94"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1505217536","https://openalex.org/W1999414703","https://openalex.org/W2062254317","https://openalex.org/W2091664090","https://openalex.org/W2135891322","https://openalex.org/W2620516189","https://openalex.org/W2755984005","https://openalex.org/W2793167437","https://openalex.org/W2968084375","https://openalex.org/W4214850897","https://openalex.org/W4220927112","https://openalex.org/W4226216701","https://openalex.org/W4229499352","https://openalex.org/W4378805993"],"related_works":["https://openalex.org/W2199813689","https://openalex.org/W4252447916","https://openalex.org/W2369033613","https://openalex.org/W2511880725","https://openalex.org/W2390226751","https://openalex.org/W1992391092","https://openalex.org/W2076071421","https://openalex.org/W2019479990","https://openalex.org/W1978775516","https://openalex.org/W2068611868"],"abstract_inverted_index":{"We":[0],"investigate":[1],"the":[2,29,35,56,63,78,81,84],"temperature-dependent":[3],"RF":[4],"response":[5],"of":[6,9,55,69],"different":[7],"types":[8],"silicon":[10],"substrates":[11],"(standard,":[12],"high-resistivity":[13],"and":[14,83],"trap-rich)":[15],"through":[16],"measurements":[17],"performed":[18],"on":[19,51],"BEOL-embedded":[20],"inductors":[21],"from":[22],"room":[23],"temperature":[24],"down":[25],"to":[26,62],"7K.":[27],"For":[28],"first":[30],"time,":[31],"we":[32,58],"observe":[33],"that":[34],"performance":[36],"ranking":[37],"between":[38,80],"substrates,":[39],"well":[40],"known":[41],"at":[42,66,77],"300K,":[43],"is":[44],"altered":[45],"in":[46],"cryogenic":[47],"conditions":[48],"(T<50K).":[49],"Based":[50],"a":[52,71],"parametric":[53],"analysis":[54],"Q-factor,":[57],"attribute":[59],"this":[60],"behavior":[61],"heightened":[64],"importance":[65],"low":[67],"T":[68],"counteracting":[70],"parasitic":[72],"surface":[73],"conduction":[74],"(PSC)":[75],"forming":[76],"interface":[79],"substrate":[82],"dielectric.":[85]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}